CN202275041U - Device for simultaneously measuring dynamic light scattering nano particle sizes of particles - Google Patents
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Abstract
The utility model discloses a device for simultaneously measuring dynamic light scattering nano particle sizes of particles. The device is characterized in that the device is formed by coaxially arranging a laser source, a sample pool, a lens and a planar-array photosensitive device. A laser beam irradiates the particles in the sample pool, the particles doing Brownian motion in the sample pool generate dynamic light scattering, dynamic light scattering signals of the particles are gathered after passing through the lens and are continuously recorded by the planar-array photosensitive device, at least more than one continuous image about the motion of the particles in time series is generated, and light spots, generated by the light scattering of the particles, on the continuous image form the locus of the Brownian motion of the particles to be measured. The device has the beneficial effects that: the dynamic light scattering signals of the particles can be simultaneously measured by using a planar-array digital camera, the particle size distribution of the particles can be obtained by processing all the dynamic light scattering signals of the particles, and thus, the time for measuring is greatly reduced; and particles of a wider size distribution range from nanometer to micrometer can be simultaneously measured.
Description
Technical field
The utility model relates to a kind of grain graininess measurement mechanism based on the dynamic light scattering principle, thereby particularly a kind of Brownian movement of adopting face battle array photosensitive device continuous detecting particle obtains the measurement mechanism of nanometer, sub-micron and micron particles granularity and distribution.
Background technology
The main method of particle sizing has the laser particle analyzer based on light scattering theory, is the static scattered light of measuring particle in laser particle analyzer.Its ultimate principle is when laser incides tested particle; Particle meeting scattering incident laser; The space distribution of its scattering luminous energy is relevant with the size of particle, measures the space distribution of its scattering luminous energy, uses the size-grade distribution that light scattering theory and inversion algorithm can obtain tested particle then.In this measuring method and laser particle analyzer,, measure so be called the static light scattering method because only consider the scattered light intensity of particle and the relation of grain size based on this method development.This method is applicable to the granulometry of submicron particles to micron particles, receives the restriction of static light scattering principle, not the granularity of energy measurement nano particle.
The multiple dynamic light scattering nano particles measuring method that the granulometry of nano particle mainly contains electron microscope and develops based on the dynamic light scattering theory; Wherein photon correlation spectroscopy method Photon correlation spectroscopy most importantly is called for short PCS.
The ultimate principle of PCS nano particles measuring method is when beam of laser incides tested nano particle sample; Because the Brownian movement of nano particle in liquid; Its scattered light can be pulsed, and the height of its ripple frequency is relevant with the coefficient of diffusion of particle, and coefficient of diffusion
D t Relevant with the granule size of particle, the diffusion of particle and the relation of granularity can use the Stocks-Einstein formula to describe:
In the formula
K B Be the graceful constant of bohr thatch,
TBe absolute temperature,
ηBe viscosity,
RIt is the radius of particle to be measured.
PCS nano particles method based on the classics of above-mentioned theory is measured its scattered light pulse in incident light 90 degree directions with photomultiplier or avalanche diode, adopts the correlator deal with data, obtains the coefficient of diffusion of particle
D t , obtain the size-grade distribution of nano particle then according to above-mentioned theory.The history in existing many years of this kind measuring method is the main method that present nano particle is measured, but still comes with some shortcomings; As being to obtain enough particle informations, the sampling time requires very long, and apparatus structure is complicated; Require tested granule density extremely low, cause specimen preparation difficulty etc.
Patent WO2010/149887 has improved this measuring method, adopts the rear orientation light of back to 180 degree angular measurement nano particles, and uses optical fiber input instead and receive measuring light, can measure the nano particle of high concentration.
Since the scattered light intensity of nano particle very a little less than, for obtaining the signal of sufficient intensity, must adopt more powerful laser instrument.Japan Shimadzu company has proposed a kind of new nano particle measuring method and instrument IG-1000 Particle Size Analyzer.In this method, light-sensitive detector spare is not a scattered light of measuring nano particle, but the electric field that produces with comb electrode earlier forms grating with tested nano particle, and beam of laser is incided this grating, measures its diffraction light.Remove electric field then, particle can spread, and measure the change procedure of diffraction light this moment again, with the size-grade distribution that obtains particle after the Measurement and Data Processing.
