CN202549531U - Magnetic-control displacement driving device - Google Patents
Magnetic-control displacement driving device Download PDFInfo
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- CN202549531U CN202549531U CN2012200566951U CN201220056695U CN202549531U CN 202549531 U CN202549531 U CN 202549531U CN 2012200566951 U CN2012200566951 U CN 2012200566951U CN 201220056695 U CN201220056695 U CN 201220056695U CN 202549531 U CN202549531 U CN 202549531U
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Abstract
The utility model discloses a magnetic-control displacement driving device, comprising a frame body, a power electrical body, an excitation deformer and a magnetic pumping body, wherein the power electrical body and the excitation deformer are in contact and are embedded in the frame body, and the magnetic pumping body is embedded in or wound around the frame body. The magnetic-control displacement driving device further comprises a displacement guiding restraining body used for pushing a magnetizer to be guided during linear displacement in a relative y/z/x direction or rotational displacement in a relative alpha/beta/gamma direction and to be restrained in other directions; and the frame body of the magnetic-control displacement driving device can further be a six-face frame body and a hollow permanent magnet sphere frame, and the magnetic pumping body is arranged in the frame body so that the position change sensing function after an instant excitation in multiple freedom degree directions is realized. The magnetic-control displacement driving device disclosed by the utility model has a displacement sensing or driving self-sensing integrating function so as to be capable of being applied to the linear motion and also be capable of being applied to rotary driving and sensing. The magnetic-control displacement driving device disclosed by the utility model has the advantages of fewer assemblies, simple and compact structure, convenience for mounting, and low cost, and can be widely applied to the field of displacement and rotating angle precise driving control.
Description
Technical field
The utility model relates to a kind of power control gearshift, specifically is a kind of magnetic force control displacement drive.
Background technology
Sensing, drive unit are the necessary devices in automation and control field.Along with development of auto-control technology, require increasingly high to easy to use, reliable sensing and drive unit.But present driving sensing device has separated often, and promptly driving is driving element, and sensing is a senser element.During the sensing integrated kinetic control system of support drive, also just simply with the use of putting together of two kinds of systems.Often integration is bad in formed like this system, drive with the simultaneity and the consistency of transducing signal not good, and employed transducer often need the power supply support etc. defective.
Retrieval through to prior art finds that the disclosed Chinese patent of 2005.08.24, notification number are CN2720584, and it discloses a kind of electromagnetic actuators, particularly the electromagnetic actuators iron core.Its technical scheme is that electromagnetic actuators comprises that fixed core is with moving unshakable in one's determination; Said fixed core and moving contact jaw unshakable in one's determination are the concaveconvex shape of mutual coupling; Said iron core is a cylinder; Said concaveconvex shape is a cone; Said cone summit is on axis unshakable in one's determination.The beneficial effect of the utility model is, the magnetic conductive area when having increased adhesive unshakable in one's determination, and suction unshakable in one's determination is stronger; Reduced vibration unshakable in one's determination, moving reliable in action unshakable in one's determination, noise reduces.
But; There is shortcoming in this driver; Though be exactly that it increases actuating force and stability through increasing magnetic conductive area, reduced vibration etc., it lacks the sensing capabilities to driving in the driving process; Do not possess the magnetic conductive area of utilization change procedure and produce magnetic field intensity and realize driving and driving sensing function simultaneously, the sensing that does not possess in the actual demand of automation field institute drives integrated " intelligence " drive characteristic.
The utility model content
The utility model provides a kind of and can form straight line or angle displacement sensing, reached accurate displacement and angular turn sensing and driven incorporate magnetic force control displacement drive to the above-mentioned deficiency that exists in the prior art.
The utility model is realized through following technical scheme.
A kind of magnetic force control displacement drive; Comprise frame body, power electricity body, excitation deformable body and magnetic pumping body; Wherein, power electricity body and excitation deformable body contact, and embed in the frame body; Said frame body forms main magnetic circuit structure down in the effect of power electricity body, excitation deformable body and magnetic pumping body, produce relative z direction straight-line displacement or relative α β the rotation displacement of γ direction.
Said frame body is a magnetic conductor; Comprise first magnetic conductor and second magnetic conductor; First magnetic conductor and second magnetic conductor form main magnetic circuit structure; Power electricity body tighten on the consistent direction in the magnetic loop path of first magnetic conductor and second magnetic conductor with the excitation deformable body and embeds first magnetic conductor, and magnetic pumping body quantity is one, embedding or center on second magnetic conductor on the magnetic loop path of first magnetic conductor and second magnetic conductor.
