CN202442791U - Infrared microscopic system - Google Patents
Infrared microscopic system Download PDFInfo
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- CN202442791U CN202442791U CN2012200248696U CN201220024869U CN202442791U CN 202442791 U CN202442791 U CN 202442791U CN 2012200248696 U CN2012200248696 U CN 2012200248696U CN 201220024869 U CN201220024869 U CN 201220024869U CN 202442791 U CN202442791 U CN 202442791U
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- infrared microscopy
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Abstract
The utility model discloses an infrared microscopic system, comprising a support, an objective table, an object, a visible microscopic camera and an infrared microscopic camera. The object is disposed on the objective table; the visible microscopic camera and the infrared microscopic camera are respectively arranged on the support and positioned over the objective table; the optical axes of the visible microscopic camera and the infrared microscopic camera are mutually parallel and perpendicular to the upper side surface of the objective table; the visible microscopic camera and the infrared microscopic camera can move relative the objective table along the support up and down simultaneously to be positioned; and the visible microscopic camera and the infrared microscopic camera can respectively move left and right along the horizontal plane to enable the respective lens to be pointed at the object disposed on the objective table. The intelligible imaging and detail analysis requirements of a micro device and a microstructure can be satisfied simultaneously, and infrared heat distribution imaging can be realized.
Description
Technical field
The utility model relates to a kind of infrared microscopy system.
Background technology
Microscopic fields such as infrared imaging detects in the reliability of the design of semiconductor power device, integrated circuit, the analysis of the heat distribution analysis of the actual effect analysis of laser diode, MEMS device, material thermal behavior and biological sample temperature analysis have to be used quite widely, so the infrared microscopy mirror system arises at the historic moment.But because thermal infrared imager is only responsive to single wavelength or certain specific band usually; Such as 7-14 mu m waveband, 3-5 mu m waveband etc.; It is insensitive to cause its brightness to scene to change, and imaging definition is low, the details of image is caught the visible light that is far from enrich.And the visual light imaging microscope is sensitive to the reflection of target object; Irrelevant with hot contrast; Can obtain the image of high definition, and the detailed information of target object can be provided, but the thermography information of target object can't be provided; Therefore,, many detections that needs the thermography analysis are restricted in using.
Summary of the invention
In order to overcome above-mentioned defective, the utility model provides a kind of infrared microscopy system, can satisfy the blur-free imaging and the detail analysis demand of micro element and microstructure simultaneously, can realize the imaging that infra-red heat distributes again.
The utility model for the technical scheme that solves its technical matters and adopt is: a kind of infrared microscopy system, comprise support, objective table, object, visible micro-camera and infrared microscopy camera, and said object places on the said objective table; Said visible micro-camera and infrared microscopy camera place on the said support respectively and are positioned at said objective table top; The optical axis of said visible micro-camera and infrared microscopy camera is parallel to each other and perpendicular to said objective table upper side; Said visible micro-camera can move up and down and locate along said support by simultaneously said relatively objective table with the infrared microscopy camera, and said it is thus clear that micro-camera and infrared microscopy camera can be respectively along move left and right in the surface level at its place and make its camera lens over against the object that places on the said objective table.
Further improvement as the utility model; Said visible micro-camera and infrared microscopy camera can move up and down and locate along said support by simultaneously said relatively objective table; And said visible micro-camera and infrared microscopy camera can be respectively along move left and right in the level at its place and make its camera lens be over against the structure that places the object on the said objective table: directly over said objective table, Z is set to guide rod; Other is provided with horizontal support; Said horizontal support through screw-threaded engagement in said Z on guide rod, and said horizontal support can move up and down and locate to guide rod along Z; Said visible micro-camera and infrared microscopy camera slide respectively and are positioned on the said horizontal support, and said it is thus clear that micro-camera and infrared microscopy camera can be distinguished said relatively horizontal support move left and right and location.
The beneficial effect of the utility model is: this system can be simultaneously offers the user with the visible light of target object and infrared static state or dynamic image data; The blur-free imaging and the detail analysis demand of micro element and microstructure had both been satisfied; Can realize the imaging that infra-red heat distributes again; Thereby gather in the time of implementation structure characteristic and performance characteristic, help analyzing simultaneously its performance and usefulness.
Description of drawings
Fig. 1 is the said infrared microscopy system architecture of a utility model synoptic diagram.
In conjunction with accompanying drawing, explanation below doing:
7---horizontal support 2---objective table
The visible micro-camera of 3---objects 4---
Z is to guide rod for 5---infrared microscopy cameras 6---
Embodiment
A kind of infrared microscopy system comprises support 1, objective table 2, object 3, visible micro-camera 4 and infrared microscopy camera 5, and said object places on the said objective table; Said visible micro-camera and infrared microscopy camera place on the said support respectively and are positioned at said objective table top; The optical axis of said visible micro-camera and infrared microscopy camera is parallel to each other and perpendicular to said objective table upper side; Said visible micro-camera can move up and down and locate along said support by simultaneously said relatively objective table with the infrared microscopy camera, and said it is thus clear that micro-camera and infrared microscopy camera can be respectively along move left and right in the surface level at its place and make its camera lens over against the object that places on the said objective table.
Preferably; Above-mentioned visible micro-camera and infrared microscopy camera can move up and down and locate along said support by simultaneously said relatively objective table; And said visible micro-camera and infrared microscopy camera can be respectively along move left and right in the level at its place and make its camera lens be over against the structure that places the object on the said objective table: Z is set to guide rod 6 directly over said objective table; Other is provided with horizontal support 7; Said horizontal support through screw-threaded engagement in said Z on guide rod, and said horizontal support can move up and down and locate to guide rod along Z; Said visible micro-camera and infrared microscopy camera slide respectively and are positioned on the said horizontal support, and said it is thus clear that micro-camera and infrared microscopy camera can be distinguished said relatively horizontal support move left and right and location.
Claims (2)
1. infrared microscopy system is characterized in that: it comprises support (1), objective table (2), object (3), visible micro-camera (4) and infrared microscopy camera (5), and said object places on the said objective table; Said visible micro-camera and infrared microscopy camera place on the said support respectively and are positioned at said objective table top; The optical axis of said visible micro-camera and infrared microscopy camera is parallel to each other and perpendicular to said objective table upper side; Said visible micro-camera can move up and down and locate along said support by simultaneously said relatively objective table with the infrared microscopy camera, and said it is thus clear that micro-camera and infrared microscopy camera can be respectively along move left and right in the surface level at its place and make its camera lens over against the object that places on the said objective table.
2. infrared microscopy according to claim 1 system; It is characterized in that: said visible micro-camera and infrared microscopy camera can move up and down and locate along said support by simultaneously said relatively objective table; And said visible micro-camera and infrared microscopy camera can be respectively along move left and right in the level at its place and make its camera lens be over against the structure that places the object on the said objective table: Z is set to guide rod (6) directly over said objective table; Other is provided with horizontal support (7); Said horizontal support through screw-threaded engagement in said Z on guide rod, and said horizontal support can move up and down and locate to guide rod along Z; Said visible micro-camera and infrared microscopy camera slide respectively and are positioned on the said horizontal support, and said it is thus clear that micro-camera and infrared microscopy camera can be distinguished said relatively horizontal support move left and right and location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200248696U CN202442791U (en) | 2012-01-19 | 2012-01-19 | Infrared microscopic system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200248696U CN202442791U (en) | 2012-01-19 | 2012-01-19 | Infrared microscopic system |
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| CN202442791U true CN202442791U (en) | 2012-09-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2012200248696U Expired - Lifetime CN202442791U (en) | 2012-01-19 | 2012-01-19 | Infrared microscopic system |
Country Status (1)
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| CN (1) | CN202442791U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217220A (en) * | 2012-01-19 | 2013-07-24 | 昆山光微电子有限公司 | Infrared microscope system and method for achieving image fusion thereof |
| CN105203457A (en) * | 2014-06-20 | 2015-12-30 | 安捷伦科技有限公司 | Magnifying Assembly For An Infrared Microscope |
| CN105676461A (en) * | 2016-04-05 | 2016-06-15 | 皖南医学院 | Animal mesentery microcirculation observation system |
| CN109060145A (en) * | 2018-08-27 | 2018-12-21 | 山西焦煤集团岚县正利煤业有限公司 | A kind of Coal-Rock Interface Recognition system for simulating downhole coal mine cutting |
-
2012
- 2012-01-19 CN CN2012200248696U patent/CN202442791U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217220A (en) * | 2012-01-19 | 2013-07-24 | 昆山光微电子有限公司 | Infrared microscope system and method for achieving image fusion thereof |
| CN103217220B (en) * | 2012-01-19 | 2015-06-10 | 昆山光微电子有限公司 | Infrared microscope system and method for achieving image fusion thereof |
| CN105203457A (en) * | 2014-06-20 | 2015-12-30 | 安捷伦科技有限公司 | Magnifying Assembly For An Infrared Microscope |
| CN105203457B (en) * | 2014-06-20 | 2019-10-08 | 安捷伦科技有限公司 | The amplifier module of infrared microscope |
| CN105676461A (en) * | 2016-04-05 | 2016-06-15 | 皖南医学院 | Animal mesentery microcirculation observation system |
| CN109060145A (en) * | 2018-08-27 | 2018-12-21 | 山西焦煤集团岚县正利煤业有限公司 | A kind of Coal-Rock Interface Recognition system for simulating downhole coal mine cutting |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120919 |
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| CX01 | Expiry of patent term |