CN202275052U - On-line trace nitrogen gas detector based on plasma emission spectroscopy - Google Patents

On-line trace nitrogen gas detector based on plasma emission spectroscopy Download PDF

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Publication number
CN202275052U
CN202275052U CN201120420961XU CN201120420961U CN202275052U CN 202275052 U CN202275052 U CN 202275052U CN 201120420961X U CN201120420961X U CN 201120420961XU CN 201120420961 U CN201120420961 U CN 201120420961U CN 202275052 U CN202275052 U CN 202275052U
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China
Prior art keywords
cavity
gas
ionization
plasma emission
detecting device
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CN201120420961XU
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Chinese (zh)
Inventor
周权
吕正伦
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CHONGQING CHUANYI ANALYZER Co Ltd
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CHONGQING CHUANYI ANALYZER Co Ltd
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Abstract

The utility model relates to the technical field of gas analysis detection equipment, in particular to a trace nitrogen gas detector capable of precisely and continuously detecting the concentration of trace impurity-containing nitrogen gas in argon gas. The goal of the trace nitrogen gas detector is realized through the following technical scheme that the on-line trace nitrogen gas detector based on plasma emission spectroscopy comprises an ionization gas chamber, an excitation unit, a receiver unit and a filter device, wherein the ionization gas chamber comprises a cavity and an ionization electrode arranged on the cavity, a gas inlet and a gas outlet are arranged on the cavity, the cavity is used for accommodating the detected gas, at least a part of the cavity is transparent, the excitation unit is electrically connected with the ionization electrode and exerts a high-frequency amplitude modulation oscillation electric field on the ionization electrode, the receiver unit is in arrangement opposite to the transparent part of the ionization chamber and is used for receiving optical signals sent by the detected gas in the ionization gas in the ionization state and converting the optical signals into electric signals, and the filter device is arranged between the receiver unit and the ionization gas chamber and is used for selecting light with specific wave length corresponding to the nitrogen gas in transmitted light signals.

Description

Online micro-nitrogen detecting device based on plasma emission spectrometry
Technical field
The utility model relates to gas analysis checkout equipment technical field, is specifically related to a kind of micro-nitrogen detecting device.
Background technology
At present; Existing concentration to the trace impurity nitrogen that contains in the argon gas mixed gas is carried out method for measuring and is: said mixed gas is input in the detecting device that has radioactive source; When measuring, measure the micro-nitrogen gas concn in the said mixed gas because of the radioactive source ion mobility that effect is produced to nitrogen.
On the one hand, because in recent years, radiomaterial influence living environment and health of human body growing interest both at home and abroad, so the method that employing radioactive source ionic migration method is measured the concentration of micro-nitrogen in the argon gas more and more not environmental protection and health.
On the other hand, owing to adopt the radioactive source ionic migration method to measure the method for the concentration of micro-nitrogen in the argon gas, its precision, the linearity and sensitivity are difficult to improve.
The utility model content
In view of this, the purpose of the utility model provides a kind of online micro-nitrogen detecting device based on plasma emission spectrometry, can high precision and measure continuously to the concentration of the impurity nitrogen that contains in the argon gas micro-ly.
The purpose of the utility model realizes through following technical scheme: the online micro-nitrogen detecting device based on plasma emission spectrometry comprises
The ionization air chamber comprises cavity and is arranged at the animating electrode on the cavity that said cavity is provided with air intake and gas outlet, and said cavity is used to hold tested gas, the partially transparent at least of cavity;
Excite the unit, be electrically connected, apply the Amplitude Modulation High Frequency oscillating electric field to animating electrode with animating electrode;
Acceptor unit, the part transparent with the ionization air chamber is oppositely arranged, and is used for receiving the light signal that the tested gas of ionized gas sends and converts electric signal under ionized state; And
Filtering device is arranged between acceptor unit and the ionization air chamber, is used for selecting to see through the light of the light signal specific wavelength corresponding with nitrogen.
Further, the cavity of said ionization air chamber is the quartz material cavity.
Further, said animating electrode is a copper electrode.
Further, the receiver of said acceptor unit is the photosensitive diode of semiconductor, photomultiplier or photodiode arrangement.
Further, said filtering device is interference filter device or optical splitter.
Further, the air intake of said cavity or gas outlet are electrically connected with flow controlling unit.
Further, also be provided with thermostat on the said acceptor unit.
The beneficial effect of the utility model is: avoided traditional use radiation source and environmental protection and the health problem brought; The sensitivity that has simultaneously improved detecting device greatly, make said detecting device can high precision, the concentration of trace impurity nitrogen in the high sensitivity, low drift ground on-line determination argon gas.
Other advantages, target and the characteristic of the utility model will be set forth in instructions subsequently to a certain extent; And to a certain extent; Based on being conspicuous to those skilled in the art, perhaps can from the practice of the utility model, obtain instruction to investigating of hereinafter.The target of the utility model and other advantages can realize and obtain through following instructions and claims.
Description of drawings
Fig. 1 shows the structural representation based on the online micro-nitrogen detecting device of plasma emission spectrometry.
Embodiment
Below will carry out detailed description to the preferred embodiment of the utility model.Should be appreciated that preferred embodiment has been merely explanation the utility model, rather than in order to limit the protection domain of the utility model.
Referring to Fig. 1, the online micro-nitrogen detecting device based on plasma emission spectrometry comprises:
The ionization air chamber comprises cavity 1 and is arranged at the animating electrode 2 on the cavity 1 that said cavity 1 is provided with air intake and gas outlet; Said cavity 1 is used to hold tested gas, and ionization takes place under the effect of animating electrode 2 tested gas, and the gas ions that obtains can be sent certain spectrum; At least the partially transparent of cavity 1, for improving spectral intensity, cavity 1 is selected the quartz material cavity for use; Animating electrode 2 is selected copper electrode for use, can improve to excite sensitivity and stability;
Excite unit 6, be electrically connected, apply the Amplitude Modulation High Frequency oscillating electric field to animating electrode 2 with animating electrode 2;
Acceptor unit 4; Be oppositely arranged with ionization air chamber cavity 1 transparent part; Be used for receiving the light signal that the tested gas of ionized gas sends and convert electric signal under ionized state; Be sent to processor unit or host computer and carry out its corresponding spectrum of analyzing and processing, can detect nitrogen content, the spectral method of detection of nitrogen can be used method of the prior art; Repeat no more at this, the receiver of acceptor unit is the photosensitive diode of semiconductor, photomultiplier or photodiode arrangement;
Filtering device 3 is arranged between acceptor unit 4 and the ionization air chamber, is used for selecting to see through the light of the light signal specific wavelength corresponding with nitrogen, and this wavelength is preferably 337nm ± 2nm, can select interference light filter spare or optical splitter for use.
Flow controlling unit 7, the air intake of said cavity or gas outlet are connected with flow controlling unit, can pass through Control Flow, improve the stability of spectrum light intensity.
Thermostat 5 is because acceptor unit 4 is vulnerable to the influence of environment temperature, so use thermostat 5 as acceptor unit 4 the steady temperature field to be provided.
Explanation is at last; Above embodiment is only unrestricted in order to the technical scheme of explanation the utility model; Although with reference to preferred embodiment the utility model is specified, those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement the technical scheme of the utility model; And not breaking away from the aim and the scope of present technique scheme, it all should be encompassed in the middle of the claim scope of the utility model.

Claims (7)

1. based on the online micro-nitrogen detecting device of plasma emission spectrometry, it is characterized in that: comprise
The ionization air chamber comprises cavity and is arranged at the animating electrode on the cavity that said cavity is provided with air intake and gas outlet, the partially transparent at least of cavity;
Excite the unit, be electrically connected, apply the Amplitude Modulation High Frequency oscillating electric field to animating electrode with animating electrode;
Acceptor unit, the part transparent with the ionization air chamber is oppositely arranged, and is used for receiving the light signal that the tested gas of ionized gas sends and converts electric signal under ionized state; And
Filtering device is arranged between acceptor unit and the ionization air chamber, is used for selecting to see through the light of the light signal specific wavelength corresponding with nitrogen.
2. the online micro-nitrogen detecting device based on plasma emission spectrometry according to claim 1, it is characterized in that: the cavity of said ionization air chamber is the quartz material cavity.
3. the online micro-nitrogen detecting device based on plasma emission spectrometry according to claim 1, it is characterized in that: said animating electrode is a copper electrode.
4. the online micro-nitrogen detecting device based on plasma emission spectrometry according to claim 1 is characterized in that: the receiver of said acceptor unit is the photosensitive diode of semiconductor, photomultiplier or photodiode arrangement.
5. the online micro-nitrogen detecting device based on plasma emission spectrometry according to claim 1, it is characterized in that: said filtering device is interference filter device or optical splitter.
6. according to each described online micro-nitrogen detecting device based on plasma emission spectrometry in the claim 1 to 5, it is characterized in that: the air intake of said cavity or gas outlet are electrically connected with flow controlling unit.
7. the online micro-nitrogen detecting device based on plasma emission spectrometry according to claim 6 is characterized in that: also be provided with thermostat on the said acceptor unit.
CN201120420961XU 2011-10-29 2011-10-29 On-line trace nitrogen gas detector based on plasma emission spectroscopy Expired - Lifetime CN202275052U (en)

Priority Applications (1)

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CN201120420961XU CN202275052U (en) 2011-10-29 2011-10-29 On-line trace nitrogen gas detector based on plasma emission spectroscopy

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Application Number Priority Date Filing Date Title
CN201120420961XU CN202275052U (en) 2011-10-29 2011-10-29 On-line trace nitrogen gas detector based on plasma emission spectroscopy

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CN202275052U true CN202275052U (en) 2012-06-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102507534A (en) * 2011-10-29 2012-06-20 重庆川仪分析仪器有限公司 Online micro-nitrogen detector based on plasma atomic emission spectrum method
CN106841485A (en) * 2017-02-16 2017-06-13 成都凯圣捷科技有限公司 PED plasma detectors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102507534A (en) * 2011-10-29 2012-06-20 重庆川仪分析仪器有限公司 Online micro-nitrogen detector based on plasma atomic emission spectrum method
CN106841485A (en) * 2017-02-16 2017-06-13 成都凯圣捷科技有限公司 PED plasma detectors

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