CN202441908U - Thin-type vacuum seal connecting valve device - Google Patents
Thin-type vacuum seal connecting valve device Download PDFInfo
- Publication number
- CN202441908U CN202441908U CN2012200790514U CN201220079051U CN202441908U CN 202441908 U CN202441908 U CN 202441908U CN 2012200790514 U CN2012200790514 U CN 2012200790514U CN 201220079051 U CN201220079051 U CN 201220079051U CN 202441908 U CN202441908 U CN 202441908U
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- plate
- base plate
- cover plate
- cavity
- vacuum seal
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Abstract
The utility model relates to a thin-type vacuum seal connecting valve device, which comprises a bottom plate with a hollow in the middle, a limiting cushion block, a cover plate with a hole in the middle, a plugboard and a connecting plate, wherein the bottom plate is arranged on a connecting cavity, the middle hole of the cover plate and the middle hole of the bottom plate are coaxially arranged, the limiting cushion block is arranged between the middle hole of the cover plate and the middle hole of the bottom plate to form a sealing slideway, the size of the sealing slideway is larger than the aperture of the center of the bottom plate, and the plugboard is tightly matched with the sealing slideway and moves inwards or outwards under the control of the connecting plate to realize vacuum seal and communication of the connecting cavity. The thin-type vacuum seal connecting valve device overcomes the defects of complexity in the installation process and incapability of installing in the same cavity of the traditional plugboard valve and has the advantages of small size, low thickness (the thinnest place can reach 2mm), simple structure and installation and capabilities of realizing installation and seal in the same cavity and conveniently connecting with a molecule/ion beam collimation device.
Description
Technical field
The present invention relates to a kind of vacuum and connect control valve unit, particularly a kind of slim vacuum seal connects control valve unit.
Background technique
Have now and be used for realizing that the device of opening and sealing of vacuum cavity mainly is the vacuum push-pull valve.Traditional vacuum push-pull valve connection set (Fig. 1), its valve body can only be installed outside cavity, when connecting two first, second cavitys, often needs first, second extra switching chamber, and this Placement volume is bigger, and the quantity of required parts is many, complex structure.Complete traditional vacuum push-pull valve connected system generally surpasses the length of 20cm.Therefore, there are following problems in traditional vacuum push-pull valve and vacuum Placement thereof: increased extra switching cavity, increased the quantity (causing its complex structure) of parts, increased the volume of vacuum system; Prolonged the distance from first cavity to second cavity, this in addition connection can only be installed between cavity, can not in an independent cavity, install.
Summary of the invention
For overcome complex structure, volume that existing vacuum push-pull valve and vacuum Placement thereof exist big and can not same chamber in the problem of sealing is installed, the present invention provides a kind of slim vacuum seal to connect control valve unit.
The objective of the invention is to reach through following measure:
A kind of slim vacuum seal connects control valve unit, comprising: spacing cushion block, plate, connecting plate, middle part base plate and middle part cover plate with holes with holes;
The superimposed successively setting of base plate, plate, cover plate is positioned at the corresponding setting in plate both sides at base plate with hole on the cover plate, and the hole on base plate and the cover plate is through slide relative control their connection or the sealing of plate between base plate and cover plate; Because plate forms a slideway in the slide relative between base plate and cover plate between base plate and cover plate; The outside of slideway is provided with spacing cushion block between base plate and cover plate; The thickness of spacing cushion block is identical with the thickness of plate;
On the surface of base plate away from cover plate one side, mider hole around be provided with annular seal ring; Be provided with annular seal ring in plate away from the surface of cover plate one side;
The connecting plate that is used to drag plate is fixed in the other end of plate.
The sealing chute or the semitight slideway that between base plate and cover plate, have spacing cushion block to form, the sealing chute size is greater than the aperture at cover plate and base plate center; Plate and sealing chute closely cooperate, can be respectively to the inboard of cover apertures or away from outer side shifting under the control of connecting plate to the hole, and corresponding vacuum seal and the connection that realizes connecting cavity.
Pass through the bolt Joint between base plate and cover plate;
Said slim vacuum seal connects control valve unit and is installed on the jointing that two required connection cavitys are connected; Base plate places in the connection cavity, is installed on the wall that connects the cavity jointing; Base plate amplexiforms with the wall that connects the cavity jointing away from cover plate one side surface mutually, and base plate seals through the annular seal ring on base plate with the wall that is connected cavity.
Connecting plate one end is fixed on the plate, and the other end is connected with the straight line guiding instrument, is used to control plate and moves.
