CN202230998U - Locking device for wafer ring - Google Patents
Locking device for wafer ring Download PDFInfo
- Publication number
- CN202230998U CN202230998U CN2011203751288U CN201120375128U CN202230998U CN 202230998 U CN202230998 U CN 202230998U CN 2011203751288 U CN2011203751288 U CN 2011203751288U CN 201120375128 U CN201120375128 U CN 201120375128U CN 202230998 U CN202230998 U CN 202230998U
- Authority
- CN
- China
- Prior art keywords
- wafer
- bracket
- locking device
- disks
- draw ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model discloses a locking device for a wafer ring, comprising a wafer disc, and further comprising a fastening bar disposed along the edge of the wafer disc, wherein one end of the fastening bar is connected with the wafer disc, the other end of the fastening bar is connected with a pull ring hook, and the pull ring hook is buckled with a tool buckle fixed on the wafer disc. Because the whole locking device for a wafer ring is locked by using a tool buckle, the operation method is simple and convenient, and locking for the wafer ring is rapid, stable, without the need to finish by operator using too much force, and unable to sprain the hands of operator.
Description
Technical field
The utility model relates to a kind of wafer process equipment, and in particular, what relate to is the wafer central locking device that a kind of LED industrial chain packaging process is used.
Background technology
In the LED production process, want accurately to pick up wafer, fast, accurately wafer is placed assigned address, then wafer central must get firmly by a kind of device locking, and common this device just is wafer disks.Weigh this operating procedure and whether meet the requirements, see mainly whether whether its operation is convenient, simple and direct, can firmly lock wafer central fast and effectively.
Like Fig. 1, Fig. 2 and shown in Figure 3; In the prior art; Usually wafer disks is provided with a plurality of wafer centrals 200, simultaneously each wafer central is provided with one and is used for fastening screw 300, and its fastening means is to screw screw 300 by one hand to compress wafer central 200 through contention effect.When taking this mode; If each primary and secondary ring overall dimension is done to such an extent that be reliable just; But because the material of primary and secondary ring is a plastic cement; And a very big defective of plastic cement is exactly an easy deformation, and it is very big to be affected by the external environment, so processing gets up to be difficult to guarantee accuracy of gauge.Therefore when the actual size of primary and secondary ring during less than theoretical value; Will there be very big problem by close screw 300 with hand-screw through the mode of oppressing locking wafer central 200: at first be to produce very big gap between wafer central 200 and the wafer disks 100; Therefore screw 300 also has very big one section distance with wafer central 200, and this locks wafer central 200 with regard to needing the consumption operator to remove to screw screw 300 the long time; Secondly be exactly when screw 300 with after wafer central 200 contact, relatively require great effort owing to removing to turn round screw 300 with hand, therefore, may cause the further distortion of wafer central, even and exert oneself very greatly also to lock tightly wafer central 200 sometimes owing to overexerting.
Therefore, prior art still haves much room for improvement and develops.
The utility model content
The purpose of the utility model is to provide a kind of wafer central locking device, prevents to lock the long or not tight wafer central of lock of wafer central spended time.
The technical scheme of the utility model is following:
A kind of wafer central locking device comprises wafer disks, wherein; Also comprise the bracket that is provided with along the wafer disks edge; One end of said bracket is connected with said wafer disks, and the other end of said bracket is connected with a draw ring hook, and said draw ring fastener connects the instrument button that is fixed on the said wafer disks.
Described wafer central locking device, wherein, said wafer disks is provided with four wafer centrals, and corresponding each wafer central is provided with a bracket, instrument button and draw ring hook thereof.
Described wafer central locking device, wherein, an end of the disconnected instrument button of said bracket is fixed through a pressing plate, and is connected with a regulating block through an adjustable bolt, and said regulating block is fixed on the said wafer disks.
Described wafer central locking device, wherein, said pressing plate laterally is a hollow structure near bracket one side, the link of said bracket embeds this hollow structure, and connects through bolt.
Described wafer central locking device, wherein, said draw ring hook has been wholely set a base plate, with an end of the said bracket of a briquetting matching and fixing.
A kind of wafer central locking device that the utility model provided; Owing to adopted the instrument button that whole wafer central locking device is locked, its method of operation is simple and convenient, wafer central locking fast and stable; Do not need the operator to spend too big strength to go to accomplish, can not sprain operator's hand yet.
Description of drawings
Fig. 1 is the structural representation of prior art wafer central locking device.
Fig. 2 is the action sketch map of prior art wafer central locking device.
Fig. 3 is the local enlarged diagram of A portion among Fig. 2.
Fig. 4 is the perspective view of the utility model wafer central locking device.
Fig. 5 is the local enlarged diagram of B portion among Fig. 4.
Fig. 6 a, Fig. 6 b are the positive and negative schematic perspective views of the utility model wafer central locking device.
Fig. 7 is the floor map of the utility model wafer central locking device.
Fig. 8 is the local enlarged diagram of C portion among Fig. 7.
Fig. 9 is the local enlarged diagram of D portion among Fig. 7.
Embodiment
Below will combine accompanying drawing, the embodiment of the utility model is specified, described specific embodiment in order to explain the utility model, is not the embodiment that is used to limit the utility model only.
A kind of wafer central locking device of the utility model; Comprise wafer disks; Also comprise the bracket that is provided with along the wafer disks edge; One end of said bracket is connected with said wafer disks, and the other end of said bracket is connected with a draw ring hook, and said draw ring fastener connects the instrument button that is fixed on the said wafer disks.Preferably, said wafer disks is provided with four wafer centrals, and corresponding each wafer central is provided with a bracket, instrument button and draw ring hook thereof.One end of the disconnected instrument button of said bracket is fixed through a pressing plate, and is connected with a regulating block through an adjustable bolt, and said regulating block is fixed on the said wafer disks.Said pressing plate laterally is a hollow structure near bracket one side, and the link of said bracket embeds this hollow structure, and connects through bolt.Said draw ring hook has been wholely set a base plate, an end of said base plate and the said bracket of a briquetting matching and fixing.
The embodiment of the utility model such as Fig. 4, Fig. 6 a, Fig. 6 b and shown in Figure 7; Said wafer central locking device comprises wafer disks 101, briquetting 201, pressing plate 301, draw ring hook 401, regulating block 501, instrument button 601, bracket 701, wafer central 801; Said regulating block 501 is fixed on the said wafer disks 101 with said instrument button 601; One end of said bracket 701 is fixed through said pressing plate 301, and is connected with said regulating block 501 through an adjustable bolt, and said adjustable bolt is except having interconnect function; Can also regulate the tightness of whole wafer central locking device; After detaining said instrument button 601, said bracket 701 is too tight or too during pine, and can loosen or tighten up this moment through regulating said screw.
The other end of said bracket 701 is connected with a draw ring hook 401, and like Fig. 5, shown in Figure 8, said draw ring hook 401 snappings one are fixed on the instrument button 601 on the said wafer disks 101.As shown in Figure 9, said pressing plate 301 laterally is a hollow structure near said bracket 701 1 sides, and the link of said bracket 701 embeds this hollow structure, and connects through bolt.Said draw ring hook 401 has been wholely set a base plate 402, an end of said base plate 402 and the said bracket 701 of a briquetting 201 matching and fixing.
Preferably, said wafer disks 101 is provided with four wafer centrals 801, and corresponding each wafer central 801 is provided with a briquetting 201, pressing plate 301, draw ring hook 401, regulating block 501, instrument button 601, bracket 701.
In the time of operation, break said instrument button 601 into two with one's hands, said bracket 701 is opened with hand; Put into said wafer disks 101 to said wafer central 801, regulate the position of said wafer central 801, make the bottom of said wafer central 801 be adjacent to a side of said wafer disks 101 fully; Said instrument button 601 fastenings, said bracket 701 just is fixed on the said wafer disks 101 then, when said bracket 701 is too tight or too loose after detaining said instrument button 601; Can loosen or tighten up this moment through regulating adjustable bolt on the said regulating block 501; Said bracket 701 firmly is fixed on the said wafer disks 101, and its method of operation is simple and convenient, said wafer central 801 locking fast and stables; Do not need the operator to spend too big strength to go to accomplish, can not sprain operator's hand yet.
Should be understood that; The above is merely the preferred embodiment of the utility model; Be not sufficient to limit the technical scheme of the utility model; Concerning those of ordinary skills, within the spirit and principle of the utility model, can increase and decrease, replacement, conversion or improvement according to above-mentioned explanation.For example said draw ring hook and said instrument button are shifted one's position; Said instrument button is connected with said bracket; Said draw ring hook is fixed on the said wafer disks; And all these increases and decreases, replacement, conversion or improve after technical scheme, all should belong to the protection range of the utility model accompanying claims.
Claims (5)
1. wafer central locking device; Comprise wafer disks; It is characterized in that also comprise the bracket that is provided with along the wafer disks edge, an end of said bracket is connected with said wafer disks; The other end of said bracket is connected with a draw ring hook, and said draw ring fastener connects the instrument button that is fixed on the said wafer disks.
2. wafer central locking device according to claim 1 is characterized in that, said wafer disks is provided with four wafer centrals, and corresponding each wafer central is provided with a bracket, instrument button and draw ring hook thereof.
3. wafer central locking device according to claim 1 is characterized in that, an end of the disconnected instrument button of said bracket is fixed through a pressing plate, and is connected with a regulating block through an adjustable bolt, and said regulating block is fixed on the said wafer disks.
4. wafer central locking device according to claim 1 is characterized in that, said pressing plate laterally is a hollow structure near bracket one side, and the link of said bracket embeds this hollow structure, and connects through bolt.
5. wafer central locking device according to claim 1 is characterized in that, said draw ring hook has been wholely set a base plate, with an end of the said bracket of a briquetting matching and fixing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203751288U CN202230998U (en) | 2011-10-08 | 2011-10-08 | Locking device for wafer ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203751288U CN202230998U (en) | 2011-10-08 | 2011-10-08 | Locking device for wafer ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202230998U true CN202230998U (en) | 2012-05-23 |
Family
ID=46081576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203751288U Expired - Fee Related CN202230998U (en) | 2011-10-08 | 2011-10-08 | Locking device for wafer ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202230998U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116598251A (en) * | 2023-06-09 | 2023-08-15 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
-
2011
- 2011-10-08 CN CN2011203751288U patent/CN202230998U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116598251A (en) * | 2023-06-09 | 2023-08-15 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
| CN116598251B (en) * | 2023-06-09 | 2024-05-10 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20191008 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |