CN202519329U - Plasma surface treatment device - Google Patents
Plasma surface treatment device Download PDFInfo
- Publication number
- CN202519329U CN202519329U CN2012201254726U CN201220125472U CN202519329U CN 202519329 U CN202519329 U CN 202519329U CN 2012201254726 U CN2012201254726 U CN 2012201254726U CN 201220125472 U CN201220125472 U CN 201220125472U CN 202519329 U CN202519329 U CN 202519329U
- Authority
- CN
- China
- Prior art keywords
- casing
- plasma
- plasma surface
- processing device
- surface processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
The utility model provides a plasma surface treatment device, comprising a box body, a vacuumizing system and a reaction gas chamber, wherein the vacuumizing system and the reaction gas chamber are connected with the box body. A plasma source electrode electric plate is arranged in the box body, and is connected with a high-frequency high-voltage power source. Plasma surface treatment is carried out by the following steps that: a work piece is arranged in the box body, and the box body is sealed; the vacuumizing system vaccumizes the box body; reaction gas is introduced from the reaction gas chamber to the box body; the high-frequency high-voltage power source outputs high-voltage power, so that the plasma source electrode electric plate excites plasmas, and the reaction gas is excited in an ionized manner to form surface free radicals by bombarding particles on the surface of the work piece. The plasma surface treatment device provided by the utility model is used for carrying out plasma surface treatment on the work piece, and used condition and working elements are environmentally friendly and harmless, so that no harmful waste gas and liquid can be discharged. Therefore, the plasma surface treatment device accords with a green and environmentally friendly production principle.
Description
[technical field]
The utility model relates to the workpiece surface processing technique field, refers in particular to a kind of using plasma surface-treated processing unit (plant).
[background technology]
Product surface functional required increasingly high now because of the human consumer; The process for treating surface demand that is manufactured with functions such as dustproof, antifouling, easy clean, anti-electrostatic day by day increases; Especially the product of silastic polymer, the siloxanes contact Si O that the structure of silastic polymer is forms, and is to belong to the Si-O of siloxanes mechanism key; And the oxygen essence is to have negatron; Will directly be attracted on the silica gel surface so run into the grit that has positive charge, product attracts a large amount of dust, can influence the ornamental and the use properties of product.The silica gel mirror leg cover that for example on glasses, uses usually can attract a large amount of dust to have a strong impact on the glasses outward appearance, and it is very unclean to wear unhygienic sensation, influences the comfort level of wearing yet.
On the existing process for treating surface of present industry member, just the effect of organic coating (Singapore frame) is more remarkable, and unfortunately, the production of organic coating (Singapore frame) all can discharge chemical waste fluid and waste gas usually, does not meet environmental protection idea now fully.And do not see have other environmental protection, performance is good, efficient is high, handle the good process for treating surface of effect.
Therefore, provide plasma surface processing device a kind of environmental protection, that treatment effect is good real for necessary.
[utility model content]
The purpose of the utility model is to provide a kind of environmental protection, the dustproof good plasma surface processing device of treatment effect.
For realizing the utility model purpose, following technical scheme is provided:
The utility model provides a kind of plasma surface processing device, and it comprises casing, the pumped vacuum systems that is connected with casing and reaction gas chamber, is provided with plasma source electrode electroplax in this casing, and this plasma source electrode electricity plate is connected with high-frequency and high-voltage power supply.Adopt this device to carry out the workpiece plasma surface treatment, condition of being utilized and job element all are environmentally friendly, and no harmful exhaust waste liquid is discharged, and meet the production principle of environmental protection.
Among some embodiment, the indoor hydrogen that is equipped with of this reactant gases.
Among some embodiment, this high-frequency high-voltage source power is 1W/cm2.
Preferably, this pumped vacuum systems comprises rotating machinery vacuum pump and the Roots vacuum pump that is in series.Preferably, be connected through the vacuum flange seat between this pumped vacuum systems and the casing, or be connected through the vacuum flange seat between this pumped vacuum systems and the casing and this pumped vacuum systems and casing between be connected with pneumatic vacuum pressure valve, thereby control vacuumizes operation.
Preferably, the intravital both sides of case locular wall respectively is provided with two pairs of plasma source electrode electroplaxs of ability activated plasma accordingly, and this plasma source electrode electricity plate connects two high-frequency and high-voltage power supplies.This plasma source electrode electricity plate comprises battery lead plate and current conducting rod, and outside current conducting rod one end of casing is the power supply interface that connects high-frequency and high-voltage power supply, to produce plasma body.