The straight line guiding instrument places required connection chamber external away from an end of connecting plate.
On the surface of base plate away from cover plate one side, mider hole around be provided with annular recess, be provided with in the groove and be used for and be connected the O RunddichtringO that cavity seals; Be provided with annular recess in plate away from the surface of cover plate one side, be provided with the O RunddichtringO that is used for the base plate sealing in the groove.
Be provided with or be equipped with to groove in said base plate middle part away from cover plate one side; Form cylinder base; Coaxial being arranged on the cylinder base bottom surface in hole at base plate middle part; The molecular rays collimating part is installed on the cylinder base bottom surface, and the molecular rays collimating part is coaxial installation collimator of cylinder base or skimmer nozzle;
On the base plate cylinder base bottom surface with cover plate on the coaxial setting in hole.
In said two required connection cavitys one is the electron gun chamber, another is sensing chamber;
The outside that vacuum seal connects valve can connect various molecular beam source apparatus and detection device very easily, and beam source apparatus only needs coaxial with the aperture at cover plate center, can realize the absolute collimation of electron gun.
Beneficial effect: the present invention has simplified traditional high vacuum push-pull valve assembly; Thin thickness; The more important thing is and realized in a cavity, installing that this covering device is also integrated in addition molecular rays colimated light system is particularly suitable for sealing or isolated molecule bundle or ion beam source chamber and sensing chamber.
Description of drawings
Fig. 1 is a traditional vacuum push-pull valve connection set schematic representation.
Fig. 2 is that the slim vacuum seal of the present invention connects the valve planimetric map.
Fig. 3 is the sectional view along line A-A direction shown in Figure 2.
Fig. 4 is that the slim vacuum of the present invention connects valve seal state sectional view.
Fig. 5 is that the slim vacuum of the present invention connects opening of valves state sectional view.
Fig. 6 is that the slim vacuum of the present invention connects valve scheme of installation when two vacuum cavities connect.
Fig. 7 is that the slim vacuum of the present invention connects the scheme of installation of valve in same cavity.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
With reference to Fig. 1: traditional vacuum push-pull valve connects independently two cavitys and can only outside cavity, connect; Its connection set structure is: vacuum push-pull valve 12 connects first cavity 8; Second cavity 9; Need the first switching chamber 10 and the second switching chamber 11, ion source is installed in first cavity 8, and colimated light system is positioned at second cavity, 9 inside.Ion beam is through the first switching chamber 10, push-pull valve 12, the second switching chambeies 11 and colimated light system to the detection zone distance of second cavity 9 at least greater than 20 centimetres.
With reference to Fig. 2 and Fig. 3: said slim vacuum seal is connected control valve unit and comprises: base plate 1, spacing cushion block 5, center cover plate 3, plate 2 and the connecting plate 4 with holes that the center is with holes.
On the surface of base plate 1 away from cover plate 3 one sides, mider hole around be provided with annular recess, be provided with in the groove and be used for and be connected the 2nd O RunddichtringO 14 that cavity seals; Be provided with annular recess in plate 2 away from the surface of cover plate 3 one sides, be provided with an O RunddichtringO 13 that is used for base plate 1 sealing in the groove.
Be provided with or be equipped with to groove in said base plate 1 middle part away from cover plate 3 one sides; Form cylinder base; The hole at base plate 1 middle part is coaxial to be arranged on the cylinder base bottom surface; The molecular rays collimating part is installed on the cylinder base bottom surface, and the molecular rays collimating part is coaxial installation collimator of cylinder base or skimmer nozzle 6;
Said slim vacuum seal connects control valve unit and is installed on the jointing that two required connection cavitys are connected; Base plate 1 places in the connection cavity, is installed on the wall that connects the cavity jointing; Base plate 1 amplexiforms with the wall that connects the cavity jointing away from cover plate 3 one side surfaces mutually, and base plate 1 seals through the annular seal ring on base plate 1 with the wall that is connected cavity.
2 of connecting plate 4 and plates are perpendicular; Connecting plate 4 one ends are fixed on the plate 2, and the other end is connected with straight line guiding instrument 18 (CHI-VAC Research & Development Co., Ltd.), is used for hydrodynamic reciprocating sealing plate 2.Straight line guiding instrument 18 places required connection chamber external away from the other end of connecting plate (4).
The sealing chute or the semitight slideway that between base plate 1 and cover plate 3, have spacing cushion block 5 to form, the sealing chute size is greater than the aperture at cover plate 3 and base plate 1 center; Plate 2 closely cooperates with sealing chute, can be respectively to the inboard of cover apertures or away from outer side shifting under the control of connecting plate 4 to the hole, and corresponding vacuum seal and the connection that realizes connecting cavity.
