CN202390575U - Vacuum meter positioning device of polycrystalline furnace and polycrystalline furnace with same - Google Patents
Vacuum meter positioning device of polycrystalline furnace and polycrystalline furnace with same Download PDFInfo
- Publication number
- CN202390575U CN202390575U CN2011204816896U CN201120481689U CN202390575U CN 202390575 U CN202390575 U CN 202390575U CN 2011204816896 U CN2011204816896 U CN 2011204816896U CN 201120481689 U CN201120481689 U CN 201120481689U CN 202390575 U CN202390575 U CN 202390575U
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- polycrystalline furnace
- vacuumometer
- threeway
- diaphragm valve
- high vacuum
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Abstract
The utility model relates to a vacuum meter positioning device of a polycrystalline furnace. The device comprises a reducing joint, a three-way pipe, a high vacuum diaphragm valve, two 90-degree bends and two vacuum meters, wherein one end of the reducing joint is connected to a cavity of the polycrystalline furnace through a hoop; the other end of the reducing joint is connected with the front port of the three-way pipe; a left flange of the three-way pipe is connected with one end of the high vacuum diaphragm valve; a right flange of the three-way pipe is connected with one end of one 90-degree bend; the other end of the high vacuum diaphragm valve is connected with one end of the other 90-degree bend; and the vacuum meters are arranged at the other ends of the two 90-degree bends respectively. The utility model also provides the polycrystalline furnace with the vacuum meter positioning device of the polycrystalline furnace.
Description
Technical field:
The utility model relates to the production of polysilicon equipment technical field, particularly a kind of polycrystalline furnace vacuumometer locating device and adopt the polycrystalline furnace of this locating device.
Background technology:
Polycrystalline furnace is that polycrystalline silicon material is converted into the indispensable equipment in the polysilicon ingot process process, and polycrystal silicon ingot is the basic material in photovoltaic generation and the semicon industry after art breading.Polycrystal silicon ingot is as the critical support material of advanced information society, is one of most important polycrystalline material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
In the polycrystalline silicon ingot casting process, the vacuumometer locating device is used to install vacuumometer, measures the intravital vacuum tightness in polycrystalline furnace chamber to utilize vacuumometer.General vacuumometer locating device is to adopt the mode of an elbow and a vacuumometer cooperation to realize, though it is simple in structure, is difficult for regulating, and causes phenomenons such as measuring result is inaccurate easily.
Summary of the invention:
In view of this, be necessary to provide a kind of control and carry out proper, sensitivity, polycrystalline furnace vacuumometer locating device that safety is high.
Also be necessary to provide a kind of polycrystalline furnace that adopts polycrystalline furnace vacuumometer locating device.
A kind of polycrystalline furnace vacuumometer locating device, it comprises reducer union, threeway, high vacuum diaphragm valve, two 90 degree elbows, two vacuumometers.One end of reducer union is connected on the polycrystalline furnace cavity through anchor ear, and the other end of reducer union is connected with the front port of threeway.The left side flange of threeway is connected with an end of high vacuum diaphragm valve, and the right side flange of threeway is connected with an end of one of them 90 degree elbow; The other end of high vacuum diaphragm valve is connected with an end of another part 90 degree elbows; The corresponding respectively the other end that is installed in two 90 degree elbows of vacuumometer.
A kind of polycrystalline furnace that adopts polycrystalline furnace vacuumometer locating device comprises polycrystalline furnace vacuumometer locating device and polycrystalline furnace cavity.Polycrystalline furnace vacuumometer locating device comprises reducer union, threeway, high vacuum diaphragm valve, two 90 degree elbows, two vacuumometers.One end of reducer union is connected on the polycrystalline furnace cavity through anchor ear, and the other end of reducer union is connected with the front port of threeway.The left side flange of threeway is connected with an end of high vacuum diaphragm valve, and the right side flange of threeway is connected with an end of one of them 90 degree elbow; The other end of high vacuum diaphragm valve is connected with an end of another part 90 degree elbows; The corresponding respectively the other end that is installed in two 90 degree elbows of vacuumometer.
The polycrystalline furnace vacuumometer locating device that the utility model provides is installed on the polycrystalline furnace back when measuring in the polycrystalline furnace cavity vacuum tightness; Utilization is installed in the intravital vacuum tightness in vacuumometer bigness scale amount polycrystalline furnace chamber on the 90 degree elbows that are connected with the right side flange of threeway; The vacuumometer of 90 degree on the elbows that is connected through the other end with the high vacuum diaphragm valve again measured the intravital vacuum tightness in polycrystalline furnace chamber accurately; So need just can not realize the thick side of the intravital vacuum tightness in polycrystalline furnace chamber, accurately survey with changing elbow and vacuumometer; And then guarantee the safety of operation, improve the accuracy of vacuum measurement and reduced the generation that vacuumometer damages phenomenon.
Description of drawings:
Accompanying drawing 1 is the structural representation of the polycrystalline furnace vacuumometer locating device of a preferred embodiments.
Accompanying drawing 2 is structural representations of another angle of polycrystalline furnace vacuumometer locating device among Fig. 1.
