CN202401164U - Etching liquid circulating system - Google Patents
Etching liquid circulating system Download PDFInfo
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- CN202401164U CN202401164U CN2011205559517U CN201120555951U CN202401164U CN 202401164 U CN202401164 U CN 202401164U CN 2011205559517 U CN2011205559517 U CN 2011205559517U CN 201120555951 U CN201120555951 U CN 201120555951U CN 202401164 U CN202401164 U CN 202401164U
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- soup
- storage box
- medicine liquid
- wool
- making herbs
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Abstract
The utility model discloses an etching liquid circulating system which is used for realizing the circular flow of the etching liquid. The system comprises a liquid accommodating box and a first baffle, wherein the liquid accommodating box is used for accommodating reaction liquid for etching silicon wafers; the first baffle is arranged at the bottom of the liquid accommodating box and used for dividing the inner part of the liquid accommodating box into two cavities, namely a first accommodating cavity and a second accommodating cavity; and the first baffle is provided with a liquid circulating opening which is close to the bottom wall of the liquid accommodating box, and because the position of the liquid circulating opening is quite low, the time of accumulating the liquid in the first accommodating cavity is greatly shortened, so that the flowing time of the liquid from the first accommodating cavity to the second accommodating cavity is also shortened when the etching liquid circulating system is started. Due to the unique structure, the etching liquid circulating system can effectively avoid the phenomenon that the etching liquid circulating system sends a false alarm due to longer circulation waiting time and improve the effective capacity of the etching equipment in full production due to the shortened circulation waiting time.
Description
Technical field
The utility model relates to etching device technical field in the photovoltaic industry, particularly a kind of making herbs into wool medicine liquid circulation.
Background technology
Silicon chip is a vital building block in the photovoltaic industry, is mainly used in luminous energy is transformed, and produces electric energy through optical radiation.In order to increase the extinction ability of silicon chip, generally can take leather producing process to silicon chip, through technologies such as chemical corrosion or laser ablations silicon chip is carried out on-plane surface and handle.
When adopting chemical corrosion method to carry out silicon chip making herbs into wool operation, need a kind of making herbs into wool reaction soup, the reaction soup can consume in the making herbs into wool process gradually.In order to improve the usage degree of soup; Such cover making herbs into wool medicine liquid circulation is provided in the prior art; Comprise soup storage box and reaction bath cabinet, the soup storage box is connected through two pipes that are used for the soup circulation with the reaction bath cabinet, realizes that with this soup circulates between soup storage box and reaction bath cabinet; This structure design has the following advantages: the first, when liquor strength is relatively low, increase the concentration of reaction soup; The high density of the second, regulating in the soup storage box is reacted soup.
The soup storage box with the concrete structure of reaction bath cabinet is: be provided with a baffle plate in the soup storage box, this baffle plate is divided into chamber, left side and right-side cavity with the soup storage box; Be provided with a baffle plate in the reaction bath cabinet; And the side at this baffle plate offers medicine outlet; The baffle plate that is provided with in the reaction bath cabinet can stop the partial reaction soup to flow back into the soup storage box from medicine outlet, and puts aside a certain amount of reaction soup at the reaction bath cabinet, supplies silicon chip making herbs into wool to use.Realization response soup round-robin making herbs into wool medicine liquid circulation is the open cycle system in the prior art, and small-particle that silicon chip drops when reaction or the particle in the environment fall in the reaction bath cabinet, causes the particle contamination of soup easily.For the pollution problem of resolution system, prior art is provided with filter screen at medicine outlet, through the filteration purification reaction soup of filter screen.And the structure design through the soup storage box can realize that equally soup to a certain degree purifies.Can be known by foregoing, be provided with a baffle plate in the soup storage box, baffle plate is divided into chamber, left side and right-side cavity with the soup storage box; When soup flows back into the right-side cavity of soup storage box from reacting bath cabinet; When having only soup accumulative level height to be higher than this height of baffle plate, soup can overflow to the chamber, left side, and then flow into the reaction bath cabinet from the chamber, left side; This structure design can accumulate on the bottom of right-side cavity through sedimentation with a part of granule foreign, thereby realizes the purification of soup.