In said two required connection cavitys one be the ion beam source device the ion beam source chamber, another is detection chambers.
The outside that vacuum seal connects valve can connect various ion beam source devices very easily, and beam source apparatus only needs coaxial with the aperture at cover plate center, can realize the absolute collimation of electron gun.
Workflow: when the needs isolated chamber, with reference to Fig. 4, utilize straight line guiding instrument 18 control plates 2 (being connected with connecting plate 4) to move to the inside, movement direction is shown in arrow; After moving into place; O RunddichtringO 13 in plate 2 inboard grooves and base plate 1 sealing, then the chamber of both sides is connected the control valve unit separation by slim vacuum seal, can realize different degree of vacuum respectively; The chamber vacuum degree that it should be noted that base plate 1 connection is higher.
When needs are communicated with two side cavity with reference to Fig. 5; Utilize straight line guiding instrument 18 control plates 2 to move laterally; Movement direction is shown in arrow, and then the chamber of both sides is communicated with through the aperture of collimator on cover plate and the base plate or skimmer nozzle 6 successively, makes the chamber at two ends be in connected state.
The molecular electron gun chamber and the detection chambers instance that connect the ion beam source device through slim vacuum seal connection control valve unit below specify.The slim vacuum of the present invention connects valve and can be installed in the cavity; Concrete mounting type is with reference to Fig. 6 and Fig. 7; Fig. 6 is that the slim vacuum of the present invention connects valve scheme of installation when two vacuum connect the cavity connection; This vacuum connects valve and only need be installed on the detection chambers 16, and molecular electron gun chamber 15 links to each other with detection chambers 16, and driveshaft partly is that straight line guiding instrument 18 is installed in 15 the insides, molecular electron gun chamber and can realizes the vacuum seal at two ends.Fig. 7 is that the slim vacuum of the present invention connects valve scheme of installation in a cavity; Only need the isolating plates of a band circular hole that this vacuum can be installed in the middle of the cavity 17 and connect valve, driveshaft partly is that the vacuum guiding instrument is installed in cavity 17 left ends and can realizes the vacuum seal at two ends.
With reference to Fig. 6 and Fig. 7: when the molecular electron gun is worked; Utilize 4 motions of straight line guiding instrument 18 control connection plates; And then the plate 2 that control links to each other with connecting plate 4 is mobile laterally, and plate is in open mode, and then the ion beam of electron gun generation is successively through the collimator 6 aperture collimations on cover plate 3 and the base plate 1; Get into detection chambers 16 (Fig. 6) or cavity 17 (Fig. 7), then ion beam beeline of 16 (Fig. 6) or cavity 17 (Fig. 7) from the electron gun to the detection chambers can reach 2 centimetres.When ion beam source is closed; In the time of perhaps ion beam source need being changed, only need utilize 4 motions of straight line guiding instrument 18 control control connection plates, and then the plate 2 that control links to each other with connecting plate 4 moves to the inside; Make plate be in closed condition, then realize the vacuum seal of both sides.It is constant that detection chambers 16 (Fig. 6) or cavity 17 (Fig. 7) can be kept condition of high vacuum degree, and ion beam source chamber 15 can be dismantled easily, is in atmospheric pressure state.
This device has overcome complexity and the problem that can not install same cavity in of existing push-pull valve in installation process.This device has the following advantages: device volume is little, thin thickness (thinnest part reaches 2 centimetres), and structure is simple with installation, can sealing be installed in same cavity, can connect molecule or ion beam collimator apparatus easily.
Above content is to combine optimal technical scheme to the further explain that the present invention did, and can not assert that the practical implementation of invention only limits to above explanation.Under the present invention, the those of ordinary skill of technical field, under the prerequisite that does not break away from the present invention's design, simple deduction and replacement can also be made, all protection scope of the present invention should be regarded as.
Claims (8)
1. a slim vacuum seal connects control valve unit, it is characterized in that:
Comprise: spacing cushion block (5), plate (2), connecting plate (4), middle part base plate (1) and middle part cover plate (3) with holes with holes;
Base plate (1), plate (2), the superimposed successively setting of cover plate (3); On base plate (1) and cover plate (3) mider hole be positioned at the corresponding setting in plate (2) both sides, their connection or sealing controlled in the hole on base plate (1) and the cover plate (3) through the slide relative of plate (2) between base plate (1) and cover plate (3); Because plate (2) is gone up between base plate (1) and cover plate (3) in the slide relative between base plate (1) and cover plate (3) and is formed a slideway; The outside of slideway is provided with spacing cushion block (5) between base plate (1) and cover plate (3); The thickness of spacing cushion block (5) is identical with the thickness of plate (2);
On the surface of base plate (1) away from cover plate (3) one sides, mider hole around be provided with annular seal ring; Be provided with annular seal ring in plate (2) away from the surface of cover plate (3) one sides;
The connecting plate (4) that is used to drag plate (2) is fixed in the other end of plate (2).
2. connect control valve unit according to the described slim vacuum seal of claim 1, it is characterized in that:
The sealing chute or the semitight slideway that between base plate (1) and cover plate (3), have spacing cushion block (5) to form, the sealing chute size is greater than the aperture at cover plate (3) and base plate (1) center; Plate (2) closely cooperates with sealing chute, can be respectively to the inboard of cover apertures or away from outer side shifting under the control of connecting plate (4) to the hole, and corresponding vacuum seal and the connection that realizes connecting cavity.
3. connect control valve unit according to claim 1 or 2 described slim vacuum seals, it is characterized in that:
Pass through the bolt Joint between base plate (1) and cover plate (3);
Said slim vacuum seal connects control valve unit and is installed on the jointing that two required connection cavitys are connected; Base plate (1) places in the connection cavity, is installed on the wall that connects the cavity jointing; Base plate (1) amplexiforms with the wall that connects the cavity jointing away from cover plate (3) one side surfaces mutually, and base plate (1) seals through the annular seal ring on base plate (1) with the wall that is connected cavity.
4. connect control valve unit according to the described slim vacuum seal of claim 1, it is characterized in that:
Connecting plate (4) one ends are fixed on the plate (2), and the other end is connected with straight line guiding instrument (18), are used to control plate (2) and move.
5. connect control valve unit according to the described slim vacuum seal of claim 4, it is characterized in that:
Straight line guiding instrument (18) places required connection chamber external away from an end of connecting plate (4).
6. connect control valve unit according to claim 1,2 or 4 described slim vacuum seals, it is characterized in that:
On the surface of base plate (1) away from cover plate (3) one sides, said mider hole around be provided with annular recess, be provided with in the groove and be used for and be connected the O RunddichtringO that cavity seals; Be provided with annular recess in plate (2) away from the surface of cover plate (3) one sides, be provided with in the groove and be used for and the O RunddichtringO of base plate (1) sealing.
7. connect control valve unit according to the described slim vacuum seal of claim 1, it is characterized in that:
Be provided with or be equipped with to groove in said base plate (1) middle part away from cover plate (3) one sides; Form cylinder base; The mider hole of base plate (1) is coaxial to be arranged on the cylinder base bottom surface; The molecular rays collimating part is installed on the cylinder base bottom surface, and the molecular rays collimating part is coaxial installation collimator of cylinder base or skimmer nozzle (6);
On base plate (1) the cylinder base bottom surface and the coaxial setting in hole on the cover plate (3).
8. connect control valve unit according to claim 1,2 or 7 described slim vacuum seals, it is characterized in that:
In said two required connection cavitys one is the electron gun chamber, another is sensing chamber;
The outside that vacuum seal connects valve can connect various molecular beam source apparatus and detection device very easily, and beam source apparatus only needs coaxial with the aperture at cover plate center, can realize the absolute collimation of electron gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200790514U CN202441908U (en) | 2011-12-16 | 2012-03-05 | Thin-type vacuum seal connecting valve device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120534177.1 | 2011-12-16 | ||
| CN201120534177 | 2011-12-16 | ||
| CN2012200790514U CN202441908U (en) | 2011-12-16 | 2012-03-05 | Thin-type vacuum seal connecting valve device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202441908U true CN202441908U (en) | 2012-09-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200790514U Expired - Fee Related CN202441908U (en) | 2011-12-16 | 2012-03-05 | Thin-type vacuum seal connecting valve device |
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| CN (1) | CN202441908U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103161968A (en) * | 2011-12-16 | 2013-06-19 | 中国科学院大连化学物理研究所 | Thinned vacuum seal connecting valve device |
-
2012
- 2012-03-05 CN CN2012200790514U patent/CN202441908U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103161968A (en) * | 2011-12-16 | 2013-06-19 | 中国科学院大连化学物理研究所 | Thinned vacuum seal connecting valve device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120919 Termination date: 20160305 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |