CN202796858U - Microwave electrodeless ultraviolet source - Google Patents
Microwave electrodeless ultraviolet source Download PDFInfo
- Publication number
- CN202796858U CN202796858U CN 201220461718 CN201220461718U CN202796858U CN 202796858 U CN202796858 U CN 202796858U CN 201220461718 CN201220461718 CN 201220461718 CN 201220461718 U CN201220461718 U CN 201220461718U CN 202796858 U CN202796858 U CN 202796858U
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- CN
- China
- Prior art keywords
- sleeve pipe
- magnetron
- end cover
- sleeve
- electrodeless ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Discharge Lamps And Accessories Thereof (AREA)
Abstract
The utility model discloses a microwave electrodeless ultraviolet source, which comprises a sleeve, a luminous body, a waveguide tube and a magnetron, wherein the sleeve is hollow; both ends of the sleeve are in sealing connection with an upper end cover and a lower end cover; the luminous body is encapsulated inside the cavity of the sleeve; the waveguide tube is fixedly connected with the upper end cover of the sleeve; one end of the waveguide tube passes through the upper end cover and is extended inside the sleeve, and the other end of the waveguide tube is exposed out of the sleeve and is connected with the magnetron; and the magnetron is further connected with a power supply. According to the microwave electrodeless ultraviolet source, microwave produced by the magnetron is utilized and transmitted through the waveguide tube for exciting the luminous body to emit ultraviolet light; the microwave electrodeless ultraviolet source is electrodeless so that a series of problems existing in an ordinary light source can be completely avoided; and the microwave electrodeless ultraviolet source is high in utilization rate of light radiation and long in service life.
Description
Technical field
The utility model relates to the light source that uses in a kind of photochemical reaction, more particularly, relates in particular to a kind of microwave electrodeless ultraviolet light source.
Background technology
At present, the light source that uses in photochemical reaction roughly can be divided into two classes, and a class is artificial light source, and such as mercury lamp, xenon lamp, metal halide lamp etc., another kind of is lamp, i.e. sunlight.Wherein, mercury lamp is to use maximum light sources in the reaction of photochemical degradating pollutant, it is by electrode two ends discharge generation free electron, mercury vapor atoms in the collision lamp makes it transit to high level, when the mercury vapor atoms that is in excited state turns back to low-lying level from high level, send light radiation.Because the existence of electrode in the lamp, caused a series of problem: the light radiation utilance is low, useful life is short, additional circuit is complicated etc.; And adopt sunlight to be subjected to the impact of weather and sunlight strength larger as light source, in actual application, be difficult to reach preferably effect.
The utility model content
The purpose of this utility model is for above-mentioned the deficiencies in the prior art, and a kind of microwave electrodeless ultraviolet light source that utilizes the microwave-excitation noble gas discharge is provided, and solves the problem that existing radiation of light source utilance is low, useful life is short.
For achieving the above object, microwave electrodeless ultraviolet light provided by the utility model source, comprise sleeve pipe, luminous element, waveguide and magnetron, described sleeve pipe is the sleeve pipe of hollow, sealed at both ends upper end cover and the bottom end cover of being connected with of sleeve pipe, and described luminous element is encapsulated in the cavity of sleeve pipe, described waveguide is fixedly connected on the upper end cover of sleeve pipe, one end of waveguide passes upper end cover and stretches in the sleeve pipe, and the other end exposes outside the sleeve pipe and is connected with magnetron, and magnetron also is connected with power supply.
The utility model is that the microwave that utilizes magnetron to produce comes the stimulated luminescence body to send ultraviolet light through the waveguide transmission, it need not electrode, therefore the series of problems that can avoid ordinary light source to exist fully, its light radiation utilance is high, and the luminous intensity at wavelength 254nm place can reach 188mW/cm
2, improved nearly 2 times than high-pressure mercury lamp, and long service life, can reach 20000 hours.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Among the figure: the 1-sleeve pipe; The 11-upper end cover; The 12-bottom end cover; The 13-support; The 2-luminous element; The 3-waveguide; The 4-magnetron; The 5-cooling system; The 6-air inlet pipe; The 7-escape pipe.
Embodiment
The utility model is described in further detail below in conjunction with the embodiment in the accompanying drawing, but do not consist of any restriction of the present utility model.
Consult shown in Figure 1, the utility model microwave electrodeless ultraviolet light source comprises sleeve pipe 1, luminous element 2, waveguide 3 and magnetron 4, and described sleeve pipe 1 is the quartz socket tube of hollow, sealed at both ends upper end cover 11 and the bottom end cover 12 of being connected with of sleeve pipe 1, described luminous element 2 is encapsulated in the cavity of sleeve pipe 1.For further fixing luminous element 2, be provided with support 13 at the inwall of sleeve pipe 1, luminous element 2 is fixed on the support 13.
Described luminous element 2 is the UV-light luminous body, normally adopts Non-polarized lamp, fills luminous gas and inert gas and a small amount of transition metal in the fluorescent tube, in order to produce the ultraviolet light of specific wavelength.Be sealedly connected with respectively air inlet pipe 6 and escape pipe 7 on the upper and lower end cap 11,12 of sleeve pipe 1, air is entered in the sleeve pipe 1 by air inlet pipe 6, is converted into ozone under the irradiation of ultraviolet light, then discharges by escape pipe 7.
Described waveguide 3 is fixedly connected on the upper end cover 11 of sleeve pipe 1, and an end of waveguide 3 passes upper end cover 11 and stretches in the sleeve pipe 1, and the other end exposes outside the sleeve pipe 1 and is connected with magnetron 4, and magnetron 4 also is connected with power supply.During work, plugged makes magnetron 4 produce microwave, and microwave is in waveguide 3 is delivered to sleeve pipe 1, and stimulated luminescence body 2 sends ultraviolet light.Be provided with cooling system 5 at magnetron 4, cooling system 5 adopts water-cooled or air-cooled forms, and magnetron 4 is cooled off, excess Temperature when preventing magnetron 4 work and damaging.
Claims (4)
1. microwave electrodeless ultraviolet light source, comprise sleeve pipe, luminous element, waveguide and magnetron, it is characterized in that: described sleeve pipe is the sleeve pipe of hollow, sealed at both ends upper end cover and the bottom end cover of being connected with of sleeve pipe, described luminous element is encapsulated in the cavity of sleeve pipe, and described waveguide is fixedly connected on the upper end cover of sleeve pipe, and an end of waveguide passes upper end cover and stretches in the sleeve pipe, the other end exposes outside the sleeve pipe and is connected with magnetron, and magnetron also is connected with power supply.
2. microwave electrodeless ultraviolet light according to claim 1 source, it is characterized in that: described sleeve pipe is the quartz socket tube of hollow, and its inwall is provided with support, and luminous element is fixed on the described support.
3. microwave electrodeless ultraviolet light according to claim 1 and 2 source, it is characterized in that: the upper and lower end of described sleeve pipe covers and is sealedly connected with respectively air inlet pipe and escape pipe.
4. microwave electrodeless ultraviolet light according to claim 1 and 2 source, it is characterized in that: be provided with cooling system on the described magnetron, cooling system adopts water-cooled or air-cooled form, and magnetron is cooled off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220461718 CN202796858U (en) | 2012-09-11 | 2012-09-11 | Microwave electrodeless ultraviolet source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220461718 CN202796858U (en) | 2012-09-11 | 2012-09-11 | Microwave electrodeless ultraviolet source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202796858U true CN202796858U (en) | 2013-03-13 |
Family
ID=47824062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220461718 Expired - Fee Related CN202796858U (en) | 2012-09-11 | 2012-09-11 | Microwave electrodeless ultraviolet source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202796858U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105762058A (en) * | 2016-04-07 | 2016-07-13 | 深圳市高斯宝环境技术有限公司 | Microwave electrodeless ultraviolet device |
| CN115877675A (en) * | 2023-03-08 | 2023-03-31 | 江苏邑文微电子科技有限公司 | Photoresist curing and exposing system of SiC wafer and process control method thereof |
-
2012
- 2012-09-11 CN CN 201220461718 patent/CN202796858U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105762058A (en) * | 2016-04-07 | 2016-07-13 | 深圳市高斯宝环境技术有限公司 | Microwave electrodeless ultraviolet device |
| CN105762058B (en) * | 2016-04-07 | 2019-07-26 | 深圳市高斯宝环境技术有限公司 | Microwave electrodeless ultraviolet device |
| CN115877675A (en) * | 2023-03-08 | 2023-03-31 | 江苏邑文微电子科技有限公司 | Photoresist curing and exposing system of SiC wafer and process control method thereof |
| CN115877675B (en) * | 2023-03-08 | 2023-05-02 | 江苏邑文微电子科技有限公司 | Photoresist curing and exposing system of SiC wafer and process control method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20140911 |
|
| EXPY | Termination of patent right or utility model |