Among the figure: polycrystalline furnace vacuumometer locating device 10, reducer union 11, threeway 12, front port 121, left side flange 122, right side flange 123, high vacuum diaphragm valve 13,90 degree elbows 14, vacuumometer 15
Embodiment:
The polycrystalline furnace vacuumometer locating device that the utility model provides is installed on the polycrystalline furnace cavity of polycrystalline furnace; Be used to measure the vacuum tightness in the polycrystalline furnace; Please be simultaneously referring to Fig. 1, Fig. 2, polycrystalline furnace vacuumometer locating device 10 comprises reducer union 11, threeway 12, high vacuum diaphragm valve 13, two 90 degree elbows 14, two vacuumometers 15.
One end of reducer union 11 is connected on the polycrystalline furnace cavity through anchor ear, and the other end of reducer union 11 is connected with the front port 121 of threeway 12.The left side flange 122 of threeway 12 is connected with an end of high vacuum diaphragm valve 13, and the right side flange 123 of threeway 12 is connected with an end of one of them 90 degree elbow 14; The other end of high vacuum diaphragm valve 13 is connected with an end of another part 90 degree elbows 14; The corresponding respectively the other end that is installed in two 90 degree elbows 14 of vacuumometer 15.
In the polycrystalline furnace ingot casting process; When using polycrystalline furnace vacuumometer locating device 10 to carry out vacuum measurement; Utilization is installed in the intravital vacuum tightness in vacuumometer 15 bigness scale amount polycrystalline furnace chambeies on the 90 degree elbows 14 that are connected with the right side flange 123 of threeway 12; Vacuumometer 15 accurate the measure polycrystalline furnace chambeies intravital vacuum tightnesss of 90 degree on the elbows 14 that are connected through the other end again with high vacuum diaphragm valve 13; So need just can not realize the thick side of the intravital vacuum tightness in polycrystalline furnace chamber, accurately survey, and then guarantee the safety of operation, improve the accuracy of vacuum measurement and reduced the generation of vacuumometer damage phenomenon with changing elbow and vacuumometer.
Claims (2)
1. polycrystalline furnace vacuumometer locating device is characterized in that: polycrystalline furnace vacuumometer locating device comprises reducer union, threeway, high vacuum diaphragm valve, two 90 degree elbows, two vacuumometers; One end of reducer union is connected on the polycrystalline furnace cavity through anchor ear, and the other end of reducer union is connected with the front port of threeway; The left side flange of threeway is connected with an end of high vacuum diaphragm valve, and the right side flange of threeway is connected with an end of one of them 90 degree elbow; The other end of high vacuum diaphragm valve is connected with an end of another part 90 degree elbows; The corresponding respectively the other end that is installed in two 90 degree elbows of vacuumometer.
2. polycrystalline furnace that adopts polycrystalline furnace vacuumometer locating device; Comprise polycrystalline furnace vacuumometer locating device and polycrystalline furnace cavity, it is characterized in that: polycrystalline furnace vacuumometer locating device comprises reducer union, threeway, high vacuum diaphragm valve, two 90 degree elbows, two vacuumometers; One end of reducer union is connected on the polycrystalline furnace cavity through anchor ear, and the other end of reducer union is connected with the front port of threeway.The left side flange of threeway is connected with an end of high vacuum diaphragm valve, and the right side flange of threeway is connected with an end of one of them 90 degree elbow; The other end of high vacuum diaphragm valve is connected with an end of another part 90 degree elbows; The corresponding respectively the other end that is installed in two 90 degree elbows of vacuumometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204816896U CN202390575U (en) | 2011-11-28 | 2011-11-28 | Vacuum meter positioning device of polycrystalline furnace and polycrystalline furnace with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204816896U CN202390575U (en) | 2011-11-28 | 2011-11-28 | Vacuum meter positioning device of polycrystalline furnace and polycrystalline furnace with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202390575U true CN202390575U (en) | 2012-08-22 |
Family
ID=46665512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204816896U Expired - Lifetime CN202390575U (en) | 2011-11-28 | 2011-11-28 | Vacuum meter positioning device of polycrystalline furnace and polycrystalline furnace with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202390575U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851746A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN105506730A (en) * | 2015-12-15 | 2016-04-20 | 上海汉虹精密机械有限公司 | Main vacuum pipeline structure of single-crystal furnace |
-
2011
- 2011-11-28 CN CN2011204816896U patent/CN202390575U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851746A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN102851746B (en) * | 2012-09-26 | 2015-06-17 | 南京晶升能源设备有限公司 | Bidirectional symmetric pump-down system for sapphire single crystal furnace |
| CN105506730A (en) * | 2015-12-15 | 2016-04-20 | 上海汉虹精密机械有限公司 | Main vacuum pipeline structure of single-crystal furnace |
| CN105506730B (en) * | 2015-12-15 | 2019-02-12 | 上海汉虹精密机械有限公司 | A kind of main vacuum line structure of single crystal growing furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120822 |
|
| CX01 | Expiry of patent term |