CN202668359U - Polishing machine with polishing solution cycle recycling device - Google Patents

Polishing machine with polishing solution cycle recycling device Download PDF

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Publication number
CN202668359U
CN202668359U CN 201220248910 CN201220248910U CN202668359U CN 202668359 U CN202668359 U CN 202668359U CN 201220248910 CN201220248910 CN 201220248910 CN 201220248910 U CN201220248910 U CN 201220248910U CN 202668359 U CN202668359 U CN 202668359U
Authority
CN
China
Prior art keywords
polishing
solution
polishing machine
recycling device
polishing fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220248910
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Chinese (zh)
Inventor
冷志红
蔡灵玲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KUNSHAN MINGBEN PHOTOELECTRIC CO Ltd
Original Assignee
KUNSHAN MINGBEN PHOTOELECTRIC CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KUNSHAN MINGBEN PHOTOELECTRIC CO Ltd filed Critical KUNSHAN MINGBEN PHOTOELECTRIC CO Ltd
Priority to CN 201220248910 priority Critical patent/CN202668359U/en
Application granted granted Critical
Publication of CN202668359U publication Critical patent/CN202668359U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a polishing machine with a polishing solution cycle recycling device, which comprises a polishing machine body and a solution outlet formed in the bottom at the rear end of the polishing machine body; the solution outlet is connected with the polishing solution cycle recycling device through a solution outlet pipe; the polishing solution cycle recycling device comprises a triangular support and a solution receiving barrel; a hopper is placed on the triangular support; a seal cover is arranged at the upper end of the solution receiving barrel; a solution inlet is formed in the seal cover; a motor is fixedly mounted on the seal cover; the other end of the solution outlet pipe is connected onto the upper part of the hopper; the bottom of the hopper is connected with the solution inlet through a pipeline; the bottom end of the motor is connected with a solution return pipe; and the other end of the solution outlet pipe is connected to a solution feeding device above an upper die of the polishing machine. The polishing solution discharged from the polishing machine is screened and filtered by the polishing machine, and the filtered polishing solution is pumped in a solution feeding mechanism of the polishing machine, so that the recycling of the polishing solution is finished, resource waste is reduced, and the cleanness of a processing workpiece is improved.

Description

Polishing machine with polishing fluid recycling device
Technical field:
The utility model relates to a kind of polishing machine, relates in particular to a kind ofly can will carry out the polishing machine with polishing fluid recycling device of recycling after the polishing fluid sieving.
Background technology:
When we carry out the polishing process processing to the wave filter wafer, what adopt all is polishing machine on original market of outsourcing, this polishing machine comprises upper die and lower die, patrix is the polishing panel, counterdie is rotational area, when wafer is carried out polishing, need to polishing fluid be transported to the upper and lower mould processing district by the feed liquor mechanism that is used for flowing out polishing fluid on the polishing machine, the polishing fluid that flows out from polishing area is that the liquid outlet through bottom, polishing machine rear end flows out, and at present, the polishing fluid that flows out for this liquid outlet is directly to get rid of, like this, not only waste a large amount of resources, simultaneously, the environment in the workplace has also been caused very large pollution.
Summary of the invention:
The technical problem that the utility model solves provides the above-mentioned technological deficiency of a kind of solution and reaches and take full advantage of resource, avoids the polishing machine with polishing fluid recycling device of the wasting of resources.
The technical scheme in the invention for solving the technical problem is: a kind of polishing machine with polishing fluid recycling device, comprise polishing machine body and the liquid outlet that is arranged on bottom, polishing machine body rear end, described liquid outlet connects polishing fluid by drain pipe and loops back receiving apparatus, and this polishing fluid loops back receiving apparatus and comprises tripod and receive the liquid bucket; Be placed with funnel on the described tripod; The upper end of described receipts liquid bucket is provided with capping, offers inlet in described capping, and is installed with motor in described capping; The other end of described drain pipe is connected to the funnel top, and the bottom of funnel is connected to inlet by pipeline, and the bottom of described motor connects liquid back pipe, and the other end of this liquid back pipe is connected to the feed liquor mechanism of polishing machine patrix top.
Further, process for polishing fluid being carried out sieving, improve the quality of polishing fluid, the top of described funnel is placed with screen frame, and the other end of described drain pipe is arranged on the top of screen frame.
The beneficial effects of the utility model are: after this retracting device carries out sieving with the polishing fluid of discharging in the polishing machine, with the polishing fluid after filtering again be withdrawn into feed liquor mechanism on the polishing machine, finish the recycling of polishing fluid, reduced the wasting of resources, and improved the cleannes of job shop.
Description of drawings:
Below in conjunction with accompanying drawing the utility model is further specified.
Fig. 1 is the schematic diagram of the utility model structure;
Fig. 2 loops back the receiving apparatus schematic diagram in the utility model.
Among the figure: 1, polishing machine body 2, liquid outlet 3, drain pipe 4, screen frame 5, funnel 6, tripod 7, receipts liquid bucket 71, capping 72, inlet 8, motor 9, liquid back pipe.
The specific embodiment:
A kind of polishing machine with polishing fluid recycling device as illustrated in fig. 1 and 2, comprise polishing machine body 1 and the liquid outlet 2 that is arranged on bottom, polishing machine body 1 rear end, and be used for to injecting the feed liquor mechanism (not marking) of polishing fluid in the processing, this feed liquor mechanism is arranged on the top of polishing machine patrix, described liquid outlet 2 connects polishing fluid by drain pipe 3 and loops back receiving apparatus, and this polishing fluid loops back receiving apparatus and comprises tripod 6 and receive liquid bucket 7; Be placed with funnel 5 on the described tripod 6; The upper end of described receipts liquid bucket 7 is provided with capping 71, offers inlet 72 in described capping 71, and is installed with motor 8 in described capping 71; The other end of described drain pipe 3 is connected to the funnel top, and the bottom of funnel 5 is connected to inlet 72 by pipeline, and the bottom of described motor 8 connects liquid back pipe 9, and the other end of this liquid back pipe 9 is connected to the feed liquor mechanism of polishing machine patrix top.
Further, process for polishing fluid being carried out sieving, improve the quality of polishing fluid, the top of described funnel 8 is placed with screen frame 4, and the other end of described drain pipe 3 is arranged on the top of screen frame 4.
The polishing fluid of this retracting device to flowing out from liquid outlet 2 in the polishing machine, polishing fluid is by after the drain pipe 3, again by screen frame 4 sievings, polishing fluid is received in the liquid bucket 7 through entering into behind the funnel 5, afterwards, the polishing fluid after will filtering by motor 8 again be withdrawn into feed liquor mechanism on the polishing machine, finish the recycling of polishing fluid, reduce the wasting of resources, and improved the cleannes of job shop.
It is emphasized that, it more than is better implementation column of the present utility model, be not that this utility model is done any type of restriction in appearance, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment does.

Claims (2)

1. polishing machine with polishing fluid recycling device, comprise polishing machine body (1) and be arranged on the liquid outlet (2) of polishing machine body (1) rear end bottom, it is characterized in that: described liquid outlet (2) connects polishing fluid by drain pipe (3) and loops back receiving apparatus, and this polishing fluid loops back receiving apparatus and comprises tripod (6) and receive liquid bucket (7); Be placed with funnel (5) on the described tripod (6); The upper end of described receipts liquid bucket (7) is provided with capping (71), offers inlet (72) in described capping (71), and is installed with motor (8) in described capping (71); The other end of described drain pipe (3) is connected to the funnel top, the bottom of funnel (5) is connected to inlet (72) by pipeline, the bottom of described motor (8) connects liquid back pipe (9), and the other end of this liquid back pipe is connected to the feed liquor mechanism of polishing machine patrix top.
2. the polishing machine with polishing fluid recycling device according to claim 1, it is characterized in that: the top of described funnel (5) is placed with screen frame (4), and the other end of described drain pipe (3) is arranged on the top of screen frame (4).
CN 201220248910 2012-05-30 2012-05-30 Polishing machine with polishing solution cycle recycling device Expired - Fee Related CN202668359U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220248910 CN202668359U (en) 2012-05-30 2012-05-30 Polishing machine with polishing solution cycle recycling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220248910 CN202668359U (en) 2012-05-30 2012-05-30 Polishing machine with polishing solution cycle recycling device

Publications (1)

Publication Number Publication Date
CN202668359U true CN202668359U (en) 2013-01-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220248910 Expired - Fee Related CN202668359U (en) 2012-05-30 2012-05-30 Polishing machine with polishing solution cycle recycling device

Country Status (1)

Country Link
CN (1) CN202668359U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103372805A (en) * 2013-07-12 2013-10-30 中国科学院上海光学精密机械研究所 Large immersion type ring polishing machine
CN109732438A (en) * 2019-01-24 2019-05-10 泉州市友腾光电科技有限公司 A kind of good miniature stick mirror plane ring polishing apparatus of polishing effect

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103372805A (en) * 2013-07-12 2013-10-30 中国科学院上海光学精密机械研究所 Large immersion type ring polishing machine
CN103372805B (en) * 2013-07-12 2015-06-17 中国科学院上海光学精密机械研究所 Large immersion type ring polishing machine
CN109732438A (en) * 2019-01-24 2019-05-10 泉州市友腾光电科技有限公司 A kind of good miniature stick mirror plane ring polishing apparatus of polishing effect

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130116

Termination date: 20130530