CN202337820U - Mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition) - Google Patents
Mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition) Download PDFInfo
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- CN202337820U CN202337820U CN201120484604XU CN201120484604U CN202337820U CN 202337820 U CN202337820 U CN 202337820U CN 201120484604X U CN201120484604X U CN 201120484604XU CN 201120484604 U CN201120484604 U CN 201120484604U CN 202337820 U CN202337820 U CN 202337820U
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- strainer
- stretching
- tungsten filament
- angle steel
- fixed
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition), which comprises a left support frame, a right support frame, a tungsten filament, a positive molybdenum rod and a negative molybdenum rod, wherein the positive and negative molybdenum rods are fixed at the opposite ends of the left and right support frames, one end of the tungsten filament is fixed to the positive molybdenum rod, and the other end of the tungsten filament is placed on the negative molybdenum rod and tightly fastened with a vertical end of an angle steel shaped straightening and tensioning mechanism; the fixed junction between the vertical end and horizontal end of the angle steel shaped straightening and tensioning mechanism is provided with a hinge, the hinge is fixed in the right support frame at a certain thickness, the angle steel shaped straightening and tensioning mechanism can rotate around the hinge, and the horizontal end of the angle steel shaped straightening and tensioning mechanism is provided with a counterweight. By using the mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD disclosed by the utility model, the horizontal distance between a tungsten filament and a substrate is kept consistent, thereby greatly ensuring the quality of produced diamonds.
Description
Technical field:
The utility model relates to the fixing stretching strainer of a kind of tungsten filament, and particularly a kind of heated filament CVD tungsten filament is fixed stretching strainer.
Background technology:
Rhinestone is a kind of many crystallizations diamond that is polymerized by the diamond crystallization of diameter 10 to 30 nanometers; Successfully developed in a kind of method of the manufacturing synthesizing diamond of chemical gaseous phase deposition (CVD) of crying of the fifties in last century; Heating provides the energy of chemical reaction by tungsten filament in the heated filament CVD system; Substrate also is to be heated to certain growth temperature by the thermal radiation of tungsten filament, thereby the shape affects of tungsten filament the distance of tungsten filament and substrate.When the rhinestone deposition was gathered, deformation constantly took place owing to the higher meeting of heating temp in tungsten filament, thereby causes the horizontal throw of tungsten filament and substrate inconsistent, caused the diamond quality of output to descend.
The utility model content
The purpose of the utility model is: in order to overcome the deficiency of prior art, thereby provide a kind of heated filament CVD tungsten filament easy to use to fix stretching strainer.
The technical scheme of the utility model:
A kind of heated filament CVD tungsten filament is fixed stretching strainer; Include left bracing frame, right bracing frame, tungsten filament, anodal molybdenum bar, negative pole molybdenum bar, the said positive and negative rod of looking as far as the eye can is fixed on the opposite end of left and right bracing frame, and tungsten filament one end is fixed on the anodal molybdenum bar; The other end is placed on the negative pole molybdenum bar; And tighten up with the perpendicular end of the stretching strainer of an angle steel shape, the vertical end and the horizontal ends fixing position of the stretching strainer of angle steel shape are provided with a hinge, and said hinges fixing fixes in the right bracing frame thickness; Can be at the stretching strainer of angle steel shape around this hinge rotation, the horizontal ends of the stretching strainer of angle steel shape is connected with a counterweight.
The horizontal ends of the stretching strainer of angle steel shape is 15 ° ~ 165 ° with the angle of vertically holding.
The fixing stretching strainer of heated filament CVD tungsten filament is contained in the CVD reaction chamber, is provided with deposition table at tungsten filament below just.
The beneficial effect of the utility model is:
The heated filament CVD tungsten filament of the utility model is fixed stretching strainer; Simple in structure; Be easy to promote, utilized lever principle cleverly, adopt a tight mechanism of Zhang Zhila to make the heating tungsten filament keep the stretching state of tensioning always; Thereby horizontal throw consistent that has effectively kept tungsten filament and substrate guaranteed the quality of the diamond of producing greatly.
Description of drawings
Fig. 1 is the sectional structure synoptic diagram of the fixing stretching strainer of heated filament CVD tungsten filament of the utility model.
Embodiment
Referring to Fig. 1, the fixing stretching strainer of a kind of heated filament CVD tungsten filament is contained in 1 li of CVD reaction chamber,
Claims (3)
1. a heated filament CVD tungsten filament is fixed stretching strainer; Include left bracing frame, right bracing frame, tungsten filament, anodal molybdenum bar, negative pole molybdenum bar, it is characterized in that: the said positive and negative rod of looking as far as the eye can is fixed on the opposite end of left and right bracing frame, and tungsten filament one end is fixed on the anodal molybdenum bar; The other end is placed on the negative pole molybdenum bar; And tighten up with the perpendicular end of the stretching strainer of an angle steel shape, the vertical end and the horizontal ends fixing position of the stretching strainer of angle steel shape are provided with a hinge, and said hinges fixing fixes in the right bracing frame thickness; Can be at the stretching strainer of angle steel shape around this hinge rotation, the horizontal ends of the stretching strainer of angle steel shape is connected with a counterweight.
2. heated filament CVD tungsten filament according to claim 1 is fixed stretching strainer, it is characterized in that: the horizontal ends of the stretching strainer of said angle steel shape is 15 ° ~ 165 ° with the angle of vertically holding.
3. heated filament CVD tungsten filament according to claim 1 is fixed stretching strainer, it is characterized in that: the fixing stretching strainer of said heated filament CVD tungsten filament is contained in the CVD reaction chamber, is provided with deposition table at tungsten filament below just.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120484604XU CN202337820U (en) | 2011-11-29 | 2011-11-29 | Mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120484604XU CN202337820U (en) | 2011-11-29 | 2011-11-29 | Mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202337820U true CN202337820U (en) | 2012-07-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120484604XU Expired - Fee Related CN202337820U (en) | 2011-11-29 | 2011-11-29 | Mechanism for fixing, straightening and tensioning tungsten filaments through hot filament CVD (chemical vapor deposition) |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202337820U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103952686A (en) * | 2014-05-23 | 2014-07-30 | 北京大学 | Break-resistant hot filament chemical vapor deposition system in preparation of large-size BDD electrode |
-
2011
- 2011-11-29 CN CN201120484604XU patent/CN202337820U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103952686A (en) * | 2014-05-23 | 2014-07-30 | 北京大学 | Break-resistant hot filament chemical vapor deposition system in preparation of large-size BDD electrode |
| CN103952686B (en) * | 2014-05-23 | 2016-02-17 | 北京大学 | A kind of anti-fracture hot-wire chemical gas-phase deposition system and the application in the preparation of large size BDD electrode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120718 Termination date: 20131129 |