CN202321624U - Conveying device - Google Patents
Conveying device Download PDFInfo
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- CN202321624U CN202321624U CN201120486312XU CN201120486312U CN202321624U CN 202321624 U CN202321624 U CN 202321624U CN 201120486312X U CN201120486312X U CN 201120486312XU CN 201120486312 U CN201120486312 U CN 201120486312U CN 202321624 U CN202321624 U CN 202321624U
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Abstract
The utility model discloses a conveying device, which comprises a mechanical hand, a conveying box and a supporting disk, wherein a first supporting disk support of a central mechanical arm on the mechanical hand and a second supporting disk support of a central support arm on the conveying box share the same supporting disk, only the supporting disk and an effective area of a baseboard are contacted and contact points are reserved. Compared with the conveying device in the prior art, the number of the contact points of the conveying device in the effective area of the baseboard is reduced, accordingly possibility of scratching the effective area of the baseboard during conveying is reduced, and yield of manufactured products is improved.
Description
Technical field
The utility model relates to liquid crystal manufacturing technology field, relates in particular to a kind of conveyer that is used to transmit substrate.
Background technology
At present; When the manufacturing two sides all needs the substrate of plated film; For example when making the array base palte of capacitive touch screen; Because the pros and cons of substrate all needs plated film, making positive drive side (TFT Driving Side) afterwards, will and be transported to the induction side (Sensing Side) that elsewhere is made reverse side the substrate turn-over.In transporting the process of substrate, can use conveyer, as use manipulator shown in Figure 1 that substrate is shifted, use transmission casket (Cassette) as shown in Figure 2 to take up substrate and be transported to required place.In this process, manipulator can form a plurality of contact points in substrate bottom surface with the pillar that transmits on the casket, and is as shown in Figure 3; Wherein, large circle point is manipulator jack-up substrate when taking out substrate, the contact point that the pillar on the manipulator forms in substrate bottom surface; To be manipulator with substrate put into dot transmits the casket metacoxal plate and fall and transmit casket; Pillar on the transmission casket is carried out in the process of these actions at the contact point that substrate bottom surface forms, and all causes the scuffing of substrate bottom surface plated film easily; Because above-mentioned contact point major part is positioned at the service area (promptly can connect up in the service area of substrate) of substrate, can cause the product yield that produces to reduce.
The utility model content
The utility model provides a kind of conveyer, transmits the contact point that reduces substrate service area and conveyer in the substrate process in order to be implemented in.
A kind of conveyer that the utility model provides comprises: transmit casket, manipulator and at least one supporting disk; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate;
Manipulator comprises central robot arm and edge mechanical arm; At least one group first supporting disk pillar is set on the central robot arm, is used for when manipulator transmits substrate, cooperating the supported dish with first draw-in groove; At least two first substrate posts are set on the edge mechanical arm, are used for supporting substrate;
Transmit casket and comprise at least one group of central authorities' trailing arm and edge trailing arm; On central authorities' trailing arm at least one group second supporting disk pillar is set, is used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator; At least two second substrate posts are set on the edge trailing arm on the same group altogether, are used for supporting substrate.
The utility model also provides a kind of conveyer, comprising: transmit casket, manipulator and at least three supporting disks; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate;
Manipulator comprises at least one mechanical arm; At least three groups first supporting disk pillar is set on the mechanical arm altogether, is used for when manipulator transmits substrate, cooperating the supported dish with first draw-in groove;
Transmit casket and comprise at least one group of trailing arm, every group of trailing arm comprises at least two trailing arms; Be provided with and the every group first cooresponding second supporting disk pillar in supporting disk pillar position on the trailing arm; Be used for transmitting substrate behind the transmission casket at manipulator; Cooperate the supported dish with second draw-in groove, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket.
