CN202461082U - Swinging blowing mechanism for ultrasonic cleaning machine - Google Patents
Swinging blowing mechanism for ultrasonic cleaning machine Download PDFInfo
- Publication number
- CN202461082U CN202461082U CN2012200672679U CN201220067267U CN202461082U CN 202461082 U CN202461082 U CN 202461082U CN 2012200672679 U CN2012200672679 U CN 2012200672679U CN 201220067267 U CN201220067267 U CN 201220067267U CN 202461082 U CN202461082 U CN 202461082U
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- CN
- China
- Prior art keywords
- blowing pipeline
- air blowing
- cylinder
- guide rail
- cleaning machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a swinging blowing mechanism for an ultrasonic cleaning machine. The swinging blowing mechanism for the ultrasonic cleaning machine is arranged above a cleaning tank, and is characterized by comprising a cylinder supplying power, a blowing pipeline which transversely extends and is communicated with a compressed air source, nozzles which are axially arranged along the blowing pipeline and are communicated with the inside of the blowing pipeline, and a guide rail which is arranged on a rack and longitudinally extends, and the blowing pipeline is in transmission connection with a piston rod of the cylinder; a sliding block is arranged on one end part of the blowing pipeline, and is arranged on the guide rail in a sliding and matching way, and the blowing pipeline is horizontally arranged; and the guide rail and the piston rod of the cylinder are arranged in parallel. According to the swinging blocking mechanism, the blowing pipeline can be moved back and forth by the cylinder and the slide rail to achieve the purpose that workpieces are uniformly blown, the production efficiency is improved, and the production cost is reduced.
Description
Technical field
The utility model relates to a kind of swing blower mechanism of supersonic wave cleaning machine.
Background technology
Along with the extensive use and the development of semiconductor of various semiconductor products, the batch process scale of semiconductor product is increasing.For semiconductor article; For example non-crystalline silicon solar panel, organic light emitting display, liquid crystal display device etc.; It is produced and all need utilize glass etc. as matrix, on matrix, carries out working procedures and then forms plural layers, and technologies such as the plated film that relates in the processing step, photoetching, etching can produce dust attached on the matrix; And then influencing the cleannes of matrix, the cleannes of matrix have significant impact to the quality of product.Therefore, be to be penetrated with cleaning step in the steps such as plated film, photoetching and etching, to keep matrix surface cleanness in process of production.In its production process, except cleaning, another important procedure is exactly air-dry.As if the residual cleaning fluid or the globule on the described glass substrate, will influence the quality of semiconductor product.For addressing the above problem; Usually can set up a plurality of air-dry apparatus in addition and come air-dry described glass basis, but just cause the complex structure of whole cleaning systems like this, and increase production cost; And existing air-dry apparatus can not reach whole work-piece is evenly dried, and has reduced its production efficiency.
Summary of the invention
The purpose of the utility model provides a kind of swing blower mechanism of supersonic wave cleaning machine, can evenly dry to workpiece.
In order to realize above-mentioned utility model purpose; The utility model adopts following technical scheme: a kind of swing blower mechanism of supersonic wave cleaning machine; Be arranged on the top of rinse bath; It comprises the cylinder that is used to provide power, along horizontal expansion and the air blowing pipeline that is connected with compressed air source, along described air blowing pipeline axially-aligned and with the nozzle of described air blowing pipeline internal communication, the guide rail that is arranged on the frame and extends longitudinally; The piston rod of described air blowing pipeline and described cylinder is in transmission connection, and an end of described air blowing pipeline is provided with slide block, and described slide block is slidingly fitted on the described guide rail; Described gassing pipe is and is horizontally disposed with, and the piston rod of described guide rail and described cylinder parallels setting.
Preferably, the cross section of described air blowing pipeline is a rectangle.
Preferably, described nozzle comprises that the thin tube part that is connected with described air blowing pipeline and external diameter are along laterally becoming big equal wind portion.
The utility model compared with prior art; Have following advantage: the utility model adopts cylinder and slide rail that the air blowing pipeline is moved around; In moving process, make air-flow can have the good effect that dries up to the hydrops in some dead angles, blind hole, the narrow crack; Can reach the purpose that workpiece is evenly dried, improve production efficiency, reduce production cost.
Description of drawings
Accompanying drawing 1 is the front view of the utility model;
Accompanying drawing 2 is the piston rod normal condition right view of the utility model;
Accompanying drawing 3 stretches out the state right view for the piston rod of the utility model.
In the accompanying drawing, 1, cylinder; 2, inflatable body; 3, slide block; 4, guide rail; 5, piston rod; 6, air blowing pipeline; 7, nozzle; 8, workpiece basket; 9, equal wind portion; 10, thin tube part.
The specific embodiment
For the purpose, technical scheme and the advantage that make the utility model clearer; Below in conjunction with accompanying drawing the utility model is done further to describe in detail; Wherein " horizontal stroke " described in the specification is to being meant the left and right directions shown in the accompanying drawing 1, and " the indulging " shown in the specification is to being meant the left and right directions shown in the accompanying drawing 2.
Like accompanying drawing 1, shown in 2, the utility model is arranged on the rinse bath top of supersonic wave cleaning machine, is used for making it air-dry to the blowing of the workpiece in the workpiece basket in the rinse bath 8.The swing blower mechanism of the utility model comprises cylinder 1, inflatable body 2, slide block 3 and guide rail 4.Cylinder 1 comprises piston rod 5, cylinder barrel, piston block and sealing device (not drawing among the figure), and cylinder 1 is positioned at same plane with inflatable body 2, and piston rod 5 links together with inflatable body 2.Inflatable body 2 comprises air blowing pipeline 6 and nozzle 7, and nozzle 7 has a plurality of, and axially-aligned is positioned at air blowing pipeline 6 on the part of blowing groove and with the inboard of air blowing pipeline 6 and is communicated with, nozzle 7 openings down, over against workpiece basket 8.Air blowing pipeline 6 is connected with extraneous blowing plant; The cross section of air blowing pipeline 6 is rectangular, and described nozzle 7 comprises the thin tube part 10 that is connected with described air blowing pipeline 6 and external diameter along laterally becoming big equal wind portion 9, and the compressed air in the air blowing pipeline 6 still keep certain air pressure after getting into thin tube part 10; Get into after the equal wind portion 9; Gas spreads rapidly, air pressure is reduced, thereby workpiece is evenly dried.
The end that is positioned at the air blowing pipeline 6 in the blowing groove outside is fixed with slide block 3; Two slide blocks 3 are set in the present embodiment; The midway of two slide blocks 3 on air blowing pipeline 6 is fixedly connected with the piston rod 5 of cylinder 1, and air blowing pipeline 6 should vertically be connected fixing with piston rod 5.Slide block 3 is sleeved on the guide rail 4 slidably, and guide rail 4 is fixed with respect to ground, the installation site of guide rail 4 and cylinder 1 should with wherein two parallel sidewalls of blowing slot, air blowing pipeline 6 is vertical with described these two sidewalls.When work, air blowing pipeline 6 is done return motion along guide rail 4 under the promotion of cylinder 1, and nozzle 7 then can done return motion under the drive of air blowing pipeline 6 above workpiece basket 8, has so just reached the purpose that workpiece is evenly dried.
The foregoing description only is the technical conceive and the characteristics of explanation the utility model, and its purpose is to let the personage who is familiar with this technology can understand content of the utility model and enforcement according to this, can not limit the protection domain of the utility model with this.All equivalences of being done according to the utility model spirit change or modify, and all should be encompassed within the protection domain of the utility model.
