CN202246978U - Oxidation resistant wire drawing pipe - Google Patents
Oxidation resistant wire drawing pipe Download PDFInfo
- Publication number
- CN202246978U CN202246978U CN201120286024XU CN201120286024U CN202246978U CN 202246978 U CN202246978 U CN 202246978U CN 201120286024X U CN201120286024X U CN 201120286024XU CN 201120286024 U CN201120286024 U CN 201120286024U CN 202246978 U CN202246978 U CN 202246978U
- Authority
- CN
- China
- Prior art keywords
- wire drawing
- drawing pipe
- pipe
- oxidation resistant
- resistant wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to the technical field of semiconductor manufacture, and relates to an appliance used for a semiconductor of a device, in particularly to an oxidation resistant wire drawing pipe, which comprises a wire drawing pipe body and a pipe cap, wherein the pipe cap adopts a structure capable of covering the wire drawing pipe body; the pipe cap is internally provided with a shrinkage groove, the shrinkage groove is internally provided with a steel mesh, and adsorbent is arranged in the steel mesh. As a result, the wire drawing pipe of the structure has the advantage that the quality of produced crystal bars is better.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, relates to a kind of apparatus that installs semiconducter device, specifically relates to the wire drawing pipe.
Background technology
The wire drawing pipe is the apparatus with the molecule proper alignment of raw semiconductor, and raw material is contained in and carries out heat in the wire drawing pipe during use, makes the molecule proper alignment of the inside; In the prior art, employed wire drawing pipe has only a chamber, and the inside holds has only raw material powder; Like this in the stringy process; Just have impurity such as water vapour, oxygen, these impurity can endanger crystal bar, influence the quality of crystal bar.
Summary of the invention
The purpose of the utility model is exactly to above-mentioned shortcoming, provides a kind of crystal bar quality of producing higher wire drawing pipe---anti-oxidation wire drawing pipe.
The technical scheme of the utility model is achieved in that anti-oxidation wire drawing pipe; Comprise wire drawing tube body and Guan Gai; Described pipe lid has the structure that is covered with the wire drawing tube body, it is characterized in that, described pipe lid inside has a retraction slot; Have a woven wire in the retraction slot, be placed with sorbent material in the woven wire.
The beneficial effect of the utility model is: the wire drawing pipe of this spline structure has the higher advantage of producing of crystal bar quality.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Wherein: 1, pipe cover 2, retraction slot 3, woven wire 4, sorbent material.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further to describe.
As shown in Figure 1, anti-oxidation wire drawing pipe comprises that wire drawing tube body and pipe cover 1; Described pipe lid 1 has the structure that is covered with the wire drawing tube body, it is characterized in that described pipe covers 1 inside and has a retraction slot 2; Have a woven wire 3 in the retraction slot 2, be placed with sorbent material 4 in the woven wire 3.
Claims (1)
1. anti-oxidation wire drawing pipe comprises wire drawing tube body and Guan Gai, and described pipe lid has the structure that is covered with the wire drawing tube body, it is characterized in that, described pipe lid inside has a retraction slot, has a woven wire in the retraction slot, is placed with sorbent material in the woven wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120286024XU CN202246978U (en) | 2011-08-09 | 2011-08-09 | Oxidation resistant wire drawing pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120286024XU CN202246978U (en) | 2011-08-09 | 2011-08-09 | Oxidation resistant wire drawing pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202246978U true CN202246978U (en) | 2012-05-30 |
Family
ID=46108248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120286024XU Expired - Fee Related CN202246978U (en) | 2011-08-09 | 2011-08-09 | Oxidation resistant wire drawing pipe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202246978U (en) |
-
2011
- 2011-08-09 CN CN201120286024XU patent/CN202246978U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20120809 |