CN202182716U - Testing measuring tool of warping degree of solar silicon wafer - Google Patents

Testing measuring tool of warping degree of solar silicon wafer Download PDF

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Publication number
CN202182716U
CN202182716U CN201120288945XU CN201120288945U CN202182716U CN 202182716 U CN202182716 U CN 202182716U CN 201120288945X U CN201120288945X U CN 201120288945XU CN 201120288945 U CN201120288945 U CN 201120288945U CN 202182716 U CN202182716 U CN 202182716U
Authority
CN
China
Prior art keywords
solar silicon
pedestal
angularity
test platform
measurer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201120288945XU
Other languages
Chinese (zh)
Inventor
黄毓灿
唐岱
高智博
颜金国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EVERGREEN SOLAR (WUHAN) Inc
Original Assignee
EVERGREEN SOLAR (WUHAN) Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EVERGREEN SOLAR (WUHAN) Inc filed Critical EVERGREEN SOLAR (WUHAN) Inc
Priority to CN201120288945XU priority Critical patent/CN202182716U/en
Application granted granted Critical
Publication of CN202182716U publication Critical patent/CN202182716U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

He utility model discloses a testing measuring tool of a warping degree of a solar silicon wafer. The measuring tool comprises a pedestal and a testing platform that is capable of making sliding movements horizontally on the pedestal. Besides, a door-shaped stop device is arranged across above the testing platform; there is a height clearance between the door-shaped stop device and the testing platform, wherein the height clearance is consistent with a preset limit value of the warping degree. According to the utility model, it can be accurately measured whether a warping degree of a band-shaped lifting solar silicon wafer reaches the standard.

Description

Solar silicon wafers angularity test measurer
Technical field
The utility model relates to measuring technology, relates in particular to a kind of solar silicon wafers angularity test measurer.
Background technology
The solar silicon wafers of " banded pull-type " solar silicon wafers and traditional ingot casting method is owing to the difference of process aspect, and product performance also has difference." banded pull-type " solar silicon wafers has warpage, and whether the characterization processes of prior art can't accurately detect the angularity of silicon chip up to standard.At present, whether the angularity of " banded pull-type " solar silicon wafers is judged by Quality Inspector's sense organ fully within customer requirement, is caused flase drop easily.
The utility model content
The utility model technical matters to be solved is: a kind of solar silicon wafers angularity test measurer is provided, and whether this measurer can be measured the angularity of banded pull-type solar silicon wafers exactly up to standard.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of solar silicon wafers angularity test measurer; This measurer includes a pedestal and test platform that can horizontal slip on this pedestal; Above said test platform, stride and be provided with a type stop means, leave and the consistent height gap of the pre-set limit of said angularity between said door type stop means and the test platform.
Wherein, the centre position on said pedestal is provided with a guide rail along its length, and below said test platform, is provided with the slide block that cooperates with said guide rail, and during work, said test platform is through the horizontal slip on said guide rail of said slide block.
Wherein, said door type stop means includes two and uprightly is located at the height-adjustable door pillar of said pedestal both sides and laterally is crossed on the block on said two door pillars.
Preferably, said two door pillars are arranged on the center line of said base width direction, and said guide rail is arranged on the center line of said pedestal length direction.
The beneficial effect of the utility model is:
The embodiment of the utility model is through being provided with a slidably test platform; And a door type stop means is set above said test platform; Said door type stop means is just consistent with the limit value of solar silicon wafers angularity with height gap between the said test platform; Thereby realized not relying on artificial sense organ and judged whether the angularity of measuring banded pull-type solar silicon wafers exactly is up to standard.
Below in conjunction with accompanying drawing the utility model is done further to describe in detail.
Description of drawings
Fig. 1 is the stereographic map of an embodiment of solar silicon wafers angularity test measurer of the utility model.
Fig. 2 is the upward view of an embodiment of solar silicon wafers angularity test measurer of the utility model.
Fig. 3 is the cross sectional representation (not cutting door type stop means) of an embodiment of solar silicon wafers angularity test measurer of the utility model.
Embodiment
A following embodiment who describes the solar silicon wafers angularity test measurer of the utility model with reference to figure 1-Fig. 3 in detail; As shown in Figure 1; Present embodiment mainly includes a pedestal 1 and test platform 2 that can horizontal slip on this pedestal 1; Above said test platform 2, stride and be provided with a type stop means 3, leave and the consistent height gap of the pre-set limit of said angularity between said door type stop means 3 and the test platform 1.
During concrete the realization; As shown in Figures 2 and 3; Centre position on said pedestal 1 is provided with a guide rail 4 along its length; And below said test platform 1, be provided with the slide block 5 that cooperates with said guide rail 4, during work, said test platform 1 is through the horizontal slip on said guide rail 4 of said slide block 5.
During concrete the realization; Said door type stop means 3 can specifically include two and uprightly be located at the height-adjustable door pillar of said pedestal 1 both sides and laterally be crossed on the block on said two door pillars; The height gap that forms between said block and the test platform 2; Can regulate through the height that changes said door pillar, thereby can satisfy the angularity limit value of various criterion neatly.
In the present embodiment, said two door pillars are arranged on the center line of said pedestal 1 Width, and said guide rail 4 is arranged on the center line of said pedestal 1 length direction.
During measurement, silicon slice placed is placed on the test platform 2, test platform 2 is promoted before and after guide rail 4 directions.Exceed specification like the silicon warp degree, then can't be through the gap between stop means and the test platform, thereby measured come out.
Judge to be very easy to erroneous judgement with the existing manual sense organ and to compare, whether the utility model can be measured the angularity of banded pull-type solar silicon wafers exactly up to standard.
The above is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection domain of the utility model.