The beneficial effect of the utility model comprises:
A kind of conveyer that the utility model provides is provided with first draw-in groove, second draw-in groove on the supporting disk, and the shared bearing surface that is used for supporting substrate; Manipulator comprises central robot arm and edge mechanical arm; At least one group first supporting disk pillar is set on the central robot arm; Be used for when manipulator transmits substrate, cooperating the supported dish, at least two first substrate posts are set on the edge mechanical arm, be used for supporting substrate with first draw-in groove; Transmit casket and comprise at least one group of central authorities' trailing arm and edge trailing arm; On central authorities' trailing arm at least one group second supporting disk pillar is set; Be used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator; At least two second substrate posts are set on the edge trailing arm on the same group altogether, are used for supporting substrate.In the conveyer that the utility model embodiment provides; First supporting disk pillar of central robot arm and the second supporting disk pillar of central trailing arm are shared a supporting disk, have only supporting disk to contact with the service area of substrate, stay contact point; Compare with conveyer of the prior art; Reduced the contact point of conveyer, thereby reduced the possibility that in the process of transporting, the substrate service area is scratched, improved the product yield that produces in the service area of substrate.
The another kind of conveyer that the utility model provides, the shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate; Manipulator comprises at least one mechanical arm, and at least three groups first supporting disk pillar is set altogether on the mechanical arm, is used for when manipulator transmits substrate cooperating with first draw-in groove said supporting disk of support; Transmit casket and comprise at least one group of trailing arm; Every group of trailing arm comprises at least two trailing arms; Be provided with and the every group first cooresponding second supporting disk pillar in supporting disk pillar position on the trailing arm; Be used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator.In the conveyer that the utility model embodiment provides; First supporting disk pillar of mechanical arm and the second supporting disk pillar of trailing arm are shared a supporting disk, have only supporting disk to contact with the service area of substrate, stay contact point; Compare with conveyer of the prior art; Reduced the contact point of conveyer, thereby reduced the possibility that in the process of transporting, the substrate service area is scratched, improved the product yield that produces in the service area of substrate.
Description of drawings
Fig. 1 is the scheme drawing of manipulator in the prior art;
Fig. 2 is the structural representation that transmits casket in the prior art;
Fig. 3 transports the distribution graph of the contact point of back formation through conveyer for substrate in the prior art;
The structural representation of the manipulator that Fig. 4 provides for the utility model embodiment;
The structural representation of the transmission casket that Fig. 5 provides for the utility model embodiment;
The birds-eye view of the supporting disk that Fig. 6 provides for the utility model embodiment;
The block diagram of the supporting disk that Fig. 7 provides for the utility model embodiment;
The central robot arm that Fig. 8 provides for the utility model embodiment and the cooperation scheme drawing of central trailing arm;
The birds-eye view of the conveyer that Fig. 9 provides for the utility model embodiment;
One of distribution graph of the contact point that forms after the substrate that Figure 10 provides for the utility model embodiment transports through conveyer;
The birds-eye view of another conveyer that Figure 11 provides for the utility model embodiment;
Two of the distribution graph of the contact point that forms after the substrate that Figure 12 provides for the utility model embodiment transports through conveyer;
Two of the first supporting disk pillar that Figure 13 provides for the utility model embodiment and the structural representation of the second supporting disk pillar.
The specific embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the conveyer that the utility model embodiment is provided is at length explained.
A kind of conveyer that the utility model embodiment provides comprises: transmit casket, manipulator and at least one is used for the supporting disk of supporting substrate; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate; Manipulator is as shown in Figure 4, comprising: central robot arm 1 and edge mechanical arm (2 and 3); At least one group first supporting disk pillar 4 is set on the central robot arm 1, is used for when manipulator transmits substrate, cooperating the supported dish with first draw-in groove; Edge mechanical arm (2 and 3) is gone up at least two first substrate posts (being the round dot on the edge mechanical arm 2 and 3 among Fig. 4) is set, and promptly mechanical arm (2 and 3) is gone up at least two first substrate posts are set altogether on the edge of, is used for supporting substrate.
The transmission casket is as shown in Figure 5, comprising: at least one group of central authorities' trailing arm 5 and edge trailing arm 6; On central authorities' trailing arm 5 at least one group second supporting disk pillar 7 is set, is used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar 4 can be broken away from first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator; Be provided with at least two second substrate posts 8 on the edge trailing arm 6 on the same group altogether, be used for supporting substrate.
Particularly; Above-mentioned supporting disk such as Fig. 6 and shown in Figure 7, wherein, Fig. 6 is the upward view of supporting disk; Fig. 7 is the block diagram of supporting disk; Supporting disk is provided with and first draw-in groove 9 of the first supporting disk pillar, 4 couplings and second draw-in groove 10 of the second supporting disk pillar, 7 couplings, and the shared bearing surface 11 that is used for supporting substrate.
