CN202720191U - Qualitative and quantitative measurement device of concentration of multiple gases - Google Patents
Qualitative and quantitative measurement device of concentration of multiple gases Download PDFInfo
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- CN202720191U CN202720191U CN 201220384230 CN201220384230U CN202720191U CN 202720191 U CN202720191 U CN 202720191U CN 201220384230 CN201220384230 CN 201220384230 CN 201220384230 U CN201220384230 U CN 201220384230U CN 202720191 U CN202720191 U CN 202720191U
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- dielectric barrier
- qualitative
- barrier discharge
- quantitative measurement
- concentration
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Abstract
The utility model discloses a qualitative and quantitative measurement device of concentration of multiple gases, and the qualitative and quantitative measurement device of the concentration of the multiple gases is long in service life and high in measurement precision, and comprises two dielectric barrier discharging layers which are parallel to each other. Two electrodes which are opposite to and parallel to each other are arranged on surfaces of the two dielectric barrier discharging layers, the surfaces are back to back, one of the electrodes is connected with a dielectric barrier discharging power supply, and the other electrode is grounded. A spectrograph is arranged to directly face an area between the two dielectric barrier discharging layers, and the area is between the two opposite electrodes. The spectrograph is connected with a data processor. By means of the qualitative and quantitative measurement device of the concentration of the multiple gases, continuous measurement of the concentration of multiple single-element gases is achieved, and the measurement of volume content of the gases from low concentration to high concentration is achieved at the same time.
Description
Technical field
The utility model belongs to the gas concentration measuring apparatus field, is specifically related to a kind of many gas concentrations qualitative, quantitative measurement mechanism.
Background technology
Present single element gas molecule such as O
2, N
2, Ar, H
2, He, Ne etc. need to grasp in detail its concrete concentration in concrete the application, so that operating personnel can carry out various tests, utilization etc. according to this concentration.Yet there are various defectives in the measurement of concetration of present single element gas molecule:
1, O
2Measuring method mainly contain electric chemical formula, magnetic mechanical etc., wherein, electric chemical formula is owing to being the expendable measurement, the employed service life of structure of this kind measuring method is generally all shorter, generally all is no more than 2 years, especially for the O of trace
2Measure and highly purified O
2Measure, the commencement of commercial operation that also do not have that has just damages; And magnetic mechanical generally can only be measured high concentration O
2, for the O of low concentration
2Substantially can not Measurement accuracy.
2, Ar and H
2The main thermal conductivity difference that relies on is measured, and shortcoming is to carry out the measurement of low concentration.
3, N
2Main employing electricity causes plasma and radioactive source plasma emission spectroscopy method is measured, but only limits to the low concentration impurity N in the high-purity argon gas
2Measurement, applicable Object range is narrow.
4, the gas such as He, Ne can be measured by mass spectrometer, but mass spectrometer is a kind of large-scale, complicated, costliness and the very large instrument of maintenance difficulties, and cost is high.
5, chromatography can be measured multiple gases concentration simultaneously, but chromatographic column is complicated, and temperature control is complicated, and simultaneously, chromatography can not be carried out continuous coverage, can only measure by Discontinuous sampling, and needs expensive high-purity gas as carrier when measuring.
Summary of the invention
For above-mentioned weak point of the prior art, the utility model aims to provide a kind of simple in structure, many gas concentrations qualitative, quantitative measurement mechanism that cost is low, can realize the continuous coverage to multiple single element gas concentration, void fraction from the low concentration to the high concentration is measured, long working life, measuring accuracy is high.
In order to achieve the above object, the technical solution of the utility model: a kind of many gas concentrations qualitative, quantitative measurement mechanism, it comprises two mutual parallel dielectric barrier discharge layers, on the surface that this two dielectric barrier discharges layer deviates from mutually, establish respectively a relative and parallel electrode, an electrode connecting media barrier discharge power supply wherein, another electrode grounding; Over against a spectrometer is arranged, this spectrometer connects a data processor on zone between the relative dielectric barrier discharge layer of described two electrodes.
Further, described two mutual parallel dielectric barrier discharge layers are one to have the opposing sidewalls of the air chamber of air intake opening and gas outlet, and described two parallel electrodes are located on the outside surface of this air chamber opposing sidewalls.
Described spectrometer by the optical fiber that is attached thereto over against zone between the relative dielectric barrier discharge layer of described two electrodes; Described electrode is connected with described dielectric barrier discharge VDD-to-VSS by cable respectively; Described data processor is connected with described spectrometer by signal cable.
