CN202548531U - Metal photomask - Google Patents
Metal photomask Download PDFInfo
- Publication number
- CN202548531U CN202548531U CN2012201813301U CN201220181330U CN202548531U CN 202548531 U CN202548531 U CN 202548531U CN 2012201813301 U CN2012201813301 U CN 2012201813301U CN 201220181330 U CN201220181330 U CN 201220181330U CN 202548531 U CN202548531 U CN 202548531U
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- CN
- China
- Prior art keywords
- light shield
- metal light
- flat forms
- forms district
- decorative pattern
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
The utility model provides a metal photomask which is used in processing of glass substrates of various displays or touch panels. The metal photomask is of a frame body and is provided with at least one opening unit, and an area shielded by the frame body is at a position where a circuit is formed in the processing. The metal photomask comprises a first surface capable of being contacted with the glass substrate, and a second surface opposite to the first surface, wherein the first surface is of a smooth surface, at least one non-flat area is arranged on the second surface, the position of the non-flat region is adjacent to the opening unit, three-dimensional textures are distributed in the area. The metal photomask aims at enlarging the surface area and improving the surface roughness so as to avoid stripping and falling of surface sediments, thus prompting the quality of the processing, and prolonging the replacement period of the metal photomask.
Description
Technical field
The utility model relates to a kind of technical field of metal light shield; Relate in particular to a kind of increase decorative pattern in metal light shield surface; In the processing procedure of the glass substrate that is used in various display or contact panel, increase replacement cycle that decorative pattern can prolong the metal light shield, promote the quality of producing and reduce production cost.
Background technology
Among present various display or contact panel; For example LCD, slimming display, LCD TV, slimming televisor, contact panel, touch control display, have the screen of touch controllable function ... in waiting; Can utilize light shield in processing procedure, on glass substrate, to deposit the film of some different materials; And comprise steps such as coating, exposure, etching, development, cleaning, baking in the process, and utilize a plurality of different light shields to operate in regular turn, in layer cook up the structure that is designed.The highest in the light shield cost is to adopt quartz material, and this type of light shield can satisfy the strict process conditions of precision requirement, but in some precision were asked not high processing procedure, if adopt the light shield of quartz material, cost was too high, and processing procedure is too complicated, so some SiO
2Deposition manufacture process then adopts the metal light shield, so just can replace processing procedures such as coating, exposure, etching, development, cleaning, baking, reduces work flow, reduces production cost.And, also can reduce amount of equipment such as buying aforementioned coating, exposure, etching, development, cleaning, baking to production firm, the expenditure of equipment investment is reduced relatively.
The requirement of common metal light shield, mainly include 3 points: 1. thickness will approach; 2. have the magnetic of receiving, in order to the clamping device with magnetic and absorption, and the glass substrate of desire processing is fixed between metal light shield and the clamping device; 3. palpus smooth, no burr in surface are avoided scratch glass substrate in clamping or processing procedure running.
Yet traditional metal light shield is for avoiding the scratch glass substrate, and two apparent surfaces are all smooth surface, and the membraneous material that in processing procedure, is deposited on substrate also can be deposited on metal light shield surface; Along with the metal light shield uses and deposition continuously, the film thickness that metal light shield surface is accumulated also increases, and this moment, smooth surface just let the film of wall-attached surface in processing procedure, peel off easily; Fall on the glass substrate of desire processing originally, and produce defective products, therefore for keeping the yield of production; Just must be after a period of time, take out and entrust outside specialized company to clean, with the serviceable life of continuity metal light shield; So can reduce the equipment mobility, also reduce the production capacity of equipment; The unit price that adds single metal light shield is also quite expensive, takes out number of times the more, improper operation and to produce damaged probability also higher.In view of this, the utility model proposes a metal light shield.
Summary of the invention
The fundamental purpose of the utility model is to improve the metal light shield of its surface area and roughness in particular surface; Mainly be to be formed with three-dimensional pattern in metal light shield one surface; Expect lifting can bear in procedure for producing frequency of depositing, prolongation replacement cycle; Let the mobility of the equipment that uses this metal light shield rise, production capacity promotes, and can reduce production cost synchronously.
For reaching above-mentioned purpose, the utility model proposes a kind of metal light shield, and it is shaped as a framework; This framework is formed with and is at least one open cells, this metal light shield include can with the glass substrate first surface in contact, and the position is the second surface of first surface opposite face; This first surface is a shiny surface; Be formed with on this second surface and be at least one non-flat forms district, contiguous this open cells of this non-flat forms zone position, three-dimensional decorative pattern is distributing in the non-flat forms district.
In the utility model one embodiment, this non-flat forms district is distributed in the peripheral second surface place of this open cells in the form of a ring.
In the utility model one embodiment, this non-flat forms district is distributed in this annular section by successional decorative pattern.