Fig. 4～Fig. 7 is the constructional drawing of an instantiation of the conveyer that provides of the utility model embodiment; The conveyer that the utility model embodiment provides is not limited to the structure among the above-mentioned figure, specifies the concrete structure of each parts in the conveyer that the utility model embodiment provides below.
Particularly; Compare with the position of mechanical arm in manipulator of prior art, edge mechanical arm in the manipulator that the utility model embodiment provides (2 and 3) outwards moves to the fringe region corresponding to supporting substrate respectively, when making first substrate post and substrate contacts on the edge mechanical arm (2 and 3); The contact point that produces is positioned at the fringe region of substrate; And on the fringe region of substrate, can not connect up usually, therefore, the damage that produces herein just can not have influence on the normal use of substrate yet.
Because edge mechanical arm (2 and 3) is positioned at the edge of manipulator in the manipulator that the utility model embodiment provides; First substrate post of depending alone on the edge mechanical arm (2 and 3) can't support whole base plate; Therefore substrate can, also be provided with central robot arm 1 because of the action of gravity position deformation landing that bends therebetween on manipulator; In order to supporting substrate, and prevent substrate bend deformation and landing.
Particularly, the position of central robot arm 1 in manipulator in the above-mentioned manipulator has more than and is limited to the middle that is positioned at manipulator, and the number of central robot arm 1 also is not limited to 1, can decide according to the concrete size of substrate that manipulator carries.
Particularly, at least one group first supporting disk pillar 4 can be set on central robot arm 1, not limit it and be positioned at the particular location on the central robot arm 1.Preferably, the first supporting disk pillar 4 can be arranged on the center corresponding to the substrate that carries, so that substrate is more stable on the supporting disk of robot support.
Preferably, the first supporting disk pillar 4 of manipulator cooperate with first draw-in groove 9 support supporting disk after, the shared bearing surface 11 of supporting disk and the top coplane of first substrate post can guarantee the steady supporting substrate of manipulator like this.
Preferably, when manipulator had only one group of first supporting disk pillar 4 and two first substrate posts, the position at the first supporting disk pillar 4 and two first substrate posts place is conllinear not preferably, can strengthen the stability of substrate on manipulator like this.
Be illustrated in figure 8 as the cooperation principle schematic of central robot arm 1 and central trailing arm 5.As shown in Figure 8; On the central robot arm 1 with the second supporting disk pillar, 7 cooresponding positions on can be provided with slot to make way 12; Be used for manipulator when transmitting substrate to the transmission casket; The second supporting disk pillar 7 enters in the slot to make way 12, cooperates the supported dish with second draw-in groove 10, and the first supporting disk pillar 4 can be broken away from first draw-in groove 9 when manipulator withdraws from the transmission casket.
Wherein, The shape of slot to make way 12 can be square, can be circular arc also, is not limited to the shape described in Fig. 8; As long as the second supporting disk pillar 7 can get into slot to make way 12, second draw-in groove, 10 backs that snap in supporting disk substitute the first supporting disk pillar, 4 picking-up supporting disks and get final product.
Optional; With inverted configuration shown in Figure 8; Also can on central trailing arm 5, be provided with slot to make way with the first supporting disk pillar, 4 cooresponding positions, be used for manipulator when transmitting substrate to the transmission casket, the first supporting disk pillar 4 enters in the slot to make way; Make the second supporting disk pillar 7 cooperate the supported dish, the first supporting disk pillar 4 can be broken away from first draw-in groove 9 when manipulator withdraws from the transmission casket with second draw-in groove 10.Wherein, The shape of slot to make way can be square, also can be circular arc, does not limit concrete shape; As long as the first supporting disk pillar 4 can get into slot to make way, second draw-in groove, 10 backs that make the second supporting disk pillar 7 can snap in supporting disk substitute the first supporting disk pillar, 4 picking-up supporting disks and get final product.
One group of first supporting disk pillar 4 as shown in Figure 8 can comprise: three first supporting disk pillars; These three first supporting disk pillars are conllinear not; Be convenient to three first supporting disk pillars like this and cooperate the picking-up supporting disk with first draw-in groove 9, keep the stability of supporting disk.Accordingly; One group of second supporting disk pillar 7 can be one second supporting disk pillar; Like this; When manipulator transmission substrate was in transmitting casket, the second supporting disk pillar 7 can be positioned at the center of the annulus of three first supporting disk pillars compositions, and such being designed with is beneficial to each supporting disk pillar stable support supporting disk.
Optional; With inverted configuration shown in Figure 8, also can be to comprise one first supporting disk pillar in one group of first supporting disk pillar 4, one group of second supporting disk pillar 7 comprises three second supporting disk pillars; These three second supporting disk pillars are conllinear not; When manipulator transmission substrate was in transmitting casket, the first supporting disk pillar 4 was positioned at the center of the annulus of three second supporting disk pillars compositions, and such being designed with is beneficial to each supporting disk pillar stable support supporting disk.
Only be that the setting of slot to make way, the first supporting disk pillar and the second supporting disk pillar is given an example among above-mentioned Fig. 8; In practical application; The number of one group of first supporting disk pillar and one group of second supporting disk pillar is not done qualification particularly, and one group of first supporting disk pillar or one group of second two sub-supporting disk pillar that the supporting disk pillar also can be a symmetry can certainly be set to a plurality of; Need only ability stable support supporting disk, do not do at this and give unnecessary details.
Particularly, in the utility model embodiment, the shape of the cross sectional shape of supporting disk, first draw-in groove 9 and second draw-in groove 10, and the shape of shared bearing surface 11 can be circles as shown in Figure 6, also can be squares, or triangle, do not do qualification at this.
Preferably, the second supporting disk pillar 7 that transmits casket cooperate with second draw-in groove 10 support supporting disk after, the top coplane of the shared bearing surface 11 of supporting disk and second substrate post 8.
Preferably; In the transmission casket that the utility model embodiment provides; Every group of central authorities' trailing arm 5 and edge trailing arm 6 can arranged crosswise, and be as shown in Figure 5, also can be arranged in parallel; Be about to the edge trailing arm 6 shown in Fig. 5 and be arranged on the edge in the transmission casket that is parallel to central trailing arm 5; Manipulator is after getting into the transmission casket like this, and the edge mechanical arm of manipulator (2 and 3) is positioned at the inboard of the edge trailing arm that transmits casket, and centering requests arm and edge trailing arm on the transmission casket, not to do concrete qualification in the concrete position that is provided with in the utility model embodiment.Be the example explanation with central trailing arm 5 with edge trailing arm 6 arranged crosswise below.
Particularly, every group of central authorities' trailing arm 5 and substrate of edge trailing arm 6 together support can be provided with central trailing arm 5 of many groups and edge trailing arms 6 in transmitting casket, and such one is transmitted casket and can transport a plurality of substrates simultaneously.In support box structure example shown in Figure 5; A central trailing arm 5 and four edge trailing arms 6 are formed substrate of one group of together support; The central trailing arm 5 that is provided with in certain every group and the quantity and the position of edge trailing arm 6 are not limited to quantity shown in Figure 5 and position, can determine the quantity and the position that are provided with according to actual needs.
Particularly; Compare with the position of trailing arm in transmitting casket of prior art; Edge trailing arm 6 is arranged on the edge that transmits in the casket then in the transmission casket that the utility model embodiment provides, and when making second substrate post 8 on the edge trailing arm 6 with substrate contacts, the contact point of generation is positioned at the fringe region of substrate; Therefore, the damage that on the contact point of substrate, produces can not have influence on the normal use of substrate.
Preferably, as shown in Figure 5, be provided with the groove of giving up the throne (13 and 14) with central robot arm 1 and the cooresponding position of edge mechanical arm (2 and 3) on the edge trailing arm 6, manipulator can withdraw from the transmission casket from the groove of giving up the throne (13 and 14) after the transmission substrate is in the transmission casket.
Wherein, The cross sectional shape of groove (13 and 14) of giving up the throne is not limited to shape shown in Figure 5; Can decide according to the concrete cross sectional shape of center mechanical arm on the manipulator 1 and edge mechanical arm (2 and 3); After the cross sectional shape of groove (13 and 14) of giving up the throne is arranged to let manipulator in transmitting casket, put down substrate, withdraws from smoothly and transmit casket and get final product, in the utility model embodiment, do not do concrete qualification.
