CN202307821U - Temperature monitoring device and plasma processing device - Google Patents
Temperature monitoring device and plasma processing device Download PDFInfo
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- CN202307821U CN202307821U CN2011203954846U CN201120395484U CN202307821U CN 202307821 U CN202307821 U CN 202307821U CN 2011203954846 U CN2011203954846 U CN 2011203954846U CN 201120395484 U CN201120395484 U CN 201120395484U CN 202307821 U CN202307821 U CN 202307821U
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- thermocouple
- pipeline
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- flange
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Abstract
The utility model provides a temperature monitoring device and a plasma processing device. The temperature monitoring device is used to measure the temperature of a pipeline and comprises a thermocouple and an annular fixing member surrounding the pipeline; wherein, the thermocouple is fixed on the outside of the pipeline by means of the annular fixing member. By the fixing mode, not only the thermocouple can be fixed on the outside of the pipeline firmly, but also the firmness of the thermocouple and the pipeline is not affected due to the high use environment temperature, so that the temperature of the pipeline can be measured accurately and reliably.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, is specifically related to a kind of device for monitoring temperature and uses the plasma processing device of this device for monitoring temperature.
Background technology
Plasma processing device is the common equipment of processing semiconductor device, and it is widely used in semi-conductive etching and depositing operation.In the process of implementing etching technics, be the reactant of using always for the material of on-gaseous at normal temperatures such as BCl3, SiCl4 etc., therefore need make it change gas into the material heating of on-gaseous, carry out etching technics then.This will ask reactant in gas transmission pipeline and reaction chamber, all to keep gaseous state; Therefore need to gas transmission pipeline heat and the control gaseous conveyance conduit in temperature; Condense into particle to avoid reactant Yin Wendu to reduce, thereby guarantee that etching technics carries out smoothly.
For the temperature of control gaseous accurately, people adopt temperature control system to come the temperature of gas in the control gaseous conveyance conduit.Fig. 1 is the fixed form of thermocouple and gas transmission pipeline in the existing temperature control system.See also Fig. 1, temperature control system comprises SMD thermocouple 21 and controller (not shown), and SMD thermocouple 21 sticks on the outside of gas transmission pipeline 1 through adhesive sticker, and with compensating wire 22 SMD thermocouple 21 is connected with controller.SMD thermocouple 21 is delivered to controller with the temperature information of the gas transmission pipeline that monitors 1; The temperature information that controller monitors according to SMD thermocouple 21 is regulated the power of the electricity companion heating tape that is arranged on gas transmission pipeline 1 outside, thus the temperature of gas in the control gaseous conveyance conduit.
Yet; In actual use; Adhesive sticker can not make SMD thermocouple 21 be securely fixed in the outside of gas transmission pipeline 1; Deviation appears in temperature easily that cause monitoring, thus cause temperature control system can not be accurately, the gas temperature in the control gaseous conveyance conduit 1 reliably, and then influence the precision of etching technics.And adhesive sticker uses apt to deteriorate in long hot environment, causes its viscosity to reduce, even loses viscosity, has a strong impact on the precision and the reliability of the gas temperature in the temperature control system adjustments of gas conveyance conduit 1, thereby influences the precision of etching technics.
The utility model content
For solving the deficiency of above-mentioned prior art; The utility model provides a kind of device for monitoring temperature and uses the plasma processing device of this device for monitoring temperature; It can be securely fixed in thermocouple the outside of pipeline, thereby can measure the temperature of pipeline accurately, reliably.
For the purpose that realizes the utility model provides a kind of device for monitoring temperature; Be used for the temperature of measuring channel, it comprises thermocouple, wherein; Also comprise the annular fixing member around said pipeline, said thermocouple is fixed on the outside of said pipeline by said annular fixing member.
Wherein, said annular fixing member is an internal diameter stationary annular flange, and it comprises the flange body that annular is closed, and said thermocouple is fixed on the said flange body.
Preferably; Said annular fixing member is the adjustable annular flange of internal diameter; The flange body that it comprises the annular that head and the tail are not connected is respectively equipped with a protuberance in two ends of said flange body, and two said protuberances are oppositely arranged; And in two said protuberances, be provided with center line first through hole point-blank, in said first through hole, be provided with the flange regulon that is used to regulate said annular flange internal diameter size.
Wherein, said flange regulon is a bolt, is provided with the screw thread that cooperates with said bolt in said first through hole, regulates the internal diameter of said flange body through regulating the position of bolt in said first through hole.Wherein, said flange regulon is bolt and nut engaged with it, and said bolt passes said first through hole and cooperates with said nut, regulates the internal diameter of said flange body through regulating the diverse location that said nut makes progress in said bolt shaft.
Wherein, on said flange body, be provided with n second through hole that runs through its radial direction, wherein, n is the integer more than or equal to 1, and said thermocouple is arranged in said second through hole.
Wherein, In said second through hole, be provided with screw thread; In said second through hole, be provided with the first adjusting parts that cooperate with it; Said thermocouple be fixed on said first regulate parts inside and its free end regulate parts to stretching out from said first near said flange body center one side, regulate parts and make said thermocouple be close to the outside of said pipeline through regulating said first in the position of said flange body radial direction.
Wherein, In said second through hole, be provided with second and regulate parts; The said second adjusting parts pass said second through hole auxiliary unit inboard with being arranged on said flange body and are connected; Said thermocouple be fixed on said second regulate parts inside and its free end regulate parts to stretching out from said second near said flange body center one side, regulate parts and make said thermocouple be close to the outside of said pipeline through regulating said second in the position of said flange body radial direction.
The utility model also provides a kind of plasma processing device; It comprises reaction chamber, the gas transmission pipeline that is communicated with said reaction chamber, be used to the device for monitoring temperature that heats the heating tape of said gas transmission pipeline and be used to monitor said air shooter channel temp; Wherein, said device for monitoring temperature adopts the said device for monitoring temperature that the utility model provides.
Preferably; Plasma processing device comprises in order to the overtemperature protection unit that prevents that said air shooter channel temp is too high, said overtemperature protection unit according to said thermocouple monitoring to the temperature of the said gas transmission pipeline power output of regulating said heating tape.
The utlity model has following beneficial effect:
The device for monitoring temperature that the utility model provides; It is looped around the outside that annular fixing member on the pipeline is fixed on thermocouple in pipeline through employing; This fixed form not only can be securely fixed in thermocouple the outside of pipeline; And can be, thereby can make thermocouple measure the temperature of pipeline accurately, reliably because of the too high fastness that influences thermocouple and pipeline of the temperature of environment for use.And annular fixing member can be securely fixed in a plurality of thermocouples the outside of pipeline, can obtain the temperature of pipeline more accurately by a plurality of thermocouples.
The plasma processing device that the utility model provides; Its device for monitoring temperature that adopts the utility model to provide is monitored the temperature of gas transmission pipeline; Thereby can monitor the temperature of gas transmission pipeline accurately, reliably; And then can guarantee that gas transmission pipeline can stably be delivered to process gas in the reaction chamber, to guarantee carrying out smoothly of technology.
Description of drawings
Fig. 1 is the fixed form of thermocouple and gas transmission pipeline in the existing temperature control system;
The profile of first embodiment of the device for monitoring temperature that Fig. 2 provides for the utility model; And
The profile of second embodiment of the device for monitoring temperature that Fig. 3 provides for the utility model.
Embodiment
For making those skilled in the art understand the technical scheme of the utility model better, the device for monitoring temperature and the plasma processing device that come the utility model is provided below in conjunction with accompanying drawing carry out sets forth in detail.
