CN202285356U - Motor for dry vacuum pump - Google Patents

Motor for dry vacuum pump Download PDF

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Publication number
CN202285356U
CN202285356U CN2011204474403U CN201120447440U CN202285356U CN 202285356 U CN202285356 U CN 202285356U CN 2011204474403 U CN2011204474403 U CN 2011204474403U CN 201120447440 U CN201120447440 U CN 201120447440U CN 202285356 U CN202285356 U CN 202285356U
Authority
CN
China
Prior art keywords
pump
stator
motor
rotor
dry vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN2011204474403U
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Chinese (zh)
Inventor
李昌龙
王光玉
刘在行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences
Original Assignee
Shenyang Scientific Instrument R&D Center of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Scientific Instrument R&D Center of CAS filed Critical Shenyang Scientific Instrument R&D Center of CAS
Priority to CN2011204474403U priority Critical patent/CN202285356U/en
Application granted granted Critical
Publication of CN202285356U publication Critical patent/CN202285356U/en
Anticipated expiration legal-status Critical
Withdrawn - After Issue legal-status Critical Current

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Abstract

The utility model belongs to the field of vacuum pumps, and in particular relates to a motor for a dry vacuum pump. The motor comprises a motor casing, a stator and a rotor, wherein the stator with a cavity is arranged in the motor casing; the rotor is arranged on the driving shaft of the dry vacuum pump and positioned in the cavity of the stator; and the stator and a pump body are positioned by rabbets. By the motor, the problems of shaft seal leakage and starting impact are radically solved, the dynamic seal of the pump and the shaft is converted into the static seal of the motor stator and the pump, lubricating liquid is not required, the problems of shaft seal leakage and medium pollution are radically solved, and the problems of high frequency vibration and starting impact noise which are caused by a rigid coupler also are solved. The overall motor can be disassembled optionally, is convenient to maintain and easy to mount and has a short maintenance work period, time and labor are saved, and cost is lowered. In the air extracting process, a vacuum environment can be kept away from pollution, and the motor for the dry vacuum pump is suitable for the industry of semiconductors, petrochemicals, metallurgy, food, medicines, electrons, packaging, printing and the like.

Description

A kind of dry vacuum electric motor for pump
Technical field
The utility model belongs to field of vacuum, specifically a kind of dry vacuum electric motor for pump.
Background technology
Existing nowadays industry developments such as semiconductor, new material, solar energy and bio-pharmaceuticals are rapid, and relevant with it pumping equipment also will adapt to new requirement: one is the final vacuum height of will trying one's best, and another is that the vacuum environment that obtains should be that cleaning does not have oil.Under the guiding of these new demands, mechanical oilless vacuum pump arises at the historic moment, and dry vacuum pump has replaced the main pump of oil diffusion pump as system more and more, greatly reduces the return oil of vacuum pump to vacuum chamber like this.External dry vacuum pump is comparative maturity, and homemade dry vacuum pump is at the early-stage, and as the motor in dry vacuum pump actuating force source; China's kind is fewer, and homemade most of vaccum pump motors adopt positive coupling to be connected with the main shaft of pump at present, and this structure has very big drawback for dry vacuum pump; Main performance is that starting-impact is bigger, and noise is big, influences part useful life; And be unfavorable for saving energy and reduce the cost, more obvious greater than the pump more than the 3000r/s for big pumping speed rotating speed, driving shaft axle envelope is in the dither environment for a long time and the material cause wearing and tearing are very fast; Cause vacuum pump serious to vacuum chamber leakage of oil and gas leak phenomenon; Need frequent change axle envelope, influence the normal useful life and the production efficiency of pump, be not suitable for the requirement of dried pump.
The utility model content
Reveal and the starting-impact problem in order to overcome prior art axis envelope, the purpose of the utility model is to provide a kind of dry vacuum electric motor for pump.The utility model changes the movable sealing of pump and axle the static seal of motor stator and pump into, has thoroughly solved a leakage of axle envelope and a starting-impact problem.
The purpose of the utility model realizes through following technical scheme:
A kind of dry vacuum electric motor for pump comprises motor housing, stator and rotor, wherein is provided with the stator of band cavity in the motor housing, and said rotor is installed on the driving shaft of dry vacuum pump and is positioned at the cavity of stator; Adopt the seam location between the said stator and the pump housing.
Said motor housing is provided with the boiler water circulation cooling water pipe, and this boiler water circulation cooling water pipe is cast into one along stator circumference direction and motor housing.
Said motor housing is a cast aluminium alloy, infusion epoxy resin between motor housing and the stator.
Said rotor key is connected on the driving shaft of dry vacuum pump; Be provided with rotor baffle plate in the end of the driving shaft of dry vacuum pump to the rotor axial location; This rotor baffle plate passes through screw on driving shaft; Between rotor baffle plate and rotor, be provided with the spring that is enclosed within on the driving shaft, this spring is connected to rotor baffle plate and rotor respectively.
Said spring is a wavy spring.
Said internal rotor is provided with the overtemperature protection structure.
Said overtemperature protection structure is a thermistor.
Gap between the inner chamber of said rotor and stator is less than 0.5mm.
Adopt the sealing of 0 RunddichtringO between the said stator and the pump housing.
Said dry vacuum electric motor for pump is provided with frequency-variable controller.
The utlity model has following advantage:
The utility model thoroughly solves axle envelope and reveals and a starting-impact problem, changes the pump and the movable sealing of axle the static seal of motor stator and pump into, need not lubricating fluid; Thoroughly solved the axle envelope and revealed and the medium pollution problem, dither and starting-impact noise problem that positive coupling is caused also are able to solve, and motor integral body can arbitrarily be dismantled; Convenient for maintaining; Easy, maintenance duration weak point is installed, time saving and energy saving, reduce cost.In pumping process, can keep vacuum environment not contaminated, be applicable to industries such as semiconductor, petrochemical industry, metallurgy, food, medicine, electronics, packing, printing.
Description of drawings
Fig. 1 is the utility model structural representation.
Wherein: 1 is the pump housing, and 2 is 0 RunddichtringO, and 3 is the boiler water circulation cooling water pipe, and 4 is driving shaft, and 5 is the motor key, and 6 is stator, and 7 is rotor, and 8 is spring, and 9 is the rotor pressing plate, and 10 is screw, and 11 is motor housing.
Embodiment
Below in conjunction with accompanying drawing the utility model is further described.
As shown in Figure 1, the utility model comprises motor housing 11, stator 6 and rotor 7, wherein is provided with the stator 6 of band cavity in the motor housing 11, and said rotor 7 is connected with driving shaft 4 keys of dry vacuum pump through motor key 5, and places in the cavity of stator 6.End at the driving shaft 4 of dry vacuum pump is provided with the rotor baffle plate 9 to rotor 7 axial location; This rotor baffle plate 9 is fixed on the driving shaft 4 through screw 10; Between rotor baffle plate 9 and rotor 7, be provided with the spring 8 that is enclosed within on the driving shaft 4, this spring 8 is connected to rotor baffle plate 9 and rotor 7 respectively; Spring 8 is a wavy spring, and screw 10 is the M12 soket head cap screw.Adopt die perfusion epoxy resin to form the chamber of rotor 7 rotations between stator 6 and the motor housing 11; Adopt the seam location between the stator 6 and the pump housing 1 and adopt 2 sealings of fluorubber 0 RunddichtringO; Motor housing 11 adopts cast aluminium alloy.
Motor housing 11 and stator 6 are by 3 coolings of boiler water circulation cooling water pipe.This boiler water circulation cooling water pipe 3 can be arranged on the motor housing 11, and this boiler water circulation cooling water pipe 3 is cast into one along stator 6 circumferencial directions and motor housing 11.
For reaching the motor overheating protection, there is thermistor overtemperature protection structure said motor stator 6 inside unshakable in one's determination.The change in resistance of thermistor can be used to control rotating speed of motor and switch.
For obtaining better technique effect, the said gap that is installed in rotor 7 and stator 6 on the driving shaft 4 is less than 0.5mm; Said rotor need pass through dynamic balancing and detect, and amount of unbalance is less than 1gmm.
For realizing the variable frequency starting of vacuum pump, reduce to bleed and impact and the increase pumping speed, the also additional frequency-variable controller of the motor of the utility model.Said frequency-variable controller can adopt universal.
When the utility model motor power is connected, variable frequency starting, rotor 7 drives driving shaft 4 through motor key 5 and rotates; Owing to adopt the seam location between the motor stator and the pump housing 1, by close 2 sealings of fluorubber 0 circle, vacuum is pumped in stator 6 inside; This moment, rotor 7 was in vacuum chamber; Be static seal between the pump housing 1 and the motor, do not have traditional movable sealing and leakage problem in the total, do not have the impacting start problem that is rigidly connected.