The manipulator that provides in the face of use the utility model embodiment is down put into and is taken out the detailed process of substrate and at length explains in transmitting casket:
Supporting disk that the first supporting disk pillar 4 of the central robot arm 1 on the manipulator holds up and the first substrate post together support substrate of edge mechanical arm (2 and 3); Manipulator move to the wherein one group of central authorities' trailing arm 5 that transmits casket and edge trailing arm 6 above the time; Move downward a segment distance; Make the central robot arm 1 of manipulator drop in the groove of giving up the throne (13 and 14), during this period, transmit in second draw-in groove 10 of the second supporting disk pillar, 7 entering supporting disks of casket and to cooperate the picking-up supporting disk with second draw-in groove 10 with edge mechanical arm (2 and 3); The first supporting disk pillar 4 of manipulator withdraws from first draw-in groove 9 of supporting disk; Then, manipulator withdraws from the transmission casket through the groove of giving up the throne (13 and 14) on the edge trailing arm 6 that transmits casket, accomplishes the process of in transmitting casket, putting into substrate.
The supporting disk that the second supporting disk pillar 7 of every group of central authorities' trailing arm 5 on the transmission casket holds up and second substrate post, the 8 together support substrates of edge trailing arm 6; Enter into through the groove of giving up the throne (13 and 14) at manipulator and to transmit casket wherein during the below of one group of central authorities' trailing arm 5 and edge trailing arm 6; Manipulator upward movement one segment distance makes the second supporting disk pillar 7 that transmits casket break away from the second groove position 10 of supporting disk, and the first groove position 9 that the first supporting disk pillar 4 on the manipulator gets into supporting disk holds up supporting disk; Incorporating mill tool first substrate post on hand holds up substrate jointly; Afterwards, the manipulator of supporting substrate withdraws from the transmission casket, accomplishes the process of in transmitting casket, taking out substrate.
Wherein, after Fig. 9 transmits casket for manipulator gets into, the birds-eye view during both together support supporting disks, the direction of arrow is the sense of motion of manipulator.
In above-mentioned whole process; The contact point that conveyer stays on substrate is shown in figure 10, and the round dot of substrate midway location is the contact point that the shared bearing surface of supporting disk stays on substrate, compares with the contact point that stays on the substrate after existing conveyer transports among Fig. 3; Can significantly see; The contact point that on the service area of substrate, stays has reduced, thereby can reduce in the process of transporting the scuffing to substrate, improves the yield of product.
In the above-mentioned conveyer that the utility model embodiment provides; Do not limit the concrete shape of the upper surface of the first supporting disk pillar, first substrate post, the second supporting disk pillar and second substrate post; Can be circular, can be square, can also be triangle; Be the concrete shape that does not limit the contact point of conveyer and substrate among the utility model embodiment, can be according to the concrete needs setting of supporting substrate.
A kind of conveyer that the utility model embodiment provides is provided with first draw-in groove, second draw-in groove on the supporting disk, and the shared bearing surface that is used for supporting substrate; Manipulator comprises central robot arm and edge mechanical arm; At least one group first supporting disk pillar is set on the central robot arm; Be used for when manipulator transmits substrate, cooperating the supported dish, at least two first substrate posts are set on the edge mechanical arm, be used for supporting substrate with first draw-in groove; Transmit casket and comprise at least one group of central authorities' trailing arm and edge trailing arm; On central authorities' trailing arm at least one group second supporting disk pillar is set; Be used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator; At least two second substrate posts are set on the edge trailing arm on the same group altogether, are used for supporting substrate.In the conveyer that the utility model embodiment provides; First supporting disk pillar of central robot arm and the second supporting disk pillar of central trailing arm are shared a supporting disk, have only supporting disk to contact with the service area of substrate, stay contact point; Compare with conveyer of the prior art; Reduced the contact point of conveyer, thereby reduced the possibility that in the process of transporting, the substrate service area is scratched, improved the product yield that produces in the service area of substrate.
The utility model embodiment also provides another kind of conveyer, comprising: transmit casket, manipulator and at least three supporting disks that are used for supporting substrate; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate;
Manipulator comprises at least one mechanical arm; At least three groups first supporting disk pillar is set on whole mechanical arms altogether, is used for when manipulator transmits substrate, cooperating the supported dish with first draw-in groove;
Transmit casket and comprise at least one group of trailing arm, every group of trailing arm comprises at least two trailing arms; Be provided with and the every group first cooresponding second supporting disk pillar in supporting disk pillar position on the trailing arm; Be used for transmitting substrate behind the transmission casket at manipulator; Cooperate the supported dish with second draw-in groove, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket.
