CN202465287U - Polysilicon hydrogenation furnace electrode sealing device - Google Patents
Polysilicon hydrogenation furnace electrode sealing device Download PDFInfo
- Publication number
- CN202465287U CN202465287U CN201120416364XU CN201120416364U CN202465287U CN 202465287 U CN202465287 U CN 202465287U CN 201120416364X U CN201120416364X U CN 201120416364XU CN 201120416364 U CN201120416364 U CN 201120416364U CN 202465287 U CN202465287 U CN 202465287U
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- China
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- electrode
- hydrogenation furnace
- wound gasket
- ceramic ring
- copper washer
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Abstract
The utility model provides a polysilicon hydrogenation furnace electrode sealing device which comprises an electrode, a hydrogenation furnace hearth, metal graphite wound gaskets, a ceramic ring, a polytetrafluoroethylene sheath, a copper washer and a fastener, wherein the electrode body is arranged in an electrode hole in the hydrogenation furnace hearth; the electrode body comprises an electrode upper part higher than the hydrogenation furnace hearth, and an electrode lower part lower than the hydrogenation furnace hearth; the electrode upper part is sealed by the metal graphite wound gaskets and the ceramic ring; the electrode lower part is sealed by the polytetrafluoroethylene sheath and the copper washer; and the fastener clamps and connects the electrode body, the hydrogenation furnace hearth, the metal graphite wound gasket, the ceramic ring, the polytetrafluoroethylene sheath and the copper washer. The electrode upper part is sealed by the upper and lower metal graphite wound gaskets and the insulating ceramic ring in the middle, so that the utility model has the advantages of high temperature resistance and long service life; and the electrode lower part is sealed by the polytetrafluoroethylene sheath and the copper washer, so that the utility model has the advantage of simple sealing form and can achieve favorable sealing effect.
Description
Technical field
The utility model relates to electrode sealing construction, particularly, relates to the polysilicon hydrogenation furnace electrode seals.
Background technology
Present main flow production of polysilicon technology both domestic and external is the improvement Siemens Method, and this method obtains high purity polycrystalline silicon through trichlorosilane under the hot conditions and hydrogen generation chemical vapour deposition reaction, produces a large amount of silicon tetrachloride as by-product simultaneously and needs recycle.In hydrogenation process, silicon tetrachloride is delivered to vapourizing unit vaporize, and mix according to a certain percentage with hydrogen, under specified temperature and flow, send into hydrogenation furnace.In hydrogenation furnace, graphite heating body uprightly is fixed on the electrode, is heated to more than 1150 ℃ through the energising of electrode pair heating member, and under hot conditions, silicon tetrachloride is converted into production of polysilicon desired raw material trichlorosilane.The sealing of hydrogenation furnace chassis top electrode has important relation for the operation of producing, in the prior art electrode sealing bad, the leakage of material or the decline of electric insulation can appear, cause producing and can't move.
The utility model content
To defective of the prior art, the purpose of the utility model provides a kind of polysilicon hydrogenation furnace electrode seals, can carry out good sealing by counter electrode, and high temperature resistant, prolongs the work-ing life of sealing element, makes polysilicon hydrogenation furnace stable.
An aspect according to the utility model; The polysilicon hydrogenation furnace electrode seals is provided; Comprise electrode body; Also comprise hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover, copper washer and fastening piece, wherein, said electrode body is placed in the electrode hole on said hydrogenation furnace chassis; Said electrode body comprises electrode top that exceeds said hydrogenation furnace chassis and the electrode bottom that is lower than said hydrogenation furnace chassis; Said electrode top is sealed by said metallic graphite carbon wound gasket and ceramic ring, and said electrode bottom is sealed by said tetrafluoro cover and copper washer, and said fastening piece clamps said electrode body, hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover and copper washer and connects.
Preferably; Said electrode top is nested with lower metal graphite wound gasket, ceramic ring and upper strata metallic graphite carbon wound gasket from lower to upper successively, and said lower metal graphite wound gasket, ceramic ring and upper strata metallic graphite carbon wound gasket seal said electrode top.
Preferably, said electrode bottom is nested with tetrafluoro cover and copper washer from top to bottom successively, and said tetrafluoro cover and copper washer seal said electrode bottom.
Preferably, the upper end of said electrode body is provided with limiting section, and said fastening piece comprises fitting nut, and wherein, said hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover and copper washer are between said limiting section and fitting nut.
Preferably, the inboard of said metallic graphite carbon wound gasket and the outside are respectively arranged with the reinforcement steel ring.
The utility model comprises electrode body, metallic graphite carbon wound gasket, insulating ceramic ring, tetrafluoro cover, copper washer and fitting nut.Electrode body is placed in the electrode hole of hydrogenation furnace chassis, and electrode body need seal comprises and exceed on the chassis and be lower than two parts under the chassis, i.e. electrode top and electrode bottom.Be higher than top, chassis, sealed by upper and lower double layer of metal graphite wound gasket and the insulating ceramic ring that is clipped in the middle, because temperature is very high in the hydrogenation furnace, ceramic ring and metallic graphite carbon wound gasket are all high temperature resistant, and long service life helps the steady running of hydrogenation furnace.Being lower than bottom, hydrogenation furnace chassis,, can reach good sealing effectiveness so use the tetrafluoro cover of tetrafluoroethylene material to seal because temperature is lower and the chassis water quench arranged.Electrode is fixed by fitting nut bottom, and each sealing element is compressed.
Description of drawings
Through reading the detailed description of non-limiting example being done with reference to following accompanying drawing, it is more obvious that the other features, objects and advantages of the utility model will become:
Fig. 1 illustrates the structure principle chart according to the polysilicon hydrogenation furnace electrode seals of the utility model;
Fig. 2 illustrates the structure principle chart according to metallic graphite carbon wound gasket in the polysilicon hydrogenation furnace electrode seals of the utility model.
Embodiment
The polysilicon hydrogenation furnace electrode seals that provides according to the utility model; Comprise electrode body 1; Also comprise hydrogenation furnace chassis 7, metallic graphite carbon wound gasket, ceramic ring 3, tetrafluoro cover 4, copper washer 5 and fastening piece; Wherein, Said electrode body 1 is placed in the electrode hole on said hydrogenation furnace chassis 7, and said electrode body 1 comprises electrode top that exceeds said hydrogenation furnace chassis 7 and the electrode bottom that is lower than said hydrogenation furnace chassis 7, and said electrode top is sealed by said metallic graphite carbon wound gasket and ceramic ring 3; Said electrode bottom is sealed with copper washer 5 by said tetrafluoro cover 4, and said fastening piece clamps said electrode body 1, hydrogenation furnace chassis 7, metallic graphite carbon wound gasket, ceramic ring 3, tetrafluoro cover 4 and copper washer 5 and connects.
Particularly; Said electrode top is nested with lower metal graphite wound gasket 21, ceramic ring 3 and upper strata metallic graphite carbon wound gasket 22 from lower to upper successively, and said lower metal graphite wound gasket 21, ceramic ring 3 and 22 pairs of said electrodes of metallic graphite carbon wound gasket top, upper strata seal.Said electrode bottom is nested with tetrafluoro cover 4 and copper washer 5 from top to bottom successively, and said tetrafluoro cover 4 and 5 pairs of said electrodes of copper washer bottom seal.
More particularly; The upper end of said electrode body is provided with limiting section 10; Said fastening piece comprises fitting nut 6, and wherein, said hydrogenation furnace chassis 7, metallic graphite carbon wound gasket, ceramic ring 3, tetrafluoro cover 4 and copper washer 5 are between said limiting section 10 and fitting nut 6.Preferably; As shown in Figure 2, the inboard of said metallic graphite carbon wound gasket and the outside are respectively arranged with strengthens steel ring 8, and the metallic graphite carbon wound gasket that seals has adopted inside and outside steel ring to strengthen; The centre is the metallic graphite carbon wound gasket, and inner ring and outer ring are the stainless steel stiffening ring.
Electrode top is sealed by upper and lower double layer of metal graphite wound gasket and intermediary insulating ceramic ring in the utility model; High temperature resistant, long service life, the electrode bottom is sealed by the tetrafluoro cover and the copper washer of tetrafluoroethylene material; Seal form is simple, can reach good sealing effectiveness.
More than the specific embodiment of the utility model is described.It will be appreciated that the utility model is not limited to above-mentioned specific implementations, those skilled in the art can make various distortion or modification within the scope of the claims, and this does not influence the flesh and blood of the utility model.
Claims (5)
1. polysilicon hydrogenation furnace electrode seals; Comprise electrode body; It is characterized in that; Also comprise hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover, copper washer and fastening piece, wherein, said electrode body is placed in the electrode hole on said hydrogenation furnace chassis; Said electrode body comprises electrode top that exceeds said hydrogenation furnace chassis and the electrode bottom that is lower than said hydrogenation furnace chassis; Said electrode top is sealed by said metallic graphite carbon wound gasket and ceramic ring, and said electrode bottom is sealed by said tetrafluoro cover and copper washer, and said fastening piece clamps said electrode body, hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover and copper washer and connects.
2. polysilicon hydrogenation furnace electrode seals according to claim 1; It is characterized in that; Said electrode top is nested with lower metal graphite wound gasket, ceramic ring and upper strata metallic graphite carbon wound gasket from lower to upper successively, and said lower metal graphite wound gasket, ceramic ring and upper strata metallic graphite carbon wound gasket seal said electrode top.
3. polysilicon hydrogenation furnace electrode seals according to claim 1 and 2 is characterized in that, said electrode bottom is nested with tetrafluoro cover and copper washer from top to bottom successively, and said tetrafluoro cover and copper washer seal said electrode bottom.
4. polysilicon hydrogenation furnace electrode seals according to claim 1; It is characterized in that; The upper end of said electrode body is provided with limiting section; Said fastening piece comprises fitting nut, and wherein, said hydrogenation furnace chassis, metallic graphite carbon wound gasket, ceramic ring, tetrafluoro cover and copper washer are between said limiting section and fitting nut.
5. polysilicon hydrogenation furnace electrode seals according to claim 1 is characterized in that the inboard of said metallic graphite carbon wound gasket and the outside are respectively arranged with the reinforcement steel ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120416364XU CN202465287U (en) | 2011-10-27 | 2011-10-27 | Polysilicon hydrogenation furnace electrode sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120416364XU CN202465287U (en) | 2011-10-27 | 2011-10-27 | Polysilicon hydrogenation furnace electrode sealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202465287U true CN202465287U (en) | 2012-10-03 |
Family
ID=46913467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120416364XU Expired - Lifetime CN202465287U (en) | 2011-10-27 | 2011-10-27 | Polysilicon hydrogenation furnace electrode sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202465287U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102616783A (en) * | 2011-10-27 | 2012-08-01 | 内蒙古神舟硅业有限责任公司 | Polysilicon hydrogenation furnace electrode sealing structure |
| CN107148399A (en) * | 2014-11-17 | 2017-09-08 | 瓦克化学股份公司 | Insulation and the equipment of the electrode clamping mechanism in sealing CVD reactors |
-
2011
- 2011-10-27 CN CN201120416364XU patent/CN202465287U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102616783A (en) * | 2011-10-27 | 2012-08-01 | 内蒙古神舟硅业有限责任公司 | Polysilicon hydrogenation furnace electrode sealing structure |
| CN107148399A (en) * | 2014-11-17 | 2017-09-08 | 瓦克化学股份公司 | Insulation and the equipment of the electrode clamping mechanism in sealing CVD reactors |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121003 |
|
| CX01 | Expiry of patent term |