CN202579114U - Three-level vacuumizing equipment with molecular pump - Google Patents
Three-level vacuumizing equipment with molecular pump Download PDFInfo
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- CN202579114U CN202579114U CN 201220098033 CN201220098033U CN202579114U CN 202579114 U CN202579114 U CN 202579114U CN 201220098033 CN201220098033 CN 201220098033 CN 201220098033 U CN201220098033 U CN 201220098033U CN 202579114 U CN202579114 U CN 202579114U
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- molecular pump
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Abstract
The utility model discloses three-level vacuumizing equipment with a molecular pump. The three-level vacuumizing equipment comprises a sliding-vane rotary vacuum pump, a roots vacuum pump, a molecular pump and a plurality of air bottle interfaces which are sequentially connected. The three-level vacuumizing equipment has the advantages of low energy consumption, small pollution to a vacuum chamber, environment friendliness, high working efficiency, relatively stable performance and the like.
Description
Technical field:
The utility model relates to a kind of three grades of vaccum-pumping equipments with molecular pump.
Background technique:
Welded insulated gas cylinder is a kind of deep cooling pressurized container that is used to store and transport gases such as low temperature liquid oxygen, liquid nitrogen, liquid argon, and its design temperature is low to reach-196 ℃, and extraneous normal temperature is 20 ℃, so need good cold insulation (thermal insulation) structure.High vacuum multiple layer heat insulation structure is generally acknowledged both at home and abroad at present, the best heat insulating construction of insulation effect.So just need use vaccum-pumping equipment, being evacuated in the space to strengthen insulation effect.What vaccum-pumping equipment of the prior art used is diffusion pump, and the shortcoming of diffusion pump is: volume is big, and energy consumption is high, vacuum chamber is had very heavy oil pollution, not environmental protection, inefficiency, poor stability.Therefore, be necessary to improve.
Summary of the invention:
The goal of the invention of the utility model is to overcome the deficiency of above-mentioned existing technology, provides a kind of volume little, and energy consumption is low, vacuum chamber is polluted three grades of vaccum-pumping equipments of little more environmental protection and high working efficiency, band molecular pump that performance is more stable.
The goal of the invention of the utility model realizes by following technological scheme:
A kind of three grades of vaccum-pumping equipments with molecular pump comprise sliding vane rotary vacuum pump, Roots pump, molecular pump and some cylinder interfaces, and said sliding vane rotary vacuum pump, said Roots pump, said molecular pump and said some cylinder interfaces are connected in turn.
Also be provided with ELECTROMAGNETIC VACUUM band gas charging valve between said sliding vane rotary vacuum pump and the said Roots pump.
Also be provided with butterfly valve, manual push-pull valve and electronic push-pull valve between said Roots pump and the said molecular pump successively.
Also be provided with cold-trap, pneumatic high vacuum flapper valve between molecular pump and the said some cylinder interfaces successively.
Said cylinder interface is provided with vacuum measuring instrument.
Said sliding vane rotary vacuum pump and said Roots pump all are connected with cooling water.
Said cylinder interface is connected with insulated gas cylinder.
The utility model has following advantage with respect to existing technology:
The utility model pollutes little more environmental protection and high working efficiency to vacuum chamber, and uses three grades of configurations because the molecular pump volume is little, and energy consumption is low, makes whole vaccum-pumping equipment change the defective of original vaccum-pumping equipment, and performance is more stable.
Description of drawings:
Fig. 1 is the structural representation of the utility model.
Embodiment:
Referring to Fig. 1; A kind of three grades of vaccum-pumping equipments that provide according to the utility model with molecular pump; Comprise sliding vane rotary vacuum pump 1, Roots pump 2, molecular pump 3 and some cylinder interfaces 4, sliding vane rotary vacuum pump 1, Roots pump 2, molecular pump 3 and some cylinder interfaces 4 are connected in turn.Also be provided with ELECTROMAGNETIC VACUUM band gas charging valve 5 between sliding vane rotary vacuum pump 1 and the Roots pump 2.Also be provided with butterfly valve 6, manual push-pull valve 7 and electronic push-pull valve 8 between Roots pump 2 and the molecular pump 3 successively.Also be provided with cold-trap 9, pneumatic high vacuum flapper valve 10 between molecular pump 3 and the some cylinder interfaces 4 successively.
The foregoing description only supplies to explain the usefulness of the utility model; And be not the restriction to the utility model; The those of ordinary skill in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also be made various variations and modification; Therefore all technological schemes that are equal to also belong to the category of the utility model, and the scope of patent protection of the utility model should be limited each claim.
Claims (7)
1. three grades of vaccum-pumping equipments with molecular pump; It is characterized in that: comprise sliding vane rotary vacuum pump, Roots pump, molecular pump and some cylinder interfaces, said sliding vane rotary vacuum pump, said Roots pump, said molecular pump and said some cylinder interfaces are connected in turn.
2. a kind of according to claim 1 three grades of vaccum-pumping equipments with molecular pump is characterized in that: also be provided with ELECTROMAGNETIC VACUUM band gas charging valve between said sliding vane rotary vacuum pump and the said Roots pump.
3. a kind of according to claim 1 three grades of vaccum-pumping equipments with molecular pump is characterized in that: also be provided with butterfly valve, manual push-pull valve and electronic push-pull valve between said Roots pump and the said molecular pump successively.
4. a kind of according to claim 1 three grades of vaccum-pumping equipments with molecular pump is characterized in that: also be provided with cold-trap, pneumatic high vacuum flapper valve between said molecular pump and the said some cylinder interfaces successively.
5. a kind of according to claim 1 three grades of vaccum-pumping equipments with molecular pump, it is characterized in that: said cylinder interface is provided with vacuum measuring instrument.
6. a kind of according to claim 1 or claim 2 three grades of vaccum-pumping equipments with molecular pump, it is characterized in that: said sliding vane rotary vacuum pump and said Roots pump all are connected with cooling water.
7. like claim 1 or 4 or 5 said a kind of three grades of vaccum-pumping equipments with molecular pump, it is characterized in that: said cylinder interface is connected with insulated gas cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220098033 CN202579114U (en) | 2012-03-13 | 2012-03-13 | Three-level vacuumizing equipment with molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220098033 CN202579114U (en) | 2012-03-13 | 2012-03-13 | Three-level vacuumizing equipment with molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202579114U true CN202579114U (en) | 2012-12-05 |
Family
ID=47248532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220098033 Expired - Fee Related CN202579114U (en) | 2012-03-13 | 2012-03-13 | Three-level vacuumizing equipment with molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202579114U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615368A (en) * | 2013-12-13 | 2014-03-05 | 北京汉能创昱科技有限公司 | Vacuum system and molecular-pump filtering protecting device with cooling function |
| CN110743876A (en) * | 2019-11-27 | 2020-02-04 | 江苏中宏机械制造有限公司 | Automatic cleaning device for steel cylinder and operation steps thereof |
-
2012
- 2012-03-13 CN CN 201220098033 patent/CN202579114U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615368A (en) * | 2013-12-13 | 2014-03-05 | 北京汉能创昱科技有限公司 | Vacuum system and molecular-pump filtering protecting device with cooling function |
| CN110743876A (en) * | 2019-11-27 | 2020-02-04 | 江苏中宏机械制造有限公司 | Automatic cleaning device for steel cylinder and operation steps thereof |
| CN110743876B (en) * | 2019-11-27 | 2022-02-15 | 江苏中宏机械制造有限公司 | Automatic cleaning device for steel cylinder and operation steps thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 321300, Zhejiang, Yongkang Province Chi Street Huang Village shop Patentee after: ZHEJIANG PUYANG CRYOGENIC EQUIPMENT CO., LTD. Address before: 321300, Zhejiang, Yongkang Province Chi Street Huang Village shop Patentee before: Zhejiang Sunor Cryogenic Equipment Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20210313 |