The manufactured materials of described air chamber is made less than or equal to 0.005% high purity quartz by iron-holder; Described dielectric barrier discharge power supply is the high-frequency sine-wave power.
Principle of work of the present utility model: the atom of component is in steady state (SS) under normal circumstances, i.e. the ground state of material, and this moment, its energy was minimum.But when atom is subject to outside energy such as electric energy, heat energy or luminous energy etc. are done the time spent, the outer-shell electron of atom just from ground state transition to high level more on, i.e. excited state, the atom that is in excited state is very unstable, approximately 8
-10Behind the s, atom namely returns to normal condition, can transition return ground state or other lower energy level, transit to from the track far away from atomic nucleus from the track process of atomic nucleus close at electronics, can discharge unnecessary energy, this unnecessary energy radiates with the form of light, produce emission spectrum, because intraatomic electron trajectory is discontinuous, quantized again, therefore the spectrum that obtains is line spectrum.The atomic structure of the various elements of component is different simultaneously, and the spectrum of its generation is also just different, namely is that the atom of each element has own distinctive characteristic light spectral line.
Under certain condition, the power of characteristic light spectral line is relevant with the content of its tested element, by measuring the intensity of elemental characteristic spectrum line, just can examine and determine the content of element like this.
By nonconducting dielectric barrier is set between two electrodes, so that atomic emission spectrum under atmospheric pressure occurs the gas to be measured between this dielectric barrier, and make in the whole electrode scope by dielectric barrier and to have Uniform Discharge, make discharge energy stable.Analyze emission spectrum by data processor and get final product the volumetric concentration that qualitative, quantitative calculates each single element gas in the gas to be measured.
Because electrode makes all gas generation emission spectrum to be measured in zone between the dielectric barrier, so that this device can be realized the continuous coverage to multiple single element gas concentration; Can realize simultaneously the measurement of the volume concentration of gas phase from the low concentration to the high concentration; The utility model is simple in structure, and is easy to use, and low cost of manufacture, and long working life can directly under atmospheric pressure be moved, during operation between the gas without the phase mutual interference, measuring accuracy is high.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the schematic diagram of the utility model measurement mechanism.
Embodiment
Further describe the utility model below in conjunction with specific embodiment and accompanying drawing.
A kind of as shown in Figure 1 many gas concentrations qualitative, quantitative measurement mechanism comprises two mutual parallel dielectric barrier discharge layers, on the surface that this two dielectric barrier discharges layer deviates from mutually, establish respectively a relative and parallel electrode 41, an electrode 41 connecting media barrier discharge power supplys 5 wherein, another electrode 41 ground connection 6; Over against a spectrometer 2 is arranged, this spectrometer 2 connects a data processor 1 on zone 33 between the relative dielectric barrier discharge layer of described two electrodes 41.
The utility model mainly is as the basis take the atomic emission spectrometry principle, by the dielectric barrier discharge layer so that electrode 41 has uniform discharge in whole electrode scope, make discharge energy stable, and then so that between the described two dielectric barrier discharge layers gas to be measured in zone 33 stable various atomic emission spectrums occur, scanned by 2 pairs of these various atomic emission spectrums of spectrometer, by data processor the light intensity of each the corresponding emission spectrum in the spectrometer 2 is inquired about, can calculate the volumetric concentration of each single element gas in the gas to be measured qualitative, quantitative.
Particularly, see Fig. 1, described many gas concentrations qualitative, quantitative measurement mechanism comprises two mutual parallel dielectric barrier discharge layers, the dielectric barrier discharge layer that this is parallel to each other is one to have the opposing sidewalls of the air chamber 3 of air intake opening 31 and gas outlet 32, the manufactured materials of this air chamber 3 is made less than or equal to 0.005% high purity quartz by iron-holder, be non-conductive medium, namely be air chamber 3 two opposite side walls directly made less than or equal to 0.005% high purity quartz with iron-holder as the dielectric barrier discharge layer, save manufacturing cost.On the outside surface of these air chamber 3 two opposite side walls, set up respectively parallel electrode 41, that is to say that described two parallel electrodes 41 are located on the outside surface of described air chamber 3 opposing sidewalls, wherein an electrode 41 is connected with described dielectric barrier discharge power supply 5 by cable 51, this dielectric barrier discharge power supply 5 is preferably the high-frequency sine-wave power, and another electrode 41 is by cable 51 ground connection 6; On the zone between the relative air chamber 3 of described two electrodes 41 over against a spectrometer 2 is arranged, this spectrometer 2 by the optical fiber 21 that is attached thereto over against the zone between the relative air chamber 3 of described two electrodes 41, it scans the gas wavelength emission spectrum to be measured between the air chamber 3, measures the light intensity of each wave spectrum.Described spectrometer 2 connects a data processor 1 by signal cable 11, this data processor 1 is by the light intensity of each gas character pair spectrum in the inquiry spectrometer 2, can qualitative, quantitative calculate the volumetric concentration of each single element gas in the gas to be measured, described data processor 1 is such as microprocessor etc.
Electrode 41 in this example is made such as gold, copper etc. by precious metal.And as the direct barrier discharge power supply 5 of preferred high-frequency sine-wave power conduct, frequency is 70KHz.
Using method for this measurement mechanism: gas to be measured is entered from the air intake opening 31 of air chamber 3 continuously, then from the gas outlet 32 out, open dielectric barrier discharge power supply 5 so that electrode 41 normal operations, two electrodes 41 pass through dielectric barrier discharge with gas to be measured therebetween, produce multi-wavelength's emission spectrum, emission spectrum by the spectrometer 2 pair various wavelength relative with this zone scans, and measure the light intensity of the emission spectrum of each wavelength, at last by with data processor 1 inquiry spectrometer 2 that spectrometer 2 is connected by signal cable 11 in the light intensity of the corresponding emission spectrum of each gas, calculate the volumetric concentration content of each single element gas in the gas to be measured with coming qualitative, quantitative.
For spectrometer 2, it mainly scans the wavelength in 200nm～850nm scope, measures the light intensity of each wave spectrum.
The above technical scheme that the utility model embodiment is provided is described in detail, used specific case herein principle and the embodiment of the utility model embodiment are set forth, the explanation of above embodiment is only applicable to help to understand the principle of the utility model embodiment; Simultaneously, for one of ordinary skill in the art, according to the utility model embodiment, all will change on embodiment and range of application, in sum, this description should not be construed as restriction of the present utility model.
Claims (6)
1. the measurement mechanism of gas concentration qualitative, quantitative more than a kind, it is characterized in that: comprise two mutual parallel dielectric barrier discharge layers, on the surface that this two dielectric barrier discharges layer deviates from mutually, establish respectively a relative and parallel electrode, an electrode connecting media barrier discharge power supply wherein, another electrode grounding; Over against a spectrometer is arranged, this spectrometer connects a data processor on zone between the relative dielectric barrier discharge layer of described two electrodes.
2. many gas concentrations qualitative, quantitative measurement mechanism according to claim 1, it is characterized in that: described two mutual parallel dielectric barrier discharge layers are one to have the opposing sidewalls of the air chamber of air intake opening and gas outlet, and described two parallel electrodes are located on the outside surface of this air chamber opposing sidewalls.
3. many gas concentrations qualitative, quantitative measurement mechanism according to claim 1 is characterized in that: described spectrometer by the optical fiber that is attached thereto over against zone between the relative dielectric barrier discharge layer of described two electrodes.
4. many gas concentrations qualitative, quantitative measurement mechanism according to claim 1 is characterized in that: described electrode is connected with described dielectric barrier discharge VDD-to-VSS by cable respectively; Described data processor is connected with described spectrometer by signal cable.
5. many gas concentrations qualitative, quantitative measurement mechanism according to claim 2, it is characterized in that: described air chamber is made less than or equal to 0.005% high purity quartz by iron-holder.
6. many gas concentrations qualitative, quantitative measurement mechanism according to claim 1 is characterized in that: described dielectric barrier discharge power supply is the high-frequency sine-wave power.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220384230 CN202720191U (en) | 2012-08-04 | 2012-08-04 | Qualitative and quantitative measurement device of concentration of multiple gases |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220384230 CN202720191U (en) | 2012-08-04 | 2012-08-04 | Qualitative and quantitative measurement device of concentration of multiple gases |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202720191U true CN202720191U (en) | 2013-02-06 |
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|---|---|---|---|
| CN 201220384230 Expired - Lifetime CN202720191U (en) | 2012-08-04 | 2012-08-04 | Qualitative and quantitative measurement device of concentration of multiple gases |
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|---|---|
| CN (1) | CN202720191U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809553A (en) * | 2012-08-04 | 2012-12-05 | 重庆特瑞尔分析仪器有限公司 | Multi-gas concentration qualitative quantitative measuring device and measuring method thereof |
-
2012
- 2012-08-04 CN CN 201220384230 patent/CN202720191U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809553A (en) * | 2012-08-04 | 2012-12-05 | 重庆特瑞尔分析仪器有限公司 | Multi-gas concentration qualitative quantitative measuring device and measuring method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130206 |