Because the effect of two baffle plates in said structure; Make soup in working cycle, in reaction bath cabinet and soup storage box, have certain integration time; It is longer to cause the making herbs into wool medicine liquid circulation that provides in the prior art after start, to arrive the smooth round-robin time; Not only cause wrong circulation warning easily, also increased the on time, the effective capacity when having reduced the etching device full production indirectly.
In sum, how to solve the long problem of on time of making herbs into wool medicine liquid circulation in the prior art, become those skilled in the art's problem demanding prompt solution.
The utility model content
The technical problem that the utility model will solve is for providing a kind of making herbs into wool medicine liquid circulation, and this making herbs into wool medicine liquid circulation can solve long problem of its on time.
For solving the problems of the technologies described above; The utility model provides a kind of making herbs into wool medicine liquid circulation, comprises the soup storage box and first baffle plate, and said first baffle plate is arranged at the bottom of said soup storage box; Said soup storage box has first containing cavity and second containing cavity; Said first containing cavity and said second containing cavity lay respectively at the both sides of said first baffle plate, and the top of said soup storage box offers soup import and medicine liquid outlet, and said soup import is connected with said first containing cavity; Said medicine liquid outlet is connected with said second containing cavity
Offer the soup communication port on said first baffle plate, said soup communication port is near the diapire of said soup storage box.
Preferably, said first baffle plate is provided with first filter screen, and said first filter screen covers whole said soup communication port.
Preferably, said first filter screen is the less filter screen in filter pore aperture.
Preferably; The utility model also comprises the soup extraction pump; Said soup extraction pump is arranged in said second containing cavity; The diapire of the liquid-inlet pipe of said soup extraction pump and said soup storage box has the gap that is used for the soup circulation, and the drain pipe of said soup extraction pump is connected with said medicine liquid outlet.
Preferably, the utility model also comprises the first-class siphunculus and second circulating tube, and said first-class siphunculus is connected with said soup import, and said second circulating tube is connected with said medicine liquid outlet.
Preferably, the utility model also comprises the reaction bath cabinet, and the diapire of said reaction bath cabinet offers feeding opening and medicine outlet, and said feeding opening is connected with said second circulating tube, and said medicine outlet is connected with said first-class siphunculus.
Preferably, the diapire of said reaction bath cabinet is provided with second baffle, and said feeding opening and said medicine outlet are divided into the both sides of said second baffle, and the top board of said second baffle and said reaction bath cabinet has the gap that is used for the soup circulation.
Preferably, the diapire of said reaction bath cabinet is provided with second filter screen, and said second filter screen covers whole said medicine outlets.
Preferably; Said soup storage box comprises soup storage box main body and soup storage box top board; Said soup storage box top board and said soup storage box main body removably connect; Said soup storage box top board comprises first top board and second top board, and said first top board offers said soup import, and said second top board offers medicine liquid outlet.
The utility model provides a kind of making herbs into wool medicine liquid circulation, is used to realize circulating of making herbs into wool soup, comprises the soup storage box and first baffle plate, and the soup storage box is used for the reaction soup of splendid attire silicon chip making herbs into wool.First baffle plate is arranged at the bottom of soup storage box, is used for the inner chamber structure branch of soup storage box is configured to two chambers, and these two chambers are respectively first containing cavity and second containing cavity.The top of soup storage box offers soup import and medicine liquid outlet; The soup import is connected with first containing cavity; Medicine liquid outlet is connected with second containing cavity; The soup import is used for the outer soup of soup storage box and enters into the soup storage box, and the soup that medicine liquid outlet is used in the soup storage box flows out.First baffle plate offers the soup communication port especially in the making herbs into wool medicine liquid circulation that the utility model provided on the basis of said structure, and the soup communication port is used for the circulation of soup storage box herb liquid between first containing cavity and second containing cavity.The soup communication port is near the diapire of soup storage box; When the soup outside the soup storage box when the soup import flow into first containing cavity; Because it is lower that the soup communication port is offered the position; Reduced the integration time of soup in first containing cavity, thereby soup flows to time of second containing cavity from first containing cavity when having shortened the start of making herbs into wool medicine liquid circulation.The utility model can effectively be avoided the making herbs into wool medicine liquid circulation through its structure design, and situation false alarm takes place because the circular wait time is long; And owing to shortened the circular wait time, the effective capacity when also having improved the etching device full production indirectly.
Description of drawings
Fig. 1 is the structural representation of making herbs into wool medicine liquid circulation among a kind of embodiment of the utility model;
The corresponding relation of component names and Reference numeral is among Fig. 1:
Embodiment
The core of the utility model is for providing a kind of making herbs into wool medicine liquid circulation, and this making herbs into wool medicine liquid circulation can solve long problem of its on time through its structure design.
In order to make those skilled in the art understand the technical scheme of the utility model better, the utility model is done further to specify below in conjunction with accompanying drawing and specific embodiment.
Please refer to Fig. 1, Fig. 1 is the structural representation of making herbs into wool medicine liquid circulation among a kind of embodiment of the utility model.
The utility model provides a kind of making herbs into wool medicine liquid circulation, is used to realize circulating of making herbs into wool soup, comprises the soup storage box 1 and first baffle plate 11, and soup storage box 1 is used for the reaction soup of splendid attire silicon chip making herbs into wool.First baffle plate 11 is arranged at the bottom of soup storage box 1, is used for the inner chamber structure branch of soup storage box 1 is configured to two chambers, and these two chambers are respectively the first containing cavity 1a and the second containing cavity 1b.The top of soup storage box 1 offers soup import and medicine liquid outlet; The soup import is connected with the first containing cavity 1a; Medicine liquid outlet is connected with the second containing cavity 1b; The soup import is used for soup storage box 1 outer soup and enters into soup storage box 1, and the soup that medicine liquid outlet is used in the soup storage box 1 flows out.First baffle plate 11 offers soup communication port 11a especially in the making herbs into wool medicine liquid circulation that the utility model provided on the basis of said structure, and soup communication port 11a is used for the circulation of soup storage box 1 herb liquid between the first containing cavity 1a and the second containing cavity 1b.Soup communication port 11a is near the diapire of soup storage box 1; When the soup outside the soup storage box 1 flow into the first containing cavity 1a from the soup import; Because it is lower that soup communication port 11a offers the position; Reduced the integration time of soup in the first containing cavity 1a, thereby soup flows to time of the second containing cavity 1b from the first containing cavity 1a when having shortened the start of making herbs into wool medicine liquid circulation.The utility model can effectively be avoided the making herbs into wool medicine liquid circulation through its structure design, and situation false alarm takes place because the circular wait time is long; And owing to shortened the circular wait time, the effective capacity when also having improved the etching device full production indirectly.
Because the making herbs into wool medicine liquid circulation that the utility model provided is a kind of open recycle system, so be mixed with the small-particle impurity in silicon chip fragment or the external environment easily in the reaction soup.In order can the reaction soup in the making herbs into wool medicine liquid circulation to be filtered; Make the soup that from the first containing cavity 1a, flow among the second containing cavity 1b be clean liquid; The utility model first baffle plate 11 in one embodiment is provided with first filter screen 111; First filter screen 111 covers whole soup communication port 11a, and first filter screen 111 is used for the soup through filter screen is filtered, and the granule foreign in the soup is tackled.This structure design can be filtered the soup in the soup storage box 1, makes that the soup among the second containing cavity 1b is purified liquid.
Particularly, first filter screen 111 is the less filter screen in filter pore aperture, adopts the less filter screen in filter pore aperture to improve the filter effect of first filter screen 111.
Particularly, the utility model also comprises soup extraction pump 12, and soup extraction pump 12 is used for extracting the soup of the second containing cavity 1b out soup storage box 1.Can know by said structure; Soup among the second containing cavity 1b is clean liquid; So soup extraction pump 12 is arranged among the second containing cavity 1b, and with the extraction of the soup among second containing cavity 1b soup storage box 1, this structure design effectively reduces the destruction of impurity to soup extraction pump 12.Particularly, have the gap that is used for the soup circulation between the diapire of liquid-inlet pipe and soup storage box 1, the drain pipe of soup extraction pump 12 is connected with medicine liquid outlet.