Claims (4)

1. a solar silicon wafers angularity is tested measurer; It is characterized in that; This measurer includes a pedestal and test platform that can horizontal slip on this pedestal; Above said test platform, stride and be provided with a type stop means, leave and the consistent height gap of the pre-set limit of said angularity between said door type stop means and the test platform.
2. solar silicon wafers angularity test measurer as claimed in claim 1; It is characterized in that; Centre position on said pedestal is provided with a guide rail along its length; And below said test platform, be provided with the slide block that cooperates with said guide rail, during work, said test platform is through the horizontal slip on said guide rail of said slide block.
3. solar silicon wafers angularity as claimed in claim 2 test measurer is characterized in that, said door type stop means includes two and uprightly is located at the height-adjustable door pillar of said pedestal both sides and laterally is crossed on the block on said two door pillars.
4. solar silicon wafers angularity test measurer as claimed in claim 3 is characterized in that said two door pillars are arranged on the center line of said base width direction, and said guide rail is arranged on the center line of said pedestal length direction.
CN201120288945XU 2011-08-10 2011-08-10 Testing measuring tool of warping degree of solar silicon wafer Expired - Fee Related CN202182716U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201120288945XU CN202182716U (en) 2011-08-10 2011-08-10 Testing measuring tool of warping degree of solar silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201120288945XU CN202182716U (en) 2011-08-10 2011-08-10 Testing measuring tool of warping degree of solar silicon wafer

Publications (1)

Publication Number Publication Date
CN202182716U true CN202182716U (en) 2012-04-04

Family

ID=46175749

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201120288945XU Expired - Fee Related CN202182716U (en) 2011-08-10 2011-08-10 Testing measuring tool of warping degree of solar silicon wafer

Country Status (1)

Country Link
CN (1) CN202182716U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487159A (en) * 2019-08-09 2019-11-22 广东利扬芯片测试股份有限公司 For loading the warpage detection device and its detection method of the Tray disk of IC

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487159A (en) * 2019-08-09 2019-11-22 广东利扬芯片测试股份有限公司 For loading the warpage detection device and its detection method of the Tray disk of IC
CN110487159B (en) * 2019-08-09 2024-03-22 广东利扬芯片测试股份有限公司 Warp detection device and method for Tray disk for loading IC

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120404

Termination date: 20140810

EXPY Termination of patent right or utility model