CN202657950U - Real-time color dynamic regulation and control micro-device - Google Patents
Real-time color dynamic regulation and control micro-device Download PDFInfo
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- CN202657950U CN202657950U CN 201220297747 CN201220297747U CN202657950U CN 202657950 U CN202657950 U CN 202657950U CN 201220297747 CN201220297747 CN 201220297747 CN 201220297747 U CN201220297747 U CN 201220297747U CN 202657950 U CN202657950 U CN 202657950U
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Abstract
The utility model discloses a real-time color dynamic regulation and control micro-device. A synchrotron radiation light source is utilized to prepare a PMMA (polymethylmethacrylate) two-dimensional microstructure array with high depth-to-width ratio on a platinum layer, direct current magnetron sputtering is utilized to deposit a lead zirconate titanate thin film layer in a microstructure, a nano-metal chromium layer with high reflectivity is deposited at the top of the microstructure, an upper reflection layer and a lower reflection layer with height difference are formed, the height difference between the two reflection layers can be controlled in a real-time manner by changing the voltage between platinum and chromium, then the device can show different colors under natural light conditions, and dynamic regulation and control of the colors can be realized. The real-time color dynamic regulation and control micro-device disclosed by the utility model can break through the restriction of the traditional microstructure array on fixed size in the depth direction, utilize the converse piezoelectric effect of a piezoelectric thin film material, realize the real-time control of the depth changes of the microstructure by only changing external voltage, further realize the real-time dynamic regulation and control of a variety of pigment-free colors and be in line with a green and environment-friendly theme, and is expected to be widely applied in optics, material science, printing industry, building industry and other fields.
Description
Technical field
The utility model relates to
OnePlant real-time color dynamic regulation micro element.
Background technology
In order to break through the application limitation of color pigment, unpigmented color control technique has been subject to people's extensive concern, in recent years develop rapidly, and principle is also varied.Along with micro-structural, particularly the preparation technology of micro-nano oldered array material reaches its maturity, it utilizes micro-structural to realize that the color regulation and control have become the main flow scheme without the paint color control technique in the unique function that the aspects such as optics, electricity, magnetics and mechanics represent in addition.At present, utilize micro-structural to realize that the research of color regulation and control has a lot, but in non-solution situation, because the micro structure array size is immutable, a kind of micro structure array of size can only corresponding a kind of specific color, realize multiple color, must repeat the processing of the micro-structural of different size.This has not only increased the complexity that color is realized, has more greatly limited the scope of application.Lead zirconate titanate (PZT) is a kind of piezoelectric of function admirable, has preferably ferroelectric, piezoelectricity, pyroelectricity, acousto-optic performance, is widely used in the aspects such as non-volatility ferroelectric memory, microsensor, microactrator, minute-pressure electricity ultrasonic imaging transducer.As microsensor or microactrator, the PZT piezoelectric film material is widely used in its obvious advantage and just is its high power output density take inverse piezoelectric effect as driving force, namely when not being very high, just can obtain larger power stage at driving voltage.But for nano-grade size, the deformation quantity of PZT is very little, directly uses lead zirconat-titanato material to prepare micro-structural meaning and little.
, micro nano structure array technology of preparing and piezoelectric material film technology of preparing are combined for this reason, in having than the micro structure array of high-aspect-ratio, fill certain thickness piezoelectric material film.A kind of or several regulation and control color corresponding wavelength on chromaticity diagram by expection, according to model configuration, calculate respectively the required optical path difference corresponding with color, and then the distance between the upper surface of definite piezoelectric membrane and the micro-structural upper surface, by the external voltage between the control voltage film two end electrodes, the elongation of fine adjustment piezoelectric membrane is realized micro structure array real-time transform dimensionally, thereby finishes the dynamic regulation of color.This technical method is novel, and the color control strong operability is expected to the information age at development, become that preparation information shows and light transmit in the another new approach of optics and photoelectric cell.For the fields such as Chinese national economy and social development, science and technology and national defence contribute.
Summary of the invention
The purpose of this utility model is to fill up the vacancy of prior art, and a kind of real-time color dynamic regulation micro element is provided.
Real-time color dynamic regulation micro element comprises titanium substrate, platinum layer, polymethyl methacrylate (PMMA) micro structure array, PZT thin film layer, chromium nanometer layer, positive electrode, negative electrode, control power supply; Sputter platinum layer on the titanium substrate; Prepare the polymethyl methacrylate micro structure array with synchrotron radiation light source on the platinum layer; Magnetron sputtering PZT thin film layer in the polymethyl methacrylate micro structure array; In polymethyl methacrylate micro structure array and sputter chromium nanometer layer above the PZT thin film layer; Positive electrode and negative electrode from chromium nanometer layer and platinum layer, draw respectively and and control power supply and link to each other; Along with the voltage change of control power supply output, the thickness of PZT thin film layer changes, and changes from the optical path difference of polymethyl methacrylate micro structure array upper surface and PZT thin film layer upper surface two-beam out, thereby causes the change of color.
