CN202372468U - Miniature differential capacitor type glucose continuous monitoring damping sensor - Google Patents
Miniature differential capacitor type glucose continuous monitoring damping sensor Download PDFInfo
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- CN202372468U CN202372468U CN2011205584985U CN201120558498U CN202372468U CN 202372468 U CN202372468 U CN 202372468U CN 2011205584985 U CN2011205584985 U CN 2011205584985U CN 201120558498 U CN201120558498 U CN 201120558498U CN 202372468 U CN202372468 U CN 202372468U
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Abstract
The utility model relates to a miniature differential capacitor type glucose continuous monitoring damping sensor, which comprises a sensor base body, a prestressed membrane and miniature silicon girders, wherein the sensor base body is provided with an air cavity; the sensor base body is provided with a solution cavity wall; a solution cavity is defined by the wall of the solution cavity; the prestressed membrane is fixed on the sensor base body to separate the solution cavity and the air cavity; the miniature silicon girders pass through the prestressed membrane and are respectively arranged in the solution cavity and the air cavity; the solution cavity is provided with a semipermeable member which allows glucose to freely pass and prevents a polymer solution from escaping from the solution cavity; the solution cavity is filled with the polymer solution which can act with the miniature silicon girders to generate damping force; the lateral wall of the air cavity is fixedly provided with a capacitor fixing pole plate; the capacitor fixing pole plate and movable capacitor pole plates arranged on the miniature silicon girders form a differential capacitor; and the miniature silicon girders are respectively provided with a ferromagnetic material layer. According to the miniature differential capacitor type glucose continuous monitoring damping sensor, a pulse exciting function of electromagnetic field acts to the ferromagnetic material layers on the miniature silicon girders to initiate the vibration of a girder-membrane structure, so that the differential capacitance value is changed, and continuous measurement of glucose concentration is realized.
Description
Technical field
The utility model is the Endermic implantating glucose concentration continuous monitoring sensor of a kind of diabetes patient's of being used for blood sugar continuous detecting; Particularly a kind of miniature differential capacitance glucose continuous monitoring damping sensor belongs to the innovative technology of glucose continuous monitoring damping sensor.
Background technology
Diabetes are a kind of metabolic diseases, also are one of modal chronic diseases, are characterized in the hyperglycemia that continues.More early find the state of an illness, keep on a diet, enalapril meleate, insulin injection suppresses because other symptom that is detrimental to health of the too high or too low generation of blood sugar is the way that medically can do at present.Therefore, to the accurate measurement and the continuous monitoring of blood sugar, has very significant meaning.Glucose sensor (Glucose sensor) is the kind device that Applied Electrochemistry or optical principle are carried out glucose detection.Present most of sensor is to belong to chemical sensor, utilizes the selectivity of glucolase, in the oxidizing glucose process, produces electric current, calculates the concentration of glucose through detecting strength of current.Main research concentrates on how to improve the activity of glucolase through chemically modified electrode, and has studied new materials such as CNT and done electrode, adsorbs more glucolase, and improves its activity.Platinum electrode has been adopted in research afterwards, no longer needs glucolase, improves the sensitivity and the life-span of sensor.But having consumed glucose in testing process, chemical sensor influenced the actual measurement blood sugar level.In addition, the restriction of being spread of the glucose consumption rate in the electro-chemical reaction.Because the biological pollution diffusion layer in any variable effect rate of propagation of sensor surface, has influenced the sensitivity of equipment by protein adsorption (for example, cell deposition forms capsule).In addition, float the production of hydrogen peroxide and disturb the electrode and the functional enzyme inactivation that may cause corroding sensor from the electrode activity chemical substance, influence accuracy, reliability and the life-span of equipment.
