CN202367401U - Quartz tube loader - Google Patents
Quartz tube loader Download PDFInfo
- Publication number
- CN202367401U CN202367401U CN201120510751XU CN201120510751U CN202367401U CN 202367401 U CN202367401 U CN 202367401U CN 201120510751X U CN201120510751X U CN 201120510751XU CN 201120510751 U CN201120510751 U CN 201120510751U CN 202367401 U CN202367401 U CN 202367401U
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- China
- Prior art keywords
- quartz ampoule
- expansion link
- loading attachment
- fixed
- bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a quartz tube loader, which comprises a base, a supporting arm, a retractable rod and a fixture; the supporting arm is vertically fixed on the base; one end of the retractable rod is fixed on the bottom of the supporting arm through a hydraulic piston mechanism, the other end of the retractable rod horizontally and outwardly extends from the top of the supporting arm, and the retractable rod can be driven by the hydraulic piston mechanism to vertically extend and retract; and the fixture is fixed on the retractable rod, and is used for loading a quartz tube. The quartz tube loader adopts a vehicle-mounted device, the hydraulic piston mechanism is matched with the retractable rod and the fixture fixed on the retractable rod, the structure is simple, the quartz tube loader ensures that the mounting position of the retractable rod is accurate, meanwhile, time and labor are saved, and the quartz tube loader is suitable for mounting and dismounting quartz tubes with larger sizes.
Description
Technical field
The utility model relates to semiconductor applications, particularly a kind of quartz ampoule loading attachment.
Background technology
Boiler tube equipment is as the widely used diffusion facilities of field of semiconductor manufacture, has simple in structurely, and it is little to take up room, plurality of advantages such as production efficiency height.But the characteristics of boiler tube equipment have also increased its difficulty in the maintaining process.
Usually; The reaction cavity of boiler tube equipment is made up of quartz ampoule; After boiler tube technology after a while; The unavoidable crystallization that has accessory substance forms and attached to its surface, therefore needs the quartz ampoule of regular dismounting equipment to clean and change, the cleanliness factor when guaranteeing that with this use next time as the quartz ampoule of reaction cavity.
Yet; So far; What the replacing of quartz ampoule was still adopted is manually-operated mode, and this mode not only wastes time and energy but also the effect of installing varies with each individual, and does not have unified standard; Will cause the later stage failure of leaking hunting in case the position of installing produces deviation, finally influence the yield that is maintained as power even influences product.For leading 300mm boiler tube equipment, have larger sized quartz ampoule, size still is all installation and removal easily of weight.At present, the where the shoe pinches of changing quartz ampoule need to be three people quartz ampoule is embraced and maintained liftoff height more than half meter, is observed and is commanded three people that it slowly is placed on the pedestal (manifold) by another people.Because pedestal is provided with the cause of O RunddichtringO, require the quartz ampoule must be by the placement of level, could guarantee that the sealing surface of quartz ampoule is complete with the O RunddichtringO and effectively contact.This method not only wastes time and energy, and does not have standardized unified gimmick, brings hidden danger must for frequent maintenance work.Simultaneously because the needs of technology; Increase a base heat shield (manifold cover) in the bottom of quartz ampoule; If in installation process, cause the friction of quartz ampoule and base heat shield; Can produce particle and bring in the quartz ampoule, have a strong impact on the quality of product, so the accuracy of installation site is most important in the quartz ampoule installation process.
Therefore, how to design the standardized device that is suitable for larger sized quartz ampoule installation and dismounting of a cover, thereby replace heavy manually-operated through time saving and energy saving mode, a difficult problem that has become the plant maintenance personnel to be faced.
The utility model content
The purpose of the utility model provides a kind of quartz ampoule loading attachment, to improve the accuracy of installation site in the quartz ampoule installation process, is suitable for larger sized quartz ampoule and installs and dismantle, and alleviates attendant's labour intensity simultaneously.
The technical solution of the utility model provides a kind of quartz ampoule loading attachment, comprises
Base;
Support arm is vertically fixed on the said base;
Expansion link, an end is fixed on said support arm bottom through a hydraulic piston device, and the other end stretches out from the top cross of said support arm, and said expansion link can be vertically flexible under the driving of hydraulic piston device;
Anchor clamps are fixed on the said expansion link, are used to load a quartz ampoule.
As preferably: said expansion link is L shaped, and wherein said expansion link part straight up is first bar, and the horizontal outward extending part of said expansion link is second bar.
As preferably: said anchor clamps comprise sucker and cantilever, and Open Side Down is fixed on second bar of said expansion link for said sucker, and the transverse cross-section parallel of said sucker is in horizontal plane, and said cantilever is fixed on first bar of said expansion link.
As preferably: said cantilever is made up of two semi arch arms, and the plane at said cantilever place is parallel with horizontal plane.
As preferably: the outside of said semi arch arm has block, and the inboard has packing ring, and the position with respect to block on the cantilever on the said expansion link is provided with screwed hole, and is provided with a length-adjustable screw rod in the screwed hole, and said screw rod one end is replaced on said block.
As preferably: said anchor clamps comprise two cantilevers, between the upper and lower at a distance from being arranged on first bar of said expansion link.
As preferably: said packing ring is processed by elastomeric material.
As preferably: said hydraulic piston device comprises piston, pedal, pressure release handle, and said pedal and pressure release handle are connected to said piston.
As preferably: said base is provided with wheel.
As preferably: said wheel is provided with brake apparatus.
Compared with prior art; The utility model quartz ampoule loading attachment adopts car-mounted device, hydraulic piston device to cooperate expansion link and be fixed on the anchor clamps on the expansion link; Simple in structure; Make that the quartz ampoule installation site is accurate, simultaneously time saving and energy saving, can be applicable to that larger sized quartz ampoule is installed and dismounting.
Description of drawings
Fig. 1 is the structural representation of the utility model quartz ampoule loading attachment.
Fig. 2 is the structural representation of the cantilever of quartz ampoule loading attachment.
Sketch map when Fig. 3 is the utility model loading quartz ampoule.
The specific embodiment
The utility model below will combine accompanying drawing to do further to detail:
A lot of details have been set forth in the following description so that make much of the present invention.But the present invention can implement much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of intension of the present invention, so the present invention does not receive the restriction of following disclosed practical implementation.
Secondly, the present invention utilizes sketch map to be described in detail, when the embodiment of the invention is detailed; For ease of explanation; The profile of expression device architecture can be disobeyed general ratio and done local the amplification, and said sketch map is instance, and it should not limit the scope of the present invention's protection at this.The three dimensions size that in actual fabrication, should comprise in addition, length, width and the degree of depth.
Fig. 1 shows the sketch map of the quartz ampoule loading attachment of the utility model.
See also shown in Figure 1ly, in the present embodiment, a kind of quartz ampoule loading attachment comprises
Base 1;
Support arm 2 is vertically fixed on the said base 1;
Hydraulic piston device 3 is fixed on said support arm 2 bottoms;
Expansion link 4, one ends are connected in said hydraulic piston device 3, and the other end stretches out from the top cross of said support arm 2, and said expansion link can be vertically flexible under the driving of hydraulic piston device 3;
Anchor clamps 5 are fixed on the said expansion link 4, are used to load quartz ampoule.
In present embodiment; Said expansion link 4 is L shaped; The part that wherein said expansion link 4 promptly is parallel to support arm 2 settings straight up is first bar 41, and said first bar 41 rests on the support arm 2, to obtain enough support forces; Said expansion link 4 horizontal outward extending parts are second bar 42, and the length of said second bar 42 greater than the diameter of the quartz ampoule that will load.Said anchor clamps 5 comprise sucker 51 and cantilever 52, and Open Side Down is fixed on second bar 42 of said expansion link 4 for said sucker 51, and the transverse cross-section parallel of said sucker 51 is in horizontal plane; Said cantilever 52 is fixed on first bar 41 of said expansion link 4; Adopt two cantilevers 52 in the present embodiment, between the upper and lower at a distance from being arranged on first bar 41, certainly; The quantity of cantilever 52 also can decide according to the length of quartz ampoule; When the quantity of cantilever more for a long time, accurately regulate the horizontal level of quartz ampoule easily and make the clamping of quartz ampoule more firm, but cantilever quantity too much also can be brought unhandy problem.
Said hydraulic piston device 3 comprises piston 31, pedal 32, pressure release handle 33.Said pedal 32 is connected to said piston 31 with pressure release handle 33.
As shown in Figure 2; Said cantilever 52 comprises two semi arch arms 522 that are connected by a jackscrew 521; Has block 523 on the outside of said semi arch arm 522; Position with respect to block 523 on each semi arch arm 522 on the said expansion link 4 is provided with the screwed hole (not shown), and is provided with a length-adjustable screw rod (not shown) in the screwed hole, and said screw rod one end is replaced on said block 523.When jackscrew 521 unclamps, can adjust two opening angles between the semi arch arm 522 through the length of adjusting screw(rod), thereby regulate the horizontal level of quartz ampoule; After the subtended angle adjustment of two semi arch arms 522 finishes, fix semi arch arm 522 through locking jackscrew 521, thereby guarantee that subtended angle is constant.In order to increase said cantilever to the frictional force of quartz ampoule and do not scratch quartz ampoule, the inboard of said each semi arch arm 522 also is provided with the packing ring (not shown) of being processed by elastomeric material.
Sucker 51 vacuum breakers also are provided with vacuum breaker device (not shown) on the said sucker 51 for ease, in order to realize multidirectional rotation and move forward and backward that said base 1 is provided with two groups of wheels 11.Said wheel 11 is provided with the brake apparatus (not shown), and the brake apparatus on said wheel and the wheel makes not only transferring position but also can fix flexibly of the utility model quartz ampoule loading attachment.
As shown in Figure 3; It is following to adopt the quartz ampoule loading attachment of the utility model to carry out the process of quartz ampoule assembling: move the quartz ampoule loading attachment to cleaning near the quartz ampoule 6 that finishes and fixing the quartz ampoule loading attachment, again through the anchor clamps loading quartz ampoule of said device, promptly hold the afterbody of quartz ampoule 6 with sucker 51; Cantilever 52 surrounds the quartz ampoule pipe shaft; Unclamp jackscrew 521, the opening angle that dwindles two semi arch arms 522 through the length of adjusting screw(rod) again makes cantilever 52 hug tight quartz ampoule 6, in this process; The horizontal level of quartz ampoule 6 is regulated in the position of two semi arch arms 522 of adjustment, then tightens jackscrew 521 and guarantees that the subtended angle of two semi arch arms 522 is constant.After quartz ampoule was accurately fixed by anchor clamps, pin was stepped on the pedal 32 of hydraulic piston device 3 again, and the piston of hydraulic piston device 3 is upwards pushed away, and drove expansion link 4 and upwards stretched, and mentioned quartz ampoule 6.Then; Through the quartz ampoule loading attachment quartz ampoule 6 is moved to boiler tube equipment place; Make quartz ampoule 6 accurately in alignment with the tops of pedestal 7 through moving forward and backward again, spur pressure release handle 33 again and make quartz ampoule drop on pedestal 7 enterprising luggages to join, after having assembled with a base heat shield 61 with left rotation and right rotation; To sucker 51 vacuum breakers, the opening angle that the length through adjusting screw(rod) increases two semi arch arms makes cantilever unclamp quartz ampoule.Utilize hydraulic piston device 3 to carry again and stretch expansion link 4, remove the quartz ampoule loading attachment.Suitable equally when dismantling said quartz ampoule 6.
The utility model quartz ampoule loading attachment adopts car-mounted device, hydraulic piston device to cooperate expansion link and be fixed on the anchor clamps on the expansion link; Simple in structure; Make that the quartz ampoule installation site is accurate, simultaneously time saving and energy saving, can be applicable to that larger sized quartz ampoule is installed and dismounting.
The above is merely the preferred embodiment of the utility model, and all equalizations of being done according to the utility model claim scope change and modify, and all should belong to the covering scope of the utility model claim.
Claims (10)
1. a quartz ampoule loading attachment is characterized in that: comprise
Base;
Support arm is vertically fixed on the said base;
Expansion link, an end is fixed on said support arm bottom through a hydraulic piston device, and the other end stretches out from the top cross of said support arm, and said expansion link can be vertically flexible under the driving of hydraulic piston device;
Anchor clamps are fixed on the said expansion link, are used to load a quartz ampoule.
2. according to the said quartz ampoule loading attachment of claim 1, it is characterized in that: said expansion link is L shaped, and wherein said expansion link part straight up is first bar, and the horizontal outward extending part of said expansion link is second bar.
3. according to the said quartz ampoule loading attachment of claim 2; It is characterized in that: said anchor clamps comprise sucker and cantilever; Open Side Down is fixed on second bar of said expansion link for said sucker, and the transverse cross-section parallel of said sucker is in horizontal plane, and said cantilever is fixed on first bar of said expansion link.
4. according to the said quartz ampoule loading attachment of claim 3, it is characterized in that: said cantilever is made up of two semi arch arms, and the plane at said cantilever place is parallel with horizontal plane.
5. according to the said quartz ampoule loading attachment of claim 4; It is characterized in that: the outside of said semi arch arm has block; The inboard has packing ring; Position with respect to block on the semi arch arm on the said expansion link is provided with screwed hole, and is provided with a length-adjustable screw rod in the screwed hole, and said screw rod one end is replaced on said block.
6. according to the said quartz ampoule loading attachment of claim 5, it is characterized in that: said packing ring is processed by elastomeric material.
7. according to the said quartz ampoule loading attachment of claim 3, it is characterized in that: said anchor clamps comprise two cantilevers, between the upper and lower at a distance from being arranged on first bar of said expansion link.
8. according to the said quartz ampoule loading attachment of claim 1, it is characterized in that: said hydraulic piston device comprises piston, pedal, pressure release handle, and said pedal and pressure release handle are connected to said piston.
9. according to the said quartz ampoule loading attachment of claim 1, it is characterized in that: said base is provided with wheel.
10. according to the said quartz ampoule loading attachment of claim 9, it is characterized in that: said wheel is provided with brake apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120510751XU CN202367401U (en) | 2011-12-08 | 2011-12-08 | Quartz tube loader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120510751XU CN202367401U (en) | 2011-12-08 | 2011-12-08 | Quartz tube loader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202367401U true CN202367401U (en) | 2012-08-08 |
Family
ID=46591124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120510751XU Expired - Fee Related CN202367401U (en) | 2011-12-08 | 2011-12-08 | Quartz tube loader |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202367401U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107782579A (en) * | 2017-11-17 | 2018-03-09 | 无锡市洗选设备厂 | A kind of Coal Mechanical sampling apparatus |
| CN115156887A (en) * | 2022-07-14 | 2022-10-11 | 北京北方华创微电子装备有限公司 | Disassembling mechanism |
-
2011
- 2011-12-08 CN CN201120510751XU patent/CN202367401U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107782579A (en) * | 2017-11-17 | 2018-03-09 | 无锡市洗选设备厂 | A kind of Coal Mechanical sampling apparatus |
| CN115156887A (en) * | 2022-07-14 | 2022-10-11 | 北京北方华创微电子装备有限公司 | Disassembling mechanism |
| CN115156887B (en) * | 2022-07-14 | 2024-02-27 | 北京北方华创微电子装备有限公司 | Dismounting mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130503 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130503 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120808 Termination date: 20181208 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |