CN202730296U - Guide cylinder of direct-pull single crystal furnace - Google Patents
Guide cylinder of direct-pull single crystal furnace Download PDFInfo
- Publication number
- CN202730296U CN202730296U CN 201220386212 CN201220386212U CN202730296U CN 202730296 U CN202730296 U CN 202730296U CN 201220386212 CN201220386212 CN 201220386212 CN 201220386212 U CN201220386212 U CN 201220386212U CN 202730296 U CN202730296 U CN 202730296U
- Authority
- CN
- China
- Prior art keywords
- guide cylinder
- water conservancy
- conservancy diversion
- crystal growing
- draft tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 39
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 6
- 239000011733 molybdenum Substances 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 41
- 230000003044 adaptive effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000007770 graphite material Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- CSJDCSCTVDEHRN-UHFFFAOYSA-N methane;molecular oxygen Chemical compound C.O=O CSJDCSCTVDEHRN-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a guide cylinder of a direct-pull single crystal furnace. The guide cylinder comprises an outer guide cylinder and an inner guide cylinder which are fixedly connected, wherein the inner guide cylinder is made of molybdenum and comprises at least two guide petals of cylindrical shapes, and two adjacent guide petals are fixedly connected. By selecting the molybdenum for manufacturing the guide cylinder, the inner guide cylinder comprises at least two guide petals which are fixedly connected, compared with the technical scheme that the guide cylinder in the prior art adopts graphite materials, the guide cylinder of the direct-pull single crystal furnace, disclosed by the utility model, has the advantages that the carbon content and the oxygen content in crystals can be reduced, and the pulling speed can be increased; the service life is longer, and the manufacturing of the guide cylinder disclosed by the utility model is more convenient due to the inner guide cylinder which is of the cylindrical shape and is formed by multiple guide petals.
Description
Technical field
The utility model relates to a kind of semiconductor material Preparation equipment, relates in particular to a kind of guide cylinder for czochralski crystal growing furnace.
Background technology
Guide shell of the prior art adopts graphite material, wherein external flow guiding cylinder and inner draft tube are integrated formed structure, use the inner draft tube of this employing graphite material of the prior art may cause that carbon oxygen content exceeds standard in the crystal, and pulling rate is significantly reduced, so need transform perfect.
Summary of the invention
Main purpose of the present utility model provides a kind of guide cylinder for czochralski crystal growing furnace, is intended to reduce carbon oxygen content in the crystal, improves pulling rate.
The utility model embodiment provides a kind of guide cylinder for czochralski crystal growing furnace, comprises the external flow guiding cylinder and the inner draft tube that are fixedly connected with, and the material of described inner draft tube is molybdenum, and it comprises at least two water conservancy diversion lobes that form tubular, and adjacent two described water conservancy diversion lobes are fixedly connected with.
Preferably, described inner draft tube also comprises the connection piece of fixing adjacent two described water conservancy diversion lobes, and described connection piece is provided with the first connecting hole, and the second connecting hole that described the first connecting hole and described water conservancy diversion lobe both sides arrange is adaptive; Rivet or screw pass described the first connecting hole and the second connecting hole is fixed described water conservancy diversion lobe and connection piece.
Preferably, the number of described connection piece equates with the number of described water conservancy diversion lobe.
Preferably, each described water conservancy diversion lobe is big or small identical.Described water conservancy diversion lobe is 5.
Preferably, described guide cylinder for czochralski crystal growing furnace also comprises set collar, and the fixed ring set is connected on the upper end of described inner draft tube, is provided with the 3rd connecting hole that is spirally connected or rivets with described external flow guiding cylinder on it.
Preferably, the lower end of described external flow guiding cylinder is provided with projection, and described guide cylinder for czochralski crystal growing furnace also comprises lower set collar, and described lower set collar comprises the interior ring of the lower end that is socketed in described inner draft tube and the outer shroud adaptive with described projection.
The utility model is by electing the material of inner draft tube as molybdenum, and inner draft tube comprises at least two water conservancy diversion lobes that are fixedly connected with, guide shell relatively of the prior art adopts the technical scheme of graphite material, and the utility model guide cylinder for czochralski crystal growing furnace has carbon oxygen content, the advantage that improves pulling rate and longer service life in the reduction crystal, forms the inner draft tube of tubular so that the utility model is made more convenient by a plurality of water conservancy diversion lobes.
Description of drawings
Fig. 1 is the structural representation of the utility model guide cylinder for czochralski crystal growing furnace preferred embodiment;
Fig. 2 be among Fig. 1 guide cylinder for czochralski crystal growing furnace along the cut-away view of A-A direction;
Fig. 3 is the structural representation of water conservancy diversion lobe among Fig. 1;
Fig. 4 is the structural representation of connection piece among Fig. 1;
Fig. 5 is the enlarged diagram of B part among Fig. 2.
The realization of the utility model purpose, functional characteristics and advantage are described further with reference to accompanying drawing in connection with embodiment.
Embodiment
Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
The utility model provides a kind of guide cylinder for czochralski crystal growing furnace, and with reference to Fig. 1, Fig. 1 is the structural representation of the utility model guide cylinder for czochralski crystal growing furnace preferred embodiment.The utility model guide cylinder for czochralski crystal growing furnace comprises external flow guiding cylinder 1 and inner draft tube 2, and external flow guiding cylinder 1 is fixedly connected with inner draft tube 2, and wherein inner draft tube 2 comprises that at least two water conservancy diversion lobes 21, at least two water conservancy diversion lobes 21 form tubular, and adjacent two water conservancy diversion lobes 21 are fixedly connected with.In a preferred embodiment, inner draft tube 2 comprises 21,5 water conservancy diversion lobes of 5 water conservancy diversion lobes formation tubular that is fixedly connected sequentially.Certainly in other variant embodiment, the number of the water conservancy diversion lobe 21 that inner draft tube 2 is included can be arbitrary value, is not restricted at this.In the utility model, the big or small identical or not identical of each water conservancy diversion lobe 21 do not limited, preferably, each water conservancy diversion lobe 21 big or small identical.
The utility model is by electing the material of inner draft tube 2 as molybdenum, and inner draft tube 2 comprises at least two water conservancy diversion lobes 21 that are fixedly connected with, guide shell relatively of the prior art adopts the technical scheme of graphite material, and the utility model guide cylinder for czochralski crystal growing furnace has carbon oxygen content, the advantage that improves pulling rate and longer service life in the reduction crystal, forms the inner draft tube of tubular so that the utility model is made more convenient by a plurality of water conservancy diversion lobes 21.
In conjunction with reference to Fig. 2, Fig. 3 and Fig. 4, Fig. 2 is that guide cylinder for czochralski crystal growing furnace is along the cut-away view of A-A direction among Fig. 1, and Fig. 3 is the structural representation of water conservancy diversion lobe among Fig. 1, and Fig. 4 is the structural representation of connection piece among Fig. 1.Inner draft tube 2 in the utility model guide cylinder for czochralski crystal growing furnace also comprises connection piece 22, connection piece 22 is used for fixing adjacent two water conservancy diversion lobes 21, the both sides of water conservancy diversion lobe 21 are respectively arranged with the second connecting hole 211, be provided with on the connection piece 22 respectively with adjacent two water conservancy diversion lobes 21 on adaptive the first connecting hole 221 of the second connecting hole 211, rivet or screw pass the second connecting hole 211 and the first connecting hole 221 is fixing with water conservancy diversion lobe 21 and connection piece 22.Connection piece 22 be positioned at the inboard of inner draft tube 2 or the outside all can, this is not limited.
In specific embodiment, the number of connection piece 22 equates with the number of water conservancy diversion lobe 21.Certainly the number of connection piece 22 also can be unequal with the number of water conservancy diversion lobe 21, and such as the number of connection piece 22 number greater than water conservancy diversion lobe 21, particularly, the upper end of adjacent two water conservancy diversion lobes 21, middle part and lower end are fixing by connection piece 22 respectively; The number of connection piece 22 is less than the number of water conservancy diversion lobe 21 for another example, particularly, when 5 water conservancy diversion lobes 21 form tubular formation inner draft tube 2, the upper end, middle part and the lower end that form 5 water conservancy diversion lobes 21 of tubular are fixed by connection piece 22 respectively, only need 3 connection pieces 22 this moment, so the number of connection piece 22, the setting position of connection piece 22 and the length of connection piece 22 are not limited.
Referring again to Fig. 2, guide cylinder for czochralski crystal growing furnace also comprises set collar 31, upper set collar 31 is socketed in the upper end of inner draft tube 2, also be provided with the 3rd connecting hole that is spirally connected or rivets with external flow guiding cylinder 1 on the upper set collar 31, so inner draft tube 2 not only is fixedly connected with by upper set collar 31 with external flow guiding cylinder 1, and inner draft tube 2 is not contacted with external flow guiding cylinder 1, reduced the thermal conduction between inner draft tube 2 and the external flow guiding cylinder 1, and then the crystal bar thermal diffusivity is increased, namely increased vertical gradient of the utility model guide cylinder for czochralski crystal growing furnace, pulling rate is further promoted.In addition, when lifting the utility model guide cylinder for czochralski crystal growing furnace, outside suspension ring etc. can be established by hook (or other mode of connection) in the 3rd connecting hole, in order to realize the lifting of guide cylinder for czochralski crystal growing furnace.
In conjunction with reference to Fig. 5, Fig. 5 is the enlarged diagram of B part among Fig. 2.Guide cylinder for czochralski crystal growing furnace also comprises lower set collar 32, the lower end of external flow guiding cylinder 1 is provided with projection 11,32 one-tenth stair-stepping interior rings 321 of lower set collar and outer shroud 322, ring 321 is socketed in the lower end of inner draft tube 2 wherein, outer shroud 322 is adaptive with projection 11, so inner draft tube 2 not only further is fixedly connected with by lower set collar 32 with external flow guiding cylinder 1, but also inner draft tube 2 is not contacted with external flow guiding cylinder 1, reduced the thermal conduction between inner draft tube 2 and the external flow guiding cylinder 1, and then the crystal bar thermal diffusivity is increased, namely increased vertical gradient of the utility model guide cylinder for czochralski crystal growing furnace, pulling rate is further promoted.
The above only is preferred embodiment of the present utility model; be not so limit claim of the present utility model; every equivalent structure or equivalent flow process conversion that utilizes the utility model specification sheets and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present utility model.
Claims (7)
1. a guide cylinder for czochralski crystal growing furnace comprises the external flow guiding cylinder and the inner draft tube that are fixedly connected with, it is characterized in that, the material of described inner draft tube is molybdenum, and it comprises at least two water conservancy diversion lobes that form tubular, and adjacent two described water conservancy diversion lobes are fixedly connected with.
2. guide cylinder for czochralski crystal growing furnace according to claim 1, it is characterized in that, described inner draft tube also comprises the connection piece of fixing adjacent two described water conservancy diversion lobes, and described connection piece is provided with the first connecting hole, and the second connecting hole that described the first connecting hole and described water conservancy diversion lobe both sides arrange is adaptive; Rivet or screw pass described the first connecting hole and the second connecting hole is fixed described water conservancy diversion lobe and connection piece.
3. guide cylinder for czochralski crystal growing furnace according to claim 2 is characterized in that, the number of described connection piece equates with the number of described water conservancy diversion lobe.
4. guide cylinder for czochralski crystal growing furnace according to claim 3 is characterized in that, each described water conservancy diversion lobe big or small identical.
5. guide cylinder for czochralski crystal growing furnace according to claim 4 is characterized in that, described water conservancy diversion lobe is 5.
6. according to claim 1 to 5 each described guide cylinder for czochralski crystal growing furnaces, it is characterized in that, also comprise set collar, the fixed ring set is connected on the upper end of described inner draft tube, is provided with the 3rd connecting hole that is spirally connected or rivets with described external flow guiding cylinder on it.
7. guide cylinder for czochralski crystal growing furnace according to claim 6, it is characterized in that, the lower end of described external flow guiding cylinder is provided with projection, described guide cylinder for czochralski crystal growing furnace also comprises lower set collar, and described lower set collar comprises the interior ring of the lower end that is socketed in described inner draft tube and the outer shroud adaptive with described projection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220386212 CN202730296U (en) | 2012-08-06 | 2012-08-06 | Guide cylinder of direct-pull single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220386212 CN202730296U (en) | 2012-08-06 | 2012-08-06 | Guide cylinder of direct-pull single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202730296U true CN202730296U (en) | 2013-02-13 |
Family
ID=47656012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220386212 Expired - Lifetime CN202730296U (en) | 2012-08-06 | 2012-08-06 | Guide cylinder of direct-pull single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202730296U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108179463A (en) * | 2017-12-28 | 2018-06-19 | 锦州神工半导体有限公司 | The flow-guiding structure of major diameter single crystal drawing process and method of river diversion in vertical pulling method |
| CN110438560A (en) * | 2019-09-16 | 2019-11-12 | 西安格美金属材料有限公司 | A kind of molybdenum guide shell and material processing method |
| CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
-
2012
- 2012-08-06 CN CN 201220386212 patent/CN202730296U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108179463A (en) * | 2017-12-28 | 2018-06-19 | 锦州神工半导体有限公司 | The flow-guiding structure of major diameter single crystal drawing process and method of river diversion in vertical pulling method |
| CN110438560A (en) * | 2019-09-16 | 2019-11-12 | 西安格美金属材料有限公司 | A kind of molybdenum guide shell and material processing method |
| CN113403675A (en) * | 2021-06-21 | 2021-09-17 | 西安奕斯伟硅片技术有限公司 | Guide cylinder and crystal pulling furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent of invention or patent application | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLD STONE TECHNOLOGY STOCK CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. |
|
| CB03 | Change of inventor or designer information |
Inventor after: Gao Han Inventor after: Zhang Zhiyong Inventor after: Jiao Jingjing Inventor before: Jiao Jingjing |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: JIAO JINGJING TO: GAO HAN ZHANG ZHIYONG JIAO JINGJING |
|
| CP03 | Change of name, title or address |
Address after: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee after: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. Address before: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee before: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130213 |
|
| CX01 | Expiry of patent term |