CN202201710U - Recycling device for silicon nitride - Google Patents
Recycling device for silicon nitride Download PDFInfo
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- CN202201710U CN202201710U CN2011202588700U CN201120258870U CN202201710U CN 202201710 U CN202201710 U CN 202201710U CN 2011202588700 U CN2011202588700 U CN 2011202588700U CN 201120258870 U CN201120258870 U CN 201120258870U CN 202201710 U CN202201710 U CN 202201710U
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Abstract
The embodiment of the utility model discloses a recycling device for silicon nitride, comprising a pickling device, wherein the pickling device is provided with a pickling bath for pickling silicon nitride waste; the utility model further comprises a solid-liquid separating device which is connected with the pickling device and is for recycling the silicon nitride mixed liquid obtained after pickling by the pickling device. The utility model can recycle silicon nitride from the waste so as to save resource and lower pollution of the waste to the environment.
Description
Technical field
The utility model relates to the silicon nitride recovery technology, relates in particular to a kind of silicon nitride retrieving arrangement.
Background technology
At present, in the production castingprocesses of polysilicon, generally comprise step:
Steps A is in quartz crucible surface-coated coating.This coating adopts the manufacturing of expensive high purity nitrogenize silicon;
Step B carries out ingot casting with polysilicon in crucible;
Step C after polycrystalline silicon ingot casting is accomplished, breaks away from from the quartz crucible surface, obtains spindle-shaped polysilicon, and this process is called " demoulding ".
Among the above-mentioned steps C, after the polysilicon demoulding, the crucible that surfaces coated is covered with high purity silicon nitride is taken as waste and discards.Because the silicon nitride manufacturing cost that crucible surface applies is high, directly abandons, with the serious waste that causes resource; Simultaneously, the crucible that the top layer is coated with silicon nitride directly discards also and will cause certain pollution to environment.But the impurity that the crucible behind the ingot casting contains is more, and wherein silicon nitride is directly taken out or through after simple the cleaning, is applied in the concrete production practice also unactual.Therefore, how from waste, to reclaim the higher silicon nitride of purity, reduce the pollution of waste to environment, be the technical problem that those skilled in the art need to be resolved hurrily always.
The utility model content
The utility model embodiment technical problem to be solved is, a kind of silicon nitride retrieving arrangement is provided, and can from waste, reclaim silicon nitride, reduces the pollution of waste to environment.
In order to solve the problems of the technologies described above, the utility model embodiment provides a kind of silicon nitride retrieving arrangement, comprising:
Pickling installation, said pickling installation is provided with the pickling tank that is used for the waste that comprises silicon nitride is carried out cleanup acid treatment;
Be connected with said pickling installation, be used for the solid-liquid separating equipment that the silicon nitride mixed solution that said pickling installation carries out obtaining after the cleanup acid treatment is recycled.
Wherein, the internal surface of said pickling tank is coated with the acid-proof wear-proof layer;
Be provided with accelerating reactor in the said pickling tank, said accelerating reactor comprises: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator.
Wherein, said solid-liquid separating equipment comprises: have the pressure filter of filter cloth or have the whizzer of filter cloth, the order number of said filter cloth is 100～2000 orders.
Wherein, said silicon nitride retrieving arrangement also comprises: be connected with said solid-liquid separating equipment, be used for the silicon nitride that said solid-liquid separating equipment reclaims is carried out the dispersing apparatus of thinning processing.
Wherein, said dispersing apparatus comprises: any one or more in ball mill, stirring ultrasonic machine and the high speed dispersor;
Wherein, said ball mill is provided with the ball milling chamber, and said stirring ultrasonic machine is provided with the teeter column, and said high speed dispersor is provided with dispersing chamber; The internal surface of said ball milling chamber, teeter column and dispersing chamber is coated with the wear-resistant plastic layer.
The utility model embodiment also provides a kind of silicon nitride retrieving arrangement, comprising:
Alkali cleaning equipment, said alkali cleaning equipment are provided with and are used for the waste that comprises silicon nitride is carried out the alkaline bath that alkali cleaning is handled;
Be connected with said alkali cleaning equipment, be used for first solid-liquid separating equipment that the silicon nitride mixed solution that said alkali cleaning equipment carries out obtaining after alkali cleaning is handled is recycled;
With the pickling installation that said first solid-liquid separating equipment is connected, said pickling installation is provided with the pickling tank that is used for the silicon nitride of said first solid-liquid separating equipment output is carried out cleanup acid treatment;
Be connected with said pickling installation, be used for second solid-liquid separating equipment that the silicon nitride mixed solution that said pickling installation carries out obtaining after the cleanup acid treatment is recycled.
Wherein, the internal surface of said alkaline bath is coated with alkaline-resisting wearing layer, and the internal surface of said pickling tank is coated with the acid-proof wear-proof layer;
Be equipped with accelerating reactor in said alkaline bath and the pickling tank, said accelerating reactor comprises: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator.
Wherein, said first solid-liquid separating equipment and second solid-liquid separating equipment include: have the pressure filter of filter cloth or have the whizzer of filter cloth, the order number of said filter cloth is 100～2000 orders.
Wherein, said silicon nitride retrieving arrangement also comprises: be connected with said second solid-liquid separating equipment, be used for the silicon nitride that said second solid-liquid separating equipment reclaims is carried out the dispersing apparatus of thinning processing.
Wherein, said dispersing apparatus comprises: any one or more in ball mill, stirring ultrasonic machine and the high speed dispersor;
Wherein, said ball mill is provided with the ball milling chamber, and said stirring ultrasonic machine is provided with the teeter column, and said high speed dispersor is provided with dispersing chamber; And the internal surface of said ball milling chamber, teeter column and dispersing chamber is coated with the wear-resistant plastic layer.
Implement the utility model embodiment, have following beneficial effect:
The utility model embodiment adopts pickling installation that the waste that comprises silicon nitride is carried out cleanup acid treatment, and the impurity with in the dissolving waste obtains the silicon nitride mixed solution; Adopt solid-liquid separating equipment that silicon nitride is separated from the silicon nitride mixed solution, the purpose of silicon nitride in realizing recycling the waste.Because the silicon nitride in the waste is recovered, and has realized the utilization again of silicon nitride, thereby has practiced thrift resource; In addition, also avoided waste directly to be abandoned, reduced the pollution of waste environment.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of first embodiment of the silicon nitride retrieving arrangement of the utility model embodiment;
Fig. 2 is the structural representation of embodiment of the pickling tank of the utility model embodiment;
Fig. 3 is the structural representation of embodiment of the pressure filter of the utility model embodiment;
Fig. 4 is the structural representation of embodiment of the link-suspended basket centrifuge of the utility model embodiment;
Fig. 5 is the structural representation of second embodiment of the silicon nitride retrieving arrangement of the utility model embodiment;
Fig. 6 is the structural representation of embodiment of the ball mill of the utility model embodiment;
Fig. 7 is the structural representation of embodiment of the stirring ultrasonic machine of the utility model embodiment;
Fig. 8 is the structural representation of embodiment of the high speed dispersor of the utility model embodiment;
Fig. 9 is the structural representation of the 3rd embodiment of the silicon nitride retrieving arrangement of the utility model embodiment;
Figure 10 is the structural representation of the 4th embodiment of the silicon nitride retrieving arrangement of the utility model embodiment;
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, is the structural representation of first embodiment of the silicon nitride retrieving arrangement of the utility model embodiment, and said silicon nitride retrieving arrangement 1 comprises: pickling installation 10 and solid-liquid separating equipment 11.
Wherein, pickling installation 10 is used for the waste that comprises silicon nitride is carried out cleanup acid treatment, obtains the silicon nitride mixed solution.This waste can be the silicon nitride that contains impurity, is covered with the quartz crucible fragment of silicon nitride layer such as surfaces coated.It is understandable that this waste also can be to adopt the silicon powder nitride method, spread the lower silicon nitride of purity that method such as sintering process is produced certainly.
In the present embodiment, pickling installation 10 is provided with the pickling tank with vessel space, in this pickling tank acidic aqueous solution is housed, and the internal surface of this pickling tank is coated with the acid-proof wear-proof layer, and this acid-proof wear-proof layer can be SiO 2-ceramic layer or polytetrafluoroethylene floor.The acid-proof wear-proof layer of pickling tank internal surface setting can effectively prevent the erosion of acidic aqueous solution to pickling tank, effectively prevents the wearing and tearing of waste to the pickling tank internal surface simultaneously.In pickling tank, be provided with accelerating reactor, accelerating reactor can comprise: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator, thus quicken the reaction of interior waste of pickling tank and acidic aqueous solution.