In order to solve the deficiency that electrochemical method detects, in the positive research of the subcutaneous method for implantation of glucose induction technology.Particularly, some methods with the stable glucose bonding agent with affinity have demonstrated very big application prospect.In these methods, glucose can not be consumed, and the influencing each other of partial glucose concentration in need not going to consider to organize need not go to consider the interaction between the product and the corrosion that produces yet.Simultaneously, only occur in the equilibration time in the deposition of the biosome on implanted sensor surface, measuring accuracy does not have any change.A kind of compatibility sensor technology that is widely used is based on concanavalin A, and concanavalin A has own specific bonding agent to glucose, and it can detect through the method for fluorescence or viscosity.Regrettably, concanavalin A has immunity and cytotoxin, and can weaken along with the time.In addition, utilized the compatibility inductor system of synthesis of glucose binder polymer can go to address these problems.Particularly, number acid sex organization has been developed into a series of methods that are used for glucose detection with the polymkeric substance that glucose synthetic together (the ph value is the same with biological value) forms, for example through fluorescence, stereomutation and conductivity go to detect.At present, the Columbia University has developed a kind of new compatibility sensing system based on acidity, and it is to utilize polyethylene polymer (acrylamide-ran-3-acrylamidophenylboronic acid) (PAA-ran-PAAPBA).In this system, phenyl boric acid is combined into into strong ester bond on glucose and the PAA-ran-PAAPB molecular skeleton, and has increased the viscosity of polymer solution.This cohesive process is reversible, and bonding position is determined by concentration of glucose.Little electric system technology (being called for short MEMS) can make implantable sensor be used for metabolic monitoring, and its small volume energy improves the measured real-time response and reduces invasiveness.MEMS has been used on the glucose sensor with relevant technology, is a kind of based on MEMS vibration signal detection method.
Formerly one of technology is (referring to " Nanotube glucose sensors nanotube glucose sensor ", Chemical and engineering news; News edition of the American Chemical Society, 2004,82 (51) 47-47) survey because the change in fluorescence that the electrical characteristics of nanotube cause based on the near-infrared optical sensor.Specific practice is, the individual layer glucose oxidase is assembled on the nanotube, and the potassium ferricyanide is adsorbed onto the surface.When glucose combines with glucose oxidase, with iron cyanogen compound process complex reaction, produced hydrogen peroxide, this reaction has caused the variation of nanotube electrical properties, thereby has caused the variation of fluorescence, and the intensity of variation of fluorescence is relevant with concentration of glucose.But, in detection, consumed glucose.
Formerly two of technology (referring to " Nonenzymatic glucose sensor enzyme-free glucose sensor " Chemical and engineering news; News edition of the American Chemical Society, 2002,80 (43) 33-33) a kind of improved galvanochemistry carbohydrate sensor that can detect D type concentration of glucose in the blood has been proposed.This sensor is by the organic chemistry lecturer Tony D. James of England University of Bath and co-worker's design thereof; Comprise two boric acid receivers; The sugared order of a loop chain unit of selecting; With one electroactive two luxuriant (network) iron sensing element, it is 40 times that former boric acid is accepted son with the constant that is connected of D type glucose.Change sensor and can also follow D type fructose, D type galactose, D type mannose combines.No enzyme carbohydrate sensor has overcome the age limit of enzyme sensor.
Formerly three of technology (referring to " A MEMS viscometric sensor for continuous glucose monitoring viscosity transducer MEMS that is used for the glucose continuous monitoring "; Yongjun Zhao; Siqi Li; Arthur Davidson; Bozhi Yang, QianWang and Qiao Lin. Journal of Micromechanics and Microengineering, 17 (2007) 2528-2537) a MEMS sensor that is intended to continuous monitoring diabetic blood sugar level proposed.This device has the micro-cantilever vibration that magnetic drives, and micro-cantilever is arranged in a miniature solution cavity that separates through semi-permeable diaphragm and environment.Blood sugar test is based on affinity and is used in combination principle and separates glucosan sword bean A type (concanavalin A) as sensing liquid.The variation that this glucose concentration determination viscosity causes is bound through detecting by concentration of glucose, through measuring the vibration parameters of cantilever.This device can be measured relevant physiology concentration of glucose from 0 to 25m/L millimeter, and resolution is superior to 0.025m/L, and phase sensitivity is superior to-0.4mL
-1This sensor changes concentration of glucose has a time constant to drop to 4.27 fens, and can further improve the design of optimizing equipment.
Formerly four of technology (referring to " the compatible glucose of A MEMS Affinity Glucose Sensor Using a Biocompatible Glucose-Responsive Polymer applying biological is replied the affine glucose sensor of MEMS of polymkeric substance ", X. Huang, S. Li; J. Schultz; Q. Wang and Q. Lin. Sensors and Actuators B:Chemical, 140:603-609,2009) improved polymer solution; In the device after improvement; Concanavalin A, this is a biocompatibility not, is a kind of nontoxic Polymer Synthesizing and replacement.These equipment have been showed sticking affine feasibility blood sugar test, measure but need a polished rod to install and use cantilever deflection, and this is incompatible subcutaneous implant surgery.
