CN202329534U - Flexible strain sensing device - Google Patents

Flexible strain sensing device Download PDF

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Publication number
CN202329534U
CN202329534U CN2011204574384U CN201120457438U CN202329534U CN 202329534 U CN202329534 U CN 202329534U CN 2011204574384 U CN2011204574384 U CN 2011204574384U CN 201120457438 U CN201120457438 U CN 201120457438U CN 202329534 U CN202329534 U CN 202329534U
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China
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sensing device
flexible
strain sensing
strain
functional layer
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CN2011204574384U
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Chinese (zh)
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周军
肖旭
袁龙炎
钟俊文
王中林
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model discloses a flexible strain sensing device. A flexible polymer substrate is provided with a functional layer; the function layer has a latticed structure consisting of ZnO and nano-fiber; and both sides of the functional layer are provided with electrodes, i.e., titanium and silver electrodes. The utility model further discloses a method for manufacturing an ultrahigh-strain-resistant semitransparent tensile force sensor based on a zinc oxide nano-wire/polystyrene nano-fiber hybridized structure on a polydimethylsiloxane substrate. The transmittance before and after growing of the zinc oxide is represented. The flexible strain sensing device can be used for detecting force as high as 50 percent, and has high durability, quick response and high sensitivity. The device can be applied to human body rapid motion testing simultaneously. Moreover, the device can be driven through a solar cell, so that the device can be potentially applied as an outdoor self-driving sensor system. The flexible strain sensing device is simple, and has low price. A strain sensor has the characteristics of semi-transparency, high strain resistance, high sensitivity, quick response, and the like.

Description

A kind of flexible strain sensing device
Technical field
The utility model belongs to sensor technology, is specifically related to a kind of flexible strain sensing device.
Background technology
In recent years, because current social is for the growing demand of portable business electronic product, relevant transparent research that can drawing electron device has become a research focus.Can drawing electron device have possessed replace stretching, the ability of deformable object arbitrarily.Can stretch and flexible material replaces rigid substrate through using, having produced in fields such as photoelectron, electric mechanicals at present can drawing electron device.Can drawing electron device possess the potentiality that obtain important application in a lot of fields future, at folding sensor, bent formula display, all there is important purposes aspect such as monitoring and medical diagnosis in real time.
Buildings, bridge and other infrastructure will often be born the disaster as hurricane and earthquake in their use.For fear of great loss, the state of monitoring buildings is necessary through using the strain sensing device to come in real time.Some common rigid materials for example ultra-thin silicon have been used to make the strain sensing device, but these materials showing without exception can only be born very little strain, and after surpassing this strain, the strain sensing device just is faced with the danger of damage.Possess fields such as superelevation strain sensing device flexible and stretchability will be monitored in health, hypersensitivity robot sensor, intelligent surgical gloves and play the part of important role.In recent years, obtained very big progress based on the flexibility or the tensility strain sensing device of nanowires/nanotubes polymer architecture.But, make transparent and the strain sensing device ability Under High Strain still is a very big challenge.
Summary of the invention
The purpose of the utility model is to provide a kind of flexible strain sensing device, this sensor have high-durability, fast the response and high sensitivity.
A kind of strain sensing device that the utility model provides is characterized in that flexible polymer substrate is provided with functional layer, and functional layer is to be latticed structure by what ZnO and nanofiber constituted, is electrode on the functional layer both sides, and electrode is titanium and silver electrode; Flexible polymer substrate is dimethyl silicone polymer PDMS; Nanofiber is for spinning the polymkeric substance of method preparation through electricity.
The utility model provides the method that on the dimethyl silicone polymer substrate, prepares based on the translucent drawing mechanics sensor of anti-Under High Strain of zinc oxide nanowire/pipe/polyhenylethylene nano fiber hybrid structure.Characterized its transmissivity before and after developing zinc oxide.This new strain sensing device can detect the power up to 50%, and have high-durability, fast the response and high sensitivity.Device can be applied in the test of human body rapid movement simultaneously.In addition, device can drive through solar cell, and this makes device possess becomes outdoor potential application from the driving sensor system.
The technique effect of the utility model is embodied in: flexible polymer substrate power on spin flexible nano fiber and growth of zinc oxide nano line and prepare the method for flexible translucent strain sensing device simple; Obtained device has high-durability, response and high sensitivity fast, can be used for accurate strain detection and human motion and monitors; In addition, because device has translucence, and can be driven by solar cell, can be applied to future outdoor in the driving sensor system.
Description of drawings
The structural representation of the flexible translucent strain sensing device that Fig. 1 provides for the utility model;
Fig. 2 is the SEM picture of ZnO nano wire/PS nanofiber hybrid structure;
Fig. 3 is the pure PDMS substrate and the transmittance graph of integral device;
Fig. 4 is current-voltage curve and the current-responsive curve of device under the different stretch state;
Fig. 5 is a human body movement monitoring test curve;
Fig. 6 is the current-responsive curve of device under Driven by Solar Energy.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is elaborated.
As shown in Figure 1, the structure of the flexible translucent strain sensing device that the utility model provides is: flexible polymer substrate 1 is provided with the functional layer 2 of fenestral fabric, is electrode 3 on functional layer 2 both sides.
Flexible polymer substrate 1 is dimethyl silicone polymer (PDMS).Functional layer 2 is to be latticed structure by what ZnO and nanofiber constituted, and nanofiber can select polystyrene (PS), polyvinylpyrrolidone (PVP) or PVDF (PVDF) etc. can spin the polymkeric substance of method preparation through electricity.Electrode 3 is titanium and silver electrode.
The preparation method's that the utility model provides step is following:
1. nanofiber is dissolved in the organic solvent, is stirred to the solution clarification.Gained solution is transferred in the needle tubing, on substrate, carried out electricity and spin.
When nanofiber was polystyrene (PS), organic solvent was: dimethyl formamide (DMF) and toluene, and every gram PS particle needs 1~2mL DMF and 1~2mL toluene;
When nanofiber was polyvinylpyrrolidone (PVP), organic solvent was: ethanol, and every gram PVP powder needs 8~12mL ethanol;
When nanofiber was PVDF (PVDF), organic solvent was: dimethyl formamide (DMF) solution and acetone, and every gram PVDF powder needs 2~4mL DMF and 5~9mL acetone;
The manufacturing process of substrate: with PDMS and hardening agent according to 2: 1~20: 1 mixed of volume ratio, be placed in 40~120 ℃ of constant temperature ovens 0.5~2 hour all curable, after the curing with the PDMS cutting as substrate.
2. prepare zinc acetate methanol solution and the 0.005~0.02mol/L potassium hydroxide methanol solution of 0.02~0.04mol/L, mixed in 3: 1 by volume~1.5: 1, gained solution need be 60 ℃~80 ℃ stirrings; When the zinc acetate methanol solution stirs, the potassium hydroxide methanol solution for preparing is dripped into, and stirred 1.5~4 hours; After nanoparticles solution is ready to, flexible polymer substrate is immersed in the solution, makes the ZnO nano particle attached on the nanofiber, the solution sowing can be accomplished.
3. prepare zinc nitrate and hexamethylene tetramine (HMTA) mixed solution, the nitric acid zinc concentration is 10~30mol/L in the mixed solution, and the concentration of hexamethylene tetramine (HMTA) is 10~30mol/L, adds ammoniacal liquor and regulates pH value to alkalescence.Flexible polymer substrate is floated over solution surface, and 60~115 ℃ of reactions promptly obtained ZnO nano wire/nanofiber hybrid structure in 12~20 hours.
4. distinguish the magnetron sputtering metal electrode at the two ends of ZnO nano wire/nanofiber hybrid structure film, and lead-in wire and encapsulation, flexible translucent strain sensing device device obtained.
Below with the instance explanation.
Instance 1:
1. 10mL PDMS and 1mL hardening agent are mixed, be placed in 60 ℃ of constant temperature ovens and be cured in 1 hour.It is subsequent use after the curing PDMS to be cut into the 1.5cm*0.5cm size.
2. 0.7g PS particle is dissolved in 3mL dimethyl formamide (DMF) and the toluene mixed solution (volume ratio 1: 1), stirs and clarified to solution in 3 hours.Gained solution is transferred to the fltting speed that adopts 0.003mm/s in the needle tubing, PS is evenly spun on the PDMS.
3. prepare zinc acetate methanol solution 125mL and the 0.01mol/L potassium hydroxide methanol solution 65mL of 0.03mol/L,, gained solution need be 60 ℃ of stirrings; When the zinc acetate methanol solution stirs, the potassium hydroxide methanol solution for preparing is dripped into, stirred 2 hours; After nanoparticles solution is ready to, flexible polymer substrate is immersed in the solution, makes the ZnO nano particle attached on the nanofiber.
4. preparation 32mol/L zinc nitrate aqueous solution 50mL and 32mol/L hexamethylene tetramine (HMTA) WS 50mL mixed and added ammoniacal liquor and regulate pH value to 10.9 in 1: 1 by volume.Flexible polymer substrate is floated over solution surface, and 95 ℃ of reactions promptly obtained ZnO nano wire/nanofiber hybrid structure in 14 hours.
5. distinguish magnetron sputtering titanium electrode (40nm) at the two ends of ZnO nano wire/nanofiber hybrid structure film, silver electrode (100nm), and lead-in wire and encapsulation obtain flexible translucent strain sensing device device.
To the device of instance 1 preparation, (SEM) analyzes with ESEM, confirms the pattern, the structure of matter of zinc oxide nanowire on the nanofiber etc., and tested the electomechanical response characteristic, transmissivity etc. of sample.Describe below in conjunction with accompanying drawing.
Shown in Figure 2 is the SEM picture of ZnO nano wire/PS nanofiber hybrid structure.From figure, can see that the ZnO nano wire is twining the axial growth of PS, form " nanometer brush " structure.
Shown in Figure 3 is simple PDMS film 4 and the transmittance graph behind synthetic ZnO nano wire/PS nanofiber hybrid structure 5 on the PDMS film.As can be seen from the figure, in visible-range, the light transmission of PDMS film is very good, and behind the ZnO nano wire of having grown/PS nanofiber hybrid structure, device has possessed translucence.
Shown in Figure 4 is under the different stretch state, the current-voltage curve of strain sensing device and the electric current-time response curve under constant frequency external force drives.Can see (a) from figure, along with the increase of pulling force, the electric current of mechanics sensor also thereupon linearity reduce.Figure (b) can find out when device along with constant frequency force-extension and when recovery, current-responsive speed is very fast, and can return to the primary current position.Above presentation of results ZnO nano wire/PS nanofiber hybrid structure mechanics sensor can bear bigger pulling force, and can be used for surveying among a small circle, highly sensitive, respond mechanical signal fast.
Shown in Figure 5ly test in human motion for flexible mechanics sensor application.Mechanics sensor is fixed on the finger, and finger is realized bending 6 and recovers 7 two actions that each action all continues 20s, measures electric current in real time and changes.As can be seen from the figure under free position, electric current remains unchanged basically.During conversion, electric current changes rapidly between different state, and under identical state, the electric current basically identical.The flexible mechanics sensor of above presentation of results has a good application prospect in the human motion monitoring, and can and then be applied to fields such as simulated humanbody skin, intelligent surgical glove.
Fig. 6 has described the current-responsive of flexible mechanics sensor under solar cell drives.As the energy, the requirement of current environmental protection low-carbon (LC) can be satisfied with sunshine, and outdoor self drive sensor-based system can be used for realizing.Use solar battery that the energy is provided, under the constant frequency extended state, flexible mechanics sensor sheet has showed good stability, and under equal state, (stretching or recovery), electric current has kept good consistance, and response speed is still very fast.
Can reach a conclusion from above-mentioned analysis; The utility model is applied in the flexible strain sensing device of synthetic ZnO nano wire on the flexible polymer substrate/nanofiber hybrid structure preparation; It has translucence, high-durability, response and high sensitivity fast; Can be used for accurate mechanics detection, human motion monitoring and medical monitoring, will have application prospect from the driving sensor system in following open air.Anyly can spin the polymkeric substance that is synthesized and anyly can all can produce flexible mechanics sensor through the method through electricity through metal, the metal oxide of hydrothermal growth.
The utility model not only is confined to above-mentioned embodiment; Persons skilled in the art are according to the disclosed content of the utility model; Can adopt other multiple embodiment to implement the utility model, therefore, project organization of every employing the utility model and thinking; Do some simple designs that change or change, all fall into the scope of the utility model protection.

Claims (1)

1. a strain sensing device is characterized in that flexible polymer substrate is provided with functional layer, and functional layer is to be latticed structure by what ZnO and nanofiber constituted, is electrode on the functional layer both sides, and electrode is titanium and silver electrode; Flexible polymer substrate is dimethyl silicone polymer PDMS; Nanofiber is for spinning the polymkeric substance of method preparation through electricity.
CN2011204574384U 2011-11-17 2011-11-17 Flexible strain sensing device Withdrawn - After Issue CN202329534U (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353324A (en) * 2011-07-26 2012-02-15 华中科技大学 Flexible semi-clarity strain sensor and preparation method thereof
CN105067014A (en) * 2015-09-02 2015-11-18 北京科技大学 Stretchable multifunctional detector and preparation method thereof
CN105318822A (en) * 2014-07-02 2016-02-10 北京科技大学 Flexible strain sensor based on ultra-long tellurium microwire
CN105928452A (en) * 2016-04-19 2016-09-07 武汉理工大学 High-tensile strain piezoelectric sensor and preparation method thereof
CN106705829A (en) * 2015-08-21 2017-05-24 中国科学院上海硅酸盐研究所 Flexible wearable conductive fiber sensor and preparation method and application thereof
CN106767379A (en) * 2016-12-30 2017-05-31 常州亿晶光电科技有限公司 A kind of testing equipment of solar panel web plate deformation
CN106828334A (en) * 2016-12-25 2017-06-13 重庆路格科技有限公司 Intake type automatic navigator
CN107703328A (en) * 2017-10-31 2018-02-16 深圳市柔纬联科技有限公司 Papery degradable nano sequence sleep movement sensor based on sheet
CN108627267A (en) * 2018-05-10 2018-10-09 北京工业大学 A kind of temperature sensor based on nano silver wire network
CN113483652A (en) * 2021-07-14 2021-10-08 东南大学 Sensor array based on flexible antenna

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353324B (en) * 2011-07-26 2013-06-05 华中科技大学 Flexible semi-clarity strain sensor and preparation method thereof
CN102353324A (en) * 2011-07-26 2012-02-15 华中科技大学 Flexible semi-clarity strain sensor and preparation method thereof
CN105318822A (en) * 2014-07-02 2016-02-10 北京科技大学 Flexible strain sensor based on ultra-long tellurium microwire
CN105318822B (en) * 2014-07-02 2017-09-29 北京科技大学 A kind of flexible strain transducer based on overlength tellurium micro wire
CN106705829A (en) * 2015-08-21 2017-05-24 中国科学院上海硅酸盐研究所 Flexible wearable conductive fiber sensor and preparation method and application thereof
CN106705829B (en) * 2015-08-21 2019-06-11 中国科学院上海硅酸盐研究所 A kind of flexible wearable conductive fabric sensor and its preparation method and application
CN105067014B (en) * 2015-09-02 2018-11-27 北京科技大学 A kind of stretchable Multifunctional detector and preparation method thereof
CN105067014A (en) * 2015-09-02 2015-11-18 北京科技大学 Stretchable multifunctional detector and preparation method thereof
CN105928452A (en) * 2016-04-19 2016-09-07 武汉理工大学 High-tensile strain piezoelectric sensor and preparation method thereof
CN106828334A (en) * 2016-12-25 2017-06-13 重庆路格科技有限公司 Intake type automatic navigator
CN106767379A (en) * 2016-12-30 2017-05-31 常州亿晶光电科技有限公司 A kind of testing equipment of solar panel web plate deformation
CN107703328A (en) * 2017-10-31 2018-02-16 深圳市柔纬联科技有限公司 Papery degradable nano sequence sleep movement sensor based on sheet
CN108627267A (en) * 2018-05-10 2018-10-09 北京工业大学 A kind of temperature sensor based on nano silver wire network
CN113483652A (en) * 2021-07-14 2021-10-08 东南大学 Sensor array based on flexible antenna

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Granted publication date: 20120711

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