CN202447326U

CN202447326U - Cleaning machine before etching

Info

Publication number: CN202447326U
Application number: CN2012200432995U
Authority: CN
Inventors: 陈雪尧; 梁泰频; 何公明; 王满根; 史小军
Original assignee: NINGBO DONGSHENG INTEGRATED CIRCUIT ELEMENT CO Ltd
Current assignee: NINGBO DONGSHENG INTEGRATED CIRCUIT ELEMENT CO Ltd
Priority date: 2012-02-10
Filing date: 2012-02-10
Publication date: 2012-09-26
Anticipated expiration: 2022-02-10

Abstract

The utility model discloses a cleaning machine before etching, which comprises a support and rollers arranged on the support, wherein the rollers comprise an upper inner roller and a lower inner roller which are axially parallel and are arranged up and down, and the outer surfaces of the upper inner roller and the lower inner roller have viscosity; an upper outer roller and a lower outer roller are respectively arranged above the upper inner roller and below the lower inner roller, the rotating direction of the upper outer roller is opposite to the rotating direction of the upper inner roller; and the rotating direction of the lower outer roller is opposite to the rotating direction of the lower inner roller. The cleaning machine before etching can be used for automatically and conveniently cleaning sundries such as processing scraps or dust on the surface of an etching sheet through an adhesive effect without influencing the coating of optical resist of the surface of the etching sheet; and the cleaning machine before etching has the advantages of simple structure, easy disassembly and cleaning, and capability of continuously cleaning the etching sheet by only replacing or cleaning an adsorbed film; and the etching quality is improved, and the working efficiency is increased.

Description

Use cleaner before the etching

Technical field

The utility model relates to a kind of cleaner, uses cleaner before particularly relating to a kind of etching.

Background technology

In the existing etching process; Applying the photoresists method is that the etch slide that processes is directly put on the roller of coating machine; Roller directly is coated in photoresists on the etch slide after rotating; The major defect of this method is: the etch slide surface that directly processes exists processing bits and all kinds of dust usually, if etch slide is directly put on the roller of coating machine, directly is coated in photoresists on the etch slide; Original processing bits in etch slide surface and all kinds of dust will anchor on the etch slide surface with photoresists together.These processing bits and all kinds of dust are present in the photoresists, influence the coating quality of photoresists, cause when etching, occurring all kinds of etching defects.

Summary of the invention

The utility model technical problem to be solved is used cleaner before providing a kind of etching of removing original processing bits in etch slide surface and all kinds of dusts.

The utility model solves the problems of the technologies described above the technical scheme that is adopted: use cleaner before a kind of etching; Comprise support and be arranged at the roller on the support; It is characterized in that: said roller comprises and is the last internal trolley and following internal trolley that axially parallel is provided with up and down, and go up internal trolley and following internal trolley can be around himself spool rotate, direction of rotation is opposite; Said going up supplies etch slide to pass through between internal trolley and the following internal trolley, and the said outer surface of going up internal trolley and following internal trolley has viscosity;

The top of said upward internal trolley and the below of following internal trolley are respectively equipped with outer roller and following outer roller; Said outer roller and last internal trolley are the axially parallel setting; And going up the outer surface of outer roller and the outer surface of last internal trolley is in contact with one another; Said axle rotation of outer roller around himself, upward the direction of rotation of the direction of rotation of outer roller and last internal trolley is opposite;

Said outer roller down is the axially parallel setting with following internal trolley, and the outer surface of said outer roller down and following internal trolley is in contact with one another, and outer roller is around the axle rotation of himself down, and the direction of rotation of said outer roller down is opposite with the direction of rotation of following internal trolley.

Preferably, for the ease of cleaning, the said outer surface of outer roller and following outer roller is provided with dismountable adsorbed film.

Compared with prior art, the advantage of the utility model is to use cleaner before this etching, can pass through the processing bits or the dust and other impurities on adhesive attraction clean etch sheet surface automatically, easily; Make it can not influence the coating of the photoresist on etch slide surface; And simple in structure before this etching with cleaner, be easy to dismounting and cleaning, as long as change or clean the continuous cleaning that adsorbed film can carry out etch slide; Improve etched quality, and improved production efficiency.

Description of drawings

Fig. 1 is the preceding sketch map with cleaner of the utility model etching.

The specific embodiment

Embodiment describes in further detail the utility model below in conjunction with accompanying drawing.

As shown in Figure 1; Comprise support 10 with cleaner before this etching, and be positioned at the last internal trolley 1 on the support 10, following internal trolley 2, the said axle of going up internal trolley 1 and following internal trolley 2 laterally arranges up and down; And last internal trolley 1 can be around the axle rotation of himself with following internal trolley 2, and direction of rotation is opposite.And should go up the rough surface of internal trolley 1 and following internal trolley 2, and have viscosity, the processing that can adsorb on the etch slide is considered to be worth doing and all kinds of dust, and etch slide passes through between internal trolley 1 and the following internal trolley 2 on this.

On this internal trolley 1 above with following internal trolley 2 below also be respectively equipped with outer roller 3 and time outer roller 4; The axle of said outer roller 3 and the axle of last internal trolley 1 laterally arrange; Going up the outer surface of outer roller 3 and the outer surface of last internal trolley 1 is in contact with one another; And go up the axle rotation of outer roller 3 around himself, upward the direction of rotation of the direction of rotation of outer roller 3 and last internal trolley 1 is opposite.The axle of said outer roller 4 down and the axle of following internal trolley 2 laterally arrange, and the outer surface of said down outer roller 4 and following internal trolley 2 is in contact with one another, and outer roller 4 is around the axle rotation of himself down, and the direction of rotation of outer roller 4 is opposite with the direction of rotation of following internal trolley 2 down.

Be somebody's turn to do on the outer surface of going up outer roller 3 and following outer roller 4 and be provided with dismountable adsorbed film 5 respectively; Adsorbed film 5 contacts with following internal trolley 2 with last internal trolley 1, and therefore when etch slide passed through between last internal trolley 1 and following internal trolley 2, processing bits on the etch slide and dust can be adsorbed by the outer surface of last internal trolley 1 and following internal trolley 2; And these processing bits and dust can be adsorbed on the outer surface of outer roller 3 and following outer roller 4 through adsorbed film 5; And then accomplish the cleaning of etch slide, cleaned etch slide after, can be as shown in Figure 1; It is following with down outer roller 4 dismountings to go up outer roller 3, then the adsorbed film 5 on surface is pulled down to clean or change to get final product.

Use cleaner before this etching; Can pass through the processing bits or the dust and other impurities on adhesive attraction clean etch sheet surface automatically, easily, make its coating that can not influence the photoresist on etch slide surface, and this etching be preceding simple in structure with cleaner; Be easy to dismounting and cleaning; As long as change perhaps and clean the continuous cleaning that adsorbed film can carry out etch slide, improved etched quality, and improved production efficiency.

Claims

1. use cleaner before an etching; Comprise support (10) and be arranged at the roller on the support (10); It is characterized in that: said roller comprises and is last internal trolley (1) and the following internal trolley (2) that axially parallel is provided with up and down, and go up internal trolley (1) and following internal trolley (2) can be around himself spool rotate, direction of rotation is opposite; Said going up supplies etch slide to pass through between internal trolley (1) and the following internal trolley (2), and the said outer surface of going up internal trolley (1) and following internal trolley (2) has viscosity;

The top of said upward internal trolley (1) and the below of following internal trolley (2) are respectively equipped with outer roller (3) and following outer roller (4); Said outer roller (3) and last internal trolley (1) are the axially parallel setting; And going up the outer surface of outer roller (3) and the outer surface of last internal trolley (1) is in contact with one another; Said axle rotation of outer roller (3) around himself, upward the direction of rotation of the direction of rotation of outer roller (3) and last internal trolley (1) is opposite;

Said outer roller (4) down and following internal trolley (2) are the axially parallel setting; The outer surface of said outer roller (4) down and following internal trolley (2) is in contact with one another; And outer roller (4) is around the axle rotation of himself down, and the direction of rotation of said outer roller (4) down is opposite with the direction of rotation of following internal trolley (2).

2. use cleaner before the etching as claimed in claim 1, it is characterized in that: the said outer surface of outer roller (3) and following outer roller (4) is provided with dismountable adsorbed film (5).