CN202238722U - Water supply system for semiconductor organic cleaning equipment - Google Patents
Water supply system for semiconductor organic cleaning equipment Download PDFInfo
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- CN202238722U CN202238722U CN2011203843487U CN201120384348U CN202238722U CN 202238722 U CN202238722 U CN 202238722U CN 2011203843487 U CN2011203843487 U CN 2011203843487U CN 201120384348 U CN201120384348 U CN 201120384348U CN 202238722 U CN202238722 U CN 202238722U
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- water tank
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- cleaning equipment
- heating water
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Abstract
The utility model discloses a water supply system for semiconductor organic cleaning equipment. The water supply system comprises a heating water tank, a cleaning pump and a water outlet pipeline, wherein the heating water tank is used for recycling cleaning waste water; the cleaning pump is connected with a discharge pipe of the heating water tank; the water outlet pipeline is connected to a technological cavity from the cleaning pump; an electromagnetic heating system directly contacted with water stored in the heating water tank is arranged in the heating water tank; and a water temperature acquisition device with the measurement range higher than 60 DEG C is arranged in the heating water tank; water quality is maintained by adopting an automatic stepped electromagnetic heating mode; and the heating water tank can be combined with a plurality of systems for use. With the adoption of the technical scheme, under the premise of meeting the requirements on ultrapure water used for semiconductor cleaning, a plurality of filters and a resistivity measurement device required for the conventional system are saved, and therefore, considerable processing cost is saved, and the time for normal operation of equipment is remarkably increased.
Description
Technical field
The utility model relates to a kind of Semiconductor Organic cleaning equipment, relates in particular to a kind of Semiconductor Organic cleaning equipment that utilizes filter realization self ultra-pure water systemic circulation to utilize.
Background technology
In the semiconductor machining industry, Spindle Accel semiconductor cleaning machine is a kind of organic washing equipment commonly used.And along with the production requirement of energy-conserving and environment-protective day by day is rooted in the hearts of the people, the Zero discharging system ultra-pure water recycle of this type of cleaning machine equipment just becomes one of important technology key of this cleaning machine.Because the characteristic of cleaning products itself, the result of cleaning must cause the filter needs of cleaning machine self often to be changed.Even yet for the cleaning of the higher semiconductor product of relative cleannes; Former abroad factory uses and changed a filter in basic one month; And after using at home; Under equal working condition and output the replacing frequency upgrading of filter several times, brought huge cost consumption to semiconductor machining.
As shown in Figure 1, be the inner ultra-pure water circulation line of traditional Spindle Accel sketch map.Visible traditional ultra-pure water cyclic utilization system from illustrating; Need be through three filters (deionization filtration 11, activated carbon filtration 12, micro particle filtering 13); And then through after the resistivity measurement (Resistivity measurement); Get into the wash chamber of semiconductor product again, the waste water after the cleaning is recycled to the ultra-pure water storage tank again.
Summary of the invention
In view of the defective that above-mentioned prior art exists, the purpose of the utility model is the water system that proposes a kind of Semiconductor Organic cleaning equipment.
For realizing the above-mentioned purpose of the utility model; Its technical scheme is: the water system of Semiconductor Organic cleaning equipment; It is characterized in that: the composition of said water system comprises the heating water tank that is used to reclaim Cleaning Wastewater; The scavenging pump that links to each other with the heating water tank delivery pipe; And be connected to the outlet pipeline of process cavity from scavenging pump, be provided with the electromagnetic heating system that directly contacts with water storage wherein in the wherein said heating water tank, and be provided with the water temperature harvester that measurement category is higher than 60 ℃ in the said heating water tank.
Preferably; Said electromagnetic heating system has automatic stepped temperature heating unit; Said temperature heating unit comprises heater automatic switchover controller and two other active heating wire of higher level; And the output of water temperature harvester is connected among the heater automatic switchover controller, and the active heating wire of different stage is that part is communicated with, all is communicated with or Close All in the different temperatures interval.
Preferably, said electromagnetic heating system has anti-dry control unit, and heating water tank is provided with level measurement device, and the level measuring result exports anti-dry control unit to, opens or close said electromagnetic heating system.Wherein level measurement device comprises ball float and the signal circuit thereof in the heating water tank, and is provided with time-delay relay in the said signal circuit.