The utility model combines synchrotron radiation micro structure array process technology and piezoelectric material film technology of preparing, its advantage is by structural design cleverly, utilize the inverse piezoelectric effect of piezoelectric film material, no longer pass through the parameter of technique in the controlled working process itself, but transfer the external voltage that changes after processing to, realized the real-time control of micro structure array on depth direction, broken through the fixing restriction of traditional micro structure array depth direction size, theoretical in conjunction with Bragg reflection and Maxwell-Garnett, propose the unpigmented color control scheme of system complete, realized the real-time dynamic regulation of multicolour.The method be expected to become preparation information shows and the light transmission in the another new approach of optics and photoelectric cell, and the micro element in the pertinent instruments such as laser instrument, integrated optical circuit, optic communication, optical interconnection, photometry calculation, optical Information Processing is brought into play significant role in processing.
Description of drawings
Fig. 1 is the micro element structure chart of dynamic regulation color in real time;
Fig. 2 adopts synchrotron radiation micro structure array technology of preparing and piezoelectric material film process technology to prepare the flow chart of micro element;
The real-time dynamic regulation color approach of Fig. 3 key diagram;
Among the figure: titanium substrate 1, platinum layer 2, PMMA micro structure array 3, PZT thin film layer 4, chromium nanometer layer 5, positive electrode 6, negative electrode 7, control power supply 8.
The specific embodiment
The utility model combines micro structure array process technology and piezoelectric material film technology of preparing, having prepared one can be by changing the two-dimentional micro structure array device of the real-time regulation depth direction of external control voltage size, while is according to the wavelength of regulation and control look correspondence on chromaticity diagram of expection, theoretical in conjunction with inverse piezoelectric effect, Bragg reflection theory and Maxwell-Garnett, by calculating, certain or multiple regulation and control look and the required external voltage of expection are mapped mutually, thereby by changing applied voltage, realize the in real time dynamically control of color.
As shown in Figure 1, real-time color dynamic regulation micro element comprises titanium substrate 1, platinum layer 2, polymethyl methacrylate micro structure array 3, PZT thin film layer 4, chromium nanometer layer 5, positive electrode 6, negative electrode 7, control power supply 8; Sputter platinum layer 2 on the titanium substrate 1; Prepare polymethyl methacrylate micro structure array 3 with synchrotron radiation light source on the platinum layer 2; At polymethyl methacrylate micro structure array 3 interior magnetron sputtering PZT thin film layers 4; In polymethyl methacrylate micro structure array 3 and sputter chromium nanometer layer 5 above the PZT thin film layer 4; Positive electrode 6 and negative electrode 7 from chromium nanometer layer 5 and platinum layer 2, draw respectively and and control power supply 8 and link to each other; Voltage change along with 8 outputs of control power supply, the thickness of PZT thin film layer 4 changes, change from the optical path difference of polymethyl methacrylate micro structure array 3 upper surfaces and PZT thin film layer 4 upper surface two-beam out, thereby cause the change of color.
Figure 2 shows that and adopt synchrotron radiation micro structure array technology of preparing and piezoelectric material film process technology, the flow process of preparation real-time color dynamic regulation micro element, its concrete steps are as follows:
1) selects titanium substrate 1 to do substrate, adopt dc magnetron sputtering method to deposit the platinum layer 2 of 0.3um as the hearth electrode of lead zirconate titanate at smooth titanium substrate 1, draw an electrode as negative electrode 7;
2) enclose the gasket ring that thickness is 10um on platinum layer 2 surfaces, pour the polymethyl methacrylate of 6 mg benzoyl peroxide initators into, in the methyl methacrylate mixed solution, the weight ratio of polymethyl methacrylate and methyl methacrylate is 3:7, and with cover plate mixed solution is covered, weight-adding hammer is pushed down, put into the baking oven heating, slowly be heated to 100 ℃, keep more than 5 hours, make the crosslinked and curing under the effect of initator of polymethyl methacrylate and methyl methacrylate, after full cross-linked, again temperature is slowly dropped to room temperature, weight and pressing plate are taken off, and the thickness that acquisition sticks to the titanium substrate 1 of surperficial platinum plating is the polymethyl methacrylate photoresist of 10um;
3) adopt subsequently synchrotron radiation light source to carry out X-ray lithography, wherein mask plate is big or small 20mm * 20mm, and the cycle is the chessboard type structure of 6um, and obtaining depth-to-width ratio is the polymethyl methacrylate micro structure array 3 of 10:3;
4) on polymethyl methacrylate micro structure array 3, use original mask plate and utilize AZ glue photoetching process, make the photoresist exposure that is deposited on array surface, and then remove the photoresist that is deposited on the array bottom with developer solution;
5) in the situation of the photoresist of the exposure of flush away not, again adopt dc magnetron sputtering method, PZT thin film layer 4 at two-dimentional micro structure array deposition 9.5um, target is pressed the prescription of Pb (Zr0.52Ti0.48) O3, the pure PbO of Analysis about Selection, Zr02, Ti02 is raw material, wherein PbO excessive 20%, mix through ball milling, briquetting, pre-burning 2 h under 800 ℃ of temperature, and then pulverize, long-time ball milling, mix cold-press moulding behind the polyvinyl alcohol, sintering 2 h make ceramic block target under 1200 ℃ of temperature, after sputter is finished, 20min anneals rapidly under 600 ~ 700 ℃ high temperature, soak device with washing glue after the annealing, and that layer bottom, ultrasonic removal micro structure array surface be with the lead zirconate titanate membrane of exposed photoresist, thus height of formation poor be 500nm about two-layer reflecting layer, the reflecting layer, upper strata is polymethyl methacrylate, and the lower floor reflecting layer is lead zirconate titanate;
6 at the light volume reflection of the thick high reflectance chromium nanometer layer 5 of polymethyl methacrylate micro structure array 3 upper surface sputter one deck 10nm with balanced two reflecting layer, and draw an electrode as positive electrode 6 from the chromium layer.
Real-time color dynamic regulation method is: at first a kind of the or several regulation and control color corresponding wavelength on chromaticity diagram by expection carries out structural simulation, theoretical in conjunction with inverse piezoelectric effect, Bragg's condition of reflection and Maxwell-Garnett, calculate corresponding with it polymethyl methacrylate micro structure array 3 upper surfaces and the difference in height of PZT thin film layer 4 upper surface, and then the needed extraneous control voltage of one or more regulation and control colors that obtain this expection, thereby by changing applied voltage, realize the in real time dynamically control of color.
Figure 3 shows that the schematic diagram of real-time dynamic regulation color.By expectations of control look corresponding wavelength on chromaticity diagram, according to model configuration, as shown in Figure 1, calculate the corresponding with it up and down difference in height on two surfaces.Computing formula is as follows:
2ndcosθ=mλ （1）
N is the effective refractive index of plated film rete and loose structure film system, and d is hole depth (difference in height on two surfaces namely), and θ is incidence angle, and λ is wavelength, and m is integer; For piezoelectric, the deformation quantity behind the making alive has following computing formula:
t=d
33×U （2）
T is the deformation quantity on polarised direction behind the piezoelectric making alive, d
33Be contrary piezoelectric constant, U is added voltage on polarised direction, and therefore the difference in height on two surfaces is up and down
d=500- t （3）
Can calculate the required external world's control voltage of one or more regulation and control colors of expection according to formula listed above, thereby by changing the voltage between platinum, the chromium, the elongation of control PZT, adjust in real time the size of micro structure array on depth direction, thereby make device under the natural daylight condition, present different colors, realize the color dynamic regulation based on synchrotron radiation micro-structural process technology and piezoelectric material film technology of preparing.
Claims (1)
1. a real-time color dynamic regulation micro element is characterized in that comprising titanium substrate (1), platinum layer (2), polymethyl methacrylate micro structure array (3), PZT thin film layer (4), chromium nanometer layer (5), positive electrode (6), negative electrode (7), control power supply (8); The upper sputter platinum layer (2) of titanium substrate (1); Platinum layer (2) is upper to prepare polymethyl methacrylate micro structure array (3) with synchrotron radiation light source; Magnetron sputtering PZT thin film layer (4) in polymethyl methacrylate micro structure array (3); In polymethyl methacrylate micro structure array (3) and sputter chromium nanometer layer (5) above the PZT thin film layer (4); Positive electrode (6) and negative electrode (7) from chromium nanometer layer (5) and platinum layer (2), draw respectively and and control power supply (8) and link to each other; Voltage change along with control power supply (8) output, the thickness of PZT thin film layer (4) changes, change from the optical path difference of polymethyl methacrylate micro structure array (3) upper surface and PZT thin film layer (4) upper surface two-beam out, thereby cause the change of color.
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| CN 201220297747 CN202657950U (en) | 2012-06-25 | 2012-06-25 | Real-time color dynamic regulation and control micro-device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102730624A (en) * | 2012-06-25 | 2012-10-17 | 浙江大学 | Real-time dynamic color regulation and control micro device, method for preparing micro device and real-time dynamic color regulation and control method |
| CN110262118A (en) * | 2019-07-05 | 2019-09-20 | 京东方科技集团股份有限公司 | Array substrate, display device and its display methods |
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2012
- 2012-06-25 CN CN 201220297747 patent/CN202657950U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102730624A (en) * | 2012-06-25 | 2012-10-17 | 浙江大学 | Real-time dynamic color regulation and control micro device, method for preparing micro device and real-time dynamic color regulation and control method |
| CN102730624B (en) * | 2012-06-25 | 2014-11-12 | 浙江大学 | Real-time dynamic color regulation and control micro device, method for preparing micro device and real-time dynamic color regulation and control method |
| CN110262118A (en) * | 2019-07-05 | 2019-09-20 | 京东方科技集团股份有限公司 | Array substrate, display device and its display methods |
| CN110262118B (en) * | 2019-07-05 | 2022-09-09 | 京东方科技集团股份有限公司 | Array substrate, display device and display method thereof |
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Granted publication date: 20130109 Effective date of abandoning: 20141112 |
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