The utility model also comprises reaction bath cabinet 2, first-class siphunculus and second circulating tube, and first-class siphunculus is connected with the soup import, and second circulating tube is connected with medicine liquid outlet.The diapire of reaction bath cabinet 2 offers feeding opening and medicine outlet 2a, and feeding opening is connected with second circulating tube, and medicine outlet 2a is connected with first-class siphunculus.Soup in the soup storage box 1 among the second containing cavity 1b is extracted out through soup extraction pump 12, and is delivered in the reaction bath cabinet 2 through second circulating tube, and soup can be realized the circulation of soup through first-class siphunculus in flowing back into soup storage box 1 then.
The diapire of reaction bath cabinet 2 is provided with second baffle 21; Has the gap that is used for the soup circulation between the top board of second baffle 21 and reaction bath cabinet 2; Second baffle 21 can intercept soup; Make soup have certain accumulation volume at reaction bath cabinet 2, the soup of these accumulation is used for carrying out the making herbs into wool reaction with silicon chip.The both sides that feeding opening of offering on the reaction bath cabinet 2 and medicine outlet 2a are divided into second baffle 21.
Particularly, in the said structure design, the diapire of the utility model reaction bath cabinet 2 is provided with second filter screen, 22, the second filter screens 22 and covers whole medicine outlet 2a.Second filter screen 22 is used for soup is filtered, and makes that the soup after purifying flows back in the soup storage box 1 through first-class siphunculus.
In an embodiment of the utility model; The concrete structure of the soup storage box 1 that the utility model provided is: comprise soup storage box 1 main body and soup storage box 1 top board; Soup storage box 1 top board and soup storage box 1 main body removably connect, and so being provided with is in order to clear up soup storage box 1.Those skilled in the art can know; Sneak into impurity easily in this open making herbs into wool medicine liquid circulation; Impurity is deposited in the soup storage box 1 needs periodic cleaning, so soup storage box 1 top board and soup storage box 1 main body removably connect and can clear up through opening soup storage box 1 top board.
Particularly, soup storage box 1 top board comprises first top board and second top board, and first top board offers the soup import, and second top board offers medicine liquid outlet.This structure design can be cleared up soup storage box 1 through only opening first top board.
Carry out brief account in the face of the working cycle of soup in the making herbs into wool medicine liquid circulation that the utility model provided of making herbs into wool reaction usefulness down.Open the making herbs into wool medicine liquid circulation that the utility model provided; Soup extraction pump 12 is delivered to reaction bath cabinet 2 with the second containing cavity 1b herb liquid through second circulating tube; And under the iris action of second baffle 21, begin to accumulate soup (reaction when the cumulative soup is used for silicon chip making herbs into wool); When the soup face surpasses second baffle 21, will flow back into the first containing cavity 1a through first-class siphunculus from medicine outlet 2a, because the bottom of first baffle plate 11 offers communication port, the soup that therefore flows back among the first containing cavity 1a can flow to the second containing cavity 1b through communication port very soon; Be delivered in the reaction bath cabinet 2 through soup extraction pump 12 again, realize circulating of soup.Because the utility model is offered communication port at first baffle plate 11 near the position of the diapire of soup storage box, has shortened the soup circular wait time.
More than a kind of making herbs into wool medicine liquid circulation that the utility model provided has been carried out detailed introduction.Used concrete example among this paper the principle and the embodiment of the utility model are set forth, the explanation of above embodiment just is used to help to understand the method and the core concept thereof of the utility model.Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model principle, can also carry out some improvement and modification to the utility model, these improvement and modification also fall in the protection domain of the utility model claim.
Claims (9)
1. making herbs into wool medicine liquid circulation; Comprise soup storage box (1) and first baffle plate (11), said first baffle plate (11) is arranged at the bottom of said soup storage box (1), and said soup storage box (1) has first containing cavity (1a) and second containing cavity (1b); Said first containing cavity (1a) and said second containing cavity (1b) lay respectively at the both sides of said first baffle plate (11); The top of said soup storage box (1) offers soup import and medicine liquid outlet, and said soup import is connected with said first containing cavity (1a), and said medicine liquid outlet is connected with said second containing cavity (1b); It is characterized in that
Offer soup communication port (11a) on said first baffle plate (11), said soup communication port (11a) is near the diapire of said soup storage box (1).
