CN202757381U - High purity oxygen extracting device - Google Patents
High purity oxygen extracting device Download PDFInfo
- Publication number
- CN202757381U CN202757381U CN 201220319445 CN201220319445U CN202757381U CN 202757381 U CN202757381 U CN 202757381U CN 201220319445 CN201220319445 CN 201220319445 CN 201220319445 U CN201220319445 U CN 201220319445U CN 202757381 U CN202757381 U CN 202757381U
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- CN
- China
- Prior art keywords
- tower
- column
- crude argon
- purity oxygen
- oxygen
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Separation By Low-Temperature Treatments (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
The utility model relates to a high purity oxygen extracting device which comprises a cold preserving box 1, a lower tower C1, an upper tower C2, a condensing evaporator K which is arranged between the lower tower C1 and the upper tower C2, a subcooler E3, a first crude argon tower C3, a second crude argon tower C5 which is communicated with the first crude argon tower C3, a circulating hydraulic pump AP which is communicated with the first crude argon tower C3 and the second crude argon tower C5 and a rectifying tower C4 which is communicated with the lower tower C1. The second crude argon tower C5 is communicated with the middle-upper portion of a high purity oxygen tower C8 through a first pipeline 5, and the top of the high purity tower C8 is communicated with the second crude argon tower C5 through a second pipeline 6. A evaporator 8 is arranged inside the high purity oxygen tower C8, one side of the evaporator 8 is connected with the rectifying tower C4 and the condensing evaporator K through a fourth pipeline 4, the other side of the evaporator 8 is communicated with the upper tower C2 through a third pipeline 7, and the bottom of the high purity oxygen tower C8 is provided with a recovery pipeline 3 of high purity liquid oxygen.
Description
Technical field
The utility model relates to the air separation field, is specifically related to a kind of high purity oxygen extraction element.
Background technology
High purity oxygen is used for the chemical vapour deposition (CVD) of silica, as oxidation source and the reactant that produces high purity water, dry oxidation, mix with carbon tetrafluoride, be used for plasma etching etc., particularly obtained more and more wider application in China's electron trade, its demand continues to keep high growth.
The method of high purity oxygen is a lot: it is raw material that a small amount of oxygen adopts electrolysis oxygen, and can produce purity through catalytic dehydrogenation is high purity oxygen more than 99.99%.Pressure swing adsorption method and membrane separation process, but higher to the feed oxygen requirement, oxygen content 〉=99.95%, general industrial oxygen is inaccessible, the sorbing material price of selecting is very high, and the production scale is smaller.The full rectification method of low temperature is made by air separation, is about to air liquefaction by rectification and purification.
The existing method of process organization of the full rectification method high purity of low temperature oxygen is a lot, but raw material all is to come from general oxygen, utilizes two rectifying columns minute two-stage to remove the impurity such as nitrogen, argon, methane in the oxygen, changes high purity oxygen with general oxygen.
Therefore, provide a kind of simple in structure, easy to operate, simple process, the high purity oxygen extraction element that efficient is high has wide market prospects.
Summary of the invention
For the deficiencies in the prior art, it is a kind of rational in infrastructure simple, convenient to operation that the utility model provides, simple process, the high purity oxygen extraction element that efficient is high.
The technical solution of the utility model is such realization: a kind of high purity oxygen extraction element, comprise cold insulated cabinet 1, lower tower C1, upper tower C2, be arranged on the condenser/evaporator K between lower tower C1 and the upper tower C2, subcooler E3, the first crude argon column C3, the the second crude argon column C5 that is connected with the first crude argon column C3, the circulation fluid press pump AP that is connected with the first crude argon column C3 and the second crude argon column C5, the rectifying column C4 that is connected with lower tower C1, described the second crude argon column C5 is connected with the middle and upper part of high-purity oxygen column C8 by the first pipeline 5, the top of high-purity oxygen column C8 is connected with the second crude argon column C5 by second pipe 6, in high-purity oxygen column C8, be provided with evaporimeter 8, evaporimeter 8 one sides are connected with rectifying column C4 with condenser/evaporator K by the 4th pipeline 4, opposite side is connected with upper tower C2 by the 3rd pipeline 7, is provided with high-purity liquid oxygen recovery channel 3 in the bottom of high-purity oxygen column C8.
Described the first pipeline 5 is connected with the 7th theoretical version of inverse of setting in the second crude argon column C5 with a side, and opposite side is connected with the middle and upper part of high-purity oxygen column C8.
The utlity model has following good effect: the utility model adopts two tower high purity oxygen technology, and flow setting is simple, processing ease, and smooth running, safe and reliable, can realize Automatic Control; The utility model high purity oxygen technology, feed oxygen derives from argon column processed, and the theoretical plate place suitable at argon column processed extracts, and can obtain desirable feed oxygen, and on fully not impact of argon processed, a tower is dual-purpose; Column plate is arranged to sieve plate under the second crude argon column C5 extraction feed oxygen place, so that this section housing structure is tightly taken out, the tower operating mode operates steadily when taking out material; The pure oxygen tower adopts the high efficiency regular packed tower, and operating flexibility is large, can 30%～115% Load Regulation, and the high purity oxygen product purity is high; Equipment is few, by original argon column processed, only need add a pure oxygen tower and get final product, and high purity oxygen device had lacked a rectifying column more in the past, and equipment investment is low; Flexible operation, high-purity oxygen column can cut off with argon producing system at any time, and argon processed is had no effect; Pure oxygen tower evaporimeter thermal source is the pure nitrogen gas that lower cat head comes, and enters tower after being liquefied and participates in rectifying, more is conducive to the operation of king-tower operating mode.
Description of drawings
Fig. 1 is structural representation of the present utility model and schematic flow sheet.
The specific embodiment
As shown in Figure 1, a kind of high purity oxygen extraction element, comprise cold insulated cabinet 1, lower tower C1, upper tower C2, be arranged on the condenser/evaporator K between lower tower C1 and the upper tower C2, subcooler E3, the first crude argon column C3, the the second crude argon column C5 that is connected with the first crude argon column C3, the circulation fluid press pump AP that is connected with the first crude argon column C3 and the second crude argon column C5, the rectifying column C4 that is connected with lower tower C1, described the second crude argon column C5 is connected with the middle and upper part of high-purity oxygen column C8 by the first pipeline 5, the top of high-purity oxygen column C8 is connected with the second crude argon column C5 by second pipe 6, in high-purity oxygen column C8, be provided with evaporimeter 8, evaporimeter 8 one sides are connected with rectifying column C4 with condenser/evaporator K by the 4th pipeline 4, opposite side is connected with upper tower C2 by the 3rd pipeline 7, is provided with high-purity liquid oxygen recovery channel 3 in the bottom of high-purity oxygen column C8.
Described the first pipeline 5 is connected with the 7th theoretical version of inverse of setting in the second crude argon column C5 with a side, and opposite side is connected with the middle and upper part of high-purity oxygen column C8,
A kind of method of utilizing above-mentioned high purity oxygen extraction element to extract high purity oxygen, its extracting method is as follows:
The utility model is produced the method for the high purity liquid state oxygen of electronics industry level technical standard through high-purity oxygen column C8, the second crude argon column C5 cryogenic rectification.The high purity oxygen product index that the method is produced can reach: oxygen purity 〉=99.999%.Other impurity contents are: H
2≤ 0.1ppm; N
2≤ 0.3ppm; CH
4≤ 0.5ppm; H
2O≤0.1ppm; Ar≤0.1ppm; N
2≤ 0.1ppm; CO
2≤ 0.1ppm.The high-class product index that has surpassed GB/T14599-2008 " pure oxygen, high purity oxygen, ultrapure oxygen " regulation.And the high purity oxygen index of GB/T14599-2008 regulation is: oxygen purity 〉=99.999%.Other impurity contents are: H
2≤ 0.5ppm; N
2≤ 5ppm; CH
4≤ 0.5ppm; H
2O≤2ppm; Ar≤2ppm; N
2≤ 5ppm; CO
2≤ 0.5ppm.
Claims (2)
1. high purity oxygen extraction element, comprise cold insulated cabinet (1), lower tower (C1), upper tower (C2), be arranged on the condenser/evaporator (K) between lower tower (C1) and the upper tower (C2), subcooler (E3), the first crude argon column (C3), the second crude argon column (C5) that is connected with the first crude argon column (C3), the circulation fluid press pump (AP) that is connected with the first crude argon column (C3) and the second crude argon column (C5), the rectifying column (C4) that is connected with lower tower (C1), it is characterized in that: described the second crude argon column (C5) is connected by the middle and upper part of the first pipeline (5) with high-purity oxygen column (C8), the top of high-purity oxygen column (C8) is connected with the second crude argon column (C5) by second pipe (6), in high-purity oxygen column (C8), be provided with evaporimeter (8), evaporimeter (8) one sides are connected with rectifying column (C4) with condenser/evaporator (K) by the 4th pipeline (4), opposite side is connected with upper tower (C2) by the 3rd pipeline (7), is provided with high-purity liquid oxygen recovery channel (3) in the bottom of high-purity oxygen column (C8).
2. high purity oxygen extraction element according to claim 1 is characterized in that: the 7th theoretical version of the inverse that arranges in described the first pipeline (5) and a side and the second crude argon column (C5) is connected, and opposite side is connected with the middle and upper part of high-purity oxygen column (C8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220319445 CN202757381U (en) | 2012-07-04 | 2012-07-04 | High purity oxygen extracting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220319445 CN202757381U (en) | 2012-07-04 | 2012-07-04 | High purity oxygen extracting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202757381U true CN202757381U (en) | 2013-02-27 |
Family
ID=47736555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220319445 Expired - Fee Related CN202757381U (en) | 2012-07-04 | 2012-07-04 | High purity oxygen extracting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202757381U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721260A (en) * | 2012-07-04 | 2012-10-10 | 开封空分集团有限公司 | High-purity oxygen extracting device and method for extracting high-purity oxygen by utilizing same |
| CN103968642A (en) * | 2014-05-15 | 2014-08-06 | 南通天源气体有限公司 | Tower type method for improving gas purity |
-
2012
- 2012-07-04 CN CN 201220319445 patent/CN202757381U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721260A (en) * | 2012-07-04 | 2012-10-10 | 开封空分集团有限公司 | High-purity oxygen extracting device and method for extracting high-purity oxygen by utilizing same |
| CN103968642A (en) * | 2014-05-15 | 2014-08-06 | 南通天源气体有限公司 | Tower type method for improving gas purity |
| CN103968642B (en) * | 2014-05-15 | 2016-05-18 | 南通天源气体有限公司 | A kind of method of tower raising gas purity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Li Meiling Inventor after: Liu Jingwu Inventor after: Ma Yuan Inventor after: Zhuo Yueguang Inventor after: Yue Yueyong Inventor after: Huang Lei Inventor before: Li Meiling Inventor before: Liu Jingwu Inventor before: Ma Yuan Inventor before: Zhuo Yueguang Inventor before: Yue Yueyong Inventor before: Huang Lei |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130227 Termination date: 20150704 |
|
| EXPY | Termination of patent right or utility model |