CN202770408U - Image type detection device - Google Patents

Image type detection device Download PDF

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Publication number
CN202770408U
CN202770408U CN 201220451288 CN201220451288U CN202770408U CN 202770408 U CN202770408 U CN 202770408U CN 201220451288 CN201220451288 CN 201220451288 CN 201220451288 U CN201220451288 U CN 201220451288U CN 202770408 U CN202770408 U CN 202770408U
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China
Prior art keywords
image
guide wheel
detecting instrument
type detecting
catoptron
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Expired - Fee Related
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CN 201220451288
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Chinese (zh)
Inventor
锺锦铭
欧阳弘道
王亮启
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HSINTEK OPTICAL INSTRUMENT Corp
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HSINTEK OPTICAL INSTRUMENT Corp
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Abstract

The utility model provides an image type detection device. Parameters of an initialization image recording device are included; a luminescence module is used for providing a light source; a projection mirror projects light source to a first reflector; the first reflector changes a projection light direction to vertically irradiate a cross section of a guide wheel to form a guide wheel image; an imaging mirror receives light source of a second reflector and the guide wheel image to enable the image recording device to record the guide wheel image; tooth values of the guide wheel image is analyzed instantly; and capture of the guide wheel image of the guide wheel is continuously carried out. By employing optics principles and utilizing a capture mode of the guide wheel image, damage to the guide wheel caused by a probe needle does not occur; the light source employed in the image type detection device is parallel with a light axis, so shadow caused by the light source can be avoided, and depth amplification multiplying power of the guide wheel can be avoided, and thereby measurement precision is improved.

Description

The image-type detecting instrument
Technical field
The utility model relates to a kind of detecting instrument, particularly a kind of image-type detecting instrument.
Background technology
According to present existing sun power, the board (wire saw machine) of the silicon wafer of the accurate industrial use such as light emitting diode or semiconductor or the cutting of glass-based printed line, normally utilize guide wheel to keep the constant spacing of line of cut on the board, yet, and these guide wheels loss just can occur later in use, if instantaneously changing guide wheel not, the least bit in difference, the situation of a thousand li of mistake lower, can cause sun power at last, light emitting diode or semi-conductive silicon wafer or glass substrate fragmentation and scrap, the cost of manufacture impact that it causes is very huge, can not be ignored.
Fortunately have at present measurer tool, can detect the profile of tooth of guide wheel, and then affirmation guide wheel behaviour in service, with as the reference frame of whether changing guide wheel, yet taking a broad view of existing guide wheel measurer tool namely knows, these measurer tools all are to utilize probe directly to contact guide wheel, and then obtain the profile state of guide wheel, but this employing probe directly contacts guide wheel, and the risk that causes guide wheel impaired is not only arranged, again because using the measurer tool of probe-type, must first the dismounting of board upper block just can be measured, its operating process is not only consuming time, expends again strength, the puzzlement that inconvenience only can cause operating personnel to use.
In view of this, the inventor is by the development Experience of being engaged in for many years related industry, the problem further investigated that faces in the use for existing measurer tool, by large component analysis, and actively seek solution, through the research and development of long-term endeavour, finally success create a kind of portable image formula detecting instrument, use and improve above-described disappearance.
Summary of the invention
Fundamental purpose of the present utility model, be to provide a kind of image-type detecting instrument, design in conjunction with light emitting module, projecting mirror module and imaging lens module, utilize optical principle to throw optical axis vertical guide idlers truncation surface to form the guide wheel image, through the second catoptron and imaging lens group, again with image recording device acquisition guide wheel image, again with the outline data of angle, spacing, top width and the ditch depth of numerical analysis guide wheel.Because the utility model adopts optical principle with acquisition guide wheel image, the enlargement ratio of imaging lens optics is optimized between 1 times to 4 times, accuracy of detection is high, reliability is good, because the guide wheel image is instant video, therefore operating personnel can operate according to intuition, mode of operation is simple and easy to study, and does not have the situation generation that produces probe injury guide wheel.
Another purpose of the present utility model, be to provide a kind of image-type detecting instrument, design with the first hollow ring body and the second hollow ring body, the personnel that are convenient to operation grip to carry with hand, and the first joint sheet and the second joint sheet can be changed in response to the diameter actual size collocation of guide wheel, and the image-type detecting instrument can directly be placed on the guide wheel, can detect, therefore being fit to very much the working site uses, and the utility model need not be such as the probe-type measurer tool, the board upper block must be dismantled, reach and set up separately numerous and diverse formality that measurer tool just can measure, therefore the utility model is compared to the measurer tool of probe-type, and its operating process not only saves time and leicht fallen D/A.
An again purpose of the present utility model, be to provide a kind of image-type detecting instrument, according to projecting mirror, catoptron and the imaging lens mode projection source with parallel optical axis, therefore but the profile of tooth of parallel radiation guide wheel because the utility model adopts the light source that is parallel to optical axis, and is arranged in pairs or groups and is used telecentric lens, the shade that can avoid light source to cause, strengthen and measure the depth of field, avoid the guide wheel degree of depth to cause the enlargement ratio error, therefore can promote measurement accuracy.
In order to achieve the above object, the utility model provides a kind of image-type detecting instrument, to detect guide wheel, the image-type detecting instrument includes light emitting module so that light source to be provided, the projecting mirror module has projecting mirror and the first catoptron, projecting mirror is to receive light source, and on projection source to the first catoptron, the first catoptron receives and changes the irradiating angle of light source, being rotated counterclockwise 90 spends to guarantee to shine time projection optical axis vertical guide idlers truncation surface and forms the guide wheel image, the imaging lens module has imaging lens and the second catoptron, the second catoptron receives light source and the guide wheel image of the first catoptron, and can change the light source projects angle, counterclockwise 90-degree rotation again, imaging lens can receive light source and the guide wheel image of the second catoptron, and device, video recorder is to receive and record guide wheel image.
Preferably, this projecting mirror and this imaging lens are all telecentric lens.
Preferably, the optical amplifier multiplying power of this imaging lens is between 1 times to 4 times.
Preferably, this first catoptron and this second catoptron are level crossing.
Preferably, this light emitting module is light emitting diode, incandescent lamp or bulb.
Preferably, this device, video recorder has an image acquisition unit, and this image acquisition unit is charge coupled cell or complementary metal oxide semiconductor element.
The image-type detecting instrument that the utility model proposes more comprises a detector assembly, and this detector assembly comprises at least:
One base has one first opening and one second opening;
One first hollow ring body is arranged on this base, and the bottom of this first hollow ring body connects this first opening;
One second hollow ring body is arranged on this base, and the bottom of this second hollow ring body connects this second opening; And
One closure body has one first accommodation space and one second accommodation space, and this first accommodation space connects the top of this first hollow ring body, and the second accommodation space connects the top of this second hollow ring body.
Preferably, this light emitting module and this device, video recorder are arranged at respectively this first accommodation space and this second accommodation space, this projecting mirror is arranged among this first hollow ring body, this imaging lens is arranged among this second hollow ring body, and this first catoptron and this second catoptron are arranged on the bottom position of this base.
Preferably, this base more is provided with one first joint sheet and one second joint sheet in the bottom, and this first joint sheet and this second joint sheet all have a cambered surface, and this cambered surface can engage this guide wheel.
Preferably, the diameter of this guide wheel is between 150 millimeters to 350 millimeters.
Preferably, this closure body is provided with a data transmission port, is electrically connected this device, video recorder, to transmit the data of this guide wheel image.
Preferably, this data transmission port is universal serial bus.
Preferably, this closure body is provided with a power delivery port, is electrically connected this light emitting module, to provide power supply to this light emitting module.
Compared with prior art, the beneficial effects of the utility model are:
Adopt optical principle in the mode of acquisition guide wheel image according to the utility model, not having the situation that produces probe injury guide wheel occurs, and the utility model is to adopt the light source that is parallel to optical axis, the shade that can avoid light source to cause, avoiding guide wheel to cause degree of depth enlargement ratio, and then promote measurement accuracy.
Description of drawings
Fig. 1 is that image-type detecting instrument of the present utility model uses schematic diagram.
Fig. 2 is the optical element structure figure of image-type detecting instrument of the present utility model.
Fig. 3 is the angle profile schematic diagram of guide wheel image of the present utility model.
Fig. 4 is the top width profile schematic diagram of guide wheel image of the present utility model.
Fig. 5 is spacing and the ditch depth profile schematic diagram of guide wheel image of the present utility model.
Fig. 6 is detector assembly schematic diagram of the present utility model.
Fig. 7 is detector assembly backplan of the present utility model.
Fig. 8 is catoptron scheme of installation of the present utility model.
Fig. 9 is joint sheet scheme of installation of the present utility model.
Figure 10 is image-type detecting instrument system block diagrams of the present utility model.
Figure 11 is the schematic diagram of the image-type detecting instrument at newly-increased data transmission port of the present utility model and power delivery port.
Figure 12 is the flow chart of image-type detecting instrument of the present utility model.
Description of reference numerals: 10-image-type detecting instrument; The 12-guide wheel; The 14-light emitting module; 16-projecting mirror module; The 18-projecting mirror; 20-the first catoptron; 22-imaging lens module; The 24-imaging lens; 26-the second catoptron; The 28-device, video recorder; 30-detector assembly; 32-the first opening; 34-the second opening; The 36-base; 38-the first hollow ring body; 40-the second hollow ring body; The 42-closure body; 44-the first accommodation space; 46-the second accommodation space; 48-the first joint sheet; 50-the second joint sheet; The 52-cambered surface; 54-data transmission port; 56-power delivery port; The 58-computer; The 59-relay; The 60-battery;
Figure GDA00002101947300041
-angle; The p-spacing; The w-top width; The h-ditch depth.
Embodiment
The utility model is enumerated an embodiment in this, consult at first in the lump Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, to illustrate that image-type detecting instrument of the present utility model uses the optical element structure figure of schematic diagram and image-type detecting instrument, the angle profile schematic diagram of guide wheel image, the top width profile schematic diagram of guide wheel image and the spacing of guide wheel image and ditch depth profile schematic diagram, as shown in the figure, the utility model discloses a kind of image-type detecting instrument 10, can be used in this way sun power of test example, the silicon wafer of the accurate industrial application of light emitting diode or semiconductor or the guide wheel 12 on the glass substrate wire cutting machine platform, and image-type detecting instrument 10 is applicable to the guide wheel 12 of diameter between 150 millimeters to 350 millimeters, as shown in Figure 2, image-type detecting instrument 10 includes light emitting module 14, projecting mirror module 16 has projecting mirror 18 and the first catoptron 20, imaging lens module 22 has imaging lens 24 and the second catoptron 26, and device, video recorder 28.
The brought forward literary composition is described, at light emitting module 14 so that light source irradiation projecting mirror 18 to be provided, projecting mirror 18 can receive light source and be projected on the first catoptron 20, after the first catoptron 20 receives light source, then can change the crevice projection angle of light source, be rotated counterclockwise 90 degree, the truncation surface of projection optical axis vertical irradiation guide wheel 12 is to form guide wheel image 29 when guaranteeing to shine, the second catoptron 26 receives light source and the guide wheel image 29 of the first catoptron 20, again change the crevice projection angle of light source, 90-degree rotation again makes imaging lens 24 can receive light source and the guide wheel image 29 of the second catoptron 26 counterclockwise, at last, recycling device, video recorder 28 instant receptions and record guide wheel image 29.
Wherein, foregoing light emitting module 14 is light emitting diode, incandescent lamp or bulb; Projecting mirror 18 and imaging lens 24 are telecentric lens (Telecentric Lens); The first catoptron 20 and the second catoptron 26 are level crossing; The optical amplifier multiplying power of imaging lens 24 is between 1 times to 4 times, so accuracy of detection is high, reliability is good; It for example is to be charge coupled cell or the image acquisition unit of complementary metal oxide semiconductor element that 28 of device, video recorders have.
In sum, the utility model discloses a kind of image-type detecting instrument 10 in this, is utilize optical principle to shine guide wheel 12 to form guide wheel image 29, again with numerical analysis and then can obtain such as Fig. 3, Fig. 4 and guide wheel 12 angles shown in Figure 5
Figure GDA00002101947300051
The outline data of guide wheel 12 profiles of tooth such as spacing p, top width w and ditch depth h, and see through projecting mirror 18, the first catoptron 20, imaging lens 24 and the second catoptron 26 with the mode projection source of parallel optical axis, and the profile of tooth of parallel radiation guide wheel 12, because the utility model adopts the light source that is parallel to optical axis, therefore can avoid the shade of light source, the core type imaging lens far away of arranging in pairs or groups strengthens and measures the depth of field, avoid guide wheel 12 degree of depth to cause the enlargement ratio error, thereby promote measurement accuracy.
Continue, consult Fig. 6 and Fig. 7, so that detector assembly schematic diagram of the present utility model and detector assembly backplan to be described, as shown in the figure, image-type detecting instrument 10 of the present utility model includes detector assembly 30,30 of detector assemblies include the base 36 of the first opening 32 and the second opening 34, the first hollow ring body 38 and the second hollow ring body 40 are arranged on the base 36, the bottom of the first hollow ring body 38 connects the first opening 32, the bottom of the second hollow ring body 40 connects the second opening 34, closure body 42 has the first accommodation space 44 and the second accommodation space 46, the first accommodation space 44 connects the top of the first hollow ring body 38, and the second accommodation space 46 connects the top of the second hollow ring body 40.
As previously mentioned, the structure of detector assembly 30 of the present utility model, can become a kind of portable image-type detecting instrument 10, operating personnel only need utilize hands grasping the first hollow ring body 38 and the second hollow ring body 40 and just can directly carry detector assembly 30 and detect operation to the working site.
Consult Fig. 8, so that catoptron scheme of installation of the present utility model to be described, consult and be aided with simultaneously Fig. 2 and Fig. 6, image-type detecting instrument 10 of the present utility model, wherein light emitting module 14 and device, video recorder 28 are arranged at respectively in the first accommodation space 44 and the second accommodation space 46, projecting mirror 18 is arranged in the first hollow ring body 38, and imaging lens 24 is arranged in the second hollow ring body 40, and the first catoptron 20 and the second catoptron 26 are arranged on the bottom position of base 36.
Continue, consult Fig. 9, so that joint sheet scheme of installation of the present utility model to be described, consult and be aided with simultaneously Fig. 1, as shown in the figure, detector assembly 30 of the present utility model, wherein base 36 more is provided with the first joint sheet 48 and the second joint sheet 50 in the bottom, the first joint sheet 48 and the second joint sheet 50 all have a cambered surface 52 to engage guide wheel 12, and wherein the first joint sheet 48 and the second joint sheet 50 can be changed in response to the diameter actual size collocation of guide wheel 12.
In sum, according to the design of the utility model for detector assembly 30, operating personnel only need gripping the first hollow ring body 38 and the second hollow ring body 40 with hand, and utilize the first joint sheet 48 and the second joint sheet 50, directly be placed on the guide wheel 12, can detect, need not to dismantle again capable numerous and diverse formality of setting up of guide wheel 12.
