CN202562704U - Diffuse silicon pressure sensor test fixture - Google Patents
Diffuse silicon pressure sensor test fixture Download PDFInfo
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- CN202562704U CN202562704U CN2012201698252U CN201220169825U CN202562704U CN 202562704 U CN202562704 U CN 202562704U CN 2012201698252 U CN2012201698252 U CN 2012201698252U CN 201220169825 U CN201220169825 U CN 201220169825U CN 202562704 U CN202562704 U CN 202562704U
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Abstract
The utility model provides a diffuse silicon pressure sensor test fixture. The diffuse silicon pressure sensor test fixture comprises a fixture base, a fixture upper mould and a needle plate, wherein a pressure air inlet and pressure ports communicated with the pressure air inlet are arranged on the fixture base. A first mounting hole, a second mounting hole and a sensor seat are respectively arranged on the fixture upper mould, the number of the first mounting hole, the second mounting hole and the sensor seat is the same as that of the pressure ports, and the sensor seat is made of insulation materials and is provided with a plurality of pin holes. The first mounting hole is communicated with the corresponding second mounting hole. One end of the sensor seat extends into the second mounting hole. The needle plate is made of insulation materials and provided with feeling pin guide holes, and the number of the feeling pin guide holes is the same as that of the pin holes. The diffuse silicon pressure sensor test fixture is mainly used for production of an original equipment manufacturer (OEM) sensor, adopts a feeling pin instead of a flexible wire to connect signals, and consequently connecting wires are reduced. Output signals of multichannel sensors are tested on the condition of one-shot pressurization, and 64 pressure sensors can be tested simultaneously. Clamping efficiency is obviously improved, and mass-production is achieved.
Description
Technical field
The utility model relates to a kind of technological equipment that is used to test diffusion silicon pressure sensor, is specifically related to a kind of diffusion silicon pressure sensor test fixture.
Background technology
At present, the test fixture that is used for diffusion silicon pressure sensor production is made up of clamp base, sensor clamping joint, connecting line three parts.Clamp base mainly forms with pipeline welding, the pipeline enclosure intercommunication, and leave a plurality of pressure interfaces.Sensor clamping joint is mainly used in the sealing of sensor, and the sensor good seal is connected with base later.One end of connecting line is inserted on the test board, and the other end links to each other with sensor pin.When this test fixture uses: 1) clamp base is fixed in the high-low temperature test chamber, and is connected (no longer mobile generally speaking) with the entrance pressure pipeline; 2) one by one the sensor sensor clamping joint of packing into is compressed, leakage can not be arranged; 3) end lead-in wire is connected with sensor; 4) the sensor clamping joint that installs is connected with clamp base, and inspection clamping sealing; 5) will go between and be connected with test board lead-in wire; 6) test lead connection, clamping are accomplished.When using this test fixture that diffusion silicon pressure sensor is tested, step is more, and every sensor all needs to clamp separately, and clamping process is loaded down with trivial details, influences the testing efficiency of multiple sensor.
The utility model content
In order to overcome the problem that exists in the above-mentioned prior art, the less diffusion silicon pressure sensor test fixture of operation steps when the purpose of the utility model provides a kind of use the, the testing efficiency of raising multiple sensor.
For realizing above-mentioned purpose, the technical scheme that the utility model adopted is: a kind of diffusion silicon pressure sensor test fixture, comprise clamp base, upper clamping fixture and needle plate,
Described clamp base comprises base plate and counterdie support plate, and base plate is provided with the pressed gas import and has the reticulate texture of a plurality of nodes, and this reticulate texture communicates with this pressed gas import; Be processed with the quantity pressure interface identical with number of nodes on the counterdie support plate, pressure interface is corresponding one by one with node, and pressure interface is a stepped hole; Pressure interface communicates with node, and the hole that diameter is bigger in the pressure interface deviates from base plate;
Described upper clamping fixture comprises upper molded plate and patrix dividing plate; An end face of upper molded plate is provided with quantity first mounting hole identical with pressure interface quantity; And form corresponding one by one; Another end face of upper molded plate is provided with quantity second mounting hole identical with the first mounting hole quantity, and second mounting hole is corresponding one by one with first mounting hole, and corresponding first mounting hole communicates through the 3rd connecting hole with second mounting hole; The diameter of the diameter of first mounting hole and second mounting hole is all greater than the diameter of the 3rd connecting hole;
Described patrix dividing plate comprises the patrix dividing plate body that insulating material is processed, and is processed with the quantity mount pad hole identical with the first mounting hole quantity on the patrix dividing plate body, and forms corresponding one by one; In each mount pad hole the sensor holder that an insulating material is processed is installed all, an end of sensor holder is positioned at the mount pad hole, and the other end of sensor holder stretches in second mounting hole, is processed with a plurality of pin bores on the sensor holder;
Described needle plate comprises the needle plate body that insulating material is processed, and the needle plate body is provided with the quantity probe pilot hole identical with pin bores quantity, and corresponding one by one.