Particularly; In above-mentioned second kind of conveyer; On the manipulator a plurality of mechanical arms can be set, not limit the number of the mechanical arm that is provided with on the manipulator, as long as the steady supporting substrate of the supporting disk that the first supporting disk pillar that on mechanical arm, is provided with holds up at this.
Transmit the one group of trailing arm that comprises in the casket, the trailing arm in every group is positioned at same plane, through supporting disk together support substrate, in transmitting casket, can comprise many group trailing arms, and such one is transmitted casket and can transport a plurality of substrates simultaneously.Do not limit the number of every group of trailing arm in every transmission casket among the utility model embodiment; As long as second supporting disk pillar on the trailing arm and the first supporting disk pillar on the manipulator can the same supporting disks of together support; Like this with respect to conveyer of the prior art; Second kind of conveyer that the utility model embodiment provides shared the supporting disk supporting substrate through manipulator and transmission casket, can reduce one times with the contact point on the substrate.
Preferably, when three group of first supporting disk pillar only was set on the mechanical arm, the position at three group of first supporting disk pillar place is conllinear not.
The structure of each parts in the second kind of grass-hopper that provides through concrete instance explanation the utility model embodiment below.
Shown in figure 11, behind manipulator entering transmission casket, the birds-eye view during both together support supporting disks.Wherein, manipulator is provided with two mechanical arms 15, and each mechanical arm is provided with three group of first supporting disk pillar (not shown); Transmit being provided with and cooresponding two trailing arms 16 of position of manipulator on the casket, each trailing arm is provided with three second supporting disk pillar (not shown)s; The first supporting disk pillar and the second supporting disk pillar are corresponding to be provided with, and can the phase trans-substitution support same supporting disk 17, makes after whole conveyer transports substrate to have only the shared bearing surface of supporting disk on substrate, to stay contact point.
The contact point that on substrate, stays for conveyer shown in figure 12; Compare with the contact point that conveyer of the prior art stays on substrate; Can significantly see; The contact point that on the service area of substrate, stays has reduced, thereby can reduce in the process of transporting the scuffing to substrate, improves the yield of product.
In addition, the concrete structure of the supporting disk in the concrete structure of the supporting disk in second kind of conveyer that the utility model embodiment provides and the first kind of conveyer is similar, repeats no more at this.
Preferably; Figure 13 is first supporting disk pillar on the manipulator among Figure 12 and the concrete structure figure that transmits the second supporting disk pillar of casket; Can be provided with slot to make way 18 with the cooresponding position of the second supporting disk pillar on the mechanical arm 15, be used for manipulator when transmitting substrate to the transmission casket, the second supporting disk pillar enters in the slot to make way 18; Cooperate the supported dish with second draw-in groove, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket.Wherein, The shape of slot to make way 18 can be square, also can be circular arc, does not limit concrete shape; As long as the second supporting disk pillar can get into slot to make way 18, make the second supporting disk pillar to snap in to substitute behind second draw-in groove of supporting disk the first supporting disk pillar to hold up supporting disk and get final product.
Optional; With inverted configuration shown in Figure 13; Also can be for being provided with slot to make way with the cooresponding position of the first supporting disk pillar on the trailing arm 16, when manipulator is transmitting substrate in transmitting casket the time, the first supporting disk pillar enters in the slot to make way; The second supporting disk pillar cooperates the supported dish with second draw-in groove, and the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket.The shape of slot to make way can be square; Also can be circular arc; Do not limit concrete shape,, make the second supporting disk pillar to snap in to substitute behind second draw-in groove of supporting disk the first supporting disk pillar to hold up supporting disk and get final product as long as the first supporting disk pillar can get into slot to make way.
Preferably; The concrete structure of one group of first supporting disk pillar on the mechanical arm 15 can be shown in figure 13; Comprise three first supporting disk pillars (the dotted line place among Figure 13); These three first supporting disk pillars are conllinear not, is convenient to three first supporting disk pillars like this and cooperates the picking-up supporting disk with first draw-in groove, keeps the stability of supporting disk.Accordingly; One group of second supporting disk pillar can be one second supporting disk pillar; Like this; When manipulator transmission substrate was in transmitting casket, the second supporting disk pillar was positioned at the center of the annulus of three first supporting disk pillars compositions, and such being designed with is beneficial to each supporting disk pillar stable support supporting disk.