Said magnetic force control displacement drive also comprises displacement guiding constraint spare; Displacement guiding constraint spare contacts with second magnetic conductor; Wherein, the first magnetic conductor position relative fixed, second magnetic conductor is arranged in magnetic loop and moves relative to first magnetic conductor; Displacement guiding constraint spare to first magnetic conductor and second magnetic conductor relatively x direction straight-line displacement or lead on the rotation displacement of α β γ direction relatively, on other direction, use restraint.
Compose in series closed flux path by several first magnetic conductors and the power electricity body and the excitation deformable body that embed first magnetic conductor; As first assembly, compose in series closed flux path by several second magnetic conductors and embedding or around the magnetic pumping body of second magnetic conductor, as second assembly; Wherein, First assembly is motionless relatively, and second assembly can relatively move, the common main magnetic circuit structure that forms between first assembly and second assembly.
Said frame body, power electricity body, excitation deformable body and magnetic pumping body become one; Said frame body is a magnetic conductor, and said magnetic pumping body is one or more in permanent magnet or the solenoid, wherein; Power electricity body and excitation deformable body embed in the frame body, magnetic pumping body wrapped frame body.
Said frame body is six frame bodies, and symmetry embeds and places several by the parts connected in series that power electricity body and excitation deformable body are formed on each frame body sidewall, and said magnetic pumping body is six permanent magnets, is placed on frame body inside; Be full of the medium with certain viscoelastic consistency between said frame body and the magnetic pumping body, said medium is liquid, gas, elastic solid (Hookean body), magnetic field or the heterogeneous body of solid-liquid gas.
Randomly, on the said frame body madial wall NULL is set, said NULL is copper, aluminium or nonmetal;
Or said frame body is copper, aluminium or nonmetal NULL.
Said frame body is a hollow permanent magnetism globe body framework, and said magnetic pumping body is a hollow permanent magnetism globe body or magnetic conduction spheroid, and wherein, the magnetic pumping body is placed on frame body inside; Embed the parts connected in series that electric body of the power that is uniformly distributed with and excitation deformable body are formed on the said frame body.
Said power electricity body is piezoelectric material body or piezoelectric transducer, and said excitation deformable body is the magnetostrictive material body.
Said displacement guiding constraint spare is linear bearing or rolling bearing.
For frame body is the situation of first magnetic conductor and second magnetic conductor, during work, its overlap area size and the relative displacement △ of these two magnetic conductors on its direction of motion y △ z △ x or produce relative
△α
△β
△The γ direction rotate into direct ratio.So far we can by the size of the signal of telecommunication judge two magnetic conductors on its direction of motion relative displacement or produce relative to rotate corner, thereby realize a kind of displacement or rotation sensor; When becoming one for frame body, power electricity body, excitation deformable body and magnetic pumping body, its operation principle is identical when being two magnetic conductors that relatively move with frame body.
For frame body is the situation of six frame body bodies, and the magnetic pumping body is six magnetic pumping bodies, is positioned at the inner definite position of six frame bodies; For example, under microgravity environment, it is motionless to realize being positioned at geometric center; And the signal of telecommunication that is positioned at six power electricity bodies on the frame body sidewall is an initial value or is set to null value; At this moment, when six frame bodies received instantaneous excitation, the relative position that translation or rotation will take place or flat turn moving between six magnetic pumping bodies and six frame bodies changed; Be positioned on six frame bodies this moment with six magnetic pumping bodies near or away from one group of power electricity body will produce the signal of telecommunication of relevant position variation; Through bridge circuit or the signal difference signal of telecommunication Treatment Analysis process of grading, can obtain a variable signal with the initial position signal of telecommunication, the value of this variable signal is corresponding with the location variation of six relative six frame bodies of magnetic pumping body; Like this, can realize six frame bodies change in location sensing function after the instantaneous excitation on the six-freedom degree direction; For frame body is the situation of hollow permanent magnetism globe body framework, and its operation principle is identical when being six frame bodies with frame body, and based on the magnetic repulsion effect, it can be realized like the initial position centering at non-microgravity environment.
Compared with prior art, the utility model comprises following advantage: have displacement sensing or drive the integrated function of self-sensing, not only can be used for rectilinear motion but also can be used for rotating drive and sensing.Assembly is few, simple in structure, and compact, easy for installation, cost is low.The utility model can be widely used in displacement and the accurate drive controlling of corner field.
Description of drawings
Fig. 1 is the utility model embodiment 1 structural representation;
Fig. 2 is the utility model embodiment 1 displacement state sketch map;
Fig. 3 is the utility model embodiment 4 structural representations;
Fig. 4 is the utility model embodiment 5 structural representations;
Fig. 5 is the utility model embodiment 6 structural representations;
Fig. 6 is the utility model embodiment 7 structural representations;
Among the figure, 1 is frame body, and 2 is power electricity body, and 3 is the excitation deformable body, and 4 is the magnetic pumping body, and 5 are displacement guiding constraint spare, and 6 is NULL, and 8 is medium.
Embodiment
Embodiment in the face of the utility model elaborates down: present embodiment is being to implement under the prerequisite with the utility model technical scheme; Provided detailed execution mode and concrete operating process, but the protection range of the utility model is not limited to following embodiment.
As shown in Figure 1, the magnetic force control displacement drive that present embodiment provides is displacement of the lines or angular displacement sensor.Comprise frame body 1, power electricity body 2, excitation deformable body 3, magnetic pumping body 4 and displacement guiding constraint spare 5.Wherein, Frame body 1 is a magnetic conductor; Comprise first magnetic conductor and second magnetic conductor; First magnetic conductor and second magnetic conductor be at the effect of power electricity body 2, excitation deformable body 3, magnetic pumping body 4 formation main magnetic circuit structure down, and can produce relative z the straight-line displacement of direction, like Fig. 2 (a) with (b); Or produce relative α β the rotation displacement of γ direction, like Fig. 2 (c), (d) with (e).Power electricity body 2 contacts with excitation deformable body 3, and both tighten and embed first magnetic conductor on the consistent direction in the magnetic loop path of first magnetic conductor and second magnetic conductor; Simultaneously magnetic pumping body 4 embeds on the magnetic loop path or around second magnetic conductor; Displacement guiding constraint spare 5 is linear bearing or rolling bearing class device; And contact with second magnetic conductor; The first magnetic conductor position relative fixed; Second magnetic conductor is arranged in magnetic loop and moving relative to first magnetic conductor, 5 pairs first magnetic conductors of displacement guiding constraint spare and second magnetic conductor relatively x direction straight-line displacement or lead on the rotation displacement of α β γ direction relatively, and on other direction, use restraint.In the present embodiment, the magnetic pumping body 4 that is adopted is permanent magnet, and excitation deformable body 3 is the magnetostrictive material body.During work, the magnetic field that produces as the permanent magnet of magnetic pumping body 4 will be through two first magnetic conductors and closed magnetic circuits of the formation of the clearance air between second magnetic conductor and this two magnetic conductors of dislocation relatively.At this moment, the first magnetic conductor position relative fixed, second magnetic conductor is arranged in magnetic loop and moves relative to first magnetic conductor.So; The size of magnetic field intensity is directly proportional with the size that the adjacent part of first magnetic conductor that relatively moves and second magnetic conductor overlaps area in this closed magnetic circuit; Promptly along with pushing course; To overlap degree big more for port area between two magnetic conductors, and the magnetic line of force of conducting is many more in two magnetic conductors, and magnetic density is that magnetic field intensity is just big more; With aforementioned reverse promotion, it is more little then to overlap degree, and magnetic field intensity is just more little in the frame body 1.Magnetic force for this embodiment provides is controlled displacement drive; Power electricity body 2 contacts with excitation deformable body 3; Both tighten and embed first magnetic conductor on the consistent direction in the magnetic loop path of first magnetic conductor and second magnetic conductor; Because excitation deformable body 3 receives magnetic pumping can produce distortion; And the size of distortion increases with suffered magnetic field excitation intensity, and then this deformation energy will act on the form of power output on the power electricity body 2 because power electricity body 2 contacts with excitation deformable body 3 and is clamped on together this moment; Power electricity body 2 is piezoelectric material body or piezoelectric transducer in the instance at this moment; Therefore produce the signal of telecommunication of a correspondence, the size of this signal of telecommunication promptly is directly proportional with the magnetic field intensity that causes excitation deformable body 3 generation power outputs with the deflection of excitation deformable body 3, promptly is directly proportional with the size that overlaps area of the opposite face of two frame bodies that relatively move 1.It is big more to overlap area, and piezoelectric signal is strong more.For two magnetic conductors that relatively move, its overlap area size and the relative displacement △ of these two magnetic conductors on its direction of motion y △ z △ x or produce relative
△α
△β
△The γ direction rotate into direct ratio.So far we can by the size of the signal of telecommunication judge two magnetic conductors on its direction of motion relative displacement or produce relative to rotate corner, thereby realize a kind of displacement or rotation sensor.