Patent GB2318889 (NanoSight) has proposed a kind of method of measuring each nano particles according to nano particle Brownian movement track following.In the method; One hemibase of sample cell plates metal level as thin as a wafer; Second half bottom surface, transparent sample pond is plated film not; Converge laser beam from the inciding from the side between sample cell plated film district and border that plated film does not go of sample cell, tested particle is produced than strong scattering light by diffraction effect and plasma resonant vibration effect meeting under laser radiation, is received with microcobjective at the incident light an angle of 90 degrees.Because particle is done Brownian movement; The scattered light meeting random drift that produces when particle is done Brownian movement under the laser radiation; Random drift movement locus with each the particle dynamic scattering of digital micro-analysis object lens record that has the CCD camera; Be the Brownian movement track of tested nano particle, just can obtain the granularity of each particle according to Stocks-Einstein formula (1).
Summary of the invention
The purpose of the utility model is to develop a kind of device that can measure granose dynamic light scattering nano particles simultaneously.
The ultimate principle of the utility model: when laser incided tested nano particle sample, scattering all can take place in all particles that shine, and scattered light pulses with the Brownian movement of particle, i.e. dynamic light scattering signal.The Simulated dynamic scattering light signals of these particles forms space distribution; Employing face battle array photosensitive device; Like CCD and CMOS camera or the continuous space distribution of taking the Simulated dynamic scattering light signals of numerous particles of video camera; Obtain the image sequence of particle dynamic light scattering, and the dynamic light scattering signal sequence of all these particles is handled.Because face battle array digital camera can write down the dynamic light scattering signal of many particles simultaneously, the dynamic light scattering signal of the many particles of parallel processing so simultaneously not only can greatly shorten Measuring Time, can also improve measuring accuracy and accuracy.And can only 1 clock signal of continuous coverage in the PCS method, for obtaining result accurately, need continuous coverage for a long time, to obtain enough data volumes.
Different with patent GB2318889 is, and what in the utility model, to measure is not the trajectory signal of particle Brownian movement, but the random pulse signal of the light scattering that the particle Brownian movement causes.
Based on above-mentioned inventive principle; The technical scheme of the utility model is: a kind of device of measuring granose dynamic light scattering nano particles simultaneously; Be characterized in; This measurement mechanism from left to right is made up of lasing light emitter, sample cell, lens, face battle array photosensitive device coaxial arrangement, and the particle of the laser beam incident laser radiation that lasing light emitter sends in the sample cell made the particle generation dynamic light scattering of Brownian movement down in the sample cell in the incident laser irradiation; The dynamic light scattering signal of these particles converges through behind the lens; Be disposed in the face battle array photosensitive device continuous recording on the lens focal plane, produce the consecutive image of the above seasonal effect in time series movement of particles of at least one width of cloth, the luminous point that grain optical scattering produces on the described consecutive image has formed the Brownian movement track of tested particle.
A kind of method of measuring granose dynamic light scattering nano particles when utilizing said apparatus is characterized in that these method concrete steps are:
1. the laser beam incident that will be sent by LASER Light Source is added with water or other particles to sample cell in the sample cell
Dispersing liquid;
2. take at this moment bias light signal pattern and record with face battle array digital camera;
3. in sample cell, add tested particulate samples;
4. take the also dynamic light scattering image of the above particle of at least one width of cloth of recorded and stored continuously;
5. after obtaining particle dynamic light scattering image continuous more than the width of cloth, particle dynamic light scattering signal image is handled with wavelet transformation, filtering algorithm or other Signal denoising algorithm according to the bias light image earlier, eliminated the noise of bias light;
6. select for use one of following 2 kinds of data processing methods to advance to the particle dynamic light scattering signal behind the elimination noise
Row is handled, and obtains the granularity and the distribution of particle:
(1) every width of cloth image segmentation is become N grid, a plurality of particle light spot signals are averaged in its each grid, and the signal with corresponding grid in this width of cloth image of continuous acquisition acquisition constitutes time series signal again; Can constitute N time series signal so altogether; Because the Brownian movement of particle, the scattered light intensity time series signal of formation will be a fluctuating signal, and its power spectrum is handled; Analyze the power spectrum signal of each ripple frequency section, use the Stocks-Einstein formula then
In the formula
K B Be the graceful constant of bohr thatch,
TBe absolute temperature,
ηBe viscosity,
RBe the radius of particle to be measured, obtain the size-grade distribution of particle,, use Stocks-Einstein formula (1) again, can obtain particle size distribution more accurately averaging after N the time series signal power spectrum;
(2) each light scattering point in the M width of cloth sequential chart picture of continuous acquisition acquisition is carried out
Follow the trail of, obtain its track.According to theory of Brownian motion, light scattering is constantly put the expectation value of relative origin displacement square and is at
:
Track by light scattering point can be in the hope of coefficient of diffusion according to formula (2)
D t , use Stocks-Einstein formula (1) again and obtain the corresponding grain graininess of this track.With all these results comprehensive after, can obtain the size-grade distribution of tested particle.