Optional; With inverted configuration shown in Figure 13, also can be to comprise one first supporting disk pillar in one group of first supporting disk pillar, one group of second supporting disk pillar always comprises three second supporting disk pillars; These three second supporting disk pillars are conllinear not; When manipulator transmission substrate was in transmitting casket, the first supporting disk pillar was positioned at the center of the annulus of three second supporting disk pillars compositions, and such being designed with is beneficial to each supporting disk pillar stable support supporting disk.
In the above-mentioned conveyer that the utility model embodiment provides; Not limiting the concrete shape of the upper surface of the first supporting disk pillar, first substrate post, can be circular, can be square; It can also be triangle; In addition, do not limit the concrete shape of the contact point of supporting disk and substrate in the conveyer among the utility model embodiment, can be according to the concrete needs setting of supporting substrate.
The another kind of conveyer that the utility model embodiment provides, the shared bearing surface that first draw-in groove, second draw-in groove is set on the supporting disk and is used for supporting substrate; Manipulator comprises at least one mechanical arm, and at least three groups first supporting disk pillar is set on the mechanical arm, is used for when manipulator transmits substrate cooperating with first draw-in groove said supporting disk of support; Transmit casket and comprise at least one group of trailing arm; Every group of trailing arm comprises at least two trailing arms; Be provided with and the every group first cooresponding second supporting disk pillar in supporting disk pillar position on the trailing arm; Be used for transmitting substrate behind the transmission casket, cooperate the supported dish, the first supporting disk pillar can be broken away from first draw-in groove when manipulator withdraws from the transmission casket with second draw-in groove at manipulator.In the conveyer that the utility model embodiment provides; First supporting disk pillar of mechanical arm and the second supporting disk pillar of trailing arm are shared a supporting disk, have only supporting disk to contact with the service area of substrate, stay contact point; Compare with conveyer of the prior art; Reduced the contact point of conveyer, thereby reduced the possibility that in the process of transporting, the substrate service area is scratched, improved the product yield that produces in the service area of substrate.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.
Claims (12)
1. a conveyer is characterized in that, comprising: transmit casket, manipulator and at least one supporting disk; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the said supporting disk and is used for supporting substrate;
Said manipulator comprises central robot arm and edge mechanical arm; At least one group first supporting disk pillar is set on the said central robot arm, is used for when said manipulator transmits substrate cooperating the said supporting disk of support with said first draw-in groove; At least two first substrate posts are set on the said edge mechanical arm, are used for supporting substrate;
Said transmission casket comprises at least one group of central authorities' trailing arm and edge trailing arm; At least one group second supporting disk pillar is set on the said central trailing arm; Be used for transmitting substrate behind said transmission casket at said manipulator; Cooperate the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket; At least two second substrate posts are set on the said edge trailing arm on the same group altogether, are used for supporting substrate.
2. device as claimed in claim 1; It is characterized in that; Be provided with slot to make way with the cooresponding position of the said second supporting disk pillar on the said central robot arm, be used for said manipulator when transmitting substrate to said transmission casket, the said second supporting disk pillar enters in the said slot to make way; Cooperate the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket; Or
Be provided with slot to make way with the cooresponding position of the said first supporting disk pillar on the said central trailing arm; Be used for said manipulator when transmitting substrate to said transmission casket; The said first supporting disk pillar enters in the said slot to make way; The said second supporting disk pillar cooperates the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket.
3. device as claimed in claim 2; It is characterized in that; Comprise three first supporting disk pillars in one group of said first supporting disk pillar; One group of second supporting disk pillar comprises one second supporting disk pillar, and when said manipulator transmission substrate was in said transmission casket, the said second supporting disk pillar was positioned at the center of the annulus of said three first supporting disk pillars composition; Or
Comprise one first supporting disk pillar in one group of said first supporting disk pillar; One group of second supporting disk pillar comprises three second supporting disk pillars; When said manipulator transmits said substrate in transmitting casket the time, the said first supporting disk pillar is positioned at the center of the annulus that said three second supporting disk pillars form.
4. device as claimed in claim 1 is characterized in that, said central trailing arm and said edge trailing arm arranged crosswise.
