CN202401125U - Sputtering anti-diffraction tray - Google Patents
Sputtering anti-diffraction tray Download PDFInfo
- Publication number
- CN202401125U CN202401125U CN2012200755332U CN201220075533U CN202401125U CN 202401125 U CN202401125 U CN 202401125U CN 2012200755332 U CN2012200755332 U CN 2012200755332U CN 201220075533 U CN201220075533 U CN 201220075533U CN 202401125 U CN202401125 U CN 202401125U
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- China
- Prior art keywords
- diffraction
- tray
- stopping block
- block
- pallet
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Abstract
The utility model discloses a sputtering anti-diffraction tray. The sputtering anti-diffraction tray comprises a frame body, wherein a housing groove is formed in the frame body; a stopping block for preventing diffraction is mounted in the housing groove. As the stopping block is mounted in the housing groove, the phenomenon that a diffraction material is diffracted to the back face of a product during sputtering is effectively prevented; particularly, the position of the stopping block can be adjusted when the same tray is used for bearing products with different sizes; through the reduction of the distance between the stopping block and the product, the diffraction phenomenon caused by nonconformance between the size of the tray and the size of an electronic product is avoided; in this way, the same tray can be also applied to various electronic products with different sizes; and the stopping block is designed with a wedge-shaped structure which, compared with a rectangular structure, is helpful for reducing the integral weight of the tray and the stopping block, so as to avoid additional increase of excessive load and operation cost.
Description
Technical field
The utility model relates to the pallet that is used to carry, transport electronic component, refers in particular to the anti-diffraction pallet of a kind of sputter.
Background technology
In the manufacturing process of general electronic products; Its finished product or work in-process normally are placed on each flow process of carrying out manufacturing course in the pallet (also claiming TRAY); For example; From contact panel glass coating, surface working foremost, in the testing process of the applying of end encapsulation to the last and each link, bound pallet is as the instrumentality of carrying and transporting.
In the above-mentioned film coating method, sputtering method relies on its preferable sedimentation effect of reaching, accurate composition control and lower manufacturing cost and is widely used.Sputtering method is a kind of technology that obtains film through ion impact.Sputter generally is in the sputter machine, to accomplish; It is in reaction chamber, to utilize photoglow that argon gas ion is clashed into target material surface to produce plasma body; Utilize accelerated manners such as magnetic field or electric field to make the pair ion sputter target in the plasma body bombard again; The surperficial target atom of target is spilt fly to plated body, and form thin film on the plated body surface.
Yet electronic product is when carrying out vacuum splashing and plating, and it is under high temperature, high vacuum environment, to carry out continuous production with tray form.Usually, pallet dimension and electronic product are not inconsistent, and very easily cause in the production process sputtering material diffraction to the electronic product back side, also have, because the pallet direct of travel is vertical with the plated film direction, are prone to cause electronic product back side diffraction yet, have influenced quality product.
Therefore, need work out a kind of new technical scheme and solve the problems referred to above.
The utility model content
In view of this, the utility model is to the disappearance of prior art existence, and its main purpose provides the anti-diffraction pallet of a kind of sputter, and it effectively solves diffraction problems.
For realizing above-mentioned purpose, the utility model adopts following technical scheme:
A kind of sputter is prevented the diffraction pallet, comprises a framework, is formed with storage tank on this framework, be equipped with in this storage tank one be used for anti-diffraction block.
As a kind of preferred version, a side of said storage tank forms a skewed slot, and this block matches with skewed slot.
As a kind of preferred version, said skewed slot has the inclined-plane that oblique outward extension forms from bottom to top.
As a kind of preferred version, said skewed slot has the inclined-plane that is the miter angle setting.
As a kind of preferred version, said block is a wedge structure.
After the utility model adopted technique scheme, its beneficial effect existed:
One, through a block is installed in storage tank, the phenomenon of diffraction to the product back side appears, especially when effectively preventing sputter; When same pallet is used to carry the product of different size; The adjustable stops position is through reducing distance between block and product, to solve owing to pallet dimension and electronic product are not inconsistent the diffraction phenomenon that produces; So, also make same pallet go for the electronic product of multiple different size;
Two, aforementioned block is designed to wedge structure, compared to the block of rectangular configuration, helps to reduce the overall weight of pallet and block, in order to avoid extra increase is too much carried and shipment and delivery cost;
Three, be formed with 45 degree skewed slots between aforementioned block and the storage tank, further be beneficial to and remove of the influence of diffraction material, improved the sputter quality of product the product back side.