The utility model test fixture adopts integral sealing, has made original single clamping sealing into integral sealing, and the step of clamping sensor has been reduced to four steps by six original steps, and signal wire be whole the connection, does not have the flexible cord connection, convenient disassembly; Outside high-low temperature test chamber, just can carry out clamping, change the clamping environment, clamping is more convenient, has improved the efficient of multiple sensor test clamping greatly.
Description of drawings
Fig. 1 is the structural representation of the utility model test fixture.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is the structural representation of base plate in the utility model test fixture.
The vertical view of Fig. 4 Fig. 3.
Fig. 5 is the structural representation of counterdie support plate in the utility model test fixture.
Fig. 6 is the structural representation of upper molded plate in the utility model test fixture.
Fig. 7 is the right view of Fig. 6.
Fig. 8 is the structural representation of patrix dividing plate in the utility model test fixture.
Fig. 9 is the left view of Fig. 8.
Figure 10 is the structural representation of sensor holder in the utility model test fixture.
Figure 11 is the right view of Figure 10.
Figure 12 is the structural representation of needle plate in the utility model test fixture.
Among the figure: 1. base plate, 2. counterdie support plate, 3. upper molded plate, 4. patrix dividing plate, 5. needle plate, 6. base plate body; 7. first groove, 8. first screw, 9. second groove, 10. the 3rd groove, 11. the 4th grooves, 12. first connecting holes; 13. register pin, 14. nodes, 15. counterdie support plate bodies, 16. second connecting holes, 17. pressure interfaces, 18. second screws; 19. first pilot hole, 20. upper molded plate bodies, 21. first through holes, 22. the 3rd screws, 23. counterbores, 24. first mounting holes; 25. second pilot hole, 26. patrix dividing plate bodies, 27. second through holes, 28. sensor holders, 29. sensor holder bodies, 30. pin bores; 31. probe aperture, 32. needle plate bodies, 33. probe pilot hole groups, 34. second mounting holes, 35. the 3rd connecting holes, 36. anti-sliding sleeves.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is elaborated.
Along with the widespread use of diffusion silicon pressure sensor and disclosing of production technology, the production firm of diffusion silicon pressure sensor also increases gradually, and the competition between the OEM sensor production manufacturer is more and more fierce also; Force each manufacturer to carry out process modification and enhance productivity; Existing diffusion silicon pressure sensor test fixture can not satisfy the production demand: specifically be reflected in following aspect: 1) clamping will divide 6 steps; And every sensor all needs independent clamped sealed, and clamping process is loaded down with trivial details and efficient is too low; 2) sensor clamping joint need carry out in high-low temperature test chamber with being connected of clamp base, and clamping is inconvenient; 3) connect with flexible cord between every sensor and the test board, intersects tangle up between line and the line easily, dismounting is difficult.4) general every batch of 30 sensors of test at most of existing anchor clamps, quantity very little with respect to the temperature compensation of test period long (generally speaking every batch needs 3 hours) and temperature are floated test.In order to overcome the problem that exists in the above-mentioned prior art; The utility model provides a kind of diffusion silicon pressure sensor test fixture that can improve testing efficiency; The structure of this test fixture is as depicted in figs. 1 and 2, comprises the base plate 1, counterdie support plate 2, upper molded plate 3, patrix dividing plate 4 and the needle plate 5 that set gradually.
Like Fig. 3 and shown in Figure 4; The structure of base plate 1 in the utility model test fixture; Comprise square base plate body 6, be processed with eight second grooves 9 that are parallel to each other and eight the 3rd grooves 10 that are parallel to each other in the zone that first groove, 7, the first grooves 7 of the side's of being processed with annular are surrounded on the end face of base plate body 6; Second groove 9 and the 3rd groove 10 are perpendicular, and eight second grooves 9 and eight article of the 3rd groove 10 constitute the reticulate texture that 64 nodes 14 are arranged; Also be processed with 11, eight second grooves 9 of the 4th groove that parallel with second groove 9 in the zone that first groove 7 is surrounded and be symmetrically distributed in the both sides of the 4th groove 11, the 4th groove 11 communicates with the 3rd all grooves 10; Second groove 9, the 3rd groove 10 are identical with the degree of depth of the 4th groove 11, and all do not communicate with first groove 7; Be processed with screw 8 on the sidewall of base plate body 6, the bottom outlet of screw 8 communicates with an end of the 4th groove 11, and screw 8 does not communicate with first groove 7.On the base plate body 7 outside first groove 7 four register pins 13 are installed; These four register pins 13 are one group in twos; These two groups of register pins are symmetrical in the axis of the 4th groove 11, also are processed with a plurality of connecting holes 12 on the base plate body 7 outside first groove 7, and connecting hole 12 is a through hole.
Counterdie support plate 2 in the utility model test fixture; As shown in Figure 5; Comprise counterdie support plate body 15, the quantity that is processed with a plurality of pressure interfaces 17 and a plurality of second connecting hole, 16, the second connecting holes 16 on the counterdie support plate body 15 is identical with the quantity of first connecting hole 12; And forming correspondence one by one, second connecting hole 16 is a stepped hole; The quantity of node 14 is identical on the quantity of pressure interface 17 and the base plate body 1, and forms correspondingly one by one, and pressure interface 17 also is a stepped hole, and pressure interface 17 diameters are provided with the O RunddichtringO than the bottom surface of macropore; The bigger hole of diameter is provided with in the same way in the hole that diameter is bigger in the pressure interface 17 and second connecting hole 16; Be evenly equipped with four second screws 18 around each pressure interface 17, be provided with between adjacent two pressure interfaces 17 that the bigger hole of diameter is provided with in the same way in aperture and the pressure interface 17 of two second screw 18, the second screws 18, second screw 18 is a blind hole; The quantity that also is processed with a plurality of first pilot hole, 19, the first pilot holes 19 on the counterdie support plate body 15 is identical with the quantity of register pin 13, and forms corresponding one by one.
Like Fig. 6 and shown in Figure 7; The structure of upper molded plate 3 in the utility model test fixture; Comprise upper molded plate body 20; Be processed with quantity first mounting hole 24 identical on the end face of upper molded plate body 20 with pressure interface 17 quantity; And form correspondingly one by one, and the next door of each first mounting hole 24 all is provided with the counterbore 23 that an axis and this first mounting hole, 24 axis parallel, and the centre distance between this counterbore 23 and this first mounting hole 24 is less than these counterbore 23 radiuses and this first mounting hole 24 radius sums; Counterbore 23 bottoms are processed with three screw 22 coaxial with counterbore 23; Be equipped with an anti-sliding sleeve 36 in each counterbore 23, anti-sliding sleeve 36 is connected with upper molded plate body 20 through screw; Be processed with quantity second mounting hole 34 identical on another end face of upper molded plate body 20 with first mounting hole, 24 quantity, and corresponding one by one, and corresponding first mounting hole 24 communicates through the 3rd connecting hole 35 with second mounting hole 34; First mounting hole 24, second mounting hole 34 and the 35 coaxial settings of the 3rd connecting hole, the diameter of the diameter of first mounting hole 24 and second mounting hole 34 are all greater than the diameter of the 3rd connecting hole 35; Be evenly equipped with four first through holes 21 around each first mounting hole 24, only be provided with two first through holes 21 between adjacent two first mounting holes 24; The quantity that also is processed with a plurality of second pilot hole, 25, the second pilot holes 25 on the upper molded plate body 20 is identical with the quantity of first pilot hole 19, and forms corresponding one by one.
Like Fig. 8 and shown in Figure 9; The structure of patrix dividing plate 4 in the utility model test fixture comprises the patrix dividing plate body 26 that epoxy resin is processed, and is processed with a plurality of mount pads hole on the patrix dividing plate body 26; The quantity in this mount pad hole is identical with the quantity of first mounting hole 24, and forms corresponding one by one; A structure such as Figure 10 and sensor holder 28 shown in Figure 11 all are installed in each mount pad hole; Sensor holder 28 comprises the sensor holder body 29 that insulating material is processed; Sensor holder body 29 is a boss shape, is processed with a plurality of pin bores 30 on the sensor holder body 29, and this a plurality of pin bores 30 is not connected; One end of each pin bores 30 all is positioned on the end face of sensor holder body 29 diameters than small boss; The other end of each pin bores 30 all is positioned at sensor holder body 29, and each pin bores 30 is connected with a probe aperture 31, probe aperture 31 and pin bores 30 coaxial settings; Pin bores 30 is positioned at sensor holder body 29 1 ends and links to each other with an end of the probe aperture that is connected 31, and the other end of all probe aperture 31 all is positioned at the end face of the big pedestal of sensor holder body 29 diameters, and all probe aperture 31 are not connected; The pedestal that sensor holder body 29 diameters are bigger is installed in the mount pad hole on the patrix dividing plate body 26, and the less boss of sensor holder body 29 diameters stretches out outside the patrix dividing plate body 26; Be evenly equipped with four second through holes 27 around each mounting hole seat, only be provided with two second through holes 27 between the adjacent two mounting hole seats.