Formerly five of technology (referring to " A Capacitive MEMS Viscometric Sensor for Affinity Detection of Glucose capacitive MEMS damping sensor that is used for the affine measurement of glucose "; X. Huang; S. Li, J. Schultz, Q. J. of Microelectromechanical Systems; 18:1246-1254,2009.) designed condenser type vibration damping miniature glucose sensor.Its principle of work is following: glucose molecule gets into sensor through semi-permeable diaphragm, and polymer solution combines (combination degree depends on concentration of glucose) with glucose is reversible, thereby causes the variation of solution viscosity.Viscosity changes the amplitude that changes film, causes changes in capacitance on the film.This method is consumption of glucose not, does not also consume any reagent, and material and bio-compatible can be implanted subcutaneous long-term work.The problem that faces at present is:
1) vibration is non-linear
Owing to there is sealing air, influenced the rigidity of film, when amplitude increased, nonlinear vibration was obvious.
2) capacitance is too little, is disturbed easily
Non-linear in order to reduce vibration, can only strengthen the thickness of sealing air, thereby reduce capacitance.In addition, the complicated vibration shape also possibly occur, offset partition capacitance and change.
3) the glucose diffusion slowly
Glucose turnover sensor is through semi-permeable diaphragm, and flowing of internal solution is laminar flow in the vibration processes, and glucose can only be through freely spreading, and speed is slower, and can produce uneven situation.
Summary of the invention
The purpose of the utility model be to consider the problems referred to above and provide a kind of can be in the continuous coverage that need not under the situation of consumption of glucose to realize concentration of glucose; Save energy resource consumption; So that wireless implantation, make the longer miniature differential capacitance glucose continuous monitoring damping sensor of working time of sensor.
The technical scheme of the utility model is: the miniature differential capacitance type glucose continuous monitoring damping sensor of the utility model; Include sensor base, prestress film, miniature silicon beam, ferromagnetic material layers, electric capacity movable plate electrode, capacitor fixing pole plate, polymer solution, semi-permeable diaphragm, solution cavity and air chamber; Wherein sensor base is provided with air chamber; Be equiped with the solution cavity wall on the sensor base, the solution cavity wall surrounds solution cavity, and the prestress film is fixed on the sensor base; Separate solution cavity and air chamber; Miniature silicon beam passes the prestress film and places solution cavity and air chamber respectively, solution cavity be equipped with allow the glucose freedom through and stop polymer solution to flee from the semi-permeable diaphragm of solution cavity, the polymer solution that can produce damping force with miniature silicon beam effect is housed in the solution cavity; Be fixed with the capacitor fixing pole plate on the sidewall of air chamber, the electric capacity movable plate electrode of installing on capacitor fixing pole plate and the miniature silicon beam is formed differential capacitance, and miniature silicon beam also is equiped with ferromagnetic material layers.
Above-mentioned solution cavity wall is provided with distributed aperture.
The utility model is owing to adopt the composite structure that comprises that sensor base, miniature silicon beam and prestress film are formed; The prestress film is fixed in the set hollow cavity of sensor base; And the hollow cavity that sensor base is set separates and is solution cavity and air chamber, and miniature silicon beam passes the prestress film and places solution cavity and air chamber respectively, and the utility model produces the pulse excitation to multiple beam diaphragm structure through electromagnetic field; When the viscosity of polymkeric substance changes; The amplitude of the beam diaphragm structure of coupling can change thereupon with it, thereby changes the peak value of differential capacitance, realizes the detection of concentration of glucose.Because the measurement of concentration of glucose is to realize that through the reversible change viscosity that combines of glucose and polymer solution the utility model adopts biocompatible materials and polymer solution, safety, the life-span is long.Adopt air chamber to separate with solution cavity, the vibration of composite beam membrane structure guarantees fluid not by compression, has improved the range of linearity of sensor; Adopt beam with holes, reduce liquid inertia power, increase viscous damping power, increased the diffusion of glucose simultaneously.Adopt differential capacitance, signal is stronger.The utility model improves the range of linearity of vibration, improves the influence of damping force, in addition; The utility model also can reduce inertia effects through processing aperture on the solution end semi-girder; Further improve the damping force influence, improve capacitance signal intensity, save energy resource consumption more; So that wireless implantation makes the time of working sensor longer.The sensor of the utility model can be in the continuous coverage that need not under the consumption of glucose situation to realize concentration of glucose, and the excitation of the pulse mode of applicating energy-saving, through the damping of electric capacity amplitude measurement solution, thereby calculates the concentration of glucose.The utility model is that a kind of design is ingenious, function admirable, convenient and practical miniature differential capacitance glucose continuous monitoring damping sensor.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the process flow diagram of the utility model manufacture craft.