Claims (3)
1. the swing blower mechanism of a supersonic wave cleaning machine; Be arranged on the top of rinse bath; It is characterized in that: it comprise the cylinder that is used to provide power, along horizontal expansion and the air blowing pipeline that is connected with compressed air source, along described air blowing pipeline axially-aligned and with the nozzle of described air blowing pipeline internal communication, the guide rail that is arranged on the frame and extends longitudinally; The piston rod of described air blowing pipeline and described cylinder is in transmission connection, and an end of described air blowing pipeline is provided with slide block, and described slide block is slidingly fitted on the described guide rail; Described gassing pipe is and is horizontally disposed with, and the piston rod of described guide rail and described cylinder parallels setting.
2. the swing blower mechanism of supersonic wave cleaning machine according to claim 1, it is characterized in that: the cross section of described air blowing pipeline is a rectangle.
3. the swing blower mechanism of supersonic wave cleaning machine according to claim 1 is characterized in that: described nozzle comprises that the thin tube part that is connected with described air blowing pipeline and external diameter are along laterally becoming big equal wind portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200672679U CN202461082U (en) | 2012-02-28 | 2012-02-28 | Swinging blowing mechanism for ultrasonic cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200672679U CN202461082U (en) | 2012-02-28 | 2012-02-28 | Swinging blowing mechanism for ultrasonic cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202461082U true CN202461082U (en) | 2012-10-03 |
Family
ID=46909280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200672679U Expired - Fee Related CN202461082U (en) | 2012-02-28 | 2012-02-28 | Swinging blowing mechanism for ultrasonic cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202461082U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103302060A (en) * | 2013-06-18 | 2013-09-18 | 无锡市翔隆机械科技有限公司 | Reciprocating type water cutting device |
| CN104393829A (en) * | 2014-12-17 | 2015-03-04 | 苏州费米光电有限公司 | Solar cell panel with automatic dust removal device |
| CN104567325A (en) * | 2014-12-11 | 2015-04-29 | 宁波吉烨汽配模具有限公司 | Device for automatically blowing air into washing machine |
| CN104634091A (en) * | 2015-02-05 | 2015-05-20 | 惠州智科实业有限公司 | Automatic air blowing device |
| CN105953562A (en) * | 2016-05-11 | 2016-09-21 | 天津市天鹏建筑器材有限公司 | Plate spraying and drying equipment |
| CN107478048A (en) * | 2017-09-30 | 2017-12-15 | 上海丰禾精密机械有限公司 | Automatic top and bottom blowing device |
| CN112629166A (en) * | 2020-11-09 | 2021-04-09 | 重庆优玛医疗科技有限公司 | Vacuum blast drying method and drying device |
-
2012
- 2012-02-28 CN CN2012200672679U patent/CN202461082U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103302060A (en) * | 2013-06-18 | 2013-09-18 | 无锡市翔隆机械科技有限公司 | Reciprocating type water cutting device |
| CN103302060B (en) * | 2013-06-18 | 2015-02-18 | 无锡市翔隆机械科技有限公司 | Reciprocating type water cutting device |
| CN104567325A (en) * | 2014-12-11 | 2015-04-29 | 宁波吉烨汽配模具有限公司 | Device for automatically blowing air into washing machine |
| CN104393829A (en) * | 2014-12-17 | 2015-03-04 | 苏州费米光电有限公司 | Solar cell panel with automatic dust removal device |
| CN104634091A (en) * | 2015-02-05 | 2015-05-20 | 惠州智科实业有限公司 | Automatic air blowing device |
| CN105953562A (en) * | 2016-05-11 | 2016-09-21 | 天津市天鹏建筑器材有限公司 | Plate spraying and drying equipment |
| CN107478048A (en) * | 2017-09-30 | 2017-12-15 | 上海丰禾精密机械有限公司 | Automatic top and bottom blowing device |
| CN112629166A (en) * | 2020-11-09 | 2021-04-09 | 重庆优玛医疗科技有限公司 | Vacuum blast drying method and drying device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121003 Termination date: 20150228 |
|
| EXPY | Termination of patent right or utility model |