It should be noted that the track of the scattering luminous point in this algorithm is not the Brownian movement track of single nanoparticle; But in the measurement zone a plurality of do the Brownian movement particle to its dynamic light scattering signal influence each other cause gross effect, reflection be the particle mean size of a plurality of particles of this luminous point representative.
Described sample cell is arranged in the back of receiver lens; The laser beam that lasing light emitter sends incides earlier sample cell behind lens; The dynamic scattering light of its particle is quilt cover battle array photosensitive device or the continuous receiving record of video camera again, obtains to change continuously scattered light space of points distribution motion image sequence.
Be equipped with Dove prism behind the described LASER Light Source and change light path, reducing the size of measurement mechanism, the laser beam of being sent by LASER Light Source incides lens or sample cell after the corner prism rotates 90 degree.
Arranged that Dove prism changes the path of scattered light between described battle array photosensitive device and the sample cell; Laser beam is through inciding the tested particle in sample cell behind the receiver lens; The dynamic scattering light of particle of doing Brownian movement in the corner prism after 2 total reflections arrival face battle array photosensitive device; The dynamic light scattering signal of face battle array photosensitive device continuous recording particle obtains the sequential chart picture.
Described battle array photosensitive device is arranged in the incoming laser beam side direction less than 180 degree; Position greater than 0 degree; Generally can be in an angle of 90 degrees position; Face battle array photosensitive device records the dynamic light scattering signal of particle in side direction, carries out data processing according to the particle Simulated dynamic scattering light signals that side direction records, and obtains the granularity of nano particle.
Described battle array photosensitive device is made up of 2 face battle array photosensitive devices, and said 2 face battle array photosensors are arranged in the forward direction 0 degree position and the side direction 90 degree positions of the incoming laser beam that lasing light emitter sends, and measures the forward direction and the side direction dynamic scattering light of particle simultaneously.
Described battle array photosensitive device adopts CCD and CMOS camera.
The beneficial effect of the utility model is to utilize CCD or CMOS face battle array digital camera can measure the dynamic light scattering signal of many particles simultaneously; Dynamic light scattering signal to all these particles is handled, and just can obtain the size-grade distribution of particle, has significantly reduced Measuring Time; And can measure the particle of particle size distribution simultaneously than broad; Like existing several nanometers, hundreds of nanometers are also arranged, even arrive the particle of micron.And photon correlation spectroscopy method (PCS) the nano particles appearance based on the dynamic light scattering principle at present commonly used is that to obtain the Measuring Time that result accurately needs very long, and when wide size-grade distribution particle sizing, is difficult to obtain result accurately.
Description of drawings
Fig. 1 is the utility model embodiment 1 synoptic diagram;
Fig. 2 is the grid dividing synoptic diagram of the image of face battle array photosensitive device acquisition;
Fig. 3 is embodiment 2 synoptic diagram;
Fig. 4 is embodiment 3 synoptic diagram;
Fig. 5 is embodiment 4 synoptic diagram;
Fig. 6 is embodiment 5 synoptic diagram;
Fig. 7 is embodiment 6 synoptic diagram.
Embodiment
A kind of device of measuring granose dynamic light scattering nano particles simultaneously; By shown in Figure 1; From left to right by lasing light emitter 1, sample cell 3, lens 2; Face battle array photosensitive device 4 coaxial arrangement constitute, and the particle of the laser beam incident laser radiation that lasing light emitter 1 sends in the sample cell 3 made the particle generation dynamic light scattering of Brownian movement down in the sample cell 3 in the incident laser irradiation; The dynamic light scattering signal of these particles converges through behind the receiver lens 2; Be disposed in face battle array photosensitive device 4 continuous recordings on the lens focal plane, produce the consecutive image of the above seasonal effect in time series movement of particles of at least one width of cloth, the luminous point that grain optical scattering produces on the described consecutive image has reflected the Brownian movement of tested particle.