5. device as claimed in claim 4; It is characterized in that; Be provided with the groove of giving up the throne with said central robot arm and the cooresponding position of mechanical arm, said edge on the said edge trailing arm, be used for said manipulator and transmit substrate behind said transmission casket, withdrawing from said transmission casket from the said groove of giving up the throne.
6. like each described device of claim 1-5, it is characterized in that, the said first supporting disk pillar cooperates the said supporting disk of support with said first draw-in groove after, the shared bearing surface of said supporting disk and the top coplane of said first substrate post.
7. like each described device of claim 1-5, it is characterized in that, the said second supporting disk pillar cooperates the said supporting disk of support with said second draw-in groove after, the shared bearing surface of said supporting disk and the top coplane of said second substrate post.
8. like each described device of claim 1-5, it is characterized in that when said manipulator had only one group of first supporting disk pillar and two first substrate posts, the position at said first supporting disk pillar and said two first substrate posts place is conllinear not.
9. a conveyer is characterized in that, comprising: transmit casket, manipulator and at least three supporting disks; Wherein,
The shared bearing surface that first draw-in groove, second draw-in groove is set on the said supporting disk and is used for supporting substrate;
Said manipulator comprises at least one mechanical arm; At least three groups first supporting disk pillar is set altogether on said at least one mechanical arm, is used for when said manipulator transmits substrate cooperating the said supporting disk of support with said first draw-in groove;
Said transmission casket comprises at least one group of trailing arm, and every group of trailing arm comprises at least two trailing arms; Be provided with and every group of cooresponding second supporting disk pillar in the said first supporting disk pillar position on the said trailing arm; Be used for transmitting substrate behind said transmission casket at said manipulator; Cooperate the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket.
10. device as claimed in claim 9; It is characterized in that; Be provided with slot to make way with the cooresponding position of the said second supporting disk pillar on the said mechanical arm, be used for said manipulator when transmitting substrate to said transmission casket, the said second supporting disk pillar enters in the said slot to make way; Cooperate the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket; Or
Be provided with slot to make way with the cooresponding position of the said first supporting disk pillar on the said trailing arm; Be used for said manipulator when transmitting substrate to said transmission casket; The said first supporting disk pillar enters in the said slot to make way; The said second supporting disk pillar cooperates the said supporting disk of support with said second draw-in groove, the said first supporting disk pillar can be broken away from said first draw-in groove when manipulator withdraws from the transmission casket.
11. device as claimed in claim 10; It is characterized in that; Comprise three first supporting disk pillars in one group of said first supporting disk pillar; One group of second supporting disk pillar comprises one second supporting disk pillar, and when said manipulator transmission substrate was in said transmission casket, the said second supporting disk pillar was positioned at the center of the annulus of said three first supporting disk pillars composition; Or
One group of said first supporting disk pillar comprises one first supporting disk pillar; Comprise three second supporting disk pillars in one group of second supporting disk pillar; When said manipulator transmission substrate was in said transmission casket, the said first supporting disk pillar was positioned at the center of the annulus of said three second supporting disk pillars composition.
12., it is characterized in that when three group of first supporting disk pillar only was set on the said mechanical arm, the position at said three group of first supporting disk pillar place is conllinear not like each described device of claim 9-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120486312XU CN202321624U (en) | 2011-11-29 | 2011-11-29 | Conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120486312XU CN202321624U (en) | 2011-11-29 | 2011-11-29 | Conveying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202321624U true CN202321624U (en) | 2012-07-11 |
Family
ID=46433613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120486312XU Expired - Lifetime CN202321624U (en) | 2011-11-29 | 2011-11-29 | Conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202321624U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113611633A (en) * | 2021-07-21 | 2021-11-05 | 北京北方华创微电子装备有限公司 | Wafer baking chamber and wafer pre-cleaning method thereof |
-
2011
- 2011-11-29 CN CN201120486312XU patent/CN202321624U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113611633A (en) * | 2021-07-21 | 2021-11-05 | 北京北方华创微电子装备有限公司 | Wafer baking chamber and wafer pre-cleaning method thereof |
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Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150623 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150623 |
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Effective date of registration: 20150623 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
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| CX01 | Expiry of patent term |
Granted publication date: 20120711 |
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| CX01 | Expiry of patent term |