Be constitutional features and the effect of more clearly setting forth the utility model, come the utility model is elaborated below in conjunction with accompanying drawing and specific embodiment:
Description of drawings
Fig. 1 is the perspective view of the preferred embodiment of the utility model.
The accompanying drawing identifier declaration:
1, pallet
10, framework 20, storage tank
30, block 40, skewed slot
50, electronic product
Embodiment
See also shown in Figure 1ly, it has demonstrated the concrete structure of pallet of the preferred embodiment of the utility model, and this pallet 1 comprises a framework 10, is formed with storage tank 20 on this framework 10, be equipped with in this storage tank 20 one be used for anti-diffraction block 30.
Wherein, One side of this storage tank 20 forms a skewed slot 40, and this block 30 matches with skewed slot 40, and this skewed slot 40 has the inclined-plane that oblique outward extension forms from bottom to top; Practice shows; When this skewed slot 40 was miter angle, block 30 was tight with cooperating of skewed slot 40, and it is more conducive to remove the influence of diffraction material to electronic product 50 back sides.Because this baffle plate 30 closely cooperates with skewed slot 40, when the electronic product on the pallet 1 50 was carried out sputter process, sputtering material can not pollute electronic product 50 because of the back side of gap diffraction to the electronic product 50 of existence between electronic product 50 and the framework 10.
In addition, in order to alleviate overall weight, in order to avoid extra increase is too much carried and shipment and delivery cost, aforementioned block 30 is designed to wedge structure, and certainly, block 30 shapes do not limit, and also can be other.
The design focal point of the utility model is, through a block is installed in storage tank, occurs the phenomenon at sputter material diffraction to the product back side when effectively preventing sputter; Especially, when same pallet is used to carry the product of different size, the adjustable stops position; Through reducing distance between block and product;, like this to solve because pallet dimension and electronic product are not inconsistent the diffraction phenomenon that produces, also make same pallet go for the electronic product of multiple different size.
The above; It only is the preferred embodiment of the utility model; Be not that the technical scope of the utility model is done any restriction; So every technical spirit according to the utility model all still belongs in the scope of the utility model technical scheme any trickle modification, equivalent variations and modification that above embodiment did.
Claims (5)
1. the anti-diffraction pallet of a sputter is characterized in that: comprise a framework, be formed with storage tank on this framework, be equipped with in this storage tank one be used for anti-diffraction block.
2. anti-scratch pallet according to claim 1 is characterized in that: a side of said storage tank forms a skewed slot, and this block matches with skewed slot.
3. anti-scratch pallet according to claim 2 is characterized in that: said skewed slot has the inclined-plane that oblique outward extension forms from bottom to top.
4. anti-scratch pallet according to claim 2 is characterized in that: said skewed slot has the inclined-plane that is the miter angle setting.
5. anti-scratch pallet according to claim 1 is characterized in that: said block is a wedge structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755332U CN202401125U (en) | 2012-03-01 | 2012-03-01 | Sputtering anti-diffraction tray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755332U CN202401125U (en) | 2012-03-01 | 2012-03-01 | Sputtering anti-diffraction tray |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202401125U true CN202401125U (en) | 2012-08-29 |
Family
ID=46698786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200755332U Expired - Fee Related CN202401125U (en) | 2012-03-01 | 2012-03-01 | Sputtering anti-diffraction tray |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202401125U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103805950A (en) * | 2012-11-02 | 2014-05-21 | 矽品精密工业股份有限公司 | Clamp for sputtering process and method for sputtering semiconductor package |
-
2012
- 2012-03-01 CN CN2012200755332U patent/CN202401125U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103805950A (en) * | 2012-11-02 | 2014-05-21 | 矽品精密工业股份有限公司 | Clamp for sputtering process and method for sputtering semiconductor package |
| CN103805950B (en) * | 2012-11-02 | 2017-03-01 | 矽品精密工业股份有限公司 | Clamp for sputtering process and method for sputtering semiconductor package |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20180301 |