Please refer to Fig. 2; It is the structural representation of embodiment of the pickling tank of the utility model embodiment; This pickling tank comprises pickling cell body 101, is surrounded the quadrate accommodation space 102 that forms, is arranged on the whisking appliance 103 at pickling tank middle part and is arranged on the heating tube 104 of pickling tank both sides by pickling cell body 101; Simultaneously, the internal surface of pickling cell body 101 also is coated with acid-proof wear-proof layer (not shown).In actual the use; Acidic aqueous solution is injected in the accommodation space 102; The waste that will comprise silicon nitride is simultaneously put into accommodation space 102, starts whisking appliance 103 and quickens the waste that comprises silicon nitride is carried out cleanup acid treatment with heating tube 104, obtains the silicon nitride mixed solution.
Solid-liquid separating equipment 11 is connected with pickling installation 10, is used for the silicon nitride mixed solution that pickling installation 10 carries out obtaining after the cleanup acid treatment is recycled, and obtains silicon nitride.In the present embodiment, solid-liquid separating equipment 11 comprises: have the pressure filter of filter cloth or have the whizzer of filter cloth, whizzer can also be a link-suspended basket centrifuge, and the order number of filter cloth is between 100～2000 orders.Wherein, the order number is in physics, to weigh the granularity of material or the amount of fineness degree, is meant in the screen cloth hole count in 1 inch line segment as the one of which.
Please refer to Fig. 3 and Fig. 4, is respectively the structural representation of embodiment of pressure filter 110 and the link-suspended basket centrifuge 111 of the utility model embodiment.Pressure filter 110 in the present embodiment is identical with prior art with the concrete structure of link-suspended basket centrifuge 111, does not give unnecessary details at this.
In the practical application; Behind structure assembling pickling installation 10 and solid-liquid separating equipment 11 shown in Figure 1; Acidic aqueous solution is injected pickling tank; This acidic aqueous solution comprises: any one in hydrochloric acid, sulfuric acid, nitric acid, nitrous acid, carbonic acid, acetic acid, the hydrofluoric acid or multiple, and metal and the oxide compound etc. that are used for dissolving waste are dissolved in the impurity of acid; The waste that will comprise silicon nitride is then poured in the pickling tank; Start accelerating reactor simultaneously; After treating waste and acidic aqueous solution reaction certain hour (such as 48 hours), the silicon nitride mixed solution that obtains is poured into or through in lift pump suction and the solid-liquid separating equipment 11 that pickling installation 10 is connected; Start solid-liquid separating equipment 11, the silicon nitride mixed solution is carried out 2 to 10 times washing, make the potential of hydrogen PH=7 of silicon nitride mixed solution, remove excess liquid in the silicon nitride mixed solution then, reclaim and obtain highly purified silicon nitride.
In the present embodiment, in the pickling installation 10, the metal in the waste reacts with other impurity and acidic aqueous solution, is dissolved in acidic aqueous solution, obtains the silicon nitride mixed solution; In the solid-liquid separating equipment 11, the silicon nitride mixed solution is through repeatedly washing, and silicon nitride reclaims out from mixed solution the most at last.Because the silicon nitride purity that solid-liquid separating equipment 11 reclaims is higher, can be applied to again in the production practice, has realized the second stage employ of silicon nitride, thereby has practiced thrift resource; Because waste is not directly discarded, reduced the waste pollution on the environment simultaneously.
Please refer to Fig. 5; It is the structural representation of second embodiment of the silicon nitride retrieving arrangement of the utility model embodiment; Said silicon nitride retrieving arrangement 1 is basic identical with the assembling and the operating principle of silicon nitride retrieving arrangement 1 shown in Figure 1; Unique distinctive points is that said silicon nitride retrieving arrangement 1 also comprises: dispersing apparatus 12.
Dispersing apparatus 12 is connected with solid-liquid separating equipment 11, is used for solid-liquid separating equipment 11 isolated silicon nitrides are carried out thinning processing.
In the present embodiment, dispersing apparatus 12 comprises: any one or more in ball mill, stirring ultrasonic machine and the high speed dispersor.Ball mill is provided with the ball milling chamber; Stir ultrasonic machine and be provided with the teeter column; High speed dispersor is provided with dispersing chamber, and the internal surface of ball milling chamber, teeter column and dispersing chamber is coated with the wear-resistant plastic layer, to prevent silicon nitride wearing and tearing to ball milling chamber, teeter column and dispersing chamber in thinning process; In one embodiment, the wear-resistant plastic layer comprises: polytetrafluoroethylene floor.
Solid-liquid separating equipment 11 reclaims the silicon nitride that obtains and is generally the bigger silicon nitride particle of particle diameter, can't directly apply in the production practice; Adopt dispersing apparatus 12 to comprise grinding or ground thinning processing by the silicon nitride particle that particle diameter is bigger, obtain the less silicon nitride particle of particle diameter, the convenient silicon nitride that in follow-up production practice, directly uses.
Please refer to the structural representation of Fig. 6 for the embodiment of the ball mill 6 of the utility model embodiment; Ball mill 6 comprises ball milling chamber 60 and the ball grinder 61 that is arranged in the ball milling chamber 60, through the ball milling pearl silicon nitride of putting into ball grinder 61 is ground with levigate, reaches the purpose of refinement.In addition, the internal surface in ball milling chamber 60 also is coated with the wear-resistant plastic layer (not shown) of being processed by tetrafluoroethylene, and ball grinder 61 adopts materials such as silicon nitride or agate to process.
See also Fig. 7, be the structural representation of the embodiment of the stirring ultrasonic machine 7 of the utility model embodiment; Stir ultrasonic machine 7 and comprise teeter column 71, be arranged on the whisking appliance 72 at 71 middle parts, teeter column and be arranged on the ultrasonic generator 73 of bottom, teeter column, the UW that the stirring action through whisking appliance 72 cooperates ultrasonic generator 3 to send makes the silicon nitride refinement.71 internal surface also is coated with the wear-resistant plastic layer of being processed by tetrafluoroethylene in the teeter column in addition.
See also Fig. 8, be the structural representation of the embodiment of the high speed dispersor 8 of the utility model embodiment; High speed dispersor 8 comprises high speed dispersion chamber 81 and is arranged on the whisking appliance 82 in the high speed dispersion chamber, on the internal surface of high speed dispersion chamber 81 and whisking appliance 82, is coated with the wear-resistant plastic layer (not shown) of being processed by tetrafluoroethylene.
Please refer to Fig. 9, is the structural representation of the 3rd embodiment of the silicon nitride retrieving arrangement of the utility model embodiment, and said silicon nitride retrieving arrangement 1 comprises: alkali cleaning equipment 30, first solid-liquid separating equipment 31, pickling installation 10 and second solid-liquid separating equipment 33.
Wherein, alkali cleaning equipment 30 is used for that the waste that comprises silicon nitride is carried out alkali cleaning and handles, and obtains the silicon nitride mixed solution.This waste can be the silicon nitride that contains impurity, is covered with the quartz crucible fragment of silicon nitride layer such as surfaces coated.It is understandable that this waste also can be to adopt the silicon powder nitride method, spread the lower silicon nitride of purity that method such as sintering process is produced certainly.
In the present embodiment, alkali cleaning equipment 30 comprises: the alkaline bath with accommodation space.Alkaline aqueous solution is housed in the alkaline bath, and the surfaces coated of alkaline bath is covered with alkaline-resisting wearing layer, and alkaline-resisting wearing layer can be a polytetrafluoroethylene floor.The alkaline-resisting wearing layer that the alkaline bath internal surface applies can effectively prevent the erosion of alkaline aqueous solution to the alkaline bath internal surface, prevents the wearing and tearing of waste to the alkaline bath internal surface simultaneously.In addition; In alkaline bath, also be provided with accelerating reactor, accelerating reactor can comprise: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator; Accelerating reactor has been accelerated the speed of response of waste and alkaline aqueous solution, has improved working efficiency.
In one embodiment, alkaline bath is formed by pickling tank transformation shown in Figure 2, and particularly, the acid-proof wear-proof layer that pickling cell body 101 internal surfaces are applied replaces with alkaline-resisting wearing layer.
First solid-liquid separating equipment 31 is connected with alkali cleaning equipment 30, is used for the silicon nitride mixed solution that said alkali cleaning equipment 30 carries out obtaining after alkali cleaning is handled is recycled, and obtains the silicon nitride of low-purity.
First solid-liquid separating equipment 31 of present embodiment can be identical with the structure of the solid-liquid separating equipment 11 shown in Fig. 1, repeats no more at this.
