CN202182834U - Liquid sampling and analyzing device - Google Patents
Liquid sampling and analyzing device Download PDFInfo
- Publication number
- CN202182834U CN202182834U CN2011203368337U CN201120336833U CN202182834U CN 202182834 U CN202182834 U CN 202182834U CN 2011203368337 U CN2011203368337 U CN 2011203368337U CN 201120336833 U CN201120336833 U CN 201120336833U CN 202182834 U CN202182834 U CN 202182834U
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- analytical equipment
- valve
- liquid
- control device
- hydrogen
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Abstract
The utility model discloses a liquid sampling and analyzing device, which relates to the technical field of liquid ingredient monitoring and is capable of timely and accurately analyzing and reflecting potential of hydrogen of tested liquid. The liquid sampling and analyzing device comprises a sampling device for sampling liquid, an analyzing device for accommodating liquid and analyzing potential of hydrogen of liquid, a pressure control device for controlling interior pressure of the analyzing device, a responding device for responding liquid level in the analyzing device, and a valve control device for controlling opening and closing of the sampling device and pressurization and decompression of the pressure control device. The sampling device is connected with the bottom of the analyzing device, the pressure control device is connected with the top of the analyzing device, the responding device is connected with the analyzing device, and the valve control device is respectively connected with the responding device, the sampling device and the pressure control device.
Description
Technical field
The utility model relates to liquid component monitoring technique field, relates in particular to a kind of liquid sampling analytical equipment.
Background technology
At present, in a lot of industrial processes, all need carry out real-time monitoring, to guarantee production efficiency and product quality to the liquid acid basicity in the production link.
For example, in the production run of LCD, the etching technics link that is absolutely necessary, and wet-etching technology has very high requirement to the potential of hydrogen of the etching liquid used in the wet etching equipment.In the process of etching; The potential of hydrogen of etching liquid must be controlled within the specific limits, thus to carry out real-time monitoring to the potential of hydrogen of etching liquid, if monitor untimely; The potential of hydrogen of etching liquid has fluctuation will cause that it's quarter is past metal level, consequence such as residual slightly, and production is caused great loss.
In the prior art; Analysis and monitoring to etching liquid; Mainly be through using pump from the etching liquid chamber of etching apparatus, to extract etching liquid; Then the etching liquid sample that takes out is placed in the external unit and analyzes, in this process, the etching liquid sample need just can be placed in the analytical equipment through a segment distance and analyze; The etching liquid sample can not be analyzed timely, cause producing error between the actual potential of hydrogen of analysis result and the etching liquid in the chamber of sample of etching liquid.
The utility model content
The embodiment of the utility model provides a kind of liquid sampling analytical equipment, the potential of hydrogen of analysis that can be promptly and accurately and reflection fluid to be measured.
For achieving the above object, the embodiment of the utility model adopts following technical scheme:
A kind of liquid sampling analytical equipment comprises:
The sampler that is used for liquid is taken a sample, be used for receiving fluids and analyze the liquid potential of hydrogen analytical equipment, be used to control said analytical equipment internal pressure pressure control device, be used to respond to the induction installation of liquid level in the said analytical equipment and be used to control said sampler opening and closing and control the valve control device that said pressure control device pressurizes and reduces pressure;
Said sampler is connected with the bottom of said analytical equipment; Said pressure control device is connected with the top of said analytical equipment; Said induction installation is connected with said analytical equipment, and said valve control device is connected with said induction installation, said sampler and said pressure control device respectively.
Said sampler comprises:
Input duct, be arranged on first valve and first level sensor on the input duct; One end of said input duct is connected with the container of ccontaining testing liquid; The other end is connected with said analytical equipment bottom; Said first level sensor is arranged on the side of said first valve near the container of said ccontaining testing liquid, and said first valve is connected with said valve control device respectively with said first level sensor.
Said analytical equipment comprises:
Analyze chamber, be arranged on second valve and the analyzer that is used to analyze said analysis chamber liquid acid basicity that is connected with the analysis chamber on the said analysis chamber; Said analyzer is positioned at said second valve below, and said second valve is connected with said valve control device respectively with said analyzer.
Said pressure control device comprises:
Gas exhaust duct, the 3rd valve, second level sensor, admission line, the 4th valve and pressue device;
Said gas exhaust duct is arranged on the top of said analytical equipment; Said the 3rd valve and said second level sensor are arranged on the said gas exhaust duct; Said second level sensor is arranged on the side of said the 3rd valve near said analytical equipment; Said admission line one end is arranged on the top of said analytical equipment; The other end is connected with said pressue device, and said the 4th valve is arranged on the said admission line, and said the 3rd valve is connected with said valve control device respectively with said the 4th valve.
Said induction installation comprises:
Induction pipe be arranged on the 3rd level sensor on the said induction pipe; Said induction pipe upper end is connected with said analytical equipment middle part; Said induction pipe lower end is connected with said analytical equipment bottom, and said the 3rd level sensor is connected with said valve control device.
The position of said gas exhaust duct and said admission line all is higher than the position of second valve that is provided with in the said analytical equipment.
The position of said induction pipe upper end is lower than the position of second valve that is provided with in the said analytical equipment.
Said analyzer comprises: be used to respond to the display device that the inductor of potential of hydrogen, being used to of being connected with said inductor are analyzed potential of hydrogen that said inductor senses and potential of hydrogen is converted into shows signal potential of hydrogen analytical equipment and being used for of being connected with said potential of hydrogen analytical equipment show said shows signal, said potential of hydrogen analytical equipment is connected with said valve control device.
The liquid sampling analytical equipment that the utility model embodiment provides; Utilize pressure control device to be pressurizeed and reduce pressure in analytical equipment inside; Thereby make between the container of the inner and ccontaining testing liquid of analytical equipment and produce pressure reduction; Make testing liquid pass through sampler and get into analytical equipment inside, thereby realize sampling and analysing, and the liquid sampling analytical equipment that the utility model embodiment provides is set directly on the container of ccontaining testing liquid testing liquid; Make testing liquid from the time shortening that the whole process that is sampled to analysis experiences, thereby make the potential of hydrogen of testing liquid promptly and accurately analyzed and to inform the production operation personnel.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of liquid sampling analytical equipment among the utility model embodiment;
Fig. 2 is the structural representation before the sampling of liquid sampling analytical equipment among the utility model embodiment;
Fig. 3 is the structural representation that the liquid sampling analytical equipment is analyzed testing liquid among the utility model embodiment;
Fig. 4 is the structural representation of liquid sampling analytical equipment backflow testing liquid among the utility model embodiment.
Description of reference numerals:
1, input duct 2, first valve 3, first level sensor 4, analyze chamber 5, inductor 6, potential of hydrogen analytical equipment 7, display device 8, second valve 9, induction pipe 10, the 3rd level sensor 11, gas exhaust duct 12, the 3rd valve 13, second level sensor 14, admission line 15, the 4th valve 16, etching liquid storage chamber
Embodiment
The embodiment of the utility model provides a kind of liquid sampling analytical equipment, the potential of hydrogen of analysis that can be promptly and accurately and reflection fluid to be measured.
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
The utility model embodiment provides a kind of liquid sampling analytical equipment, and this device comprises:
The sampler that is used for liquid is taken a sample, be used for receiving fluids and analyze the liquid potential of hydrogen analytical equipment, be used for control analysis device internal pressure pressure control device, be used to respond to the induction installation of liquid level in the analytical equipment and be used to control the sampler opening and closing and valve control device that the controlled pressure control device pressurizes and reduces pressure;
Sampler is connected with the bottom of analytical equipment, and pressure control device is connected with the top of analytical equipment, and induction installation is connected with analytical equipment, and valve control device is connected with induction installation, sampler and pressure control device respectively.
The liquid sampling analytical equipment that the utility model embodiment provides; The pressure control device that is utilized under the valve control device control pressurizes and reduces pressure analytical equipment inside; Thereby make between the container of the inner and ccontaining testing liquid of analytical equipment and produce pressure reduction; Make testing liquid pass through sampler and get into analytical equipment inside; And carry out the analysis of testing liquid potential of hydrogen through analytical equipment, realize sampling and analysing, and the liquid sampling analytical equipment that the utility model embodiment provides is set directly on the container of ccontaining testing liquid to testing liquid; Make testing liquid from the time shortening that the whole process that is sampled to analysis experiences, thereby make the potential of hydrogen of testing liquid promptly and accurately analyzed and to inform the production operation personnel.
Among the utility model embodiment, as shown in Figure 1, sampler comprises:
Analytical equipment comprises:
Wherein, Analyzer comprises: be used to respond to the display device 7 that the inductor 5 of potential of hydrogen, being used to of being connected with inductor are analyzed potential of hydrogen that inductor 5 senses and potential of hydrogen is converted into shows signal potential of hydrogen analytical equipment 6 and being used for of being connected with potential of hydrogen analytical equipment 6 show shows signal, potential of hydrogen analytical equipment 6 is connected with valve control device.
Pressure control device comprises:
Induction installation comprises:
For the ease of illustrating the technical scheme of the utility model; The liquid sampling analytical equipment that provides among the utility model embodiment; Be used for the detection of the potential of hydrogen of wet etching equipment etching liquid, but the scope of application of the liquid sampling analytical equipment that provides among the utility model embodiment is not limited thereto.
As shown in Figure 2, in the utility model embodiment, the liquid sampling analytical equipment is connected with the container of ccontaining testing liquid; Promptly be connected with the etching liquid storage chamber 16 of ccontaining etching liquid, promptly input duct 1 one ends are connected with etching liquid storage chamber 16, at this moment; Valve control device is controlled first valve 2 and is closed; Be that etching liquid (dash area illustrates among the figure) can't pass through first valve 2, simultaneously, control second valve 8 and 12 unlatchings of the 3rd valve; The 4th valve 15 is closed, and makes the air pressure of analyzing in the chamber 4 equal atmospheric pressure.
As shown in Figure 3, because the pressure in the etching liquid storage chamber 16 is greater than atmospheric pressure, so when valve control device is controlled 2 unlatchings of first valve; Etching liquid (dash area illustrates among the figure) promptly prolongs input duct 1 and gets into analysis chamber 4 and induction pipe 9; Because the liquid level of analyzing in chamber 4 and the induction pipe 9 is the height such as grade, so when the liquid level of etching liquid rose to the 3rd level sensor 10 places, the liquid levels of analyzing in the chamber 4 had also reached desirable measuring height; At this moment; After the 3rd level sensor 10 is sensed liquid level signal is transferred to valve control device, valve control device is controlled first valve 2, second valve 8 and the 3rd valve 12 immediately and is closed, and makes etching liquid stop to continue to get into and analyzes chamber 4; Closing of second valve 8 is too high in order to prevent the etching liquid liquid level; Cause etching liquid to spill in the gas exhaust duct 11, second level sensor 13 that is provided with on the gas exhaust duct 11 simultaneously also is in order to prevent that etching liquid from spilling in the gas exhaust duct 11, if when etching liquid spills in the gas exhaust duct 11; Second level sensor 13 can be sensed etching liquid; And alerting signal is transferred to valve control device, whether the latter checks first valve and second valve to close once more, prevent etching liquid continue overflow.
After etching liquid get into to be analyzed chamber 4 and first valve 2 and closed, analytical equipment began etching liquid is detected, i.e. the potential of hydrogen of inductor 5 induction etching liquids; And the data transmission that will describe the etching liquid potential of hydrogen is given potential of hydrogen analytical equipment 6; 6 pairs of these data of potential of hydrogen analytical equipment are analyzed, and the analysis result signal is transferred to display device 7, and display device 7 changes into image with this signal; Make the operating personnel can be after the potential of hydrogen data of observing etching liquid intuitively; If analysis result is unusual, potential of hydrogen analytical equipment 6 can be transferred to abnormal signal the supervisory system of wet etching equipment, and wet etching equipment will be reported to the police and is out of service; If analysis result is normal; Potential of hydrogen analytical equipment 6 can be transferred to valve control device with corresponding signal, after valve control device is received signal, will control the 4th valve 15, second valve 8 and 2 unlatchings of first valve.
After the 4th valve 15 is opened; The pressue device that is connected with admission line 14 begins to analyzing pressurization in the chamber 4; The pressure of analyzing in the chamber 4 will constantly raise; Pressure in analyzing chamber 4 is during greater than the pressure etching liquid storage chamber 16 in, and analysis chamber 4 interior etching liquids will pass back in the etching liquid storage chamber 16 gradually.
As shown in Figure 4; When etching liquid (dash area illustrates among the figure) liquid level is lower than first level sensor 3 on the input duct 1, i.e. first level sensor, 3 inductions are during less than liquid level, and first level sensor 3 is transferred to valve control device with signal; After valve control device is received signal; To control first valve 2 and the 4th valve 15 is closed, and arrive this, primary sample is analyzed and is finished.
Instantly after sub-sampling analysis began, the 3rd valve 12 was opened, and the gas that the 3rd valve 12 is opened in the post analysis chamber 4 will prolong gas exhaust duct 11 discharges, make the pressure of analyzing in the chamber 4 return to atmospheric pressure gradually, and process afterwards is the same.
First valve, second valve, the 3rd valve and the 4th valve used among the utility model embodiment all adopt pneumatic valve.
The liquid sampling analytical equipment that the utility model embodiment provides; Utilize the opening and closing of level sensor by-pass valve control; Thereby make between the container of the inner and ccontaining testing liquid of liquid sampling analytical equipment and produce pressure reduction; Realization is to the sampling and analysing of testing liquid; And the liquid sampling analytical equipment that the utility model embodiment provides is set directly on the container of ccontaining testing liquid, makes testing liquid from the time shortening that the whole process that is sampled to analysis experiences, thereby makes the potential of hydrogen of testing liquid promptly and accurately analyzed and to inform the production operation personnel.
The foregoing description provides only is the concrete a kind of scheme used of the utility model, and this analytical equipment not only can be analyzed liquid in concrete the application, also can be used to analyze the colloid that can flow, suspension etc.
The above; Be merely the embodiment of the utility model; But the protection domain of the utility model is not limited thereto; Any technician who is familiar with the present technique field can expect changing or replacement in the technical scope that the utility model discloses easily, all should be encompassed within the protection domain of the utility model.Therefore, the protection domain of the utility model should be as the criterion by said protection domain with claim.
Claims (8)
1. a liquid sampling analytical equipment is characterized in that, comprising:
The sampler that is used for liquid is taken a sample, be used for receiving fluids and analyze the liquid potential of hydrogen analytical equipment, be used to control said analytical equipment internal pressure pressure control device, be used to respond to the induction installation of liquid level in the said analytical equipment and be used to control said sampler opening and closing and control the valve control device that said pressure control device pressurizes and reduces pressure;
Said sampler is connected with the bottom of said analytical equipment; Said pressure control device is connected with the top of said analytical equipment; Said induction installation is connected with said analytical equipment, and said valve control device is connected with said induction installation, said sampler and said pressure control device respectively.
2. liquid sampling analytical equipment according to claim 1 is characterized in that, said sampler comprises:
Input duct, be arranged on first valve and first level sensor on the input duct; One end of said input duct is connected with the container of ccontaining testing liquid; The other end is connected with said analytical equipment bottom; Said first level sensor is arranged on the side of said first valve near the container of said ccontaining testing liquid, and said first valve is connected with said valve control device respectively with said first level sensor.
3. liquid sampling analytical equipment according to claim 1 is characterized in that, said analytical equipment comprises:
Analyze chamber, be arranged on second valve and the analyzer that is used to analyze said analysis chamber liquid acid basicity that is connected with the analysis chamber on the said analysis chamber; Said analyzer is positioned at said second valve below, and said second valve is connected with said valve control device respectively with said analyzer.
4. liquid sampling analytical equipment according to claim 3 is characterized in that, said pressure control device comprises:
Gas exhaust duct, the 3rd valve, second level sensor, admission line, the 4th valve and pressue device;
Said gas exhaust duct is arranged on the top of said analytical equipment; Said the 3rd valve and said second level sensor are arranged on the said gas exhaust duct; Said second level sensor is arranged on the side of said the 3rd valve near said analytical equipment; Said admission line one end is arranged on the top of said analytical equipment; The other end is connected with said pressue device, and said the 4th valve is arranged on the said admission line, and said the 3rd valve is connected with said valve control device respectively with said the 4th valve.
5. liquid sampling analytical equipment according to claim 3 is characterized in that, said induction installation comprises:
Induction pipe be arranged on the 3rd level sensor on the said induction pipe; Said induction pipe upper end is connected with said analytical equipment middle part; Said induction pipe lower end is connected with said analytical equipment bottom, and said the 3rd level sensor is connected with said valve control device.
6. liquid sampling analytical equipment according to claim 4 is characterized in that, the position of said gas exhaust duct and said admission line all is higher than the position of second valve that is provided with in the said analytical equipment.
7. liquid sampling analytical equipment according to claim 5 is characterized in that, the position of said induction pipe upper end is lower than the position of second valve that is provided with in the said analytical equipment.
8. liquid sampling analytical equipment according to claim 3; It is characterized in that; Said analyzer comprises: be used to respond to the display device that the inductor of potential of hydrogen, being used to of being connected with said inductor are analyzed potential of hydrogen that said inductor senses and potential of hydrogen is converted into shows signal potential of hydrogen analytical equipment and being used for of being connected with said potential of hydrogen analytical equipment show said shows signal, said potential of hydrogen analytical equipment is connected with said valve control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203368337U CN202182834U (en) | 2011-09-08 | 2011-09-08 | Liquid sampling and analyzing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203368337U CN202182834U (en) | 2011-09-08 | 2011-09-08 | Liquid sampling and analyzing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202182834U true CN202182834U (en) | 2012-04-04 |
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ID=46175866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203368337U Expired - Lifetime CN202182834U (en) | 2011-09-08 | 2011-09-08 | Liquid sampling and analyzing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202182834U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677687A (en) * | 2015-03-27 | 2015-06-03 | 山东钢铁股份有限公司 | Industrial liquid sampling device and industrial liquid sampling method |
| CN106950085A (en) * | 2017-05-31 | 2017-07-14 | 俊杰机械(深圳)有限公司 | A kind of electroplate liquid sampler and its sampling method |
| CN109540598A (en) * | 2018-10-30 | 2019-03-29 | 山西钢科碳材料有限公司 | High viscosity liquid sampler |
-
2011
- 2011-09-08 CN CN2011203368337U patent/CN202182834U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677687A (en) * | 2015-03-27 | 2015-06-03 | 山东钢铁股份有限公司 | Industrial liquid sampling device and industrial liquid sampling method |
| CN104677687B (en) * | 2015-03-27 | 2017-04-19 | 山东钢铁股份有限公司 | Industrial liquid sampling device and industrial liquid sampling method |
| CN106950085A (en) * | 2017-05-31 | 2017-07-14 | 俊杰机械(深圳)有限公司 | A kind of electroplate liquid sampler and its sampling method |
| CN109540598A (en) * | 2018-10-30 | 2019-03-29 | 山西钢科碳材料有限公司 | High viscosity liquid sampler |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150703 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150703 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150703 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176, No. 8, Middle West Road, Beijing economic and Technological Development Zone, Beijing Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120404 |