Preferably, be provided with two-dimentional workpiece turntable in this casing, this workpiece turntable is connected with motor drive shaft through gear.Preferably, this two dimension workpiece turntable comprises the rotation of revolution and two dimensions of rotation.Further, this workpiece turntable is provided with a plurality of hanger rotating shafts, and a plurality of workpiece can hang over simultaneously realizes the two dimension rotation in the hanger rotating shaft, carry out plasma surface treatment simultaneously.
Preferably, this casing also is connected with vacuumometer, is used for the intravital suction pressure numerical value of detection case.Preferably, this casing also is connected with gas meter, is used to detect the intravital flow rate of reactive gas of input magazine.Preferably, this casing also is connected with purging valve, is used for replying barometric point in the air admission casing and then opening fire door.
The contrast prior art the utlity model has following advantage:
The utility model plasma surface processing device carries out the workpiece plasma surface treatment; To workpiece surface modification; Do not relate to the discharging of any waste gas, waste water in the process, condition of being utilized and job element all are environmentally friendly, meet the production principle of environmental protection.This method makes workpiece surface have dustproof, anti-electrostatic, is prone to cleaning function workpiece surface modification, improves the value added of product.
[description of drawings]
Fig. 1 is the structural representation of the utility model plasma surface processing device;
Fig. 2 is the vertical view of the casing of the utility model plasma surface processing device;
Fig. 3 is employed hanger frame of the utility model plasma surface treatment and hanger rotating shaft synoptic diagram;
Fig. 4 is employed hanger frame of the utility model plasma surface treatment and hanger rotating shaft vertical view;
Fig. 5 is that the utility model plasma surface processing device is at the vacuum suction synoptic diagram;
Fig. 6 is a chemical reaction ionization decomposing schematic representation in the utility model plasma surface processing device;
Fig. 7 is that the utility model plasma surface processing device is being realized function of surface modification synoptic diagram.
[embodiment]
See also Fig. 1 and Fig. 5; The utility model plasma surface processing device comprises casing 1; Pumped vacuum systems that is connected with casing 1 and reaction gas chamber 9 are provided with plasma source electrode electroplax 2 in this casing, this plasma source electrode electricity plate is connected with high-frequency and high-voltage power supply 30.Wherein, this casing 1 is the design of a drum pattern, and the box body wall chamber is to adopt stainless material to process, and comparatively meets the actual needs of the utility model plasma reaction.In this reaction gas chamber 9 reactant gases is housed, hydrogen generally is housed.
This casing 1 is provided with the vacuum flange seat of standard, and connecting through this vacuum flange seat has one group of pumped vacuum systems, and this pumped vacuum systems comprises the oil seal type rotating machinery vacuum pump 3 and Roots vacuum pump 4 that links to each other and make up with series system.
In the present embodiment, the combination of this pumped vacuum systems has an oil seal type rotating machinery vacuum pump 2x70 model, and its pumping speed has 70L/S, and limit suction pressure reaches 6.0E-2Pa, and rotating speed has 450r/min, and this its function is as the preliminary vacuum operation of bleeding.The bleeding point position of this oil seal type rotating machinery vacuum pump also connects a flange seat; Just connect Roots vacuum pump ZJP-150 model on this flange seat, its vacuum pump ability pumping speed 150L/S, limit suction pressure 3.0E-2Pa; Rotating speed has 1470r/min; This its function is used for carrying out in the scope under the low pressure vacuum suction, quickens slightly to take out progression pressure, thereby as the vacuum pump of supercharging.The bleeding point of this Roots vacuum pump connects a pneumatic vacuum pressure valve 6, between be connected with vacuum pipe 5 and be docked with plasma body vacuum chamber 1.
The both sides locular wall of this casing 1 respectively is provided with two groups of relative plasma sources; Such as Fig. 2 demonstration, plasma source electrode electroplax 2 combination includes battery lead plate and current conducting rod, casing 1 outside current conducting rod one end is the power supply interface; Be connected with two high-frequency and high-voltage power supplies 30, to produce plasma body.
