CN202372316U - Leak detection and interception device of helium mass spectrometer leak detector - Google Patents
Leak detection and interception device of helium mass spectrometer leak detector Download PDFInfo
- Publication number
- CN202372316U CN202372316U CN 201120422353 CN201120422353U CN202372316U CN 202372316 U CN202372316 U CN 202372316U CN 201120422353 CN201120422353 CN 201120422353 CN 201120422353 U CN201120422353 U CN 201120422353U CN 202372316 U CN202372316 U CN 202372316U
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- CN
- China
- Prior art keywords
- helium
- mass spectrometer
- leak detection
- leak
- leak detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Examining Or Testing Airtightness (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model discloses a leak detection and interception device of a helium mass spectrometer leak detector, which includes a hollow connector, wherein the connector includes an air inlet and an air outlet; and a helium separator is inserted at the central position of the connector. The helium separator provided by the utility model only has excellent permeability to helium, and can satisfactorily prevent other gases from passing through. When a workpiece is subjected to leak detection through spraying helium under the condition of low vacuum above 1000 Pa and below one atmospheric pressure, as long as entering the working piece, helium can enter the helium mass spectrometer leak detector through the helium separator so as to be detected out and realize leak detection for the workpiece. The leak detection and interception device disclosed by the utility model has a simple structure, is convenient to use, solves the problem of leak detection through spraying helium under the condition of low vacuum above 1000 Pa and below one atmospheric pressure in the present helium mass spectrometer leak detector, and has good application prospects.
Description
Technical field
The utility model relates to a kind of helium mass spectrometer leak detector leak detection cut-off equipment, can be when the application helium mass spectrometer leak detector vacuumize leak detection, and the realization workpiece is being hunted leak to 1 atmospheric pressure more than the low vacuum 1000Pa.
Background technology
Along with science and technology development, the vacuum leak hunting technical requirement is increasingly high.Use the most extensive at present at home and abroad; The vacuum leak hunting equipment that precision is the highest is exactly helium mass spectrometer leak detector; But also there is limitation in helium mass spectrometer leak detector when realizing vacuum leak hunting; Just to could get into the leak detection state below being extracted into 1000Pa,, can't realize normal leak detection so take out less than 1000Pa when following helium mass spectrometer leak detector when detection workpiece vacuum tightness because the used the highest pressure that bears of molecular pump is about 1000Pa in the present helium mass spectrometer leak detector with detecting workpiece vacuum tightness.
The utility model content
The purpose of the utility model provides a kind of helium mass spectrometer leak detector leak detection cut-off equipment that can realize that workpiece is being hunted leak to 1 atmospheric pressure more than the low vacuum 1000Pa.
In order to reach above-mentioned purpose, the technical scheme of the utility model is:
Helium mass spectrometer leak detector leak detection cut-off equipment comprises a hollow joint, and said joint comprises air intake opening, gas outlet, and the center of said joint embeds a helium separation vessel.The inwall of said helium separation vessel and joint fits tightly.
The advantage of the utility model: the helium separation vessel of the utility model only has the good penetration rate to helium, can well block other gases and pass through.When workpiece more than the low vacuum 1000Pa to 1 atmospheric pressure spray as long as helium gets into workpiece, just can get in the helium mass spectrometer leak detector, thereby be detected during helium leak test through the helium separation vessel, realize leak detection to workpiece.The utility model is simple in structure, and is easy to use.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Embodiment
Helium mass spectrometer leak detector leak detection cut-off equipment comprises a hollow joint 1, and said joint 1 comprises air intake opening 2, gas outlet 3, and the center of said joint 1 embeds a helium separation vessel 4.Said helium separation vessel 4 fits tightly with the inwall of joint 1.
The air intake opening 2 of joint 1 links to each other with workpiece; The gas outlet 3 of joint 1 links to each other with helium mass spectrometer leak detector, and workpiece is found time down at service pump, no matter how much workpiece vacuum tightness can reach; As long as helium gets into workpiece; Just can get in the helium mass spectrometer leak detector through helium separation vessel 4, thereby be detected, realize leak detection workpiece.
Claims (2)
1. helium mass spectrometer leak detector leak detection cut-off equipment, it is characterized in that: comprise a hollow joint, said joint comprises air intake opening, gas outlet, the center of said joint embeds a helium separation vessel.
2. a kind of helium mass spectrometer leak detector leak detection cut-off equipment according to claim 1, it is characterized in that: the inwall of said helium separation vessel and joint fits tightly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120422353 CN202372316U (en) | 2011-10-31 | 2011-10-31 | Leak detection and interception device of helium mass spectrometer leak detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120422353 CN202372316U (en) | 2011-10-31 | 2011-10-31 | Leak detection and interception device of helium mass spectrometer leak detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202372316U true CN202372316U (en) | 2012-08-08 |
Family
ID=46596013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120422353 Expired - Lifetime CN202372316U (en) | 2011-10-31 | 2011-10-31 | Leak detection and interception device of helium mass spectrometer leak detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202372316U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104007024A (en) * | 2014-06-10 | 2014-08-27 | 博益(天津)气动技术研究所有限公司 | Detecting device for detecting air tightness of rivets of wing tank |
| CN110231128A (en) * | 2019-06-29 | 2019-09-13 | 广东利元亨智能装备股份有限公司 | Helium leak test mechanism |
| CN113049188A (en) * | 2019-12-26 | 2021-06-29 | 中核北方核燃料元件有限公司 | Device and method for detecting air tightness of tubular SiC composite material |
-
2011
- 2011-10-31 CN CN 201120422353 patent/CN202372316U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104007024A (en) * | 2014-06-10 | 2014-08-27 | 博益(天津)气动技术研究所有限公司 | Detecting device for detecting air tightness of rivets of wing tank |
| CN104007024B (en) * | 2014-06-10 | 2016-04-27 | 天津博益气动股份有限公司 | A kind of pick-up unit for wing tank rivet air-leakage test |
| CN110231128A (en) * | 2019-06-29 | 2019-09-13 | 广东利元亨智能装备股份有限公司 | Helium leak test mechanism |
| CN113049188A (en) * | 2019-12-26 | 2021-06-29 | 中核北方核燃料元件有限公司 | Device and method for detecting air tightness of tubular SiC composite material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120808 |
|
| CX01 | Expiry of patent term |