CN202326256U - Water-cooling structure for vacuum pump - Google Patents
Water-cooling structure for vacuum pump Download PDFInfo
- Publication number
- CN202326256U CN202326256U CN2011204467185U CN201120446718U CN202326256U CN 202326256 U CN202326256 U CN 202326256U CN 2011204467185 U CN2011204467185 U CN 2011204467185U CN 201120446718 U CN201120446718 U CN 201120446718U CN 202326256 U CN202326256 U CN 202326256U
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- cavity
- water
- vacuum pump
- cooling structure
- air inlet
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Abstract
The utility model belongs to the technical field of vacuum pumps and in particular relates to a water-cooling structure for a vacuum pump. The water-cooling structure for the vacuum pump comprises an air inlet cavity, multiple stages of cavities and a venting cavity which are successively connected and are all provided with water passages, wherein the water passages on the adjacent cavities are communicated; the water inlet of each water passage is arranged on the air inlet cavity; and a water return hole is arranged on the venting cavity. According to the water-cooling structure for the vacuum pump, the contact area between the cooling water and the pump body is greatly increased so as to enhance the cooling effect. The water passages in the cavities are cast without machining so as to omit water pipes and fixing parts to save the cost. Meanwhile, manual coil pipes are omitted, working hours are reduced, and the efficiency is increased.
Description
Technical field
The utility model belongs to the vacuum pump technology field, specifically a kind of vacuum pump water-cooling structure.
Background technique
Dry vacuum pump is the positive displacement vacuum pump that seals without oils (or liquid) in a kind of pump.Owing to do not need working liquid body in the dry vacuum pump pump chamber, therefore, be applicable to that semicon industry, chemical industry, pharmaceuticals industry and food service industry etc. need the technology occasion of no oily clean vacuum environment.
Along with being surging forward of semi-conductor industry, electronics industry, the against vacuum environment requirement is more and more, more and more stricter.Because the vacuum system of being made up of common oil sealing mechanical pump, diffusion pump is easy in vacuum chamber, return oil, the oil molecule in the vacuum chamber can deposit on the silicon chip crystal, makes silicon crystal become waste product.So the application of such vacuum system in semi-conductor industry, electronics industry is restricted.On the contrary,, accomplished that no oil vapor pollutes because dry vacuum pump does not need lubricant oil to come lubrication and seal, and insensitive to the dust and the water vapour that contain in the pumped gas.So the vacuum system of being made up of dry vacuum pump has obtained using widely, and in the evolution of semi-conductor industry, electronics industry, played the effect that promotes.
Because in semiconductor technology, the gas of use often all is than higher temperature.It is inner that the high-temperature gas passes reaction chamber gets into the pump housing, after the relief opening discharge of pump.Therefore gas has been passed to dried pump with the part heat, because the also continuous pressurized gas of multi-stage dry pump self produces a large amount of heats, these heats also have a big chunk to be transmitted on the pump housing simultaneously.The temperature of conducting dried pump self through many-sided heat is just than higher, makes the component of pump housing inside owing to high temperature is out of shape, and this life-span and personal security to pump self all threatens.Thereby therefore reaching through the cooling to the pump housing protects pump self and user of service's safety to become problem demanding prompt solution.
The model utility content
To the problems referred to above, the purpose of the utility model is to provide a kind of vacuum pump water-cooling structure.This vacuum pump water-cooling structure has greatly increased the area of contact of the cooling water and the pump housing, thereby has strengthened cooling effect.
In order to achieve the above object, the utility model adopts following technological scheme:
A kind of vacuum pump water-cooling structure comprises the air inlet cavity, multistage cavity and the exhaust cavity that link to each other successively, is equipped with flow channel on said air inlet cavity, multistage cavity and the exhaust cavity, and the flow channel on each adjacent cavity communicates; The water intake of said flow channel is located on the air inlet cavity, and backwater mouth is located on the exhaust cavity.
The bottom of said air inlet cavity is provided with discharge opening.
Said water intake is located at the bottom of air inlet cavity.
Said backwater mouth is located at the top of exhaust cavity.
Said flow channel centers on a week on each cavity.
Said multistage cavity comprises successively the one-level cavity that links to each other, one-level dividing plate, secondary cavity, three grades of cavitys, level Four cavity.
The two-port place of flow channel is equipped with groove on said one-level cavity, one-level dividing plate, secondary cavity, three grades of cavitys, the level Four cavity.
Be provided with the O RunddichtringO in the said groove.
Said flow channel and each cavity are integrally casting.
