A kind of gas cleaning plant that is applied to solid state laser
[technical field]
The utility model relates to the solid state laser field, particularly a kind of gas cleaning plant that is applied to solid state laser.
[background technology]
In the solid state laser manufacture process; For guaranteeing normally using and prolonging its service life of laser instrument; Generally be employed in the space of high cleaning, carry out the method for encapsulation process, perhaps adopt the method for perfusion nitrogen to guarantee the cleanliness factor requirement in the laser cavity.
But generally be employed in the manufacture process that encapsulation process is carried out in the high cleaning space, still have the factor that can influence the inner clean level of laser instrument, cause pollution, be difficult to the cleanliness factor requirement that reaches desirable laser cavity.Even carried out encapsulation process so in this case, also have trace contaminant and remain in the cavity of laser instrument, make laser instrument have potential failure risk, influence its life length.
[summary of the invention]
The present invention is directed to above problem and proposed especially can realize the high cleaning environment being provided, reach high cleanliness factor laser cavity, thus the gas cleaning plant that prolongs the service life of laser instrument.
Technical scheme of the present invention is: a kind of gas cleaning plant that is applied to solid state laser; The purifier shell that comprises each parts of built-in purifying device; It is characterized in that; The purifier enclosure have with external communications go into tracheae and escape pipe, going into filter and the air pump of tracheae to the multistage difference in functionality that is tightly connected successively between the escape pipe, be used for filtering various dust and the hydrone harmful to laser process.
Filters wherein at different levels are packaged in respectively in the different filter cartridges, and in different filter boxes, are respectively equipped with the different performance screen pack, and dust granules and the hydrone to 0.1-15 μ m carries out classified filtering respectively.
Said air pump is that tight air-tightness is connected with gas outlet linking between the two, connects through tight air-tightness, thereby realizes can not receiving secondary pollution and being provided in the laser cavity used through the gas that purifies.
Beneficial effect of the present invention: this gas cleaning plant; Filter cartridge stage realization height air cleaning through different levels; And gas carried out drying, and further reduce the water in air branch to the issuable influence of solid state laser, be connected with the air-tightness of laser cavity with this purifier then and deliver a gas to laser cavity; Realization circulates to exchange to the laser cavity that seals and purifies; Make laser cavity inner, reach high cleanliness factor, thereby prolonged laser instrument service life.
[description of drawings]
Fig. 1 is a structural representation of the present invention.
Wherein: 1, shell; 2, go into tracheae; 3, first filter; 4, second filter; 5, drying box; 6, air pump; 7, escape pipe.
[specific embodiment]
In order to make the object of the invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with accompanying drawing and embodiment.
A kind of gas cleaning plant that is applied to solid state laser; The purifier shell 1 that comprises each parts of built-in purifying device; It is characterized in that; Have in purifier shell 1 inside with external communications go into tracheae 2 and escape pipe 7, be sealedly connected with filters at different levels successively between the escape pipe 7 going into tracheae 2, in this sketch map, only be provided with first filter 3, second filter 4, drying box 5 and air pump 6; Can also increase the progression of filter in case of necessity again, be used to realize different filtering accuracies.For example, first filter cartridge neutralizes and is respectively equipped with screen pack in second filter cartridge in this structural representation, and the screen pack in first filter cartridge mainly is the dust granules to 1-5 μ m, and the screen pack in second filter cartridge is to the dust granules less than 1 μ m.Air gets into the filter cartridge part through going into tracheae 1; Filter the dust particle of 1-5 μ m earlier through first filter; Filter dust particle through second filter again, embodied the original design motive of this device, stage by stage gas is carried out filtration in various degree for being provided with of filter less than 1 μ m; Filter for the first time and then filter out the bigger dust particle in aperture; For the second time then be the further smaller dust granules of pore size filter on the basis of filtering for the first time, then through drying box (hydrone filter) drying, dry back humidity can reach below 10%.See gas off through the gas outlet by air pump at last.Producing, use, all can use when keeping in repair, the gas circulation utilization economizes on resources.
Said air pump is that tight air-tightness is connected with gas outlet linking between the two, connects through tight air-tightness, thereby realizes can not receiving secondary pollution and being provided in the laser cavity used through the gas that purifies.
This purifier can be applicable in the production process that laser instrument makes, in the maintenance process, and in the real time execution process of laser instrument.Make that solid state laser is inner to keep clean, prolong laser instrument service life.