Claims (10)

1. dry vacuum electric motor for pump; It is characterized in that: comprise motor housing (11), stator (6) and rotor (7); Wherein be provided with the stator (6) of band cavity in the motor housing (11), the cavity of stator (6) is gone up and be positioned to the driving shaft (4) that said rotor (7) is installed in dry vacuum pump; Adopt the seam location between the said stator (6) and the pump housing (1).
2. by the described dry vacuum electric motor for pump of claim 1, it is characterized in that: said motor housing (11) is provided with boiler water circulation cooling water pipe (3), and this boiler water circulation cooling water pipe (3) is cast into one along stator (6) circumferencial direction and motor housing (11).
3. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: said motor housing (11) is a cast aluminium alloy, infusion epoxy resin between motor housing (11) and the stator (6).
4. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: said rotor (7) key is connected on the driving shaft (4) of dry vacuum pump; End at the driving shaft (4) of dry vacuum pump is provided with the rotor baffle plate (9) to rotor (7) axial location; This rotor baffle plate (9) is fixed on the driving shaft (4) through screw (10); Between rotor baffle plate (9) and rotor (7), be provided with the spring (8) that is enclosed within on the driving shaft (4), this spring (8) is connected to rotor baffle plate (9) and rotor (7) respectively.
5. by the described dry vacuum electric motor for pump of claim 4, it is characterized in that: said spring (8) is a wavy spring.
6. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: said rotor (7) inside is provided with the overtemperature protection structure.
7. by the described dry vacuum electric motor for pump of claim 6, it is characterized in that: said overtemperature protection structure is a thermistor.
8. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: the gap between the inner chamber of said rotor (7) and stator (6) is less than 0.5mm.
9. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: adopt the sealing of 0 RunddichtringO between the said stator (6) and the pump housing (1).
10. by claim 1 or 2 described dry vacuum electric motor for pump, it is characterized in that: be provided with frequency-variable controller.
CN2011204474403U 2011-11-11 2011-11-11 Motor for dry vacuum pump Withdrawn - After Issue CN202285356U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011204474403U CN202285356U (en) 2011-11-11 2011-11-11 Motor for dry vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011204474403U CN202285356U (en) 2011-11-11 2011-11-11 Motor for dry vacuum pump

Publications (1)

Publication Number Publication Date
CN202285356U true CN202285356U (en) 2012-06-27

Family

ID=46296867

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011204474403U Withdrawn - After Issue CN202285356U (en) 2011-11-11 2011-11-11 Motor for dry vacuum pump

Country Status (1)

Country Link
CN (1) CN202285356U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103107647A (en) * 2011-11-11 2013-05-15 中国科学院沈阳科学仪器研制中心有限公司 Motor for dry-type vacuum pump
CN109931263A (en) * 2019-03-08 2019-06-25 西安航天动力研究所 A kind of dry type shielding vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103107647A (en) * 2011-11-11 2013-05-15 中国科学院沈阳科学仪器研制中心有限公司 Motor for dry-type vacuum pump
CN103107647B (en) * 2011-11-11 2015-06-03 中国科学院沈阳科学仪器股份有限公司 Motor for dry-type vacuum pump
CN109931263A (en) * 2019-03-08 2019-06-25 西安航天动力研究所 A kind of dry type shielding vacuum pump

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENT CO., LTD.

Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S

CP01 Change in the name or title of a patent holder

Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province.

Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences

Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province.

Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S

AV01 Patent right actively abandoned

Granted publication date: 20120627

Effective date of abandoning: 20150603

RGAV Abandon patent right to avoid regrant