Consult Figure 10 and Figure 11, schematic diagram with image-type detecting instrument that image-type detecting instrument system block diagrams of the present utility model and newly-increased data transmission port and power delivery port are described, consult and be aided with simultaneously Fig. 2, as shown in the figure, the utility model can have additional data transmission port 54 and power delivery port 56 again on closure body 42, data transmission port 54 is electrically connected device, video recorder 28, and data transmission port 54 for universal serial bus with the data of transmitting guide wheel image 29 to computer 58, power delivery port 56 is electrically connected light emitting module 14, to provide power supply to light emitting module 14 and built-in battery 60.The utility model also can see through built-in battery 60 and be electrically connected light emitting module 14, to provide power supply to light emitting module 14,56 at power delivery port is electrically connected battery 60, so that battery 60 is charged, according to the aforesaid technology contents of the utility model, the utility model provides power supply to light emitting module 14 in the mode of built-in battery 60 as can be known, therefore, the image-type detecting instrument 10 that operating personnel only need carry and computer 58 just can detect in the working site guide wheel 12, when computer 58 is electrically connected data transmission port 54, relay 59 and device, video recorder 28 will be electrically connected on the computer 58 simultaneously, to provide simultaneously power supply to light emitting module 14 and device, video recorder 28, image-type detecting instrument 10 provides relay 59 power supplys with the built-in battery 60 of conducting and then powers to light emitting module 14.When computer 58 is electrically connected image-type detecting instrument 10, start simultaneously image-type detecting instrument 10, so image-type detecting instrument 10 also need not be set up mechanical switch.
The utility model is enumerated the method for operating embodiment of an image-type detecting instrument in this, consult Figure 12, so that the flow chart of image-type detecting instrument of the present utility model to be described, consult and be aided with simultaneously Fig. 2, Fig. 6 and Figure 10, as shown in the figure, the utility model discloses a kind of method of operating of image-type detecting instrument 10 in this, can be used in this way sun power of test example, guide wheel 12 on the accurate industrial board of light emitting diode or semiconductor, its method of operating includes the following step, shown in step S10, the utility model example is light emitting diode in this way, the light emitting module 14 of incandescent lamp or bulb is with projection source; Such as step S12, the parameter of initialization device, video recorder 28; Such as step S14, the guide wheel image 29 of acquisition guide wheel 12; Such as step S16, transmit the profile of tooth numerical value to computer 58 by the data transmission port 54 of universal serial bus.And step is returned step S14 continuing to capture the guide wheel image 29 of guide wheel 12, and is last, such as step S18, according to computer 58 to analyze the profile of tooth numerical value of guide wheel image 29.
As previously mentioned, the method of operating of image-type detecting instrument 10 of the present utility model, its step S10, light emitting module 14 is with projection source, its operation steps order can be carried out before the parameter of step S12 initialization device, video recorder 28, yet technology contents of the present utility model is not as limit, the utility model carries out step S10 again after the parameter of step S12 initialization device, video recorder 28, light emitting module 14 with projection source also can, its step order does not successively affect the purpose of technology contents of the present utility model.
Brought forward is described, the method for operating of image-type detecting instrument 10 of the present utility model, and wherein the parameter of device, video recorder 28 is object distance, focal length and the enlargement ratio of image acquisition unit, such as Fig. 3, Fig. 4 and shown in Figure 5, profile of tooth numerical value is the angle of guide wheel 12
Figure GDA00002101947300071
Spacing p, top width w and ditch depth h; The profile of tooth numerical value of analyzing guide wheel image 29 also can be divided into profile of tooth image automated analysis and manual some taken amount cls analysis, only must design a cover robotization software for the angle that detects guide wheel 12 in the part of profile of tooth image automated analysis
Figure GDA00002101947300072
Spacing p, top width w and ditch depth h, and can design equally the auxiliary software of a cover in the part of manually putting the taken amount cls analysis, offer operating personnel and manually put the angle of getting guide wheel 12
Figure GDA00002101947300073
Spacing p, top width w and ditch depth h.
Although the aforesaid embodiment of the utility model discloses as above, so it is not to limit the utility model.The change of doing within not breaking away from spirit and scope of the present utility model and retouching all belong to the opinion of the utility model claim.

