CN202326111U - Gas path distribution system used for multilevel dry vacuum pump - Google Patents
Gas path distribution system used for multilevel dry vacuum pump Download PDFInfo
- Publication number
- CN202326111U CN202326111U CN201120446620XU CN201120446620U CN202326111U CN 202326111 U CN202326111 U CN 202326111U CN 201120446620X U CN201120446620X U CN 201120446620XU CN 201120446620 U CN201120446620 U CN 201120446620U CN 202326111 U CN202326111 U CN 202326111U
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- gas
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- integration module
- outlet
- pin
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Abstract
The utility model belongs to the field of vacuum pumps, and particularly relates to a gas path distribution system used for a multilevel dry vacuum pump. The gas path distribution system comprises an integration module, an orifice plate, a pin and pressure sensors, wherein the interior of the integration module is respectively provided with an air inlet channel and an air outlet channel, and the air inlet channel and the air outlet channel are communicated through the orifice plate arranged between the air inlet channel and the air outlet channel; the rotatable pin is inserted in the air outlet channel, and a part, positioned in the air outlet channel, of the pin is provided with multiple through holes; the air inlet end and air outlet end of the integration module are respectively provided with an air inlet which is communicated with the air inlet channel and an air outlet which is communicated with the air outlet channel; and the pressure sensors are respectively arranged on the air inlet end and the air outlet end of the integration module, and can respectively measure the gas flow of the two sides of the orifice plate. According to the utility model, the through holes with different bore diameters are butted with the air outlet, and the gas output of different flow ratios in each output pipe is realized without changing the gas path.
Description
Technical field
The utility model belongs to field of vacuum, specifically a kind of gas circuit distribution system that is used for multi-stage dry vacuum pump.
Background technique
In multi-stage dry vacuum pump, feed dry gas, help the discharge of vacuum pump inter-stage condensable gas, the discharge of the dust medium that also helps being extracted, the dead angle is residual and pile up in pump.
The air-channel system of multi-stage dry vacuum pump is most by mass flowmenter or float flowmeter measurement flow at present, and the output of the multichannel of gas circuit can only can not change by unique flow proportional.Such air-channel system takes up room greatly; And the flow export ratio can not change; If use float flowmeter, its flow show that numerical value can only draw through observation, can not carry out data capture; If the occasion that multi-stage dry vacuum pump uses need be adjusted flow number, can only change air-channel system.
The model utility content
The purpose of the utility model is to provide a kind of gas circuit distribution system that is used for multi-stage dry vacuum pump.This gas circuit distribution system can be realized the detection of gas flow, and outlet side gas can be exported with the different flow ratio.
The purpose of the utility model realizes through following technological scheme:
The utility model comprises integration module, orifice plate, pin and pressure transducer, wherein has gas-entered passageway and outlet passageway in the integration module, and gas-entered passageway is connected through the orifice plate that is positioned between the two with outlet passageway; Be inserted with rotating pin in the said outlet passageway, the part that pin is positioned at outlet passageway has a plurality of through holes; The inlet end of said integration module and outlet side are respectively equipped with suction port that is communicated with gas-entered passageway and the air outlet that is communicated with outlet passageway; Said pressure transducer is installed in the inlet end and the outlet side of integration module respectively, measures the gas flow of said orifice plate both sides respectively.
Wherein: the air outlet of said integration module outlet side is a plurality of, and the through hole on the pin is provided with many rows vertically, the corresponding air outlet of every exhausting hole; Said outlet passageway is the blind hole of offering on the integration module, and the opening end of outlet passageway is positioned on the sidewall of integration module, and the other end is connected with gas-entered passageway through orifice plate; The inside of said pin has the blind hole that is communicated with outlet passageway, and an end of pin is the opening end of said blind hole, is positioned at outlet passageway, and the other end and integration module are tightly connected; Through hole on the said pin all is opened on the tube wall corresponding with said blind hole; Said pin and outlet passageway transition fit; The radial cross section of said gas-entered passageway is circular, and an end is communicated with outlet passageway through orifice plate, and the other end is a closed end; The aperture of said orifice plate is respectively less than the diameter of gas-entered passageway and outlet passageway.
Advantage of the utility model and good effect are:
1. the utility model is through the rotation of pin, docks with the air outlet with the through hole in different apertures, need not change the gas output that gas circuit can realize different flow ratio between each output pipe.
2. the utility model adopts pressure sensor measurement gas pressure of orifice plate both sides of flowing through directly carries out data capture, is convenient to observe.
Description of drawings
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the A-A sectional view among Fig. 1;
Wherein: 1 is integration module, and 2 is suction port, and 3 is the air outlet, and 4 is orifice plate, and 5 is pin, and 6 is O-ring seal, and 7 is through hole, and 8 is outlet passageway, and 9 is pressure transducer, and 10 is gas-entered passageway.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further to detail.
Like Fig. 1, shown in Figure 2, the utility model comprises integration module 1, orifice plate 4, pin 5 and pressure transducer 9, and wherein integration module 1 is block (present embodiment is a cuboid), and an end of integration module 1 is an inlet end, and the other end is the outlet side; Have gas-entered passageway 10 and outlet passageway 8 in the inside of integration module 1; Between gas-entered passageway 10 and outlet passageway 8, be provided with orifice plate 4; Less than the diameter of gas-entered passageway 10 with outlet passageway 8, gas-entered passageway 10 is connected through the orifice plate 4 that is positioned between the two with outlet passageway 8 respectively in the aperture of this orifice plate 4; The radial cross section of gas-entered passageway 10 and outlet passageway 8 is circle, and an end of gas-entered passageway 10 is connected with an end of outlet passageway 8 through orifice plate 4, and the other end of gas-entered passageway 10 is a closed end; The blind hole of outlet passageway 8 for offering on the integration module 1, the opening end of outlet passageway 8 is positioned on the sidewall of integration module 1, and the other end is connected with gas-entered passageway 10 through orifice plate 4.
In outlet passageway 8, be inserted with rotating pin 5, pin 5 and outlet passageway 8 transition fit.The inside of pin 5 has the blind hole that is communicated with outlet passageway 8; A pin end of 5 be said blind hole opening end, be positioned at outlet passageway 8, near the other end of said outlet passageway 8; Pin 5 the other end and the sidewall butt of integration module 1, and pass through O-ring seal 6 and be connected with the inner wall sealing of outlet passageway 8.Sell on the tube wall of 5 inner blind holes and have a plurality of through holes 7, being set to of through hole 7 adopts the mode of five equilibrium that many rows are set vertically, and each arranges circumference uniform distribution.The inlet end of integration module 1 is provided with the suction port 2 that is communicated with gas-entered passageway 10, and the suction port 2 of present embodiment is one; The outlet side of integration module 1 is provided with the air outlet 3 that is communicated with outlet passageway 8, and air outlet 3 can be a plurality of, the exhausting hole on each all corresponding pin 5 in an air outlet 3, and air outlet 3 is connected with pin 5 inner blind holes through through hole; The size of through hole is set as requested.Inlet end and outlet side at integration module 1 are separately installed with the both sides that 9, two pressure transducers 9 of pressure transducer lay respectively at orifice plate 4, use the gas pressure of differential method measuring diaphragm 4 both sides, can calculate the gas flow of flowing through.
The working principle of the utility model is:
Gas is entered in the gas-entered passageway 10 by suction port 2, in orifice plate 4 flows to outlet passageway 8, is discharged by each air outlet 3 through the through hole 7 on the pin 5 again.In the process of exhaust, rotating dog 5, the through hole 7 in different apertures can join with each air outlet 3, realizes the gas output of different flow ratio between each output pipe.
Claims (7)
1. gas circuit distribution system that is used for multi-stage dry vacuum pump; It is characterized in that: comprise integration module (1), orifice plate (4), pin (5) and pressure transducer (9); Wherein have gas-entered passageway (10) and outlet passageway (8) in the integration module (1), gas-entered passageway (10) is connected through the orifice plate (4) that is positioned between the two with outlet passageway (8); Be inserted with rotating pin (5) in the said outlet passageway (8), the part that pin (5) is positioned at outlet passageway (8) has a plurality of through holes (7); The inlet end of said integration module (1) and outlet side are respectively equipped with suction port (2) that is communicated with gas-entered passageway (10) and the air outlet (3) that is communicated with outlet passageway (8); Said pressure transducer (9) is installed in the inlet end and the outlet side of integration module (1) respectively, measures the gas flow of said orifice plate (4) both sides respectively.
2. by the said gas circuit distribution system that is used for multi-stage dry vacuum pump of claim 1, it is characterized in that: the air outlet (3) of said integration module (1) outlet side is for a plurality of, and the through hole (7) on the pin (5) is provided with many rows vertically, the corresponding air outlet (3) of every exhausting hole.
3. by claim 1 or the 2 said gas circuit distribution systems that are used for multi-stage dry vacuum pump; It is characterized in that: the blind hole of said outlet passageway (8) for offering on the integration module (1); The opening end of outlet passageway (8) is positioned on the sidewall of integration module (1), and the other end is connected with gas-entered passageway (10) through orifice plate (4).
4. by claim 1 or the 2 said gas circuit distribution systems that are used for multi-stage dry vacuum pump; It is characterized in that: the inside of said pin (5) has the blind hole that is communicated with outlet passageway (8); An end of selling (5) is the opening end of said blind hole, is positioned at outlet passageway (8), and the other end and integration module (1) are tightly connected; Through hole (7) on the said pin (5) all is opened on the tube wall corresponding with said blind hole.
5. by the said gas circuit distribution system that is used for multi-stage dry vacuum pump of claim 4, it is characterized in that: said pin (5) and outlet passageway (8) transition fit.
6. by claim 1 or the 2 said gas circuit distribution systems that are used for multi-stage dry vacuum pump, it is characterized in that: the radial cross section of said gas-entered passageway (10) is for circular, and an end is communicated with outlet passageway (8) through orifice plate (4), and the other end is a closed end.
7. by claim 1 or the 2 said gas circuit distribution systems that are used for multi-stage dry vacuum pump, it is characterized in that: the aperture of said orifice plate (4) is respectively less than the diameter of gas-entered passageway (10) and outlet passageway (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120446620XU CN202326111U (en) | 2011-11-11 | 2011-11-11 | Gas path distribution system used for multilevel dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120446620XU CN202326111U (en) | 2011-11-11 | 2011-11-11 | Gas path distribution system used for multilevel dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202326111U true CN202326111U (en) | 2012-07-11 |
Family
ID=46438093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120446620XU Expired - Fee Related CN202326111U (en) | 2011-11-11 | 2011-11-11 | Gas path distribution system used for multilevel dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202326111U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103104439A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Gas circuit distribution system used for multistage dry vacuum pump |
-
2011
- 2011-11-11 CN CN201120446620XU patent/CN202326111U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103104439A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Gas circuit distribution system used for multistage dry vacuum pump |
| CN103104439B (en) * | 2011-11-11 | 2016-02-10 | 中国科学院沈阳科学仪器研制中心有限公司 | A kind of gas path distribution system for multi-stage dry vacuum pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20161111 |