A kind of method of measuring granose dynamic light scattering nano particles is simultaneously utilized said apparatus, and its concrete step is: the laser beam incident that will be sent by LASER Light Source 1 is added with water or other particle dispersion liquid to sample cell 3 in the sample cell; Take at this moment bias light signal pattern and record with area array CCD and cmos digital camera; In sample cell 3, add tested particulate samples; Take the also dynamic light scattering image of the above particle of at least one width of cloth of recorded and stored continuously, image values confirms that according to the size of particle tested particle is bigger, arrives micron order like hundreds of nanometers; Because the frequency of Brownian movement is lower,, image values can be littler; As from 256-1024, particle is smaller, and nanometer is to the particle of hundreds of nanometers in full; Because the frequency ratio of Brownian movement is higher, image values must be big, as from 512-2048; After obtaining particle dynamic light scattering image continuous more than at least one width of cloth, according to the bias light image particle dynamic light scattering signal image is handled with wavelet transformation, filtering algorithm or other Signal denoising algorithm earlier, eliminate the noise of bias light; Particle dynamic light scattering signal to behind the elimination noise selects for use one of following 2 kinds of data processing methods to handle, and obtains the granularity and the distribution of particle:
(1) every width of cloth image segmentation is become N grid, a plurality of particle light spot signals are averaged in its each grid, and the signal with corresponding grid in this width of cloth image of continuous acquisition acquisition constitutes time series signal again; Can constitute N time series signal so altogether; Because the Brownian movement of particle, the scattered light intensity time series signal of formation will be a fluctuating signal, and its power spectrum is handled; Analyze the power spectrum signal of each ripple frequency section, use the Stocks-Einstein formula then
In the formula
K B Be the graceful constant of bohr thatch,
TBe absolute temperature,
ηBe viscosity,
RBe the radius of particle to be measured, obtain the size-grade distribution of particle,, use Stocks-Einstein formula (1) again, can obtain particle size distribution more accurately averaging after N the time series signal power spectrum;
(2) each light scattering point in the above sequential chart picture of at least one width of cloth of continuous acquisition acquisition is followed the trail of,
Obtain its track.According to theory of Brownian motion, constantly the expectation value of the relative origin displacement of scattering luminous point square is at
:
（2）
Track by the scattering luminous point can be in the hope of coefficient of diffusion according to formula (2)
D t , use Stocks-Einstein formula (1) again and obtain the corresponding grain graininess of this track.With all these results comprehensive after, can obtain the size-grade distribution of tested particle.
Concrete applying step is following:
Earlier obtain its average displacement amount according to each the light scattering point in the multiple image of continuous coverage, as the average displacement amount of certain the light scattering point that obtains
r, the shooting interval time of each width of cloth image is τ, can obtain coefficient of diffusion by formula (2)
D t , obtain coefficient of diffusion
D t After, obtain the granularity of the corresponding particle of this light scattering point again according to formula (1)
RThe granularity of all particles that obtained by the scattering luminous point of statistics is just obtained the size-grade distribution of tested particle.
A kind of embodiment of measuring the device of granose dynamic light scattering nano particles is simultaneously explained through following examples:
Embodiment 1:
By shown in Figure 1; The laser beam incident that lasing light emitter 1 sends is put into tested particulate samples to sample cell 3 in the sample cell 3, particle meeting scattering incident laser; The scattered light of particle is collected the back forms space distribution on the focal plane of lens 2 scattering luminous point by lens 2; The scattering luminous point of this space distribution the random variation of intensity and position can occur in time because the effect with Brownian movement of varying in size of particle, but the random variation of this spot intensity and the position quilt face battle array photosensitive device 4 of continuous coverage; Like CCD or CMOS camera or camera record, obtain to change continuously the space distribution image sequence of scattering luminous point.Since the Brownian movement of particle with vary in size, the scattering luminous point on the consecutive image sequence relevant position of face battle array photosensitive device 4 records changes, according to the grain size difference, its change frequency also is different.The difference of these frequencies has promptly characterized the difference of grain graininess size.
In this light path arrangement, the diameter of lens 2 should be able to guarantee that the scattering luminous energy quilt cover battle array photosensitive device 4 of particle correctly receives.