Preferably, said heating water tank delivery pipe connects the scavenging pump more than two or two, is communicated to the above process cavity of two covers respectively.
Preferably, be provided with the automatic water-supply switch control unit between this heating water tank delivery pipe and each scavenging pump.
Use the technical scheme of the utility model, can clean under the used ultra-pure water requirement satisfying semiconductor, save a plurality of filters and the resistivity test device of legacy system, thereby saved considerable processing cost, increased the time of the normal operation of equipment greatly.
Description of drawings
Fig. 1 is the supply channel circulation sketch map that the inner ultra-pure water of traditional Spindle Accel follows.
Fig. 2 is the water system block diagram that the present invention improves back one preferred embodiment.
Fig. 3 be embodiment illustrated in fig. 2 in the circulation sketch map of a supply channel.
Fig. 4 is the circuit diagram of the utility model anti-dry control unit and automatic water-supply switch control unit.
Fig. 5 is the utility model ball float and signal circuit sketch map thereof.
Fig. 6 is the circuit diagram that heater automaticallyes switch and controls.
The specific embodiment
Following constipation closes the embodiment accompanying drawing, and the water system of the Semiconductor Organic cleaning equipment after the utility model is improved describes, and purpose is to understand the technology contents of the utility model better for the public, rather than to the restriction of this technology contents.In fact, in the said creative spirit essence of the utility model, any technology increase and decrease or the equivalence replacement carried out all should be encompassed within the utility model technical scope required for protection.
Preferred embodiment accompanying drawing as shown in Figures 2 and 3; The water system of a kind of Semiconductor Organic cleaning equipment that the utility model provides; Its composition comprises the heating water tank (being the ultra-pure water storage tank) that is used to reclaim Cleaning Wastewater, the scavenging pump that links to each other with the heating water tank delivery pipe, and the outlet pipeline that is connected to process cavity from scavenging pump; Wherein be provided with the electromagnetic heating system that directly contacts with water storage wherein in the heating water tank; And be provided with the water temperature harvester that measurement category is higher than 60 ℃ in this heating water tank, clearly do not illustrate in the system block diagram, below specify the architectural feature in this heating water tank:
This electromagnetic heating system has automatic stepped temperature heating unit; It comprises heater automatic switchover controller and two other active heating wire of higher level; And the output of water temperature harvester is connected among the heater automatic switchover controller, and the active heating wire of different stage is that part is communicated with, all is communicated with or Close All in the different temperatures interval.For example: when 24 ℃ of water temperatures wherein, four resistances are respectively 24K Ω, 12K Ω, 4K Ω, the whole active heating wire work of 2K Ω; When water temperature rise to 40 ℃, 24K Ω receives the control of heater automatic switchover controller and closes; In the time of 45 ℃, 12K Ω is controlled to close; In the time of 50 ℃, 4K Ω is controlled to close; When temperature surpassed 57 ℃ of scopes, 2K Ω is controlled to close; Work was also set up when otherwise temperature descended.In heating process, electromagnetic heating system contacts with water, thereby effectively improves water quality, makes it keep the basic chemical property of ultra-pure water.Generally, only need heating 5 minutes or make water temperature be heated to 50 ± 2 ℃, can meet semiconductor and clean the required water standard of processing, thereby can save the huge various filter parts of losing quantity.
As the further optimization of above embodiment technical scheme, to shown in Figure 6, this electromagnetic heating system has anti-dry control unit like Fig. 4, and heating water tank is provided with level measurement device, and the level measuring result exports anti-dry control unit to.When the water level in the heating water tank is lower than the warning threshold values, just controls electromagnetic heating system and quit work, to prevent dry combustion method.And when water level is higher than the warning threshold values or is about to fill with, then control electromagnetic heating system and work on.Wherein level measurement device comprises ball float and the signal circuit thereof in the heating water tank, and is provided with time-delay relay in the signal circuit.The benefit of doing like this is to avoid the swinging of signal that causes because of the ball float fluctuation during critical working to the last minute when the water in the heating water tank, the frequent switch of equipment such as scavenging pump, even cause the phenomenon of unexpected equipment downtime to take place.