The utlity model has following advantage:
The utility model has greatly increased the area of contact of the cooling water and the pump housing, thereby has strengthened cooling effect with respect to traditional coil pipe cooling.Flow channel is accomplished for casting and need not processing in the cavity, has saved water pipe and retaining element, has practiced thrift cost, need not artificial coil pipe simultaneously, has reduced working time, increases efficient.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the plan view of Fig. 1;
Fig. 4 is the A-A sectional view of Fig. 3;
Wherein: 1 is the air inlet cavity, and 2 is the one-level cavity, and 3 is the one-level dividing plate, and 4 is the secondary cavity, and 5 is three grades of cavitys, and 6 is the level Four cavity, and 7 are the exhaust cavity, and 8 is discharge opening, and 9 is flow channel, and 10 is water intake, and 11 is backwater mouth.
Embodiment
Below in conjunction with accompanying drawing the utility model is further described.
Shown in Fig. 1～4; The utility model comprises air inlet cavity 1, multistage cavity and the exhaust cavity 7 that links to each other successively, is equipped with flow channel 9 on air inlet cavity 1, multistage cavity and the exhaust cavity 7, and flow channel 9 centers on a week on each cavity; But and S shape around, strengthen film-cooled heat.Flow channel 9 on each adjacent cavity communicates; The water intake 10 of flow channel 9 is located at the bottom of air inlet cavity 1, and backwater mouth 11 is located at the top of exhaust cavity 7.The foot of air inlet cavity 1 is provided with discharge opening 8.
Said multistage cavity comprises successively the one-level cavity 2 that connects, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6.The two-port place of the flow channel 9 on one-level cavity 2, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6 is equipped with groove, i.e. seal groove.Be provided with the O RunddichtringO in the said groove and carry out static seal, compress through the connection between each cavity again, carry out effective seal.
Flow channel 9 in each cavity is that integrally casting is accomplished with each cavity, need not processing, has saved water pipe and retaining element, has practiced thrift cost, need not artificial coil pipe simultaneously, has reduced working time, increases efficient.
The working procedure of the utility model is:
The flow channel 9 that cooling water is got in the air inlet cavity 1 by the water intake on the air inlet cavity 1 10; Realize the cooling that the pump housings are inner via the flow channel 9 of one-level cavity 2, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6, exhaust cavity 7 again, the backwater mouth 11 from the exhaust cavity 7 is discharged at last.If with the cooling water emptying in each cavity, then discharge from discharge opening 8.
Claims (9)
1. vacuum pump water-cooling structure; It is characterized in that: comprise the air inlet cavity (1), multistage cavity and the exhaust cavity (7) that link to each other successively; Be equipped with flow channel (9) on said air inlet cavity (1), multistage cavity and the exhaust cavity (7), the flow channel (9) on each adjacent cavity communicates; The water intake (10) of said flow channel (9) is located on the air inlet cavity (1), and backwater mouth (11) is located on the exhaust cavity (7).
2. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: the bottom of said air inlet cavity (1) is provided with discharge opening (8).
3. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: said water intake (10) is located at the bottom of air inlet cavity (1).
4. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: said backwater mouth (11) is located at the top of exhaust cavity (7).
5. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: said flow channel (9) centers on a week on each cavity.
6. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: said multistage cavity comprises one-level cavity (2), one-level dividing plate (3), secondary cavity (4), three grades of cavitys (5), the level Four cavity (6) that links to each other successively.
7. by the described vacuum pump water-cooling structure of claim 6, it is characterized in that: the two-port place that said one-level cavity (2), one-level dividing plate (3), secondary cavity (4), three grades of cavitys (5), level Four cavity (6) are gone up flow channel (9) is equipped with groove.
8. by the described vacuum pump water-cooling structure of claim 7, it is characterized in that: be provided with the O RunddichtringO in the said groove.
9. by the described vacuum pump water-cooling structure of claim 1, it is characterized in that: said flow channel (9) is an integrally casting with each cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204467185U CN202326256U (en) | 2011-11-11 | 2011-11-11 | Water-cooling structure for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204467185U CN202326256U (en) | 2011-11-11 | 2011-11-11 | Water-cooling structure for vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202326256U true CN202326256U (en) | 2012-07-11 |
Family
ID=46438238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204467185U Expired - Fee Related CN202326256U (en) | 2011-11-11 | 2011-11-11 | Water-cooling structure for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202326256U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103104496A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum pump water-cooling structure |
-
2011
- 2011-11-11 CN CN2011204467185U patent/CN202326256U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103104496A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum pump water-cooling structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20151111 |
|
| EXPY | Termination of patent right or utility model |