Embodiment
Embodiment:
The structural representation of the utility model is as shown in Figure 1; The miniature differential capacitance type glucose continuous monitoring damping sensor of the utility model; Include sensor base 1, prestress film 2, miniature silicon beam 3, ferromagnetic material layers 4, electric capacity movable plate electrode 5, capacitor fixing pole plate 6, polymer solution 7, semi-permeable diaphragm 8, solution cavity 9 and air chamber 10; Wherein sensor base 1 is provided with air chamber 10; Be equiped with solution cavity wall 12 on the sensor base 1, solution cavity wall 12 surrounds solution cavity 9, and prestress film 2 is fixed on the sensor base 1; Separate solution cavity 9 and air chamber 10; Miniature silicon beam 3 passes prestress film 2 and places solution cavity 9 and air chamber 10 respectively, solution cavity 9 be equipped with allow the glucose freedom through and stop polymer solution to flee from the semi-permeable diaphragm 8 of solution cavity 9, the polymer solution 7 that can produce damping forces with miniature silicon beam 3 effects is housed in the solution cavity 9; Be fixed with capacitor fixing pole plate 6 on the sidewall of air chamber 10, the electric capacity movable plate electrode 5 of installing on capacitor fixing pole plate 6 and the miniature silicon beam 3 is formed differential capacitances, also is equiped with on the miniature silicon beam 3 to be used for the power-actuated ferromagnetic material layers 4 of electromagnetism.Above-mentioned electric capacity movable plate electrode 5 is formed differential capacitance with the capacitor fixing pole plate 6 of air chamber 10, has strengthened signal intensity.
In the present embodiment; Capacitor fixing pole plate 6 is two golden films on the sidewall that is fixed on air chamber 10; The electric capacity movable plate electrode 5 of installing on two golden films and the miniature silicon beam 3 is formed differential capacitance; Above-mentioned ferromagnetic material layers 4 is embedded on the miniature silicon beam 3 in the air chamber 10, through the pulse excitation of minitype electromagnet, causes the vibration of beam diaphragm structure.Because the bending stiffness of miniature silicon beam 3 is much larger than the flexural vibrations rigidity of film, miniature silicon beam 3 is rigid motion basically, plays the effect of amplifying and transmitting electromagnetic force and damping force.Film flexural vibrations under the effect of miniature silicon beam 3 have guaranteed that basically the volume of air chamber 10 and solution cavity 9 can not change.
The method for making of the miniature differential capacitance glucose continuous monitoring damping sensor of the utility model comprises the steps, and is as shown in Figure 2:
1) on thermally grown silicon, iron plating flux material layer 4 and electric capacity movable plate electrode 5 obtain miniature silicon beam 3 with line cutting or photoetching method, scheme like (a) among Fig. 2; Plate sacrifice layer 11 and vapour deposition parylene film then, scheme like (b) among Fig. 2; On film, plate capacitor fixing pole plate 6 at last, last vapour deposition parylene film like (c) among Fig. 2 figure, forms the differential capacitance sub-assemblies, has guaranteed the symmetry and the accuracy requirement of differential capacitance.
2) deep etching or electrosparking deep trouth on silicon substrate form sensor base 1, and like (d) among Fig. 2 figure, the differential capacitance sub-assemblies bonding that the first step is obtained is installed on the set deep trouth of sensor base (1), schemes like (e) among Fig. 2;
3) vapour deposition parylene film forms prestress film 2, and dissolving sacrifice layer 11 is schemed like (f) among Fig. 2; Solution cavity wall 12 and semi-permeable diaphragm 8 are installed, and solution cavity wall 12 surrounds solution cavity 9, at last device is encapsulated, and schemes like (g) among Fig. 2.
