CN202196762U - Wafer basket - Google Patents
Wafer basket Download PDFInfo
- Publication number
- CN202196762U CN202196762U CN2011203279352U CN201120327935U CN202196762U CN 202196762 U CN202196762 U CN 202196762U CN 2011203279352 U CN2011203279352 U CN 2011203279352U CN 201120327935 U CN201120327935 U CN 201120327935U CN 202196762 U CN202196762 U CN 202196762U
- Authority
- CN
- China
- Prior art keywords
- wafer
- wafer basket
- base plate
- connecting portion
- side plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a wafer basket for placing wafers, which comprises a bottom plate and lateral plates extending upwards from the bottom plate and connected through a first connection portion. One end of the first connection portion is connected with the bottom plate. The end of the first connection portion away from the bottom plate is provided with an abutting portion. The wafers can be placed one by one in a stacking mode, thereby saving space, reducing cost and meanwhile having a function of filtering away water as well.
Description
Technical field
The utility model relates to a kind of wafer place apparatus, relates in particular to a kind of wafer basket that is used to place wafer.
Background technology
The semiconductor wafer that integrated circuit uses; Process technologies such as high accuracy cutting, grinding, polishing are adopted in preparation; After the course of processing; Need utilize lotion to remove the exotics such as particle, organic substance and inorganic matter that wafer surface is adhered to and stained, it is dried that the wafer after the cleaning need be placed and filter, and waits processing afterwards such as packing to be detected.Because wafer is very fragile and expensive, occur easily when placing wafer damaging, this just needs the place apparatus of a wafer to place wafer, and plays filter and do effect.But the apparatus for placing of existing wafer all is independently to deposit one by one, makes the storage placement of wafer take very large space, has improved cost greatly.
Given this, be necessary to provide a kind of new place apparatus to solve the problems referred to above.
The utility model content
The utility model technical problem to be solved is to provide a kind of wafer basket, and it is simple in structure, can clean the back at wafer and place wafer, saves the space again, can play the effect that filter is done simultaneously.
In order to solve the problems of the technologies described above, the utility model provides following technical scheme:
A kind of wafer basket comprises base plate and from the upwardly extending side plate of base plate, said side plate interconnects through first connecting portion, and said first connecting portion, one end is connected with said base plate, and said first connecting portion is provided with the contact part away from an end of base plate.
Further, said contact part protrudes from said first connecting portion.
Further, said side plate tilts to be connected with said base plate.
Further, said base plate is provided with some first holes.
Further, said first hole is rectangular, and evenly arranges.
Further, said side plate is provided with some second holes.
Further, said side plate is provided with extension away from base plate one end, and said extension protrudes from said side plate.
Further, said extension interconnects through second connecting portion.
Further, said second connecting portion is circular arc.
Compared to prior art, the described wafer basket of the utility model is provided with the contact part, makes said wafer basket can pile up placement one by one; On unit are, can place more wafer, save the space, reduce cost; Be provided with plurality of holes simultaneously, play the effect that the filter solid carbon dioxide divides.
Description of drawings
Fig. 1 is the perspective view of wafer basket in the embodiment of the utility model;
Fig. 2 is the planar structure sketch map of wafer basket in the embodiment of the utility model;
Fig. 3 is the enlarged diagram of A among Fig. 1.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is done further to detail:
Wafer basket as depicted in figs. 1 and 2 comprises base plate 1, the some side plates 2 that are connected with said base plate 1 and first connecting portion 3 that connects said side plate 2.
As depicted in figs. 1 and 2, said base plate 1 is a rectangle, evenly is placed with some first holes 11 on the said base plate 1, and said first hole 11 is a rectangle, is used to filter moisture, so that water flows out in first hole 11, has accelerated the time that wafer dries.Certainly, said first hole 11 also can be other shapes, and for example circular perhaps direction or the like can be irregular shape also, and arranging also can be rule or irregular.
As depicted in figs. 1 and 2, said side plate 2 extends upward around said base plate 1 and has four.Said side plate 2 tilts to be connected with said base plate 1, and the part that promptly said side plate 2 is connected with said base plate 1 (not indicating) constitutes the obtuse angle.Said side plate 2 is provided with extension 21 away from an end of base plate, and said extension 21 interconnects through second connecting portion 211, and said second connecting portion 211 is circular arc, places bump.Said extension 21 extends and protrudes from said side plate 2, with the portable wafer basket of getting, prevents that the wafer basket from dropping because of cunning too when being convenient to operating personnel and needing.Also be provided with some second holes 22 on the said side plate 2, the shape of said second hole 22 also can be rule or irregular different shape, and is preferred, and second hole 22 is shaped as rectangle and trapezoidal in the present embodiment.Said second hole 22 also is to be used for drainage, and effect and said first hole 11 are similar.
Said side plate 2 interconnects through some first connecting portions 3, and promptly one first connecting portion 3 connects two blocks of side plates 2, makes four blocks of side plates connect and has played formation " mouth " font, and said side plate 2 constitutes the hexahedron that has only an opening with base plate 1.Said first connecting portion, 3 one ends connect said base plate 1, and the other end is provided with contact part 31, and said contact part 31 protrudes from said first connecting portion 3, and the equal in length of said contact part 31.Said contact part 31 makes the wafer basket can pile up placement, and when being placed with first wafer basket horizontal positioned of wafer, this moment, wafer can not overfill; Must be less than the length of contact part 31; Second wafer basket (not shown) gets into first wafer basket through the side plate guiding of tilting, the extension 21 of first wafer basket of contact part conflict of second wafer basket, like this; Just make two wafer baskets can pile up placement, saved the space effectively.When needs extract second wafer basket, directly pinching the extension of second wafer basket with hand, just the wafer basket can be proposed easily.
The wafer basket that the utility model provides through on first connecting portion 3, being provided with contact part 31, makes the wafer basket can pile up placement, has saved the space greatly, has improved space availability ratio, has reduced cost.
Although be the example purpose; The preferred implementation of the utility model is disclosed; But those of ordinary skill in the art will recognize, under situation about not breaking away from by the scope of the disclosed the utility model of appending claims and spirit, various improvement, increase and replacement are possible.
Claims (9)
1. wafer basket; Comprise base plate and from the upwardly extending side plate of base plate; Said side plate interconnects through first connecting portion, and said first connecting portion, one end is connected with said base plate, and it is characterized in that: said first connecting portion is provided with the contact part away from an end of base plate.
2. wafer basket according to claim 1 is characterized in that: said contact part protrudes from said first connecting portion.
3. wafer basket according to claim 2 is characterized in that: said side plate tilts to be connected with said base plate.
4. wafer basket according to claim 2 is characterized in that: said base plate is provided with some first holes.
5. wafer basket according to claim 4 is characterized in that: said first hole is rectangular, and evenly arranges.
6. wafer basket according to claim 2 is characterized in that: said side plate is provided with some second holes.
7. wafer basket according to claim 1 is characterized in that: said side plate is provided with extension away from base plate one end, and said extension protrudes from said side plate.
8. wafer basket according to claim 7 is characterized in that: said extension interconnects through second connecting portion.
9. wafer basket according to claim 8 is characterized in that: said second connecting portion is circular arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203279352U CN202196762U (en) | 2011-09-02 | 2011-09-02 | Wafer basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203279352U CN202196762U (en) | 2011-09-02 | 2011-09-02 | Wafer basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202196762U true CN202196762U (en) | 2012-04-18 |
Family
ID=45951661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203279352U Expired - Fee Related CN202196762U (en) | 2011-09-02 | 2011-09-02 | Wafer basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202196762U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677031A (en) * | 2015-03-19 | 2015-06-03 | 合肥美的电冰箱有限公司 | Unfreezing assembling and refrigerator |
-
2011
- 2011-09-02 CN CN2011203279352U patent/CN202196762U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677031A (en) * | 2015-03-19 | 2015-06-03 | 合肥美的电冰箱有限公司 | Unfreezing assembling and refrigerator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120418 Termination date: 20150902 |
|
| EXPY | Termination of patent right or utility model |