Shown in figure 12; The structure of needle plate 5 in the utility model test fixture; Comprise the needle plate body 32 that epoxy resin is processed, needle plate body 32 is provided with the quantity probe pilot hole group 33 identical with sensor holder 28 quantity, and each probe pilot hole group 33 is corresponding with a sensor holder 28; The quantity of probe aperture 31 is identical on the quantity of these probe pilot hole group 33 middle probe pilot holes and the corresponding sensor seat 28, and corresponding for one by one.
When using this test fixture that sensor is tested:
The hole that diameter in the counterdie support plate 2 upward pressure interfaces 17 is less is towards base plate 1, with the register pin 13 that first pilot hole 19 on the counterdie support plate 2 is aimed on the base plate 1, combination counterdie support plate 2 and base plate 1; Seal with red copper pad (little range can be used rubber blanket) between counterdie support plate 2 and the base plate 1.After the combination, register pin 13 passes first locating piece 19 and stretches out outside the counterdie support plate 2, and counterdie support plate 2 is formed clamp base with base plate 1; This clamp base is placed in the high-low temperature test chamber, below base plate 1 is positioned at; Connect upward draft tube through first screw 8.Combination upper molded plate 3 and patrix dividing plate 4 make the less boss of diameter on the sensor holder 28 towards upper molded plate 3, and this boss is stretched in second mounting hole 34 corresponding with it, and upper molded plate 3 and patrix dividing plate 4 are assembled into upper clamping fixture, and be as shown in Figure 2., get sensor to be tested with upper molded plate 3 up, the pin of sensor is penetrated first mounting hole 24, pass the 3rd connecting hole 35, each pin on this sensor is penetrated respectively in the pin bores 30 on the sensor holder 28.After all being provided with sensor to be tested on each sensor holder 28; Upper clamping fixture is moved into high-low temperature test chamber; Downwards towards counterdie support plate 2, each sensor to be tested that is provided with on the upper clamping fixture is stretched in the corresponding pressure interface 17 respectively upper molded plate 3, second locating piece 25 on the upper molded plate 3 matches with register pin 13; Upper clamping fixture is fixedly connected with clamp base, accomplishes the sealing location of sensor to be tested.Then; Needle plate 5 is installed on patrix dividing plate 4; Promptly accomplish the clamping of sensor to be measured, probe is inserted respectively in each probe aperture 31 through the probe pilot hole in the probe pilot hole group 33 on the needle plate 5, and contact with the pin of sensor to be measured; Adopt existing method to test, test signal transmits through probe.The gas that has pressure gets into first screw 8 through last draft tube, gets into reticulate texture through the 4th groove 11 then, and arrives all nodes 14, gets into pressure interface 17 again, and sensor to be measured is pressed on the sensor holder 28.
Upper clamping fixture is generally no longer taken apart, is used to compress and alignment sensor.In order to guarantee that probe can all contact with the pin of sensor to be measured; Adopt the probe that has scalable probe during test; Sensor holder 28 adopts insulating material to process, and is processed with pilot hole, so promptly can correct the pin of sensor to be measured; Also can play the guiding role, make probe be easy to insert probe.Anti-sliding sleeve 36 can prevent to move that sensor to be measured drops when going up die clamper from last die clamper.
The innovative point of the utility model test fixture: 1) clamp base adopts separate machined man-hour adding, and the mode of combination has realized the integral sealing of anchor clamps at last; 2) upper molded plate adopts the way that adds anti-sliding sleeve to make sensor clamping to be measured accomplish stable when moving during the sensor plug-in mounting, can not fall down; 3) sensor pin imports the patrix dividing plate from bottom to top, and the patrix dividing plate has played the effect of correcting and locating to sensor pin; 4) adopt the way of the probe feeler pin of band telescopic head to transmit signal.
The utility model test fixture is mainly used in the production of OEM sensor, adopts probe to replace flexible cord to carry out signal and connects, thereby reduced connecting line; The output signal of test multiple sensor can be tested 64 pressure transducers simultaneously under once pressurization situation, has obviously improved clamping efficient, has solved the problem of producing in enormous quantities.
Claims (4)
1. a diffusion silicon pressure sensor test fixture is characterized in that, comprises clamp base, upper clamping fixture and needle plate (5),
Described clamp base comprises base plate (1) and counterdie support plate (2), and base plate (1) is provided with the pressed gas import and has the reticulate texture of a plurality of nodes (14), and this reticulate texture communicates with this pressed gas import; Be processed with the quantity pressure interface (17) identical with node (14) quantity on the counterdie support plate (2), pressure interface (17) is corresponding one by one with node (14), and pressure interface (17) is a stepped hole; Pressure interface (17) communicates with node (14), and the bigger hole of diameter deviates from base plate (1) in the pressure interface (17);
Described upper clamping fixture comprises upper molded plate (3) and patrix dividing plate (4); An end face of upper molded plate (3) is provided with quantity first mounting hole (24) identical with pressure interface (17) quantity; And form corresponding one by one; Another end face of upper molded plate (3) is provided with quantity second mounting hole (34) identical with first mounting hole (24) quantity; Second mounting hole (34) is corresponding one by one with first mounting hole (24), and corresponding first mounting hole (24) communicates through the 3rd connecting hole (35) with second mounting hole (34); The diameter of the diameter of first mounting hole (24) and second mounting hole (34) is all greater than the diameter of the 3rd connecting hole (35);
Described patrix dividing plate (4) comprises the patrix dividing plate body (26) that insulating material is processed, and is processed with quantity and the identical mount pad hole of first mounting hole (24) quantity on the patrix dividing plate body (26), and forms corresponding one by one; The sensor holder (28) that an insulating material is processed all is installed in each mount pad hole; One end of sensor holder (28) is positioned at the mount pad hole; The other end of sensor holder (28) stretches in second mounting hole (34), is processed with a plurality of pin bores (30) on the sensor holder (28);
Described needle plate (5) comprises the needle plate body (32) that insulating material is processed, and needle plate body (32) is provided with quantity and the identical probe pilot hole of pin bores (30) quantity, and corresponding one by one.
2. diffusion silicon pressure sensor test fixture as claimed in claim 1 is characterized in that, said pressure interface (17) diameter is provided with the O RunddichtringO than the bottom surface of macropore.
3. diffusion silicon pressure sensor test fixture as claimed in claim 1; It is characterized in that; The next door of said first mounting hole (24) is provided with the counterbore (23) that an axis and this first mounting hole (24) axis parallel, and the centre distance between this counterbore (23) and this first mounting hole (24) is less than this counterbore (23) radius and this first mounting hole (24) radius sum; Counterbore (23) is equipped with anti-sliding sleeve (36).
4. diffusion silicon pressure sensor test fixture as claimed in claim 1; It is characterized in that; Described sensor holder (28) comprises the sensor holder body (29) of the boss shape that insulating material is processed; Be processed with a plurality of not connected pin bores (30) on the sensor holder body (29); One end of each pin bores (30) all is positioned on the end face of sensor holder body (29) diameter than small boss, and the other end of each pin bores (30) all is positioned at and is connected with a probe aperture (31), probe aperture (31) and the coaxial setting of pin bores (30); The other end of all probe aperture (31) all is positioned at the end face of the big pedestal of sensor holder body (29) diameter, and all probe aperture (31) are not connected; The bigger pedestal of sensor holder body (29) diameter is installed in the mount pad hole on the patrix dividing plate body (26), and the less boss of sensor holder body (29) diameter stretches in second mounting hole (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201698252U CN202562704U (en) | 2012-04-20 | 2012-04-20 | Diffuse silicon pressure sensor test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201698252U CN202562704U (en) | 2012-04-20 | 2012-04-20 | Diffuse silicon pressure sensor test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202562704U true CN202562704U (en) | 2012-11-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201698252U Expired - Fee Related CN202562704U (en) | 2012-04-20 | 2012-04-20 | Diffuse silicon pressure sensor test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202562704U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106154142A (en) * | 2016-09-26 | 2016-11-23 | 伟创力电子技术(苏州)有限公司 | Solve pin bending and cause the universal test support plate that false failure rate is high |
| CN106595947A (en) * | 2015-10-14 | 2017-04-26 | 南京高华科技股份有限公司 | Pressure sensor |
-
2012
- 2012-04-20 CN CN2012201698252U patent/CN202562704U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106595947A (en) * | 2015-10-14 | 2017-04-26 | 南京高华科技股份有限公司 | Pressure sensor |
| CN106154142A (en) * | 2016-09-26 | 2016-11-23 | 伟创力电子技术(苏州)有限公司 | Solve pin bending and cause the universal test support plate that false failure rate is high |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121128 Termination date: 20160420 |
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| CF01 | Termination of patent right due to non-payment of annual fee |