2. according to the said making herbs into wool medicine liquid circulation of claim 1, it is characterized in that said first baffle plate (11) is provided with first filter screen (111), said first filter screen (111) covers whole said soup communication port (11a).
3. according to the said making herbs into wool medicine liquid circulation of claim 2, it is characterized in that said first filter screen (111) is the less filter screen in filter pore aperture.
4. according to the said making herbs into wool medicine liquid circulation of claim 1; It is characterized in that; Also comprise soup extraction pump (12); Said soup extraction pump (12) is arranged in said second containing cavity (1b), and the diapire of the liquid-inlet pipe of said soup extraction pump (12) and said soup storage box (1) has the gap that is used for the soup circulation, and the drain pipe of said soup extraction pump (12) is connected with said medicine liquid outlet.
5. according to the said making herbs into wool medicine liquid circulation of claim 4, it is characterized in that, also comprise the first-class siphunculus and second circulating tube, said first-class siphunculus is connected with said soup import, and said second circulating tube is connected with said medicine liquid outlet.
6. according to the said making herbs into wool medicine liquid circulation of claim 5; It is characterized in that; Also comprise reaction bath cabinet (2); The diapire of said reaction bath cabinet (2) offers feeding opening and medicine outlet (2a), and said feeding opening is connected with said second circulating tube, and said medicine outlet (2a) is connected with said first-class siphunculus.
7. according to the said making herbs into wool medicine liquid circulation of claim 6; It is characterized in that; The diapire of said reaction bath cabinet (2) is provided with second baffle (21); Said feeding opening and said medicine outlet (2a) are divided into the both sides of said second baffle (21), and said second baffle (21) has the gap that is used for the soup circulation with the top board of said reaction bath cabinet (2).
8. according to claim 6 or 7 said making herbs into wool medicine liquid circulations, it is characterized in that the diapire of said reaction bath cabinet (2) is provided with second filter screen (22), said second filter screen (22) covers whole said medicine outlets (2a).
9. according to each said making herbs into wool medicine liquid circulation of claim 1 to 7; It is characterized in that; Said soup storage box (1) comprises soup storage box (1) main body and soup storage box (1) top board, and said soup storage box (1) top board and said soup storage box (1) main body removably connect, and said soup storage box (1) top board comprises first top board and second top board; Said first top board offers said soup import, and said second top board offers medicine liquid outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205559517U CN202401164U (en) | 2011-12-27 | 2011-12-27 | Etching liquid circulating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205559517U CN202401164U (en) | 2011-12-27 | 2011-12-27 | Etching liquid circulating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202401164U true CN202401164U (en) | 2012-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205559517U Expired - Fee Related CN202401164U (en) | 2011-12-27 | 2011-12-27 | Etching liquid circulating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202401164U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102925983A (en) * | 2012-11-02 | 2013-02-13 | 洛阳尚德太阳能电力有限公司 | Recovering device and method for monocrystalline silicon piece frocking liquid |
| CN107891036A (en) * | 2017-10-25 | 2018-04-10 | 无锡琨圣科技有限公司 | A kind of water saving fixtures of new etching cleaning machine |
-
2011
- 2011-12-27 CN CN2011205559517U patent/CN202401164U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102925983A (en) * | 2012-11-02 | 2013-02-13 | 洛阳尚德太阳能电力有限公司 | Recovering device and method for monocrystalline silicon piece frocking liquid |
| CN107891036A (en) * | 2017-10-25 | 2018-04-10 | 无锡琨圣科技有限公司 | A kind of water saving fixtures of new etching cleaning machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CNBM JETION SOLAR (CHINA) TECHNOLOGY CO., LTD. Free format text: FORMER NAME: JETION TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee after: China National Building Materials Group Corporation Jetion Solar (China) Co., Ltd. Address before: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee before: Jetion Solar(China) Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20161227 |