CN202452318U - 一种扫描电镜的光源装置 - Google Patents
一种扫描电镜的光源装置 Download PDFInfo
- Publication number
- CN202452318U CN202452318U CN2012201117381U CN201220111738U CN202452318U CN 202452318 U CN202452318 U CN 202452318U CN 2012201117381 U CN2012201117381 U CN 2012201117381U CN 201220111738 U CN201220111738 U CN 201220111738U CN 202452318 U CN202452318 U CN 202452318U
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- China
- Prior art keywords
- light source
- electron microscope
- scanning electron
- source device
- light
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000001681 protective effect Effects 0.000 claims abstract description 9
- 239000000428 dust Substances 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012201117381U CN202452318U (zh) | 2012-03-14 | 2012-03-14 | 一种扫描电镜的光源装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2012201117381U CN202452318U (zh) | 2012-03-14 | 2012-03-14 | 一种扫描电镜的光源装置 |
Publications (1)
Publication Number | Publication Date |
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CN202452318U true CN202452318U (zh) | 2012-09-26 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2012201117381U Expired - Fee Related CN202452318U (zh) | 2012-03-14 | 2012-03-14 | 一种扫描电镜的光源装置 |
Country Status (1)
Country | Link |
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CN (1) | CN202452318U (zh) |
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2012
- 2012-03-14 CN CN2012201117381U patent/CN202452318U/zh not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Permanent Electronics Co., Ltd. of Huainan City three Assignor: Anhui University Of Science And Technology Contract record no.: 2012340000344 Denomination of utility model: Light source device of scanning electron microscope Granted publication date: 20120926 License type: Exclusive License Record date: 20121206 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120926 Termination date: 20130314 |