CN202610398U - Silicon stick cleaning device - Google Patents
Silicon stick cleaning device Download PDFInfo
- Publication number
- CN202610398U CN202610398U CN 201220201733 CN201220201733U CN202610398U CN 202610398 U CN202610398 U CN 202610398U CN 201220201733 CN201220201733 CN 201220201733 CN 201220201733 U CN201220201733 U CN 201220201733U CN 202610398 U CN202610398 U CN 202610398U
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- CN
- China
- Prior art keywords
- silicon rod
- slide block
- guide rail
- silicon stick
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Silicon Compounds (AREA)
- Cleaning In General (AREA)
Abstract
The utility model relates to a silicon stick cleaning device which comprises a cleaning tank body, wherein a silicon stick supporting device is arranged on the inner wall of the bottom of the tank body; the supporting device comprises a guide rail and two sliders arranged on the guide rail; and the distance between the two sliders is less than or equal to the length of the silicon stick. The silicon stick cleaning device provided by the utility model has the advantages that the cleaning device is simple in structure and is convenient for use, and the silicon stick surface area surrounded by a cleaning solution is the maximum possibly, and no bump can appear on the surface of the silicon stick, so that the fragmentation rate of the follow-up fragmentation process is reduced, and the production cost is reduced.
Description
Technical field
The utility model relates to crystalline silicon and cleans and the accessory design field, the bracing or strutting arrangement when especially a kind of silicon rod cleans.
Background technology
Behind the silicon crystal of having grown, earlier the right cylinder crystal is cut flaw-piece usually and form the fillet rectangular parallelepiped, afterwards this rectangular parallelepiped is used the line cutting and be made into the thin silicon sheet.General, there is affected layer on the fillet rectangular parallelepiped silicon rod surface that has just cut flaw-piece, and during online cutting, affected layer can spread the fragmentation rate that causes the thin silicon sheet to be increased.Therefore, before the online cutting, generally need clean silicon rod, remove its surperficial affected layer with chemical corrosion liquid.Its process is to be put in the container silicon rod is horizontal, pours corrosive fluid into and cleans.Can both be cleaned preferably for each surface that makes silicon rod, silicon rod does not contact with container bottom, but is placed on the bracing or strutting arrangement of container bottom.Bracing or strutting arrangement commonly used is the platform of two projections, supports whole silicon rod through holding the silicon rod part.But there is a defective in this bracing or strutting arrangement, and promptly the part of silicon rod and contact with platform can't be corroded to, and after cleaning, can form salient point, in the subsequent slice process, increases fragmentation rate.
The utility model content
The technical problem that the utility model will solve is: a kind of silicon rod washing unit is provided, can produces the problem of salient point after cleaning in order to the solution silicon rod.
The utility model solves the technical scheme that its technical problem adopted: a kind of silicon rod washing unit; Comprise the cleaning cell body; The bottom interior wall of described cell body is provided with the silicon rod bracing or strutting arrangement; Described bracing or strutting arrangement comprises guide rail and is arranged on two slide blocks on the guide rail that the distance between described two slide blocks is smaller or equal to the length of silicon rod.
Specifically, the described slide block of the utility model is the triangular prism slide block, and the cross section of slide block is right angle, acute angle or obtuse triangle; The surface that described slide block contacts with cell body is the plane, and two faces of all the other of slide block are plane or cambered surface.
The described slide block of the utility model moves horizontally on guide rail, is fixed on the guide rail through screw.
The beneficial effect of the utility model is; Solved the defective that exists in the background technology, this apparatus structure is simple, and is easy to use; It is maximum as far as possible to make silicon rod be cleaned the surface-area that liquid surrounds; The silicon rod surface salient point can not occur simultaneously, has reduced the fragmentation rate of subsequent slice process, thereby has reduced production costs.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the structural representation of the preferred embodiment of the utility model;
Among the figure: 1, scavenging solution, 2, silicon rod, 3, cell body, 4, slide block, 5, guide rail.
Embodiment
Combine accompanying drawing and preferred embodiment that the utility model is done further detailed explanation now.These accompanying drawings are the synoptic diagram of simplification, the substruction of the utility model only is described in a schematic way, so it only show the formation relevant with the utility model.
A kind of silicon rod washing unit as shown in Figure 1 comprises and cleans cell body 3, and the bottom interior wall of cell body 3 is provided with guide rail 5 and is arranged on the guide rail distance between 4, two slide blocks 4 of two slide blocks smaller or equal to the length of silicon rod 3.
Slide block 4 can be fastened on the guide rail 5 through retaining screw according to silicon rod 2 length shift position on guide rail 5 then.
Slide block is the triangular prism slide block, and the trilateral bottom surface of slide block is a right-angle triangle, and in addition, the surface that triangular prism contacts with rinse bath is the plane, and remaining surface is the plane also.When cleaning, measure silicon rod length earlier, according to the distance between two slide blocks of silicon rod length adjustment, and fix with screw.Silicon rod is placed on the stationary installation gently, pours the scavenging solution cleaning into and get final product.
The just embodiment of describing in the above specification sheets of the utility model; The various fleshes and bloods that illustrate not the utility model constitute restriction; Under the those of ordinary skill of technical field after having read specification sheets can to before described embodiment make an amendment or be out of shape, and do not deviate from the essence and the scope of utility model.
Claims (3)
1. silicon rod washing unit; Comprise the cleaning cell body; It is characterized in that: the bottom interior wall of described cell body is provided with the silicon rod bracing or strutting arrangement, and described bracing or strutting arrangement comprises guide rail and be arranged on two slide blocks on the guide rail that the distance between described two slide blocks is smaller or equal to the length of silicon rod.
2. silicon rod washing unit as claimed in claim 1 is characterized in that: described slide block is the triangular prism slide block, and the cross section of slide block is right angle, acute angle or obtuse triangle; The surface that described slide block contacts with cell body is the plane, and two faces of all the other of slide block are plane or cambered surface.
3. silicon rod washing unit as claimed in claim 1 is characterized in that: described slide block moves horizontally on guide rail, is fixed on the guide rail through screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220201733 CN202610398U (en) | 2012-05-07 | 2012-05-07 | Silicon stick cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220201733 CN202610398U (en) | 2012-05-07 | 2012-05-07 | Silicon stick cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202610398U true CN202610398U (en) | 2012-12-19 |
Family
ID=47344110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220201733 Expired - Fee Related CN202610398U (en) | 2012-05-07 | 2012-05-07 | Silicon stick cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202610398U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109930205A (en) * | 2017-12-18 | 2019-06-25 | 有研半导体材料有限公司 | A kind of device and method removing silicon single crystal rod surface mechanical damage layer |
-
2012
- 2012-05-07 CN CN 201220201733 patent/CN202610398U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109930205A (en) * | 2017-12-18 | 2019-06-25 | 有研半导体材料有限公司 | A kind of device and method removing silicon single crystal rod surface mechanical damage layer |
| CN109930205B (en) * | 2017-12-18 | 2020-12-29 | 有研半导体材料有限公司 | Device and method for removing mechanical damage layer on surface of single crystal silicon rod |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121219 Termination date: 20180507 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |