CN202263761U - Furnace tube cleaning platform - Google Patents
Furnace tube cleaning platform Download PDFInfo
- Publication number
- CN202263761U CN202263761U CN 201120384709 CN201120384709U CN202263761U CN 202263761 U CN202263761 U CN 202263761U CN 201120384709 CN201120384709 CN 201120384709 CN 201120384709 U CN201120384709 U CN 201120384709U CN 202263761 U CN202263761 U CN 202263761U
- Authority
- CN
- China
- Prior art keywords
- boiler tube
- cleaning platform
- motor
- turning cylinder
- furnace tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning In General (AREA)
Abstract
The utility model discloses a furnace tube cleaning platform, comprising: a cleaning platform, a rotation axle mounted on the cleaning platform and a motor used for driving the rotation axle, wherein the rotation axle rotates under the drive of the motor. When a diffusion furnace is cleaned by the furnace tube cleaning platform and the rotation axle is driven to rotate by the motor, therefore the diffusion furnace tube is driven to rotate without manual operation.
Description
[technical field]
The utility model relates to semiconductor applications, relates in particular to a kind of boiler tube rinsing table.
[background technology]
Traditional boiler tube rinsing table is when cleaning the boiler tube of diffusion furnace, and general the selection is placed on boiler tube on the boiler tube rinsing table, adopts manually-operated to rotate boiler tube, cleans to accomplish.
Yet, adopt manually-operated to rotate boiler tube, be infected with dirt when causing boiler tube to clean easily, cause influence to product quality.
[utility model content]
Based on this, do not need manually-operated to rotate the boiler tube rinsing table of boiler tube when being necessary to provide a kind of boiler tube that cleans diffusion furnace.
A kind of boiler tube rinsing table comprises: cleaning platform, the motor that is installed in the turning cylinder on the said cleaning platform and is used to drive said turning cylinder; Said turning cylinder can rotate under the driving of said motor.
Preferably, said turning cylinder comprises axis body and is set in the cleaning ring on the said axis body.
Preferably, said rotation the tip of the axis links to each other with said motor.
This boiler tube rinsing table rotates through the motor-driven turning cylinder when cleaning diffusion furnace, rotates thereby drive the diffusion furnace boiler tube, does not need manually-operated to rotate boiler tube.
[description of drawings]
Fig. 1 is the structural representation of the boiler tube rinsing table of an embodiment.
[specific embodiment]
Below in conjunction with accompanying drawing and embodiment the boiler tube rinsing table is done further and to be explained.
The boiler tube rinsing table of an embodiment as shown in Figure 1 comprises: cleaning platform 10, the motor 30 (figure is the display part structure only) that is installed in the turning cylinder 20 on the cleaning platform 10 and is used for driving turning cylinder 20.
In order clearerly to see turning cylinder 20, cleaning platform 10 is the display part structure only, and actual cleaning platform 10 should be rectangular structure.
Turning cylinder 20 can rotate under the driving of motor 30.
Turning cylinder 20 comprises axis body 22 and is set in the cleaning ring 24 on the axis body 22.
The end of turning cylinder 20 links to each other with motor 30.
This boiler tube rinsing table drives turning cylinder 20 through motor 30 and rotates when cleaning diffusion furnace, rotates thereby drive the diffusion furnace boiler tube, does not need manually-operated to rotate boiler tube.
Use this boiler tube rinsing table to clean diffusion furnace, safer with respect to traditional mode, clean cleanliness factor thereby reduce simultaneously to stain to improve.
The above embodiment has only expressed one or more embodiments of the utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to the protection domain of the utility model.Therefore, the protection domain of the utility model patent should be as the criterion with accompanying claims.
Claims (3)
1. a boiler tube rinsing table is characterized in that, comprising: cleaning platform, the motor that is installed in the turning cylinder on the said cleaning platform and is used to drive said turning cylinder; Said turning cylinder can rotate under the driving of said motor.
2. boiler tube rinsing table as claimed in claim 1 is characterized in that, said turning cylinder comprises axis body and is set in the cleaning ring on the said axis body.
3. boiler tube rinsing table as claimed in claim 1 is characterized in that, said rotation the tip of the axis links to each other with said motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120384709 CN202263761U (en) | 2011-10-11 | 2011-10-11 | Furnace tube cleaning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120384709 CN202263761U (en) | 2011-10-11 | 2011-10-11 | Furnace tube cleaning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202263761U true CN202263761U (en) | 2012-06-06 |
Family
ID=46154572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120384709 Expired - Fee Related CN202263761U (en) | 2011-10-11 | 2011-10-11 | Furnace tube cleaning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202263761U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110238116A (en) * | 2019-06-28 | 2019-09-17 | 上海提牛机电设备有限公司 | 12 cun of one kind boiler tube cleaning groove mechanism compatible with eight cun and boiler tube rinse bath equipment |
-
2011
- 2011-10-11 CN CN 201120384709 patent/CN202263761U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110238116A (en) * | 2019-06-28 | 2019-09-17 | 上海提牛机电设备有限公司 | 12 cun of one kind boiler tube cleaning groove mechanism compatible with eight cun and boiler tube rinse bath equipment |
| CN110238116B (en) * | 2019-06-28 | 2020-07-03 | 上海提牛机电设备有限公司 | Twelve-inch and eight-inch compatible furnace tube cleaning tank mechanism and furnace tube cleaning tank equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20161011 |