CN202329673U - Protective housing structure of sliding sensor - Google Patents
Protective housing structure of sliding sensor Download PDFInfo
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- CN202329673U CN202329673U CN2011204782438U CN201120478243U CN202329673U CN 202329673 U CN202329673 U CN 202329673U CN 2011204782438 U CN2011204782438 U CN 2011204782438U CN 201120478243 U CN201120478243 U CN 201120478243U CN 202329673 U CN202329673 U CN 202329673U
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- protective case
- case structure
- slide sensor
- silicon chip
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Abstract
The utility model discloses a protective housing structure of a sliding sensor, which is arranged above a silicon chip processing area, and includes an accommodating space for accommodating the sliding sensor, a bottom surface facing to the silicon chip processing area, and a top surface opposite to the bottom surface, wherein a sensing window facing to the silicon chip processing area is arranged on the bottom surface; and the top surface is completely sealed. As the sensing window is arranged on the bottom surface of the protective housing structure of the sliding sensor and the top surface thereof is completely sealed, crystals or water stains are prevented from entering the accommodating space to accumulate on the sliding sensor during the processing process of the silicon chip, and the false alarm of the sliding sensor is avoided.
Description
Technical field
The utility model relates to technical field of semiconductors, relates in particular to a kind of protective case structure of slide sensor.
Background technology
In the process apparatus of semi-conductor industry; Slide sensor is widely used as a kind of pick-up unit; In the use of slide sensor, need use relevant protective case it is protected, thereby avoid the operate as normal of extraneous some factor affecting slide sensors.
Silicon chip machine table of the prior art is provided with a slide sensor, and this slide sensor position is over against the silicon chip processing district.The outside of said slide sensor is provided with protecting sheathing, said protecting sheathing comprise in order to the accepting groove of accommodating slide sensor, be positioned at the below and towards the complete open diapire of silicon chip processing district, relative with diapire and be positioned at above roof and four sidewalls that are connected with roof.Said four sidewalls and roof surround said accepting groove jointly.Said roof is provided with first opening that bore is bigger, said second opening that makes things convenient for slide sensor to install that offers on the sidewall of slide sensor.Said protecting sheathing is enclosed within the slide sensor periphery by second opening and complete open diapire.
But the protecting sheathing of above-mentioned slide sensor is provided with the first bigger opening of bore at roof, and diapire is arranged to open fully; Make crystallization or water dregs in the silicon chip working process be easier to enter in the receiving space; And then have crystallization or water dregs to remain on the slide sensor, and finally cause slide sensor by false triggering, cause a lot of false alarms of slide sensor; Increase unnecessary workload, reduced production capacity.
And the protecting sheathing of above-mentioned slide sensor is directly to be enclosed within on the slide sensor, and said protecting sheathing itself is not fixed by setting tool such as screw and machine table; Said protecting sheathing is fixing not firm, so in the board operation, said protecting sheathing is easy to generate bigger rocking; Even can and the board cover plate between produce collision; Thereby produce a lot of collision particles, not only cause the board cover plate to damage, and destroyed the environmental health of whole board.
Therefore, to above-mentioned technical matters, be necessary to provide a kind of protective case structure of structure improved slide sensor, to overcome above-mentioned defective.
The utility model content
In view of this; The utility model provides a kind of protective case structure of slide sensor; The protective case structure of this slide sensor only is provided with a less induction window in the bottom surface; And, prevent that crystallization or water dregs in the silicon chip working process from entering into the protective case inside configuration and remain on the slide sensor, avoids slide sensor the false alarm phenomenon to occur with the end face complete closed; Simultaneously, said protective case structure adopts compact to fixedly mount, and adopts screw to fix, and positioning stablity is difficult for rocking, and avoids producing the collision particle and polluting board.
For realizing above-mentioned purpose, the utility model provides following technical scheme:
A kind of protective case structure of slide sensor; Said slide sensor position is over against a silicon chip processing district; Said protective case structure comprises in order to the receiving space of accommodating slide sensor, towards the bottom surface of silicon chip processing district and the end face relative with the bottom surface; Said bottom surface is provided with an induction window facing to the silicon chip processing district, said end face complete closed.
Preferably, in the protective case structure of above-mentioned slide sensor, said slide sensor is provided with the inductor that sends induced signal, and said induction position of window is corresponding with said sensor location.
Preferably, in the protective case structure of above-mentioned slide sensor, said induction window is the aperture of rectangle.
Preferably, in the protective case structure of above-mentioned slide sensor, said induction window is oval-shaped aperture.
Preferably, in the protective case structure of above-mentioned slide sensor, said end face is provided with and the integrated block of end face.
Preferably; In the protective case structure of above-mentioned slide sensor; Said protective case structure is provided with near first installation portion of bottom surface and near second installation portion of end face; Said first installation portion is provided with in order to fixing first fixed orifice of protective case structure, and said second installation portion is provided with in order to fixing second fixed orifice of protective case structure.
Preferably; In the protective case structure of above-mentioned slide sensor; Said slide sensor is located on the board; Said board is provided with first mounting hole corresponding with the first fixed orifice position and second mounting hole corresponding with the second fixed orifice position, and said protective case structure is fixed together through securing member and board.
Preferably, said securing member is a screw.
Preferably, in the protective case structure of above-mentioned slide sensor, said protective case structure also comprises three closed side and the open ports that connects with receiving space between end face and bottom surface, and said open ports is over against slide sensor.
Preferably, in the protective case structure of above-mentioned slide sensor, said first installation portion and second installation portion all comprise two and lay respectively at the both sides of open ports.
Can find out from technique scheme; The protective case structure of the utility model embodiment slide sensor only is provided with an induction window in the bottom surface, and end face is arranged to the complete closed structure; Prevent crystallization or water dregs in the silicon chip working process from entering in the receiving space and remain on the slide sensor; Avoid slide sensor the false alarm phenomenon to occur, reduced workload, improved production capacity; Simultaneously, the protective case structure of said slide sensor adopts compact to fixedly mount, and adopts securing member to fix, positioning stablity, and the protective case structure is difficult for rocking, and avoids producing the collision particle and polluting board.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing of the relevant the utility model in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the synoptic diagram of the protective case structure of slide sensor in the prior art;
Fig. 2 is the synoptic diagram of the protective case structure of slide sensor among the utility model embodiment.
100, protecting sheathing 11, accepting groove 12, diapire 13, roof 14, sidewall 15, first opening 16, second opening 200, protective case structure 21, receiving space 22, bottom surface 23, end face 24, closed side 25, open ports 26, induction window 27, block 28, first installation portion 281, first fixed orifice 29, second installation portion 291, second fixed orifice
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is described in detail, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belongs to the scope that the utility model is protected.
See also shown in Figure 1, the protecting sheathing 100 of a kind of slide sensor of the prior art, wherein, the slide sensors that are installed in the protecting sheathing 100 are located on the silicon chip machine table, this slide sensor position is over against the silicon chip processing district.Said protecting sheathing 100 is a hollow structure.Said protecting sheathing 100 comprise in order to the accepting groove 11 of accommodating slide sensor, fully open diapire 12, with diapire 12 relatively and the roof 13 above being positioned at and four sidewalls 14 that are connected with roof 13.Said four sidewalls 14 surround said accepting groove 11 jointly with roof 13.Said roof 13 is provided with first opening 15 that bore is bigger, said second opening 16 that makes things convenient for slide sensor to install that offers on the sidewall 14 of slide sensor.Said protective case structure is enclosed within the slide sensor periphery by second opening 16 with open diapire 12.
But the protecting sheathing 100 of above-mentioned slide sensor is provided with the first bigger opening 15 of bore at roof 13, and diapire 12 is arranged to open fully; Make crystallization or water dregs in the silicon chip working process be easier to enter in the accepting groove 11; And then remain on the slide sensor, finally cause slide sensor by false triggering, cause a lot of false alarms of slide sensor; Increase unnecessary workload, reduced production capacity.
And the protecting sheathing 100 of above-mentioned slide sensor is directly to be enclosed within on the slide sensor, and said protecting sheathing 100 itself is not fixed by setting tool such as screw and machine table; It is not firm that said protecting sheathing 100 is fixed, so in the board operation, said protecting sheathing 100 is easy to generate bigger rocking; Even can and the board cover plate between produce collision; Thereby produce a lot of collision particles, not only cause the board cover plate to damage, and destroyed the environmental health of whole board.
The utility model discloses a kind of protective case structure of slide sensor; The protective case structure of this slide sensor only is provided with a less induction window in the bottom; And with the top complete closed; Prevent that crystallization or water dregs in the silicon chip working process from entering into the protective case inside configuration and remain on the slide sensor, avoids slide sensor the false alarm phenomenon to occur; Simultaneously, said protective case structure adopts compact to fixedly mount, and adopts screw to fix, positioning stablity, and the protective case structure is difficult for rocking, and avoids producing the collision particle and polluting board.
See also shown in Figure 2, the protective case structure 200 of said slide sensor, wherein, the slide sensor that is installed in protective case structure 200 structures is installed on the silicon chip machine table in actual use, this slide sensor position is over against the silicon chip processing district.Said protective case structure 200 comprises in order to the receiving space 21 of accommodating slide sensor, towards the bottom surface 22 of silicon chip processing district, the end face 23 relative with bottom surface 22, between end face 23 and bottom surface 22 and three closed side 24 and a wide-open open ports 25 that connects with receiving space 21 of being connected with end face 23 and bottom surface 22.Said open ports 25 when protective case structure 200 is not installed over against slide sensor.Said open ports 25 makes things convenient for slide sensor to be fit in the protective case structure 200.Said bottom surface 22 is provided with one facing to silicon chip processing district and the very little induction window 26 of opening, said end face 23 complete closed.So be provided with; Through the less induction window 26 of bore is set, and, make that crystallization or the water dregs in the silicon chip working process is not easy to enter in the receiving space 21 with end face 23 complete closed on bottom surface 22; And then avoided crystallization or water dregs to remain on the slide sensor; Finally can reduce slide sensor is caused false alarm by false triggering probability, reduce unnecessary workload, improve production capacity.
Please continue to consult shown in Figure 2, said slide sensor is provided with the inductor that sends induced signal, and said induction position of window is corresponding with sensor location.Said induction window 26 is the aperture of rectangle.Said end face 23 is provided with and end face 23 integrated blocks 27.Said protective case structure 200 is provided with near first installation portion 28 of bottom surface 22 and near second installation portion 29 of end face 23.Said first installation portion 28 is provided with in order to fixing first fixed orifice 281 of protective case structure 200.Said second installation portion 29 is provided with in order to fixing second fixed orifice 291 of protective case structure 200.Said board is provided with first mounting hole (not shown) corresponding with first fixed orifice, 281 positions and second mounting hole (not shown) corresponding with second fixed orifice, 291 positions.Said protective case structure 200 is fixed together through securing member and board, and said securing member is preferably screw.Said first installation portion 28 and second installation portion 29 include two and lay respectively at the both sides of open ports 25.So be provided with, said protective case structure 200 adopts the compact fixed installation, and fixes through securing member and machine table; Said protective case structure 200 is fixed; In the board operation, said protective case structure 200 is difficult for producing rocks, also can not occur and the board cover plate between produce the phenomenon of collision; Avoid producing and collide particle and pollute board, guaranteed the environmental health of whole board.
In the utility model embodiment, said induction window 26 is set to the aperture of rectangle, certainly in other embodiments, also can said induction window 26 be set to oval-shaped aperture.
In the utility model embodiment, said open ports 25 is a full open model, and promptly whole face all is empty, opening, certainly in other embodiments, according to the size of protective case structure, as long as the size of open ports can make things convenient for slide sensor to install.
The protective case structure 200 of the utility model embodiment; The less induction window 26 of bore only is set on bottom surface 22, and, makes that crystallization or the water dregs in the silicon chip working process is not easy to enter in the receiving space 21 end face 23 complete closed; And then avoid in silicon chip working process, having crystallization or water dregs to remain on the slide sensor; Finally can reduce slide sensor is caused false alarm by false triggering probability, reduce unnecessary workload, improve production capacity.
The protective case structure 200 of the utility model embodiment adopts the compact fixed installation, through securing member protective case structure 200 and machine table is fixed; Said protective case structure 200 is fixed; In the board operation, said protective case structure 200 is difficult for producing rocks, also can not occur and the board cover plate between produce the phenomenon of collision; Avoid producing and collide particle and pollute board, guaranteed the environmental health of whole board.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. the protective case structure (200) of a slide sensor; Said slide sensor position is over against a silicon chip processing district; Said protective case structure (200) comprises in order to the receiving space (21) of accommodating slide sensor, towards the bottom surface (22) of silicon chip processing district and the end face (23) relative with bottom surface (22); It is characterized in that: said bottom surface (22) are provided with an induction window (26) facing to the silicon chip processing district, said end face (23) complete closed.
2. the protective case structure of slide sensor according to claim 1, it is characterized in that: said slide sensor is provided with the inductor that sends induced signal, and the position of said induction window (26) is corresponding with said sensor location.
3. the protective case structure of slide sensor according to claim 2, it is characterized in that: said induction window (26) is the aperture of rectangle.
4. the protective case structure of slide sensor according to claim 2, it is characterized in that: said induction window (26) is oval-shaped aperture.
5. the protective case structure of slide sensor according to claim 1 is characterized in that: said end face (23) is provided with and the integrated block of end face (23) (27).
6. the protective case structure of slide sensor according to claim 1; It is characterized in that: said protective case structure (200) is provided with near first installation portion (28) of bottom surface (22) and near second installation portion (29) of end face (23); Said first installation portion (28) is provided with in order to fixing first fixed orifice (281) of protective case structure (200), and said second installation portion (29) is provided with in order to fixing second fixed orifice (291) of protective case structure (200).
7. the protective case structure of slide sensor according to claim 6; It is characterized in that: said slide sensor is located on the board; Said board be provided with first mounting hole corresponding with first fixed orifice (281) position and with the second corresponding mounting hole of second fixed orifice (291) position, said protective case structure (200) is fixed together through securing member and board.
8. the protective case structure of slide sensor according to claim 7, it is characterized in that: said securing member is a screw.
9. the protective case structure of slide sensor according to claim 6; It is characterized in that: said protective case structure (200) also comprises three closed side (24) and open ports (25) that connects with receiving space (21) that is positioned between end face (23) and bottom surface (22), and said open ports (25) is over against slide sensor.
10. the protective case structure of slide sensor according to claim 9 is characterized in that: said first installation portion (28) and second installation portion (29) all comprise two and lay respectively at the both sides of open ports (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204782438U CN202329673U (en) | 2011-11-25 | 2011-11-25 | Protective housing structure of sliding sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204782438U CN202329673U (en) | 2011-11-25 | 2011-11-25 | Protective housing structure of sliding sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202329673U true CN202329673U (en) | 2012-07-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204782438U Expired - Fee Related CN202329673U (en) | 2011-11-25 | 2011-11-25 | Protective housing structure of sliding sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202329673U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603595A (en) * | 2015-12-18 | 2016-05-25 | 江南大学 | Broken yarn detection probe shell with anticollision function and installation method thereof |
-
2011
- 2011-11-25 CN CN2011204782438U patent/CN202329673U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603595A (en) * | 2015-12-18 | 2016-05-25 | 江南大学 | Broken yarn detection probe shell with anticollision function and installation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20171125 |