In the utility model one embodiment, identical and repeated decorative pattern is distributing in this non-flat forms district.
In the utility model one embodiment, the non-flat forms district that the chemical etching processing procedure processes in the second surface place is adopted in this non-flat forms district.
In the utility model one embodiment, this uneven surface is distributed in the regional area of this second surface.
In the utility model one embodiment, whole second surface is contained in these uneven surface distributed areas.
In the utility model one embodiment, the thickness of this metal light shield is between 0.15～0.7mm.
In the utility model one embodiment, the thickness of this metal light shield is between 0.25～0.5mm.
The utility model is formed with three-dimensional decorative pattern on the metal light shield, fundamental purpose can increase surface area and improve roughness.Increase the number of times that surface area can improve the surperficial deposition that can bear, the life cycle that prolongs this metal light shield reduces replacement rate, also reduces the number of times that equipment downtime is changed, and improves the equipment mobility.Can avoid the material on adhesion metal light shield surface in the processing procedure that abnormal peeling off taken place and improve surfaceness, reduce fraction defective, make quality-improving.
Following conjunction with figs. and component symbol are done more detailed explanation to the embodiment of the utility model, so that those of ordinary skills can implement after studying this instructions carefully according to this.
Description of drawings
Fig. 1 is the planimetric map of the utility model;
Fig. 2 A is the local planimetric map that amplifies of the utility model;
Fig. 2 B is the local view of apparatus of the utility model;
Fig. 3 is the floor map of second kind of decorative pattern in the utility model non-flat forms district;
Fig. 4 is the floor map of the third decorative pattern in the utility model non-flat forms district;
Fig. 5 is the floor map of the 4th kind of decorative pattern in the utility model non-flat forms district.
Wherein, description of reference numerals is following:
Open cells 11
First surface 13
Uneven surface 15
Embodiment
Fig. 1, Fig. 2 A and Fig. 2 B are respectively planimetric map, partial enlarged drawing and the stereographic map of the utility model.The utility model is a metal light shield 1; Can apply in the processing procedure of various display or contact panel; Related product such as LCD, slimming display, LCD TV, slimming televisor, contact panel, touch control display, have the screen of touch controllable function ... etc.; Mainly be the film of deposition certain material on the glass substrate in processing procedure, refer to the SiO2 film in an embodiment.This metal light shield 1 is a framework, is formed with to be at least one open cells 11, and the pattern of the corresponding deposition of these open cells 11 shapes, this framework zone (being the zone of non-open cells) of covering is the circuit that desire forms in the processing procedure in the present embodiment.This metal light shield 1 has two facing surfaces, and wherein first surface 13 glass substrate that supplies to process with the desire applying that contacts is the surface of a smooth; Second surface 14 is in the opposite face of first surface 13, and the subregion of this second surface 14 can be by the clamping that clamping device contacts of equipment, and the subregion also can let the thin-film material deposition that is deposited on substrate surface in this in processing procedure.
It is to be formed with in this second surface 14 to be at least one non-flat forms district 15 that the utility model mainly designs, and in Fig. 1, representes its position with oblique line, and detailed shape sees also Fig. 2 A and Fig. 2 B.Contiguous this open cells 11 in these 15 positions, non-flat forms district, this non-flat forms district 15 is distributed in second surface 14 places of these open cells 11 peripheries in the form of a ring in the present embodiment.This non-flat forms district 15 is formed by 151 in the decorative pattern of solid, and so-called three-dimensional decorative pattern 151 is to be formed by different peak face pattern and the paddy face patterns of height.This non-flat forms district 15 is uniformly distributed in the annular section by successional decorative pattern 151 in the present embodiment; But not as limit; Can be because of there be the 1 original design of metal light shield the part position: desire the contact position or the relation vacancy that must reserve blank space is gone up in design like pilot hole, clamping device, but it is little best to heal at interval.Moreover this non-flat forms district 15 is formed by 151 in identical and repeated decorative pattern in the present embodiment, and purpose is that the effect that each zone can be reached is identical.
Moreover, originally executing in the instance, this non-flat forms district 15 only forms the regional area of second surface 14, but not as limit, also can be for containing all surface of second surface 14.In addition originally execute real in a plurality of non-flat forms district 15 be connected with each other on the distribution second surface 14, but be not as limit yet, also can be independent individually continuous each other, or a plurality of non-flat forms district 15 that distributing in single open cells 11 peripheries.
The pattern of this decorative pattern 151 can be simple geometric configuration, and for example this decorative pattern 151 sexangle ring concentricity by two, that be recess constitutes in this example, but not as limit.For example this decorative pattern of Fig. 3 151A is the sexangle ring of single depression.In Fig. 3 to Fig. 5, represent the position of caving in staggered profile line.This decorative pattern of Fig. 4 151B is the sexangle ring that the center sexangle that is depression, peripheral tool in addition are depression.151C is the sexangle of single depression like this decorative pattern of Fig. 5.Hence one can see that, and the utility model decorative pattern 151 also unrestrictedly must be specific pattern, also can be non-geometric pattern or the formed three-dimensional contouring of irregular pattern, or by three-dimensional contouring that one or more pattern constituted.
Moreover the metal light shield of the utility model is considered the restriction on its processing procedure, and its thickness must be at 0.15～0.7mm, and illustrated embodiments is 0.25mm, but changes for ease and reduce the probability of breaking when changing, and general used thickness is about 0.5mm.Desire to form three-dimensional decorative pattern 151 in the surface at so thin metal light shield 1, utilize traditional machining mode that suitable degree of difficulty is arranged, the consistance of surperficial decorative pattern everywhere is also more wayward.Therefore the utility model system adopts the chemical etching processing procedure to form this non-flat forms district 15 in second surface 14 places of metal light shield 1, so can make the three-dimensional pattern 151 that forms equiconsistency in the non-flat forms district 15 everywhere.
The purpose of the utility model design and effect are done an explanation with that: the metal light shield 1 of the utility model is possessed smooth first surface 13 and is contacted applying with the glass substrate of desire processing, can avoid this substrate of scratch, keeps the quality that must have on original processing procedure.And being formed with non-flat forms district 15 in second surface 14, this non-flat forms district 15 utilizes the three-dimensional pattern 151 that distributes on it can increase the surface area of second surface 14 originally and improves roughness, and is like this in carrying out the processing procedure that substrate processes; The surface area that increases can bear more thin-film material deposition wherein, coarse surface energy make deposition membraneous material wherein between be not easy to peel off, both add each other hold under; Can prolong the life cycle of this metal light shield 1, the metal light shield that is all shiny surface with traditional two sides is compared, and the utility model can increase by 500 above service time; Therefore; The number of times that metal light shield 1 is taken off in shutdown reduces, and improves the equipment mobility, lets equipment bring into play maximum production capacity; And reduce the number of times that washes down the metal light shield, also can reduce production cost.
The above person is merely the preferred embodiment of the utility model, is not the scope that is used for limiting the utility model embodiment.Be that all equalizations of being done according to the utility model claim change and modification, the claim that is all the utility model is contained.
Claims (9)
1. metal light shield; Be that a framework and being formed with is at least one open cells, this metal light shield include can with the glass substrate first surface in contact, and the position is the second surface of this first surface opposite face; This first surface is a shiny surface; It is characterized in that: be formed with on this second surface and be at least one non-flat forms district, contiguous this open cells of this non-flat forms zone position, three-dimensional decorative pattern is distributing in this non-flat forms district.
2. metal light shield as claimed in claim 1 is characterized in that, this non-flat forms district is distributed in the peripheral second surface place of this open cells in the form of a ring.
3. metal light shield as claimed in claim 2 is characterized in that, this non-flat forms district is distributed in this annular section by successional decorative pattern.
4. metal light shield as claimed in claim 1 is characterized in that, identical and repeated decorative pattern is distributing in this non-flat forms district.
5. metal light shield as claimed in claim 1 is characterized in that, the non-flat forms district that the chemical etching processing procedure processes in the second surface place is adopted in this non-flat forms district.
6. metal light shield as claimed in claim 1 is characterized in that this uneven surface is distributed in the regional area of this second surface.
7. metal light shield as claimed in claim 1 is characterized in that, whole second surface is contained in these uneven surface distributed areas.
8. metal light shield as claimed in claim 1 is characterized in that the thickness of this metal light shield is between 0.15～0.7mm.
9. metal light shield as claimed in claim 8 is characterized in that the thickness of this metal light shield is between 0.25～0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201813301U CN202548531U (en) | 2012-04-20 | 2012-04-20 | Metal photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201813301U CN202548531U (en) | 2012-04-20 | 2012-04-20 | Metal photomask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202548531U true CN202548531U (en) | 2012-11-21 |
Family
ID=47169140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201813301U Withdrawn - After Issue CN202548531U (en) | 2012-04-20 | 2012-04-20 | Metal photomask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202548531U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376668A (en) * | 2012-04-20 | 2013-10-30 | 世禾科技股份有限公司 | Metal light cover |
-
2012
- 2012-04-20 CN CN2012201813301U patent/CN202548531U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376668A (en) * | 2012-04-20 | 2013-10-30 | 世禾科技股份有限公司 | Metal light cover |
| CN103376668B (en) * | 2012-04-20 | 2015-03-25 | 世禾科技股份有限公司 | Metal light cover |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121121 Effective date of abandoning: 20150325 |
|
| RGAV | Abandon patent right to avoid regrant |