CN202263761U - Furnace tube cleaning platform - Google Patents

Furnace tube cleaning platform Download PDF

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Publication number
CN202263761U
CN202263761U CN 201120384709 CN201120384709U CN202263761U CN 202263761 U CN202263761 U CN 202263761U CN 201120384709 CN201120384709 CN 201120384709 CN 201120384709 U CN201120384709 U CN 201120384709U CN 202263761 U CN202263761 U CN 202263761U
Authority
CN
China
Prior art keywords
boiler tube
cleaning platform
motor
turning cylinder
furnace tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201120384709
Other languages
Chinese (zh)
Inventor
叶宗桂
柏才利
业海俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHENZHEN SI SEMICONDUCTORS CO Ltd
Original Assignee
SHENZHEN SI SEMICONDUCTORS CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHENZHEN SI SEMICONDUCTORS CO Ltd filed Critical SHENZHEN SI SEMICONDUCTORS CO Ltd
Priority to CN 201120384709 priority Critical patent/CN202263761U/en
Application granted granted Critical
Publication of CN202263761U publication Critical patent/CN202263761U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a furnace tube cleaning platform, comprising: a cleaning platform, a rotation axle mounted on the cleaning platform and a motor used for driving the rotation axle, wherein the rotation axle rotates under the drive of the motor. When a diffusion furnace is cleaned by the furnace tube cleaning platform and the rotation axle is driven to rotate by the motor, therefore the diffusion furnace tube is driven to rotate without manual operation.

Description

The boiler tube rinsing table
[technical field]
The utility model relates to semiconductor applications, relates in particular to a kind of boiler tube rinsing table.
[background technology]
Traditional boiler tube rinsing table is when cleaning the boiler tube of diffusion furnace, and general the selection is placed on boiler tube on the boiler tube rinsing table, adopts manually-operated to rotate boiler tube, cleans to accomplish.
Yet, adopt manually-operated to rotate boiler tube, be infected with dirt when causing boiler tube to clean easily, cause influence to product quality.
[utility model content]
Based on this, do not need manually-operated to rotate the boiler tube rinsing table of boiler tube when being necessary to provide a kind of boiler tube that cleans diffusion furnace.
A kind of boiler tube rinsing table comprises: cleaning platform, the motor that is installed in the turning cylinder on the said cleaning platform and is used to drive said turning cylinder; Said turning cylinder can rotate under the driving of said motor.
Preferably, said turning cylinder comprises axis body and is set in the cleaning ring on the said axis body.
Preferably, said rotation the tip of the axis links to each other with said motor.
This boiler tube rinsing table rotates through the motor-driven turning cylinder when cleaning diffusion furnace, rotates thereby drive the diffusion furnace boiler tube, does not need manually-operated to rotate boiler tube.
[description of drawings]
Fig. 1 is the structural representation of the boiler tube rinsing table of an embodiment.
[specific embodiment]
Below in conjunction with accompanying drawing and embodiment the boiler tube rinsing table is done further and to be explained.
The boiler tube rinsing table of an embodiment as shown in Figure 1 comprises: cleaning platform 10, the motor 30 (figure is the display part structure only) that is installed in the turning cylinder 20 on the cleaning platform 10 and is used for driving turning cylinder 20.
In order clearerly to see turning cylinder 20, cleaning platform 10 is the display part structure only, and actual cleaning platform 10 should be rectangular structure.
Turning cylinder 20 can rotate under the driving of motor 30.
Turning cylinder 20 comprises axis body 22 and is set in the cleaning ring 24 on the axis body 22.
The end of turning cylinder 20 links to each other with motor 30.
This boiler tube rinsing table drives turning cylinder 20 through motor 30 and rotates when cleaning diffusion furnace, rotates thereby drive the diffusion furnace boiler tube, does not need manually-operated to rotate boiler tube.
Use this boiler tube rinsing table to clean diffusion furnace, safer with respect to traditional mode, clean cleanliness factor thereby reduce simultaneously to stain to improve.
The above embodiment has only expressed one or more embodiments of the utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to the protection domain of the utility model.Therefore, the protection domain of the utility model patent should be as the criterion with accompanying claims.

Claims (3)

1. a boiler tube rinsing table is characterized in that, comprising: cleaning platform, the motor that is installed in the turning cylinder on the said cleaning platform and is used to drive said turning cylinder; Said turning cylinder can rotate under the driving of said motor.
2. boiler tube rinsing table as claimed in claim 1 is characterized in that, said turning cylinder comprises axis body and is set in the cleaning ring on the said axis body.
3. boiler tube rinsing table as claimed in claim 1 is characterized in that, said rotation the tip of the axis links to each other with said motor.
CN 201120384709 2011-10-11 2011-10-11 Furnace tube cleaning platform Expired - Fee Related CN202263761U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120384709 CN202263761U (en) 2011-10-11 2011-10-11 Furnace tube cleaning platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201120384709 CN202263761U (en) 2011-10-11 2011-10-11 Furnace tube cleaning platform

Publications (1)

Publication Number Publication Date
CN202263761U true CN202263761U (en) 2012-06-06

Family

ID=46154572

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201120384709 Expired - Fee Related CN202263761U (en) 2011-10-11 2011-10-11 Furnace tube cleaning platform

Country Status (1)

Country Link
CN (1) CN202263761U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110238116A (en) * 2019-06-28 2019-09-17 上海提牛机电设备有限公司 12 cun of one kind boiler tube cleaning groove mechanism compatible with eight cun and boiler tube rinse bath equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110238116A (en) * 2019-06-28 2019-09-17 上海提牛机电设备有限公司 12 cun of one kind boiler tube cleaning groove mechanism compatible with eight cun and boiler tube rinse bath equipment
CN110238116B (en) * 2019-06-28 2020-07-03 上海提牛机电设备有限公司 Twelve-inch and eight-inch compatible furnace tube cleaning tank mechanism and furnace tube cleaning tank equipment

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120606

Termination date: 20161011