Embodiment one
The profile of first embodiment of the device for monitoring temperature that Fig. 2 provides for the utility model.See also Fig. 2, the device for monitoring temperature that present embodiment provides is used for the temperature of measuring channel 3, and it comprises that around the annular fixing member of pipeline 3 and two thermocouples 5 fixed thereon, wherein, annular fixing member is in order to be fixed on thermocouple 5 in the outside of pipeline 3.Can thermocouple 5 be securely fixed in the outside of pipeline 3 by the annular heat galvanic couple, and can not influence the fastness of thermocouple 5 and pipeline 3, thereby can make thermocouple 5 measure the temperature of pipeline 3 accurately, reliably because of the temperature of environment for use is too high.
In the present embodiment, annular fixing member is the adjustable annular flange of internal diameter, and it comprises the flange body 40 of the annular that head and the tail are not connected.Be respectively equipped with first protuberance 81 and second protuberance, 82, the first protuberances 81 and second protuberance 82 in two ends of flange body 40 and be oppositely arranged, and in first protuberance 81 and second protuberance 82, be respectively equipped with two center lines, first through hole 83 point-blank.In first through hole 83, be provided with screw thread, and in first through hole 83, be provided with the bolt 84 with threaded engagement.Regulate the internal diameter of flange body 40 through regulating the position of bolt 84 in first through hole 83, thereby make thermocouple 5 be close to the outside of pipeline 3.
On flange body 40, be provided with two second through holes 41 that run through its radial direction, in second through hole 41, be provided with screw thread, and in second through hole 41, be provided with first of its threads engaged and regulate parts 6.Thermocouple 5 is fixed on the inside of the first adjusting parts 6; As thermocouple 5 is arranged on first regulate parts 6 axial location, and its free end (measuring junction that promptly is used for the measuring channel temperature) is regulated parts 6 from first and is stretched out to center one side near flange body 40.Regulate parts 6 in flange body 40 position in the radial direction through regulating first, can realize each thermocouple 5 is regulated in flange body 40 position in the radial direction, thereby make each thermocouple 5 all be close to the outside of pipeline 3.
Need to prove that present embodiment is on flange body 40, to be provided with two second through holes 41 that run through its radial direction, but is not limited thereto at the utility model.In fact; Second through hole 41 that n (wherein, n for more than or equal to 1 integer) runs through its radial direction can be set on flange body 40, and each second through hole 41 can be corresponding is provided with a thermocouple; Can increase point for measuring temperature like this, thereby obtain the temperature of pipeline more accurately.
Need to prove that also present embodiment is in first through hole 83, screw thread to be set, and bolt 84 conducts of employing and its threaded engagement are in order to the flange regulon of the internal diameter of adjusting flange body 40.But in practical application, the flange regulon can also be bolt and nut engaged with it, and bolt passes first through hole 83 and cooperates with nut.Through adjusting nut bolt axially on diverse location, can regulate the internal diameter of flange body 40 equally, thereby make thermocouple 5 be close to the outside of pipeline 3.
Need to prove that also the annular fixing member in the present embodiment is the adjustable annular flange of internal diameter, but in practical application, annular flange also can be internal diameter stationary annular flange.This annular flange comprises the flange body that annular is closed, and the first adjusting parts 6 that the second same through hole 41 are set on this flange body and cooperate with it.This moment, thermocouple 5 can be regulated its position in the radial direction in flange body 40 by the first adjusting parts 6, and this can make thermocouple 5 be close to the outside of pipeline 3 equally, thereby measures the temperature of pipeline accurately, reliably.
Embodiment two
The profile of second embodiment of the device for monitoring temperature that Fig. 3 provides for the utility model.See also Fig. 3; The device for monitoring temperature that present embodiment provides is used for the temperature of measuring channel 3; It comprises around the annular fixing member of pipeline 3 and two thermocouples 5 fixed thereon; Wherein, annular fixing member is in order to be fixed on thermocouple 5 in the outside of pipeline 3, and this fixed form not only can be securely fixed in thermocouple 5 outside of pipeline 3; And can not influence the fastness of thermocouple 5 and pipeline 3, thereby can make thermocouple 5 measure the temperature of pipeline 3 accurately, reliably because of the temperature of environment for use is too high.
In the present embodiment; Annular fixing member comprises the flange body 40 of the annular that head and the tail are not connected; The concrete structure of first protuberance 81, second protuberance 82 and flange regulon on two ends of flange body 40 is identical with the content described in the foregoing description, repeats no more at this.
In the present embodiment; In second through hole 41 on flange body 40 screw thread is not set; In second through hole 41, be provided with second and regulate parts 7; The second adjusting parts 7 pass second through hole 41 and are connected with the auxiliary units 9 that are arranged on flange body 40 inboards, and auxiliary unit 9 is arranged near flange body 40 centers one side.Thermocouple 5 is fixed on inside and its free end (measuring junction that promptly is used for the measuring channel temperature) of the second adjusting parts 7 and regulates parts 7 to stretching out near a side at flange body 40 centers from second.The second adjusting parts 7 are bolt; Auxiliary unit 9 is a nut; Can make bolt moving in the radial direction through adjusting nut and the relative position of bolt on the bolt axial direction in flange body 40; Move in the radial direction in flange body 40 thereby drive thermocouple 5, thereby make thermocouple 5 be close to the outside of pipeline 3.
The device for monitoring temperature that present embodiment provides; It is looped around the outside that annular fixing member on the pipeline is fixed on thermocouple in pipeline through employing; This fixed form not only can be securely fixed in thermocouple the outside of pipeline; And can be, thereby can make thermocouple measure the temperature of pipeline accurately, reliably because of the too high fastness that influences thermocouple and pipeline of the temperature of environment for use.
Present embodiment also provides a kind of plasma processing device; It comprises reaction chamber, the gas transmission pipeline that is communicated with reaction chamber, be used for the heating tape of heated air conveyance conduit, be used to monitor the device for monitoring temperature of air shooter channel temp; Wherein, The said temperature supervising device that device for monitoring temperature has adopted present embodiment to provide is monitored the temperature of gas transmission pipeline; Thereby can monitor the temperature of the process gas of transmission in the gas transmission pipeline accurately, reliably, undergo phase transition, and then guarantee carrying out smoothly of technology to avoid process gas.
In the present embodiment, plasma processing device comprises that also it comprises the thermocouple that is used to monitor gas transmission pipeline in order to the overtemperature protection unit that prevents that the air shooter channel temp is too high, and thermocouple is fixed through the annular fixing member that the foregoing description provides.The overtemperature protection unit according to thermocouple monitoring to the temperature of the gas transmission pipeline power output of regulating the heating tape, thereby the temperature that can prevent gas transmission pipeline is too high.
The plasma processing device that the utility model provides; Its device for monitoring temperature that adopts the utility model to provide is monitored the temperature of gas transmission pipeline; Thereby can monitor the temperature of gas transmission pipeline accurately, reliably; And then can guarantee that gas transmission pipeline can stably be delivered to process gas in the reaction chamber, to guarantee carrying out smoothly of technology.
It is understandable that above execution mode only is the illustrative embodiments that adopts for the principle that the utility model is described, yet the utility model is not limited thereto.For the one of ordinary skilled in the art, under the situation of spirit that does not break away from the utility model and essence, can make various modification and improvement, these modification and improvement also are regarded as the protection range of the utility model.
Claims (10)
1. device for monitoring temperature is used for the temperature of measuring channel, and it comprises thermocouple, it is characterized in that, also comprises the annular fixing member around said pipeline, and said thermocouple is fixed on the outside of said pipeline by said annular fixing member.
2. device for monitoring temperature according to claim 1 is characterized in that, said annular fixing member is an internal diameter stationary annular flange, and it comprises the flange body that annular is closed, and said thermocouple is fixed on the said flange body.
3. device for monitoring temperature according to claim 1; It is characterized in that said annular fixing member is the adjustable annular flange of internal diameter, it comprises the flange body of the annular that head and the tail are not connected; Two ends in said flange body are respectively equipped with a protuberance; Two said protuberances are oppositely arranged, and in two said protuberances, are provided with center line first through hole point-blank, in said first through hole, are provided with the flange regulon that is used to regulate said annular flange internal diameter size.
4. device for monitoring temperature according to claim 3; It is characterized in that; Said flange regulon is a bolt, is provided with the screw thread that cooperates with said bolt in said first through hole, regulates the internal diameter of said flange body through regulating the position of bolt in said first through hole.
5. device for monitoring temperature according to claim 3; It is characterized in that; Said flange regulon is bolt and nut engaged with it; Said bolt passes said first through hole and cooperates with said nut, regulates the internal diameter of said flange body through regulating the diverse location that said nut makes progress in said bolt shaft.
6. according to claim 2 or 3 described device for monitoring temperature, it is characterized in that on said flange body, be provided with n second through hole that runs through its radial direction, wherein, n is the integer more than or equal to 1, said thermocouple is arranged in said second through hole.
7. device for monitoring temperature according to claim 6; It is characterized in that; In said second through hole, be provided with screw thread; In said second through hole, be provided with it cooperate first regulate parts, said thermocouple be fixed on said first regulate parts inside and its free end regulate parts to stretching out from said first near said flange body center one side, regulate parts and make said thermocouple be close to the outside of said pipeline through regulating said first in the position of said flange body radial direction.
8. device for monitoring temperature according to claim 6; It is characterized in that; In said second through hole, be provided with second and regulate parts; The said second adjusting parts pass said second through hole auxiliary unit inboard with being arranged on said flange body and are connected; Said thermocouple be fixed on said second regulate parts inside and its free end regulate parts to stretching out from said second near said flange body center one side, regulate parts and make said thermocouple be close to the outside of said pipeline through regulating said second in the position of said flange body radial direction.
9. plasma processing device; It comprises reaction chamber, the gas transmission pipeline that is communicated with said reaction chamber, be used to the device for monitoring temperature that heats the heating tape of said gas transmission pipeline and be used to monitor said air shooter channel temp; It is characterized in that said device for monitoring temperature adopts any described device for monitoring temperature among the claim 1-8.
10. plasma processing device according to claim 9; It is characterized in that; Plasma processing device comprises in order to the overtemperature protection unit that prevents that said air shooter channel temp is too high, said overtemperature protection unit according to said thermocouple monitoring to the temperature of the said gas transmission pipeline power output of regulating said heating tape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203954846U CN202307821U (en) | 2011-10-18 | 2011-10-18 | Temperature monitoring device and plasma processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203954846U CN202307821U (en) | 2011-10-18 | 2011-10-18 | Temperature monitoring device and plasma processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202307821U true CN202307821U (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203954846U Expired - Lifetime CN202307821U (en) | 2011-10-18 | 2011-10-18 | Temperature monitoring device and plasma processing device |
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| Country | Link |
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| CN (1) | CN202307821U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104654875A (en) * | 2014-12-17 | 2015-05-27 | 张素平 | Heat transfer pipe for mining machinery |
| CN104965545A (en) * | 2015-07-06 | 2015-10-07 | 胡延军 | Electric heating constant-temperature pipeline and temperature control method |
| CN110486792A (en) * | 2019-08-05 | 2019-11-22 | 陈其钻 | Heat supply network remote monitoring and managing system and method based on GPRS network |
-
2011
- 2011-10-18 CN CN2011203954846U patent/CN202307821U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104654875A (en) * | 2014-12-17 | 2015-05-27 | 张素平 | Heat transfer pipe for mining machinery |
| CN104965545A (en) * | 2015-07-06 | 2015-10-07 | 胡延军 | Electric heating constant-temperature pipeline and temperature control method |
| CN110486792A (en) * | 2019-08-05 | 2019-11-22 | 陈其钻 | Heat supply network remote monitoring and managing system and method based on GPRS network |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100176 No. 8, Wenchang Avenue, Daxing District economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120704 |