CN202373568U - Mounting tool for electrostatic adsorption disc - Google Patents
Mounting tool for electrostatic adsorption disc Download PDFInfo
- Publication number
- CN202373568U CN202373568U CN 201120571423 CN201120571423U CN202373568U CN 202373568 U CN202373568 U CN 202373568U CN 201120571423 CN201120571423 CN 201120571423 CN 201120571423 U CN201120571423 U CN 201120571423U CN 202373568 U CN202373568 U CN 202373568U
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- CN
- China
- Prior art keywords
- electrostatic absorption
- disc
- absorption dish
- hole
- shaped body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a mounting tool for an electrostatic adsorption disc. The electrostatic adsorption disc is installed on a base by a plurality of screws and is provided with a plurality of screw holes matched with the screws. The mounting tool for the electrostatic adsorption disc comprises a disc-shaped body, the diameter of the disc-shaped body is large than or equal to that of the electrostatic adsorption disc, through holes corresponding to the screw holes in the electromagnetic adsorption disc are arranged in the disc-shaped body, and the diameters of the through holes are larger than the outer diameters of screw caps of corresponding screws. When the electromagnetic adsorption disc is disassembled, a cover of the disc-shaped body is covered on the electrostatic adsorption disc firstly and then can prevent a screwdriver from touching the electrostatic adsorption disc all the time in the process that the screws on the electrostatic adsorption disc are unscrewed or screwed by the screwdriver, so that the cover of the disc-shaped body plays the role of protecting the electrostatic adsorption disc in the replacing process of the electrostatic adsorption disc.
Description
Technical field
The utility model relates to a kind of semiconductor applications, relates in particular to a kind of erecting tools.
Background technology
At present, use Electrostatic Absorption dish absorption wafer in a lot of process cavity in the semiconductor applications.Shown in Figure 1 is the internal structure sketch map of etching chamber, in cavity 110 inside, Electrostatic Absorption dish 120 borders through some screw lockings below base 130 on, said Electrostatic Absorption dish 120 is provided with the screw hole that some and said screw is complementary.
After using a period of time, the attendant need overhaul and change Electrostatic Absorption dish 120.In the replacing process, be easy to generate following problem:
On the one hand, when unclamping screw with screwdriver or tightening screw, the surface that occurs Electrostatic Absorption dish 120 is easily caused the surface smoothness of Electrostatic Absorption dish 120 to reduce, so that has reduced the absorption affinity to wafer by the screwdriver scratch, influences the product processing procedure.
On the other hand, because the border of Electrostatic Absorption dish 120 adopts a lot of screws fastening, and, receive artificial factor bigger because the attendant is manual operations.Yet the tightening sequence of screw is worthy of careful study, can not be fastening in turn, otherwise, the phenomenon of Electrostatic Absorption dish 120 discontinuity appears easily, and it is not in place to cause Electrostatic Absorption dish 120 to be installed.
Therefore, how the Electrostatic Absorption dish erecting tools that can effectively protect the Electrostatic Absorption panel surface being provided is the technical problem that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of the utility model is to provide a kind of Electrostatic Absorption dish erecting tools, can effectively protect the surface of Electrostatic Absorption dish.
In order to reach above-mentioned purpose, the utility model adopts following technical scheme:
A kind of Electrostatic Absorption dish erecting tools; Said Electrostatic Absorption dish is installed on the base through some screws; Said Electrostatic Absorption dish is provided with the screw hole that some and said screw is complementary; Said Electrostatic Absorption dish erecting tools comprises a disc-shaped body; The diameter of said disc-shaped body is greater than or equal to the diameter of said Electrostatic Absorption dish, and the screw hole on the corresponding said Electrostatic Absorption dish of said disc-shaped body is provided with corresponding through hole, and the diameter of said through hole is greater than the external diameter of the nut of respective screws.
In above-mentioned Electrostatic Absorption dish erecting tools, said through hole comprises some first through holes and some second through holes, and the diameter of said first through hole is provided with one or more second through holes greater than the diameter of said second through hole between adjacent first through hole.
In above-mentioned Electrostatic Absorption dish erecting tools, the quantity of first through hole is four.
In above-mentioned Electrostatic Absorption dish erecting tools, the quantity of second through hole is eight.
In above-mentioned Electrostatic Absorption dish erecting tools, a surface of said disc-shaped body is provided with the screw sequence identification.
The Electrostatic Absorption dish erecting tools that the utility model provides; Comprise a disc-shaped body, the diameter of said disc-shaped body is greater than or equal to the diameter of said Electrostatic Absorption dish, and the screw hole on the corresponding said Electrostatic Absorption dish of said disc-shaped body is provided with corresponding through hole; The diameter of said through hole is greater than the external diameter of the nut of respective screws; Therefore, when dismounting Electrostatic Absorption dish, can earlier this disc-shaped body be covered on said Electrostatic Absorption dish; And make respective screws hole on the said Electrostatic Absorption dish of through-hole alignment of this disc-shaped body; Then, unclamp or tighten the screw on the Electrostatic Absorption dish, unclamping with screwdriver or tightening in the process of the screw on the Electrostatic Absorption dish with screwdriver; The disc-shaped body lid intercepts screwdriver all the time and touches the Electrostatic Absorption dish, thereby in the replacing process of Electrostatic Absorption dish, plays the effect of protection Electrostatic Absorption dish.
In addition; Through on a surface of said disc-shaped body, being provided with the screw sequence identification; Can indicate the attendant to tighten screw through the screw sequence identification according to correct order; Make the stressed of Electrostatic Absorption dish evenly be in place everywhere, thereby effectively improved the stability of Electrostatic Absorption dish.
Description of drawings
The Electrostatic Absorption dish erecting tools of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the internal structure sketch map of existing etching chamber;
Fig. 2 is the structural representation of the Electrostatic Absorption dish erecting tools of the utility model one embodiment.
Among the figure, 110-cavity, 120-Electrostatic Absorption dish, 130-base, 210-disc-shaped body, 220-first through hole, 230-second through hole.
Embodiment
Below will do further to describe in detail to the Electrostatic Absorption dish erecting tools of the utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.
For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development possibly be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 2; And combination Fig. 1; Present embodiment provides a kind of Electrostatic Absorption dish erecting tools, and said Electrostatic Absorption dish 120 is installed on the base 130 through some screws, and said Electrostatic Absorption dish 120 is provided with the screw hole that some and said screw is complementary; The said erecting tools that is used to install Electrostatic Absorption dish 120 comprises a disc-shaped body 210; The diameter of said disc-shaped body 210 is greater than or equal to the diameter of said Electrostatic Absorption dish 120, and the screw hole on the said disc-shaped body 210 corresponding said Electrostatic Absorption dishes 120 is provided with corresponding through hole, and the diameter of said through hole is greater than the external diameter of the nut of respective screws.When dismounting Electrostatic Absorption dish 120; Can earlier this disc-shaped body 210 be covered on the said Electrostatic Absorption dish 120; And make respective screws hole on the said Electrostatic Absorption dish 120 of through-hole alignment of this disc-shaped body 210; Then, unclamp or tighten the screw on the Electrostatic Absorption dish 120, unclamping with screwdriver or tightening in the process of the screw on the Electrostatic Absorption dish 120 with screwdriver; Disc-shaped body lid 210 intercepts screwdriver all the time and touches Electrostatic Absorption dish 120, thereby in the replacing process of Electrostatic Absorption dish 120, plays the effect of protection Electrostatic Absorption dish 120.
In the present embodiment; In this Electrostatic Absorption dish erecting tools; Said through hole comprises some first through holes 220 and some second through holes 230, and the diameter of said first through hole 220 is provided with one or more second through holes 230 greater than the diameter of said second through hole 230 between adjacent first through hole 220.The through hole of different size is the screw of corresponding different size respectively, can because except base 130, also have miscellaneous part and Electrostatic Absorption dish 120 to pass through screw in order to the different parts of difference and Electrostatic Absorption dish 120 screw.Particularly, the quantity of said first through hole 220 is four.The quantity of said second through hole 230 is eight.Certainly, the utility model is not done qualification to the quantity of first through hole and second through hole, and those skilled in the art can do corresponding adjustment according to the quantity and the distribution situation of the screw hole of Electrostatic Absorption dish 120.
Preferably, in the Electrostatic Absorption dish erecting tools of present embodiment, a surface of said disc-shaped body 210 is provided with the screw sequence identification.Through on a surface of said disc-shaped body 210, the screw sequence identification being set; Can indicate the attendant to tighten screw through the screw sequence identification according to correct order; Make Electrostatic Absorption dish 120 stressed everywhere evenly; Be in place, thereby effectively improved the stability of Electrostatic Absorption dish 120.
In sum, the Electrostatic Absorption dish erecting tools that the utility model provides comprises a disc-shaped body; The diameter of said disc-shaped body is greater than or equal to the diameter of said Electrostatic Absorption dish; Screw hole on the corresponding said Electrostatic Absorption dish of said disc-shaped body is provided with corresponding through hole, and the diameter of said through hole is greater than the external diameter of the nut of respective screws, therefore; When dismounting Electrostatic Absorption dish; Can earlier this disc-shaped body be covered on said Electrostatic Absorption dish, and make respective screws hole on the said Electrostatic Absorption dish of through-hole alignment of this disc-shaped body, then; Unclamp or tighten the screw on the Electrostatic Absorption dish with screwdriver; Unclamping with screwdriver or tightening in the process of the screw on the Electrostatic Absorption dish, the disc-shaped body lid intercepts screwdriver all the time and touches the Electrostatic Absorption dish, thereby in the replacing process of Electrostatic Absorption dish, plays the effect of protection Electrostatic Absorption dish.In addition; Through on a surface of said disc-shaped body, being provided with the screw sequence identification; Can indicate the attendant to tighten screw through the screw sequence identification according to correct order; Make the stressed of Electrostatic Absorption dish evenly be in place everywhere, thereby effectively improved the stability of Electrostatic Absorption dish.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.
Claims (5)
1. Electrostatic Absorption dish erecting tools; Said Electrostatic Absorption dish is installed on the base through some screws; Said Electrostatic Absorption dish is provided with the screw hole that some and said screw is complementary; It is characterized in that said Electrostatic Absorption dish erecting tools comprises a disc-shaped body, the diameter of said disc-shaped body is greater than or equal to the diameter of said Electrostatic Absorption dish; Screw hole on the corresponding said Electrostatic Absorption dish of said disc-shaped body is provided with corresponding through hole, and the diameter of said through hole is greater than the external diameter of the nut of respective screws.
2. Electrostatic Absorption dish erecting tools according to claim 1; It is characterized in that; Said through hole comprises some first through holes and some second through holes, and the diameter of said first through hole is provided with one or more second through holes greater than the diameter of said second through hole between adjacent first through hole.
3. Electrostatic Absorption dish erecting tools according to claim 2 is characterized in that the quantity of said first through hole is four.
4. Electrostatic Absorption dish erecting tools according to claim 2 is characterized in that the quantity of said second through hole is eight.
5. according to any described Electrostatic Absorption dish erecting tools in the claim 1～4, it is characterized in that a surface of said disc-shaped body is provided with the screw sequence identification.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120571423 CN202373568U (en) | 2011-12-30 | 2011-12-30 | Mounting tool for electrostatic adsorption disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120571423 CN202373568U (en) | 2011-12-30 | 2011-12-30 | Mounting tool for electrostatic adsorption disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202373568U true CN202373568U (en) | 2012-08-08 |
Family
ID=46597262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120571423 Expired - Fee Related CN202373568U (en) | 2011-12-30 | 2011-12-30 | Mounting tool for electrostatic adsorption disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202373568U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109129295A (en) * | 2018-09-05 | 2019-01-04 | 中车唐山机车车辆有限公司 | Brake disc bolt tightens sequential disc and tightens sequence control method |
| CN115243495A (en) * | 2022-06-29 | 2022-10-25 | 上海森桓新材料科技有限公司 | Semiconductor equipment electrostatic adsorption dish protection device |
-
2011
- 2011-12-30 CN CN 201120571423 patent/CN202373568U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109129295A (en) * | 2018-09-05 | 2019-01-04 | 中车唐山机车车辆有限公司 | Brake disc bolt tightens sequential disc and tightens sequence control method |
| CN115243495A (en) * | 2022-06-29 | 2022-10-25 | 上海森桓新材料科技有限公司 | Semiconductor equipment electrostatic adsorption dish protection device |
| CN115243495B (en) * | 2022-06-29 | 2023-10-24 | 上海森桓新材料科技有限公司 | Semiconductor device electrostatic adsorption disk protection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120808 Termination date: 20161230 |