CN202181363U

CN202181363U - Furnace soleplate of straight-pull single crystal furnace

Info

Publication number: CN202181363U
Application number: CN201120260319XU
Authority: CN
Inventors: 刘宏; 林平; 张建中
Original assignee: TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Current assignee: TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Priority date: 2011-07-21
Filing date: 2011-07-21
Publication date: 2012-04-04
Anticipated expiration: 2021-07-21

Abstract

The utility model provides a furnace soleplate of a straight-pull single crystal furnace. The furnace soleplate of the straight-pull single crystal furnace comprises a cylindrical furnace soleplate body, wherein the edge of the furnace soleplate body extends in a vertical direction to form a circle of sealing part; and the edge of the furnace soleplate body extends in a horizontal direction to form a circle of supporting part with a smooth lower surface. After the sealing part is clamped into an outlet or an inlet of mechanical equipment, the supporting part is contacted with the circumferential edge of the outlet or the inlet of the mechanical equipment to realize the supporting function, and the acting area of the supporting part is far larger than that before improvement, so that the pressure intensity within a contact area of the furnace soleplate and connecting and detaching equipment is relatively small, the furnace soleplate and the mechanical equipment are well protected, and the service life of a product is prolonged.

Description

A kind of czochralski crystal growing furnace drop-bottom

Technical field

The utility model relates to a kind of semiconductor material and prepares equipment, relates in particular to a kind of czochralski crystal growing furnace drop-bottom.

Background technology

Existing drop-bottom is formed to the extended sealing of vertical direction by round kiln base plate body and by the edge of drop-bottom body, and there is following problem in existing design, owing to need to place the apparatus of certainweight on the drop-bottom; With after mechanical means engages, contact surface is less than normal between drop-bottom body and the mechanical means with sealing, and local pressure is excessive; Possibly damage the drop-bottom body by pressure on the one hand; Even can the mechanical means of contact with it be caused damage, make reduce its work-ing life, need improvement badly.

The utility model content

The purpose of the utility model is to provide a kind of czochralski crystal growing furnace drop-bottom that can improve service life of equipment.

For solving the problems of the technologies described above; The utility model proposes a kind of czochralski crystal growing furnace drop-bottom; The drop-bottom body that comprises column, said drop-bottom body edge extends to vertical direction, forms a circle sealing; Said drop-bottom body edge extends to horizontal direction, forms the smooth support portion of a circle lower surface.

Through the as above proposition of technical scheme, the utlity model has following beneficial effect:

Sealing in the utility model snaps in after mechanical means outlet or the inlet; Its support portion contacts with all edges of mechanical means outlet or inlet; Play a supporting role, its active area makes drop-bottom less than normal with the pressure of equipment in contact area of unloading much larger than when improving; So just played the effect of good protection drop-bottom and mechanical means, made increase the work-ing life of product.

Description of drawings

According to accompanying drawing and embodiment the utility model is done further explain below:

Fig. 1 is a kind of czochralski crystal growing furnace drop-bottom synoptic diagram that the utility model embodiment 1 proposes;

Among the figure:

1, support portion; 2, sealing; 3, drop-bottom body.

Embodiment

Embodiment 1

Present embodiment proposes a kind of czochralski crystal growing furnace drop-bottom, comprises the drop-bottom body 3 of column, and drop-bottom body 3 edges extend to vertical direction; Form a circle sealing 2, sealing 2 is used to snap in inlet or the outlet that mechanical means need cover, and moves to prevent it; Simultaneously, can also play sealing function, drop-bottom body 3 edges extend to horizontal direction; Form the smooth support portion 1 of a circle lower surface, after sealing 2 snapped in mechanical means outlet or inlet, its support portion 1 contacted with all edges of mechanical means outlet or inlet; Play a supporting role, its active area makes drop-bottom less than normal with the pressure of equipment in contact area of unloading much larger than when improving; So just played the effect of good protection drop-bottom and mechanical means, made increase the work-ing life of product.

The utility model is not limited thereto embodiment, and the related realization assembly that is the basis with the utility model thought is all in the protection domain of the utility model.

Claims

1. czochralski crystal growing furnace drop-bottom comprises the drop-bottom body (3) of column, and said drop-bottom body (3) edge extends to vertical direction; Form a circle sealing (2); It is characterized in that said drop-bottom body (3) edge extends to horizontal direction, form the smooth support portion (1) of a circle lower surface.