Pickling installation 10 is connected with first solid-liquid separating equipment 31, and pickling installation 10 is provided with and is used for said first solid-liquid separating equipment 31 is separated the pickling tank that the silicon nitride that obtains carries out cleanup acid treatment.
The pickling installation 10 of present embodiment can be identical with the structure of the pickling installation 10 shown in Fig. 1, repeats no more at this.
Second solid-liquid separating equipment 33 is connected with pickling installation 10, is used for the silicon nitride mixed solution that pickling installation carries out obtaining after the cleanup acid treatment is recycled, and obtains silicon nitride.
Second solid-liquid separating equipment 33 of present embodiment can be identical with the structure of the solid-liquid separating equipment 11 shown in Fig. 1, repeats no more at this.
In the practical application; Behind structure assembling silicon nitride retrieving arrangement shown in Figure 9; In alkaline bath, inject alkaline aqueous solution, alkaline aqueous solution comprises: the aqueous solution of any one or more in sodium hydroxide, Lithium Hydroxide MonoHydrate, Pottasium Hydroxide, calcium hydroxide and the hydrated barta etc.; The silicon nitride waste that will contain impurity is then poured in the alkaline bath, behind the oxide compound and other the impurity that dissolves in the alkaline aqueous solution of silicon, silicon, obtains the silicon nitride mixed solution in the removal waste; The silicon nitride mixed solution is poured into or through in pumping plant suction first solid-liquid separating equipment 31 such as water pump; 31 pairs of silicon nitride mixed solutions of first solid-liquid separating equipment carry out 2 to 10 times washing; Make the potential of hydrogen PH=7 of silicon nitride mixed solution; Remove the most of liquid in the silicon nitride mixed solution then, reclaim the silicon nitride that obtains low-purity; Pour the silicon nitride of low-purity into injected acidic aqueous solution pickling tank, after the metal in the removal low-purity silicon nitride dissolves in the impurity of acidic aqueous solution with other, obtain the silicon nitride mixed solution; The silicon nitride mixed solution is poured into or adopted in water pump suction second solid-liquid separating equipment 33; The silicon nitride mixed solution carried out 2 to 10 times washing; Make the potential of hydrogen PH=7 of silicon nitride mixed solution, remove the most of liquid in the silicon nitride mixed solution then, obtain the higher silicon nitride of purity.
Oxide compound that present embodiment has been removed silicon, silicon in the waste through alkali cleaning equipment 30 etc. is soluble in the impurity of alkaline aqueous solution; Removed the impurity that metal etc. in the waste is soluble in acidic aqueous solution through pickling installation 10; Because the alkaline aqueous solution that is dissolved in the waste has all obtained removal with the impurity that is dissolved in acidic aqueous solution, thereby makes the silicon nitride that reclaims have higher purity, is adapted to using in the higher production practice of silicon nitride purity requirement.
Please refer to Figure 10; It is the structural representation of the 4th embodiment of the silicon nitride retrieving arrangement of the utility model embodiment; Said silicon nitride retrieving arrangement 1 is basic identical with the assembling and the operating principle of silicon nitride retrieving arrangement 1 shown in Figure 9; Unique distinctive points is that in the present embodiment, said silicon nitride retrieving arrangement 1 also comprises:
The dispersing apparatus 12 of present embodiment can be identical with the structure of dispersing apparatus 12 shown in Figure 5, repeats no more at this.
Above disclosedly be merely the utility model preferred embodiment; Certainly can not limit the interest field of the utility model with this; One of ordinary skill in the art will appreciate that all or part of flow process that realizes the foregoing description; And according to the equivalent variations that the utility model claim is done, the scope that still belongs to utility model and contained.
Claims (10)
1. a silicon nitride retrieving arrangement is characterized in that, comprising:
Pickling installation, said pickling installation is provided with the pickling tank that is used for the waste that comprises silicon nitride is carried out cleanup acid treatment;
Be connected with said pickling installation, be used for the solid-liquid separating equipment that the silicon nitride mixed solution that said pickling installation carries out obtaining after the cleanup acid treatment is recycled.
2. silicon nitride retrieving arrangement as claimed in claim 1 is characterized in that the internal surface of said pickling tank is coated with the acid-proof wear-proof layer;
Be provided with accelerating reactor in the said pickling tank, said accelerating reactor comprises: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator.
3. silicon nitride retrieving arrangement as claimed in claim 1 is characterized in that, said solid-liquid separating equipment comprises: have the pressure filter of filter cloth or have the whizzer of filter cloth, the order number of said filter cloth is 100～2000 orders.
4. like each described silicon nitride retrieving arrangement among the claim 1-3, it is characterized in that, also comprise:
Be connected with said solid-liquid separating equipment, be used for the silicon nitride that said solid-liquid separating equipment reclaims is carried out the dispersing apparatus of thinning processing.
5. silicon nitride retrieving arrangement as claimed in claim 4 is characterized in that, said dispersing apparatus comprises: any one or more in ball mill, stirring ultrasonic machine and the high speed dispersor;
Wherein, said ball mill is provided with the ball milling chamber, and said stirring ultrasonic machine is provided with the teeter column, and said high speed dispersor is provided with dispersing chamber; The internal surface of said ball milling chamber, teeter column and dispersing chamber is coated with the wear-resistant plastic layer.
6. a silicon nitride retrieving arrangement is characterized in that, comprising:
Alkali cleaning equipment, said alkali cleaning equipment are provided with and are used for the waste that comprises silicon nitride is carried out the alkaline bath that alkali cleaning is handled;
Be connected with said alkali cleaning equipment, be used for first solid-liquid separating equipment that the silicon nitride mixed solution that said alkali cleaning equipment carries out obtaining after alkali cleaning is handled is recycled;
With the pickling installation that said first solid-liquid separating equipment is connected, said pickling installation is provided with the pickling tank that is used for the silicon nitride of said first solid-liquid separating equipment output is carried out cleanup acid treatment;
Be connected with said pickling installation, be used for second solid-liquid separating equipment that the silicon nitride mixed solution that said pickling installation carries out obtaining after the cleanup acid treatment is recycled.
7. like the said silicon nitride retrieving arrangement of claim 6, it is characterized in that,
The internal surface of said alkaline bath is coated with alkaline-resisting wearing layer, and the internal surface of said pickling tank is coated with the acid-proof wear-proof layer;
Be equipped with accelerating reactor in said alkaline bath and the pickling tank, said accelerating reactor comprises: any one or more in whisking appliance, heating tube, ultrasonic generator and the microwave generator.
8. silicon nitride retrieving arrangement as claimed in claim 6 is characterized in that,
Said first solid-liquid separating equipment and second solid-liquid separating equipment include: have the pressure filter of filter cloth or have the whizzer of filter cloth, the order number of said filter cloth is 100～2000 orders.
9. like each described silicon nitride retrieving arrangement among the claim 6-8, it is characterized in that, also comprise:
Be connected with said second solid-liquid separating equipment, be used for the silicon nitride that said second solid-liquid separating equipment reclaims is carried out the dispersing apparatus of thinning processing.
10. silicon nitride retrieving arrangement as claimed in claim 9 is characterized in that, said dispersing apparatus comprises: any one or more in ball mill, stirring ultrasonic machine and the high speed dispersor;
Wherein, said ball mill is provided with the ball milling chamber, and said stirring ultrasonic machine is provided with the teeter column, and said high speed dispersor is provided with dispersing chamber; And the internal surface of said ball milling chamber, teeter column and dispersing chamber is coated with the wear-resistant plastic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202588700U CN202201710U (en) | 2011-07-21 | 2011-07-21 | Recycling device for silicon nitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202588700U CN202201710U (en) | 2011-07-21 | 2011-07-21 | Recycling device for silicon nitride |
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| Publication Number | Publication Date |
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| CN202201710U true CN202201710U (en) | 2012-04-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011202588700U Expired - Fee Related CN202201710U (en) | 2011-07-21 | 2011-07-21 | Recycling device for silicon nitride |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104401997A (en) * | 2014-11-18 | 2015-03-11 | 河南新大新材料股份有限公司 | Treatment device and method for high-iron silicon carbide micro-powder |
-
2011
- 2011-07-21 CN CN2011202588700U patent/CN202201710U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104401997A (en) * | 2014-11-18 | 2015-03-11 | 河南新大新材料股份有限公司 | Treatment device and method for high-iron silicon carbide micro-powder |
| CN104401997B (en) * | 2014-11-18 | 2016-08-24 | 河南易成新能源股份有限公司 | The processing means of high ferro silicon carbide micro-powder and processing method |
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