Claims (13)

1. an image-type detecting instrument to detect a guide wheel, is characterized in that, this image-type detecting instrument comprises at least:
One light emitting module provides a light source;
One projecting mirror module has a projecting mirror and one first catoptron, and this projecting mirror is to receive this light source, and throw this light source to this first catoptron, this first catoptron receives and changes the refraction angle of this light source, shining this guide wheel, and forms a guide wheel image;
One imaging lens module has an imaging lens and one second catoptron, and this second catoptron receives light source and this guide wheel image of this first catoptron, and can change the refraction angle of this light source, and this imaging lens can receive light source and this guide wheel image of this second catoptron; And
One device, video recorder is to receive and to note down this guide wheel image.
2. image-type detecting instrument as claimed in claim 1 is characterized in that, this projecting mirror and this imaging lens are all telecentric lens.
3. image-type detecting instrument as claimed in claim 2 is characterized in that, the optical amplifier multiplying power of this imaging lens is between 1 times to 4 times.
4. image-type detecting instrument as claimed in claim 1 is characterized in that, this first catoptron and this second catoptron are level crossing.
5. image-type detecting instrument as claimed in claim 1 is characterized in that, this light emitting module is light emitting diode, incandescent lamp or bulb.
6. image-type detecting instrument as claimed in claim 1 is characterized in that, this device, video recorder has an image acquisition unit, and this image acquisition unit is charge coupled cell or complementary metal oxide semiconductor element.
7. image-type detecting instrument as claimed in claim 1 is characterized in that, more comprises a detector assembly, and this detector assembly comprises at least:
One base has one first opening and one second opening;
One first hollow ring body is arranged on this base, and the bottom of this first hollow ring body connects this first opening;
One second hollow ring body is arranged on this base, and the bottom of this second hollow ring body connects this second opening; And
One closure body has one first accommodation space and one second accommodation space, and this first accommodation space connects the top of this first hollow ring body, and the second accommodation space connects the top of this second hollow ring body.
8. image-type detecting instrument as claimed in claim 7, it is characterized in that, this light emitting module and this device, video recorder are arranged at respectively this first accommodation space and this second accommodation space, this projecting mirror is arranged among this first hollow ring body, this imaging lens is arranged among this second hollow ring body, and this first catoptron and this second catoptron are arranged on the bottom position of this base.
9. image-type detecting instrument as claimed in claim 7 is characterized in that, this base more is provided with one first joint sheet and one second joint sheet in the bottom, and this first joint sheet and this second joint sheet all have a cambered surface, and this cambered surface can engage this guide wheel.
10. image-type detecting instrument as claimed in claim 9 is characterized in that, the diameter of this guide wheel is between 150 millimeters to 350 millimeters.
11. image-type detecting instrument as claimed in claim 7 is characterized in that, this closure body is provided with a data transmission port, is electrically connected this device, video recorder, to transmit the data of this guide wheel image.
12. image-type detecting instrument as claimed in claim 11 is characterized in that, this data transmission port is universal serial bus.
13. image-type detecting instrument as claimed in claim 7 is characterized in that, this closure body is provided with a power delivery port, is electrically connected this light emitting module, to provide power supply to this light emitting module.
CN 201220451288 2012-09-05 2012-09-05 Image type detection device Expired - Fee Related CN202770408U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478153A (en) * 2017-08-11 2017-12-15 哈尔滨工业大学 A kind of background light source structure for chip detection
CN108278972A (en) * 2018-04-17 2018-07-13 徐州利宝机械科技有限公司 A kind of revolving meber measuring device and its backstage control method
CN109506571A (en) * 2018-10-26 2019-03-22 北京航天控制仪器研究所 A kind of part dimension measurement method in place and device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478153A (en) * 2017-08-11 2017-12-15 哈尔滨工业大学 A kind of background light source structure for chip detection
CN108278972A (en) * 2018-04-17 2018-07-13 徐州利宝机械科技有限公司 A kind of revolving meber measuring device and its backstage control method
CN108278972B (en) * 2018-04-17 2024-02-27 徐州利宝机械科技有限公司 Rotary member measuring device and background control method thereof
CN109506571A (en) * 2018-10-26 2019-03-22 北京航天控制仪器研究所 A kind of part dimension measurement method in place and device

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