Moreover from the angle of efficient application, the heating water tank delivery pipe of this water system of the utility model can connect the scavenging pump more than two or two, is communicated to the above process cavity of two covers respectively and cleans operations.Based on this, also be provided with the automatic water-supply switch control unit between this heating water tank delivery pipe and each scavenging pump, supply water or supply water to one of process cavity with convenient control heating water tank to the both.
To sum up: the technical scheme of using the utility model; Can clean under the used ultra-pure water requirement satisfying semiconductor; Save a plurality of filters and the resistivity test device of legacy system, thereby saved considerable processing cost, increased the time of the normal operation of equipment greatly.
Claims (6)
1. the water system of Semiconductor Organic cleaning equipment; It is characterized in that: the composition of said water system comprises the heating water tank that is used to reclaim Cleaning Wastewater; The scavenging pump that links to each other with the heating water tank delivery pipe; And be connected to the outlet pipeline of process cavity from scavenging pump, be provided with the electromagnetic heating system that directly contacts with water storage wherein in the wherein said heating water tank, and be provided with the water temperature harvester that measurement category is higher than 60 ℃ in the said heating water tank.
2. the water system of Semiconductor Organic cleaning equipment according to claim 1; It is characterized in that: said electromagnetic heating system has automatic stepped temperature heating unit; Said temperature heating unit comprises heater automatic switchover controller and two other active heating wire of higher level; And the output of water temperature harvester is connected among the heater automatic switchover controller, and the active heating wire of different stage is that part is communicated with, all is communicated with or Close All in the different temperatures interval.
3. the water system of Semiconductor Organic cleaning equipment according to claim 1; It is characterized in that: said electromagnetic heating system has anti-dry control unit; And heating water tank is provided with level measurement device; And the level measuring result exports anti-dry control unit to, opens or close said electromagnetic heating system.
4. the water system of Semiconductor Organic cleaning equipment according to claim 3 is characterized in that: said level measurement device comprises ball float and the signal circuit thereof in the heating water tank, and is provided with time-delay relay in the said signal circuit.
5. the water system of Semiconductor Organic cleaning equipment according to claim 1 is characterized in that: said heating water tank delivery pipe connects the scavenging pump more than two or two, is communicated to the above process cavity of two covers respectively.
6. the water system of Semiconductor Organic cleaning equipment according to claim 5 is characterized in that: be provided with the automatic water-supply switch control unit between said heating water tank delivery pipe and each scavenging pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203843487U CN202238722U (en) | 2011-10-11 | 2011-10-11 | Water supply system for semiconductor organic cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203843487U CN202238722U (en) | 2011-10-11 | 2011-10-11 | Water supply system for semiconductor organic cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202238722U true CN202238722U (en) | 2012-05-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203843487U Expired - Lifetime CN202238722U (en) | 2011-10-11 | 2011-10-11 | Water supply system for semiconductor organic cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202238722U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109891162A (en) * | 2017-01-26 | 2019-06-14 | 株式会社Kelk | Fluid heater |
-
2011
- 2011-10-11 CN CN2011203843487U patent/CN202238722U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109891162A (en) * | 2017-01-26 | 2019-06-14 | 株式会社Kelk | Fluid heater |
| CN109891162B (en) * | 2017-01-26 | 2021-06-08 | 株式会社Kelk | Fluid heating device |
| US11387119B2 (en) | 2017-01-26 | 2022-07-12 | Kelk Ltd. | Fluid heating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: LITTELFUSE SEMICONDUCTOR (WUXI) CO., LTD. Free format text: FORMER NAME: CONCORD ELECTRONIC (WUXI) CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: New area, industrial park road six Zhenfa 214142 Jiangsu province Wuxi City No. three Patentee after: Lite semiconductor (Wuxi) Co. Ltd. Address before: 214142 Jiangsu Province, Wuxi City Industrial Park, No. 1 East Road six Zhenfa Patentee before: Concord Electronic (Wuxi) Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |
|
| CX01 | Expiry of patent term |