Solenoid is fed exciting current, and the coil electromagnetism field will form a closed magnetic circuit through the clearance air between two magnetic conductors and this two magnetic conductors.Because under electromagnetic field effect; Two magnetic conductor opposite faces or opposite end actinal surface will not become adhesive and draw close the position by initially not overlapping the position; In this process based on the principle of embodiment 1; When electromagnetic signal strength is constant; The signal of telecommunication that the electric body 2 of power produces can strengthen along with the increasing of the closed degree of two magnetic conductors, thereby realizes judging that based on the variation of the signal of telecommunication two magnetic conductors change to displacement that realizes attracting process or rotational angle from initial, thereby realizes the displacement sensing based on electromagnetic field effect.
In above motion process; Because electromagnetic force effect; Realized that simultaneously two magnetic conductors are by not being closed into closed active adhesive motion process; So present embodiment still is displacement or device of rotation driving under the effect of a kind of externally exciting current, and displacement/rotational variable quantity that should the driving process can be by the while perception, thereby realizes a kind of sensing integrated magnetic force control displacement drive that drives.
For embodiment 2 said situations; When two frame bodies 1 are under the attracting state; Though two magnetic conductor relative positions no longer change; If but this moment, the current strength in second magnetic conductor continued to change; The variation magnetic field that produces of variable-current causes the excitation deformable body 3 distortion electric body 2 of exerting all one's strength to produce the corresponding signal of telecommunication so, the size variation of this signal of telecommunication and exciting field intensity promptly with magnetic pumping body 4 on the current strength that applies be directly proportional, so the present embodiment device can also be a kind of current strength or magnetic field intensity sensing device.
Embodiment 4
In the present embodiment, as shown in Figure 3, one or more device serial connections described in two or more embodiment 1 or the embodiment 2 are formed closed flux path as shown in Figure 3, comprise first assembly and second assembly.Wherein first composite unit structure part is motionless relatively, and second composite unit structure part can relatively move.And the magnetic pumping body 4 that is provided with respectively in the second composite unit structure top and the bottom can be in permanent magnet or the solenoid one or more.
When the magnetic pumping body 4 that is provided with in the second composite unit structure top and the bottom is all solenoid; The present embodiment device can be through alternately feeding electric current to two coils; Its drive mechanism is with embodiment 2; Produce driving process up and down reciprocatingly as shown in Figure 3, thereby realize reciprocal driving and drive displacement self-sensing device based on the twin coil alternative excitation.
In like manner, a magnetic pumping body 4 is a solenoid in the second composite unit structure top and the bottom, when another magnetic pumping body 4 is permanent magnet; The present embodiment device can be through feeding electric current to solenoid, and its drive mechanism drives process with embodiment 2 and produce to solenoid position direction; Afterwards; To the solenoid outage, permanent magnet effect this moment is under the permanent magnet magnetic field action; The present embodiment device produces to permanent magnet position direction reset drives process, thereby realizes reciprocal driving and drive displacement self-sensing device based on a solenoid and a permanent magnet alternative excitation.
Embodiment 5
In the present embodiment, as shown in Figure 4, described frame body 1, power electricity body 2, excitation deformable body 3 and magnetic pumping body 4 have the form that becomes one, and wherein, frame body 1 is a magnetic conductor, and magnetic pumping body 4 is one or more in permanent magnet or the solenoid.Magnetic pumping body 4 wrapped frame bodies 1, insertion force electricity body 2 and excitation deformable body 3 in the frame body 1.During work, drive the sensing realization mechanism with aforementioned embodiment 1-4.
Embodiment 6
In the present embodiment, can realize two above sensing parallel organizations, the form of carrying out sensing work through combining ability fax sense signal.As Fig. 5 with shown in, be six frame bodies forming by frame body 1, symmetry embed to be placed two or more parts connected in series of being made up of power electricity body 2 and excitation deformable body 3 on each sidewall of frame body.At one or six magnetic pumping bodies 4 of the inner placement of six frame bodies forming frame body 1; Be full of the medium 8 with certain viscoelastic consistency between six frame bodies and six magnetic pumping bodies 4, this medium 8 can be liquid or gas or elastic solid (Hookean body) or magnetic field or the heterogeneous body of solid-liquid gas.Six magnetic pumping bodies 4 are permanent magnet, and relatively six frame bodies forming of frame body 1 realize △ x △ y △ z or produce relative
△α
△β
△The rotation of γ direction.When initial; Six magnetic pumping bodies 4 are positioned at the inner definite position of six frame bodies; As be positioned at geometric center motionless (as under microgravity environment, realizing), and the signal of telecommunication that is positioned at six power electricity bodies 2 on the frame body sidewall is an initial value or is set to null value.At this moment; When six frame bodies receive instantaneous excitation; The relative position that translation or rotation will take place or flat turn moving between six magnetic pumping bodies 4 and six frame bodies changes, the principle identical with embodiment 1, be positioned at this moment on six frame body frameworks with six magnetic pumping bodies 4 near or away from one group of power electricity body 2 will produce the signal of telecommunication of relevant position variation; Through bridge circuit or the signal difference signal of telecommunication Treatment Analysis process of grading, can obtain a variable signal with the initial position signal of telecommunication.The value of this variable signal is corresponding with the location variation of six magnetic pumping body 4 relative six frame bodies.Like this, can realize six frame bodies change in location sensing function after the instantaneous excitation on the six-freedom degree direction.
In the present embodiment, magnetic pumping body 4 is six permanent magnets, its maybe with frame body 1 madial wall adhesive, on frame body 1 madial wall, be provided with as copper, aluminium or NULL 6 such as nonmetal, with reduction by the possibility of adhesive.Perhaps, the material of frame body 1 is copper or aluminium or NULL such as nonmetal, in order to reduce by the possibility of adhesive.
Embodiment 7
Based on embodiment 6; Present embodiment is as shown in Figure 6, and frame body 1 is a permanent magnet, and magnetic pumping body 4 is the permanent magnetism globe body of a hollow; Its magnetizing direction is the extremely outside S utmost point of inner N; Frame body 1 is a bigger hollow permanent magnetism globe body framework, and its magnetizing direction is the extremely outside N utmost point of inner S, and is placed on bigger hollow permanent magnetism globe body framework inside as the hollow permanent magnetism globe body of magnetic pumping body 4.Because their field poles are opposite, and are the spherical symmetric structures, magnetic pumping body 4 will be suspended in permanent magnetism globe body framework central authorities so; On the permanent magnetism globe body framework, embed the parts connected in series of electric body 2 of the power that is uniformly distributed with and excitation deformable body 3 compositions simultaneously.Like this, based on the principle of embodiment 6, can realize sensor monitoring in the immediate movement on the translation direction arbitrarily as the hollow permanent magnetism globe body framework of frame body 1.
Magnetic pumping body 4 also can be a magnetic conduction spheroid in the present embodiment, and this magnetic pumping body 4 also will initially be suspended in middle position under frame body 1 even suction.Based on the principle of embodiment 6, when this magnetic pumping body and frame body generation relative displacement, on the frame body be subjected to displacement variation and near the position local magnetic field take place and change, cause the power electricity body of this localized positions to produce signal.
More than the embodiment of the utility model has been done detailed description, be to be to implement under the prerequisite, but the protection range of the utility model is not limited to the above embodiments with the utility model technical scheme.
Claims (10)
1. a magnetic force is controlled displacement drive; It is characterized in that, comprise frame body, power electricity body, excitation deformable body and magnetic pumping body, wherein; Power electricity body and excitation deformable body contact; And in the embedding frame body, said frame body forms main magnetic circuit structure down in the effect of power electricity body, excitation deformable body and magnetic pumping body, and produce relative z direction straight-line displacement or relative α β the rotation displacement of γ direction.
2. magnetic force control displacement drive according to claim 1; It is characterized in that; Said frame body is a magnetic conductor, comprises first magnetic conductor and second magnetic conductor, and first magnetic conductor and second magnetic conductor form main magnetic circuit structure; Power electricity body and excitation deformable body tighten and embed first magnetic conductor on the consistent direction in the magnetic loop path of first magnetic conductor and second magnetic conductor; Said magnetic pumping body is permanent magnet or solenoid, and its quantity is one, on the magnetic loop path of first magnetic conductor and second magnetic conductor, embeds or around second magnetic conductor.
3. magnetic force control displacement drive according to claim 2; It is characterized in that; Also comprise displacement guiding constraint spare, displacement guiding constraint spare contacts with second magnetic conductor, wherein; The first magnetic conductor position relative fixed; Second magnetic conductor is arranged in magnetic loop and moving relative to first magnetic conductor, displacement guiding constraint spare to first magnetic conductor and second magnetic conductor relatively x direction straight-line displacement or lead on the rotation displacement of α β γ direction relatively, on other direction, use restraint.
4. according to claim 2 or 3 described magnetic force control displacement drives; It is characterized in that, compose in series closed flux path by several first magnetic conductors and the power electricity body and the excitation deformable body that embed first magnetic conductor, as first assembly; Compose in series closed flux path by several second magnetic conductors and embedding or around the magnetic pumping body of second magnetic conductor; As second assembly, wherein, first assembly is motionless relatively; Second assembly can relatively move, the common main magnetic circuit structure that forms between first assembly and second assembly.
5. magnetic force control displacement drive according to claim 1; It is characterized in that said frame body, power electricity body, excitation deformable body and magnetic pumping body become one, said frame body is a magnetic conductor; Said magnetic pumping body is one or more in permanent magnet or the solenoid; Wherein, power electricity body and excitation deformable body embed in the frame body, magnetic pumping body wrapped frame body.
6. magnetic force control displacement drive according to claim 1; It is characterized in that; Said frame body is six frame bodies; Symmetry embeds and places several by the parts connected in series that power electricity body and excitation deformable body are formed on each frame body sidewall, and said magnetic pumping body is six permanent magnets, is placed on frame body inside; Be full of the medium with certain viscoelastic consistency between said frame body and the magnetic pumping body, said medium is liquid, gas, elastic solid (Hookean body), magnetic field or the heterogeneous body of solid-liquid gas.
7. magnetic force control displacement drive according to claim 6 is characterized in that, randomly,
On the said frame body madial wall NULL is set, said NULL is copper, aluminium or nonmetal;
Or said frame body is copper, aluminium or nonmetal NULL.
8. magnetic force control displacement drive according to claim 1 is characterized in that said frame body is a hollow permanent magnetism globe body framework, and said magnetic pumping body is a hollow permanent magnetism globe body or magnetic conduction spheroid, and wherein, the magnetic pumping body is placed on frame body inside; Embed the parts connected in series that electric body of the power that is uniformly distributed with and excitation deformable body are formed on the said frame body.
9. according to each described magnetic force control displacement drive in the claim 1 to 8, it is characterized in that said power electricity body is piezoelectric material body or piezoelectric transducer, said excitation deformable body is the magnetostrictive material body.
10. magnetic force control displacement drive according to claim 3 is characterized in that said displacement guiding constraint spare is linear bearing or rolling bearing.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200566951U CN202549531U (en) | 2012-02-21 | 2012-02-21 | Magnetic-control displacement driving device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012200566951U CN202549531U (en) | 2012-02-21 | 2012-02-21 | Magnetic-control displacement driving device |
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| CN202549531U true CN202549531U (en) | 2012-11-21 |
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| CN2012200566951U Withdrawn - After Issue CN202549531U (en) | 2012-02-21 | 2012-02-21 | Magnetic-control displacement driving device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102607389A (en) * | 2012-02-21 | 2012-07-25 | 上海交通大学 | Magnetic control displacement device |
| CN104535056A (en) * | 2014-12-16 | 2015-04-22 | 上海交通大学 | Micro sensing device based on coriolis force effect and combined structure thereof |
-
2012
- 2012-02-21 CN CN2012200566951U patent/CN202549531U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102607389A (en) * | 2012-02-21 | 2012-07-25 | 上海交通大学 | Magnetic control displacement device |
| CN104535056A (en) * | 2014-12-16 | 2015-04-22 | 上海交通大学 | Micro sensing device based on coriolis force effect and combined structure thereof |
| CN104535056B (en) * | 2014-12-16 | 2017-09-05 | 上海交通大学 | Micro sensing device based on Coriolis force effect and combinations thereof structure |
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Granted publication date: 20121121 Effective date of abandoning: 20141015 |
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