The images recorded sequence is divided into N grid, shown in Fig. 2.1 is face battle array photosensitive device among the figure, like the image of CCD and CMOS camera or video camera acquisition, the 2nd, the grid of dividing, the 3rd, the dynamic scattering luminous point of particle.Particle dynamic light scattering signal to behind the elimination noise selects for use one of aforementioned 2 kinds of data processing methods to handle, and obtains the granularity and the distribution of particle.
Embodiment 2:
Shown in Fig. 3; Different with embodiment 1 is the back that described sample cell 3 is arranged in receiver lens 2; The laser beam that lasing light emitter 1 sends incides earlier sample cell 3 behind lens 2; The dynamic scattering light of its particle is quilt cover battle array photosensitive device 4 again, like CCD or CMOS camera or the continuous receiving record of video camera, obtains to change continuously scattered light space of points distribution motion image sequence.
Embodiment 3:
In the light path of laser beam 1, sample cell 3, lens 2, face battle array photosensitive device 4 coaxial arrangement, whole device size is long in embodiment 1 and embodiment 2.For reducing the size of measurement mechanism, shown in Fig. 4, be equipped with the corner prism behind the described LASER Light Source 1, reducing the size of measurement mechanism, the laser beam of being sent by LASER Light Source 1 incides lens 2 or sample cell 3 after the corner prism rotates 90 degree.Shown in Fig. 4, after sample cell 3 is arranged in lens 2.Before this sample cell 3 also can be arranged in lens 2.
Embodiment 4:
By shown in Figure 5; Arranged that Dove prism 5 changes the path of scattered light between described battle array photosensitive device 4 and the sample cell 3; The laser beam that LASER Light Source 1 sends is through inciding the tested particle in sample cell 3 behind the lens 2; The dynamic scattering light 6 of particle of doing Brownian movement in Dove prism 5 after 2 total reflections arrival face battle array photosensitive device 4, the dynamic light scattering signal of face battle array photosensitive device 4 continuous recording particles obtains the sequential chart picture.Adopt this layout can reduce the size of measurement mechanism.Dove prism 5 also can use 2 corner prisms or other optical elements to replace, and just can as long as realize the optical element of the direction of propagation of change light.Before sample cell 3 also can be arranged in lens 2 in the present embodiment, the laser beam that lasing light emitter 1 sends at first incided sample cell 3, and the dynamic scattering light of particle is received and record through lens 2 and Dove prism 5 arrival face battle array photosensitive devices 4 then continuously.
Embodiment 5:
Shown in Fig. 6, in the present embodiment, face battle array photosensitive device 4 is not to be arranged in the forward direction that lasing light emitter 1 gives off laser beam; Described battle array photosensitive device 4 is arranged in lasing light emitter 1 and gives off laser beam side direction less than 180 degree, greater than 0 degree position, generally in 90 angle positions; At the yardstick of nano particle, the space distribution of the scattered light intensity of particle can be used the Rayleigh scattering theoretical description, and is also very strong at the scattered light intensity of side direction; Therefore; Face battle array photosensitive device records the dynamic light scattering signal of particle in side direction, carries out data processing according to the particle Simulated dynamic scattering light signals that side direction records, and obtains the granularity of nano particle.
Embodiment 6:
By shown in Figure 7; In the present embodiment; Described battle array photosensitive device is made up of 2 face battle array photosensitive devices, and said 2 face battle array photosensors are arranged in the forward direction 0 degree position and the side direction 90 degree positions of the incoming laser beam that lasing light emitter sends, and measures the forward direction and the side direction dynamic scattering light of particle simultaneously.For sub-micron and micron particles, forward scattering light intensity and lateral scattering light intensity differ greatly, and forward direction and side direction are measured simultaneously, can more accurately confirm the granularity of particle.
Claims (7)
1. device of measuring granose dynamic light scattering nano particles simultaneously; It is characterized in that; This measurement mechanism from left to right is made up of lasing light emitter, sample cell, lens, face battle array photosensitive device coaxial arrangement; The particle of the laser beam incident laser radiation that lasing light emitter sends in the sample cell; The particle of under the incident laser irradiation, doing Brownian movement in the sample cell produces dynamic light scattering, and the dynamic light scattering signal of these particles converges through behind the lens, is disposed in the face battle array photosensitive device continuous recording on the lens focal plane; Produce the consecutive image of the above seasonal effect in time series movement of particles of at least one width of cloth, the luminous point that grain optical scattering produces on the described consecutive image has formed the Brownian movement track of tested particle.
2. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 1; It is characterized in that; Described sample cell is arranged in the back of receiver lens; The laser beam that lasing light emitter sends incides sample cell earlier behind lens, the dynamic scattering light of its particle is quilt cover battle array photosensitive device or the continuous receiving record of video camera again, obtains to change continuously scattered light space of points distribution motion image sequence.
3. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 1 and 2; It is characterized in that; Be equipped with the corner prism behind the described LASER Light Source; Reducing the size of measurement mechanism, the laser beam of being sent by LASER Light Source incides lens or sample cell after the corner prism rotates 90 degree.
4. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 1; It is characterized in that; Arranged that between described battle array photosensitive device and sample cell Dove prism changes the path of scattered light; Laser beam is through inciding the tested particle in sample cell behind the lens; The dynamic scattering light of particle of doing Brownian movement in the corner prism after 2 total reflections arrival face battle array photosensitive device, the dynamic light scattering signal of face battle array photosensitive device continuous recording particle obtains the sequential chart picture.
5. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 2; It is characterized in that; Face battle array photosensitive device is arranged in the incoming laser beam side direction less than 180 degree, and greater than the position of 0 degree, face battle array photosensitive device records the dynamic light scattering signal of particle in side direction; Particle Simulated dynamic scattering light signals according to side direction records is carried out data processing, obtains the granularity of nano particle.
6. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 2; It is characterized in that; Described battle array photosensitive device is made up of 2 face battle array photosensitive devices; Said 2 face battle array photosensors are arranged in the forward direction 0 degree position and the side direction 90 degree positions of the incoming laser beam that lasing light emitter sends, and measure the forward direction and the side direction dynamic scattering light of particle simultaneously.
7. the device of measuring granose dynamic light scattering nano particles simultaneously according to claim 1 is characterized in that, face battle array photosensitive device adopts CCD and CMOS camera.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102109454A (en) * | 2011-03-17 | 2011-06-29 | 上海理工大学 | Device for synchronously measuring granularity of dynamic light scattering nanometer particles of multi-particles and method thereof |
| CN104359804A (en) * | 2013-07-22 | 2015-02-18 | 南通大学 | Optical system capable of simply and conveniently detecting size and shape of particle |
| CN108291861A (en) * | 2015-09-23 | 2018-07-17 | 马尔文帕纳科 | particle characterization |
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- 2011-03-17 CN CN201120070411XU patent/CN202275041U/en not_active Expired - Fee Related
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| CN102109454A (en) * | 2011-03-17 | 2011-06-29 | 上海理工大学 | Device for synchronously measuring granularity of dynamic light scattering nanometer particles of multi-particles and method thereof |
| CN104359804A (en) * | 2013-07-22 | 2015-02-18 | 南通大学 | Optical system capable of simply and conveniently detecting size and shape of particle |
| CN104359804B (en) * | 2013-07-22 | 2017-10-17 | 南通大学 | Succinctly, the easily optical system of detection of particles size and shape |
| US11002655B2 (en) | 2015-09-23 | 2021-05-11 | Malvern Panalytical Limited | Cuvette carrier |
| US10845287B2 (en) | 2015-09-23 | 2020-11-24 | Malvern Panalytical Limited | Particle characterisation |
| CN108291861A (en) * | 2015-09-23 | 2018-07-17 | 马尔文帕纳科 | particle characterization |
| CN108291861B (en) * | 2015-09-23 | 2021-10-12 | 马尔文帕纳科 | Particle characterization |
| US11435275B2 (en) | 2015-09-23 | 2022-09-06 | Malvern Panalytical Limited | Particle characterisation |
| US11187638B2 (en) | 2016-03-16 | 2021-11-30 | Malvern Panalytical Limited | Particle characterisation |
| US11747257B2 (en) | 2016-03-16 | 2023-09-05 | Malvern Panalytical Limited | Particle characterization |
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| US11906412B2 (en) | 2017-03-23 | 2024-02-20 | Malvern Panalytical Limited | Particle characterisation |
| CN111239012A (en) * | 2020-03-31 | 2020-06-05 | 山东大学 | Aerosol particle detection system and method |
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