CN202531877U - Guide valve for vacuum system - Google Patents
Guide valve for vacuum system Download PDFInfo
- Publication number
- CN202531877U CN202531877U CN2012201352235U CN201220135223U CN202531877U CN 202531877 U CN202531877 U CN 202531877U CN 2012201352235 U CN2012201352235 U CN 2012201352235U CN 201220135223 U CN201220135223 U CN 201220135223U CN 202531877 U CN202531877 U CN 202531877U
- Authority
- CN
- China
- Prior art keywords
- valve
- holes
- adjustment disk
- vacuum system
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Electrically Driven Valve-Operating Means (AREA)
Abstract
The utility model discloses a guide valve for a vacuum system. The guide valve comprises a valve body, a valve stem and a stepping motor. One end of the valve stem is connected with the stepping motor through a coupler, a regulating disc is arranged at the other end of the valve stem, a plurality of through holes are distributed on the regulating disc, and the valve body is provided with a plurality of through holes corresponding to the through holes on the regulating disc. The stepping motor drives the regulating disc to rotate by a certain angle by the aid of the valve stem, and then the through holes on the regulating disc are overlapped with the through holes on the valve body to some degree, the overlapping degree of the through holes can be controlled by controlling rotating angle of the stepping motor, and thus, opening degree of the valve can be controlled.
Description
Technical field
The utility model relates to a kind of electric valve mechanism, particularly relates to a kind of vacuum system and uses the conductance valve.
Background technique
All kinds of vacuum systems can both provide a metastable vacuum environment according to usage requirement usually, and the total gas gas output when the vacuum chamber working pressure is only with the vacuum chamber stable state when stablizing and the effective pumping speed of vacuum pump are relevant.If the total gas gas output during the vacuum chamber stable state is constant, the effective pumping speed that so only need regulate vacuum pump can realize the adjusting of vacuum chamber working pressure.In fact the effective pumping speed of vacuum pump is relevant with the pumping speed and the pipeline conductance of vacuum pump; When the vacuum pump of configuration does not have change; Want to regulate the vacuum chamber working pressure and have only the pipeline of adjusting conductance; The size description of conductance is what of the throughput of the dirty element by the road of the certain condition of the pressure difference at pipeline parts two ends, and conventional at present pipe valve all can't accurately be regulated the pipeline fluid ability.Like its flow control component of fly valve is one the dish at inclination angle to be arranged, and disk is fixed on the axle, and controls switching with revolvable axle, and open and close is 90 degree rotations, and precision is relatively poor; Gate valve is to rely on valve rod to drive valve plate one lifting to come controlling opening of valve and keying state, and same flashboard position is difficult for accurately control, and degree of regulation is not enough.
Summary of the invention
But the task of the utility model is to provide a kind of simple in structure and degree of precision to regulate the electric valve mechanism of sending out aperture, is applicable to and regulates the vacuum chamber working pressure in the vacuum system.
The task of the utility model is accomplished like this, and vacuum system is used the conductance valve, comprises valve body; Valve rod and stepper motor; It is characterized in that an end of said valve rod is connected with stepper motor through coupling, its other end is provided with adjustment disk; Be furnished with several through holes on the adjustment disk, through hole is corresponding on said valve body and the adjustment disk is furnished with several through holes.
Preferably, the arc-shaped through-hole of the through hole on the said adjustment disk for circumferentially offering along adjustment disk.
Beneficial effect: the technological scheme that the utility model provides; Drive the adjustment disk rotating certain angle by stepper motor through valve rod; It is certain overlapping to make on the adjustment disk through hole on the through hole and valve body form; Control step motor rotation angle is a may command through hole overlapping degree, and then the aperture of control valve.
Description of drawings
Fig. 1 is the example structure schematic representation of the utility model.
Fig. 2 is the adjustment disk structural representation
Embodiment
Can be expressly understood the technical spirit and the beneficial effect of the utility model more for the auditor that the makes Patent Office especially public; The claimant general elaborates with embodiment's mode below; But embodiment's description all is not the restriction to the utility model scheme, any according to the utility model design done only for pro forma but not substantial equivalent transformation all should be regarded as the technological scheme category of the utility model.
Embodiment:
Ask for an interview accompanying drawing 1 and accompanying drawing 2; Stepper motor 1 is connected with valve rod 3 one ends through coupling 2, and the other end of valve rod 3 is fixed with adjustment disk 4, circumferentially offers arc-shaped through-hole 6 along adjustment disk 4; Valve body 5 is offered arc-shaped through-hole 7 accordingly with adjustment disk 4, and valve body 5 imports and outlet are arranged at an angle of 90.Drive the adjustment disk rotating certain angle by stepper motor through valve rod, it is certain overlapping to make on the adjustment disk that through hole on the through hole and valve body forms, and control step motor rotation angle is a may command through hole overlapping degree, and then the aperture of control valve.
Claims (2)
1. vacuum system is used the conductance valve; Comprise valve body (5), valve rod (3) and stepper motor (1) is characterized in that; One end of said valve rod (3) is connected with stepper motor (1) through coupling (2); Its other end is provided with adjustment disk (4), is furnished with several through holes (6) on the adjustment disk (4), said valve body (5) and adjustment disk (4) go up through hole (6) corresponding be furnished with several through holes (7).
2. vacuum system according to claim 1 is used the conductance valve, it is characterized in that the arc-shaped through-hole of the through hole (6) on the said adjustment disk (4) for circumferentially offering along adjustment disk (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201352235U CN202531877U (en) | 2012-04-01 | 2012-04-01 | Guide valve for vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201352235U CN202531877U (en) | 2012-04-01 | 2012-04-01 | Guide valve for vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202531877U true CN202531877U (en) | 2012-11-14 |
Family
ID=47133064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201352235U Expired - Lifetime CN202531877U (en) | 2012-04-01 | 2012-04-01 | Guide valve for vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202531877U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112833204A (en) * | 2021-01-08 | 2021-05-25 | 刘秀华 | Valve capable of quantitatively regulating fluid flow |
-
2012
- 2012-04-01 CN CN2012201352235U patent/CN202531877U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112833204A (en) * | 2021-01-08 | 2021-05-25 | 刘秀华 | Valve capable of quantitatively regulating fluid flow |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121114 |
|
| CX01 | Expiry of patent term |