This casing 1 bottom is provided with the two-dimentional workpiece turntable 10 that revolution adds rotation; Lean on one group of motor to workpiece turntable 10 two-dimentional turning axle to be provided by the outside through gear drive; The workpiece turntable is put on the shelf and is provided with 20 hanger rotating shafts 11 and places hanger frame 12; A plurality of workpiece can hang over simultaneously realizes the two dimension rotation in the hanger rotating shaft, carry out plasma surface treatment simultaneously, like Fig. 3 and shown in Figure 4; All workpiece are all hung on the hanger frame 12, and purpose is that workpiece can both receive the processing of plasma body aura comprehensively and be activated its surface of modification effectively.
This casing 1 is provided with one group of vacuumometer, is used to detect the suction pressure numerical value in the Vakuumkammer; And be provided with quality gas under meter 8 and purging valve 7, be used for the Detection & Controling when Vakuumkammer inflated.
Adopt the said plasma surface processing device of the utility model that workpiece is carried out the operation of plasma surface treatment, it mainly comprises the steps:
(1) place in the casing workpiece and airtight casing;
(2) pumped vacuum systems vacuumizes processing to casing;
(3) in casing, add reactant gases from reaction gas chamber;
(4) high-frequency and high-voltage power supply output high voltage electric makes plasma source electrode electroplax activated plasma, makes reactant gases excited by ionization, bombardment workpiece surface particle and form surface free radical.
Particularly, this plasma body surface treatment is following:
I) earlier with workpiece (like the silica gel workpiece) scrubbing, deoil, dry;
II) be positioned over workpiece turntable 10 in the casing 1 then, shut the door for vacuum chamber closed box;
III) through vacuum system casing is vacuumized then, treat that the vacuum tightness of Vakuumkammer reaches the number of degrees of 8.0 * 10-2Pa, as shown in Figure 5;
IV) in casing 1, add reactant gases (like hydrogen) to 20-80Pa from reaction gas chamber 8 then;
V) high-frequency and high-voltage power supply output high voltage electric stimulates the electrode electroplax of plasma source; The about 1W/cm2 of power comes activated plasma, and workpiece 20 sees through workpiece turntable 10 and is exposed to plasma body aura scope; Cause sample surfaces and reactant gases and receive chemical reaction ionization decomposition, see also Fig. 6;
After entering reactant gases (hydrogen) is excited by ionization; Bombardment has been broken surperficial chemical bond at the particle on silica gel surface, causes having formed surface free radical; These surperficial radicals become to have hydrogen essence key; Be plasma body active specy reaction, form effective chemical functional group, realize the function of surface modification.Make the silica gel surface exist the hydrogen essence to become positive pole, can prevent that grit from attracting the surface, reaches dust reduction capability.
The practical Surface Treatment with Plasma technical equipment of the utility model can be widely used in the solid surface of any product; Like metal, glass, plastic cement, Zylox etc.; And the surface modification technology that uses this equipment to carry out can give the sample surfaces additional function, like anti-electrostatic, dustproof etc.
The finished product test method:
Adopt a light and handy hand-held electrostatic position survey meter to measure the negative ions difference value of surface treated product, useful range with+/-20KV numerical value, about 1 inch of the tested object of distance.Testing method is to need untreated sample and the sample handled has been made comparisons and decided, and untreated sample can be measured deflection negative numerical value-V, and the sample of having handled can be measured trend 0 or to positive.
The above is merely the preferred embodiment of the utility model, and the protection domain of the utility model is not limited thereto, and anyly all belongs within the utility model protection domain based on the equivalent transformation on the utility model technical scheme.
Claims (8)
1. a plasma surface processing device is characterized in that, it comprises casing, the pumped vacuum systems that is connected with casing and reaction gas chamber, is provided with plasma source electrode electroplax in this casing, and this plasma source electrode electricity plate is connected with high-frequency and high-voltage power supply.
2. plasma surface processing device as claimed in claim 1; It is characterized in that; This pumped vacuum systems comprises rotating machinery vacuum pump and the Roots vacuum pump that is in series; Be connected through the vacuum flange seat between this pumped vacuum systems and the casing, or be connected through the vacuum flange seat between this pumped vacuum systems and the casing and this pumped vacuum systems and casing between be connected with pneumatic vacuum pressure valve.
3. plasma surface processing device as claimed in claim 1 is characterized in that, this plasma source electrode electricity plate comprises battery lead plate and current conducting rod.
4. plasma surface processing device as claimed in claim 1 is characterized in that, is provided with two-dimentional workpiece turntable in this casing, and this workpiece turntable is connected with motor drive shaft through gear.
5. plasma surface processing device as claimed in claim 4 is characterized in that, this workpiece turntable is provided with a plurality of hanger rotating shafts.
6. plasma surface processing device as claimed in claim 1 is characterized in that, this casing also is connected with vacuumometer and/or gas meter and/or purging valve.
7. plasma surface processing device as claimed in claim 1 is characterized in that, this reactant gases is a hydrogen.
8. plasma surface processing device as claimed in claim 1 is characterized in that, this high-frequency high-voltage source power is 1W/cm2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201254726U CN202519329U (en) | 2012-03-29 | 2012-03-29 | Plasma surface treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201254726U CN202519329U (en) | 2012-03-29 | 2012-03-29 | Plasma surface treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202519329U true CN202519329U (en) | 2012-11-07 |
Family
ID=47102289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201254726U Expired - Fee Related CN202519329U (en) | 2012-03-29 | 2012-03-29 | Plasma surface treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202519329U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560439A (en) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | Method and device for carrying out surface treatment on plasma |
| CN106182729A (en) * | 2016-08-31 | 2016-12-07 | 南京苏曼等离子科技有限公司 | Normal atmosphere jet lower temperature plasma technology caulking gum processing equipment and method |
| CN108603292A (en) * | 2016-01-25 | 2018-09-28 | 黑拉有限责任两合公司 | For carrying out the method that layer is arranged on surface to component under vacuum |
-
2012
- 2012-03-29 CN CN2012201254726U patent/CN202519329U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560439A (en) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | Method and device for carrying out surface treatment on plasma |
| CN108603292A (en) * | 2016-01-25 | 2018-09-28 | 黑拉有限责任两合公司 | For carrying out the method that layer is arranged on surface to component under vacuum |
| CN108603292B (en) * | 2016-01-25 | 2020-08-04 | 黑拉有限责任两合公司 | Method for surface application of layers to components under vacuum |
| CN106182729A (en) * | 2016-08-31 | 2016-12-07 | 南京苏曼等离子科技有限公司 | Normal atmosphere jet lower temperature plasma technology caulking gum processing equipment and method |
| CN106182729B (en) * | 2016-08-31 | 2018-12-04 | 南京苏曼等离子科技有限公司 | Normal atmosphere jet stream lower temperature plasma technology seal rubber processing equipment and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202519329U (en) | Plasma surface treatment device | |
| CN201906534U (en) | Vacuum dedusting system for chemical vapor deposition technology | |
| CN104211137A (en) | Plasma water treatment device | |
| CN208866048U (en) | One kind being used for rotary ton bucket Spray-cleaning Machine | |
| CN102560439A (en) | Method and device for carrying out surface treatment on plasma | |
| CN207702611U (en) | A kind of environmental protection air air purifying apparatus for chemical plant | |
| CN108786508B (en) | Test dust generation device and method for simulating particle size distribution characteristics of atmospheric dust | |
| CN204247022U (en) | The waste gas treatment equipment that biofiltration is integrated with low temperature plasma | |
| CN203750052U (en) | Portable static negative ion air purification breathing device | |
| CN203803245U (en) | All-in-one machine for waste gas purification | |
| CN104299882A (en) | Surface plasma processing device for powder materials | |
| CN203379767U (en) | Air purification device | |
| CN204684881U (en) | Environment-friendly type is without pump coating cloud dust processing equipment | |
| CN204382306U (en) | A kind of glove box with plasma treatment function | |
| CN207958048U (en) | A kind of ultra-pure water purification apparatus | |
| CN207823550U (en) | Without pipeline self-cleaning type vent cabinet | |
| CN103537220A (en) | Energy-saving and environment-friendly liquid storage pot | |
| CN202279857U (en) | Auxiliary plasma chemical vapor deposition equipment | |
| CN207479141U (en) | A kind of cleaning device for chemical barrel | |
| CN206199211U (en) | A kind of reactor emission-control equipment for benzoyl area kind product | |
| CN204149551U (en) | A kind of repacking plasma generator for silicon rubber insulator surface modification | |
| CN207153426U (en) | A kind of plasma cleaner | |
| CN214233471U (en) | Monitoring system of distributing type exhaust-gas treatment efficiency and emission | |
| CN203816417U (en) | Smoke waste gas treatment device | |
| CN203342612U (en) | Energy-saving waste gas smoke-exhausting and sterilizing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121107 Termination date: 20180329 |