The measured concentration of glucose of the utility model is to realize with the damping of the reversible polymer solution that combines of glucose through measuring; Its design feature is; Prestress film 2 separates air chamber and polymer solution chamber; Ferromagnetic material drives miniature silicon beam (3) and rotates around the intersecting lens with prestress film 2 under the effect of electromagnetic force, drive prestress film 2 simultaneously and do the second order flexural vibrations, has guaranteed gas and the constancy of volume of polymer solution in the capacitor.Miniature silicon beam 3 interacts in solution cavity 9 parts and polymer solution, produces damping force, changes the amplitude of miniature silicon beam 3 under given electromagnetic actuation force.Electric capacity movable plate electrode 5 on little beam is formed differential capacitance with the capacitor fixing pole plate of air chamber wall 6, and the amplitude of miniature silicon beam 3 is by the reacting condition of differential capacitance value.Glucose in the blood frees in and out through semi-permeable diaphragm 8, the reversible viscosity that combines to change solution of glucose and polymkeric substance, thus influence the amplitude of little beam and the capacitance of differential capacitance.
The damping of described miniature beam film unitized construction can be through the gap adjustment of miniature silicon beam 3 with the chamber wall of solution cavity 9, thereby according to the gap length of the scope designing optimal of survey damping, the sensitivity of raising sensor.
In addition, can also through in the chamber of solution cavity 9 wall process distributed aperture, reduce the inertia force influence of liquid, and improve the influence of damping force.
Claims (2)
1. miniature differential capacitance type glucose continuous monitoring damping sensor; It is characterized in that including sensor base (1), prestress film (2), miniature silicon beam (3), ferromagnetic material layers (4), electric capacity movable plate electrode (5), capacitor fixing pole plate (6), polymer solution (7), semi-permeable diaphragm (8), solution cavity (9) and air chamber (10); Wherein sensor base (1) is provided with air chamber (10); Be equiped with solution cavity wall (12) on the sensor base (1); Solution cavity wall (12) surrounds solution cavity (9); Prestress film (2) is fixed on the sensor base (1), separates solution cavity (9) and air chamber (10), and miniature silicon beam (3) passes prestress film (2) and places solution cavity (9) and air chamber (10) respectively; Solution cavity (9) be equipped with allow the glucose freedom through and stop polymer solution to flee from the semi-permeable diaphragm of solution cavity (9) (8), the polymer solution (7) that can produce damping force with miniature silicon beam (3) effect is housed in the solution cavity (9); Be fixed with capacitor fixing pole plate (6) on the sidewall of air chamber (10), capacitor fixing pole plate (6) is formed differential capacitance with the electric capacity movable plate electrode (5) that miniature silicon beam (3) is gone up installing, also is equiped with ferromagnetic material layers (4) on the miniature silicon beam (3).
2. miniature differential capacitance type glucose continuous monitoring damping sensor according to claim 1 is characterized in that above-mentioned solution cavity wall (12) is provided with distributed aperture.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011205584985U CN202372468U (en) | 2011-12-28 | 2011-12-28 | Miniature differential capacitor type glucose continuous monitoring damping sensor |
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| CN2011205584985U CN202372468U (en) | 2011-12-28 | 2011-12-28 | Miniature differential capacitor type glucose continuous monitoring damping sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565148A (en) * | 2011-12-28 | 2012-07-11 | 广东工业大学 | Miniature differential capacitance glucose continuous monitoring damping sensor and manufacturing method thereof |
| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
-
2011
- 2011-12-28 CN CN2011205584985U patent/CN202372468U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565148A (en) * | 2011-12-28 | 2012-07-11 | 广东工业大学 | Miniature differential capacitance glucose continuous monitoring damping sensor and manufacturing method thereof |
| CN102565148B (en) * | 2011-12-28 | 2014-05-07 | 广东工业大学 | Miniature differential capacitance glucose continuous monitoring damping sensor and manufacturing method thereof |
| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
| CN113376377B (en) * | 2021-04-21 | 2023-11-24 | 上海工程技术大学 | MEMS sensor for sustainable detection of glucose concentration |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20120808 Effective date of abandoning: 20140507 |
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| RGAV | Abandon patent right to avoid regrant |