CN202153274U - Double-field microscope - Google Patents
Double-field microscope Download PDFInfo
- Publication number
- CN202153274U CN202153274U CN2010205766194U CN201020576619U CN202153274U CN 202153274 U CN202153274 U CN 202153274U CN 2010205766194 U CN2010205766194 U CN 2010205766194U CN 201020576619 U CN201020576619 U CN 201020576619U CN 202153274 U CN202153274 U CN 202153274U
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- catoptron
- reflector
- double
- triangular
- microscope
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Abstract
Provided is a double-field microscope used for the aligning observation of two plane points. The double-field microscope mainly comprises a left object lens (1), a semipermeable and semi-reflective reflector (2), a distance-adjusting hand button (3), a lighting system (4), a reflector 1 (5), a reflector 2 (6), an imaging lens (7), a reflector 3 (10), a path-changing draw bar (11), a reflector 4 (12), a reflector 5 (13), and a sparganium reflector (14). The double-field microscope is internally provided with two optical paths, which are independent of each other, with no mutual influence. The sparganium reflector (14) is shared by the two optical paths. The position of the sparganium reflector (14) is moved via the path-changing draw bar (11), thereby switching the left and the right fields of view. Moreover, the adjustment of the object lens multiplying power and the micro-focusing technology are utilized to achieve the microscope double-field aligning observation.
Description
Affiliated technical field
The utility model is a kind of special-purpose optical viewing system that is used for 2 alignings in plane, realizes the observation of microscope double-view field aligning.
Technical background
Along with the continuous development of technology, to contact, near the formula lithographic equipment, mask, silicon pad alignment system have proposed increasingly high requirement, require alignment system not only will have efficiently, but also will have very high alignment precision.In order to reach the lithography alignment of contact, proximity printing equipment; Make the pattern on mask and the sample have the consistent location relation; Just must let two points on the mask aim at two points of correspondence on the samples, could guarantee that the respective aligned of each pattern on mask and the sample concerns.Based on this principle, we develop a kind of special microscope that is used for 2 alignings in plane.This microscope can be seen the picture of the alignment mark of two visual fields simultaneously in the visual field of observing.
Summary of the invention
Can not observe the deficiency of two field ranges simultaneously in order to overcome existing monoscopic microscope, the utility model provides a kind of viewing microscope, and this viewing microscope can only be observed an object in the visual field; Can observe two objects in the visual field simultaneously again, thereby realize the aligning observation of double-view field, carry out the comparison operation of two objects.
The utility model solves the scheme that its technical matters adopted: at viewing microscope indoor design two-way light path system, mainly by left object lens, semi-transparent semi-reflecting catoptron, roll adjustment hand button, illuminator, catoptron 1, catoptron 2, imaging len, catoptron 3, change road pull bar, catoptron 4, mirror 5, triangular catoptron and constitute.The two-way light path system is separate, be independent of each other.Be provided with one by the shared triangular catoptron of two-way light path at the top of two-way light path, the drift angle of this triangular catoptron is 80 °.When triangular catoptron places the middle, two semicircle field of view that size is impartial about the visual field is divided into by the drift angle seamed edge of triangular catoptron, thus realize 2 the aligning observations in plane, carry out the comparison operation of left and right sides object.And when triangular catoptron placed Far Left or farthest right position, the observer can only see the visual field of left object lens or right object lens.Three working positions of triangular catoptron all adopt steel ball and groove to realize the location, make things convenient for the observer to operate.
The beneficial effect of the utility model is, realizes that the microscope double-view field is aimed to observe, and through the optimal design of aligming microscope, microscopical enlargement ratio reaches: 50X-500X; Whole focusing stroke: 20mm; Focusing amount: 0.06mm-1mm can satisfy the exposure range of bigger silicon chip relatively.This optical observation microscope is practical, and compact conformation is easy to operate.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the structural principle synoptic diagram of the utility model.
Fig. 2 is the fine setting close-burning structure synoptic diagram of imaging len.
Fig. 3 is a double-view field microscope longitudinal profile view.
Fig. 4 is that synoptic diagram is cut apart in the visual field when prism is positioned at the position, middle.
1. left object lens among the figure, 2. semi-transparent semi-reflecting catoptron, 3. roll adjustment hand button, 4. illuminator, 5. catoptron 1, and 6. catoptron 2; 7. imaging len, 8. focusing hand button, 9. handle, 10. catoptron 3,11. changes the road pull bar, 12. catoptrons 4; 13. catoptron 5,14. triangular catoptrons, 15. viewing microscope seats, 16. focusing gears, 17. focusing tooth bars, 18. focusing slide blocks; 19. the focusing guide rail, 20. focusing microscope bases, 21. roll adjustment slide blocks, 22. object lens slide blocks, 23. prism guide rails, 24. prism slide blocks.
Embodiment
In Fig. 1; The light that left side object sends sees through semi-transparent semi-reflecting catoptron (2) again and is injected on the catoptron (1) through object lens (1), reenters through the plane reflection principle to be mapped on the catoptron 2 (6); The light of secondary reflection incides on the catoptron 3 (10) through imaging len (7) again; The light that reflects reenters and is mapped on the catoptron 4 (12), and the light of catoptron 4 (12) outgoing reenters and is mapped on the catoptron 5 (13), and secondary reflection forms the picture of object in the place, tip on rib catoptron (14) the right repeatedly more at last.Reach in observer's the eyes through viewing microscope (15) again.
In like manner, the light of the right object emission also can form the picture of oneself at the tip location place on triangular catoptron (14) left side.Two field of view about the visual field that the observer saw so just is divided into by the cusped edge of triangular catoptron.When triangular catoptron is positioned at the middle, two semicircle field of view that size is impartial about the visual field is divided into.Make triangular catoptron (14) when move on the left side when spurring handle (9), the zone, the right of divided visual field reduces left area and increases; Continue to be moved to the left triangular catoptron (14), up to visual field that cannot see the right object lens, the observer just can only see the visual field of left side object lens like this.In like manner, when triangular catoptron when move on the right, the left area of divided visual field reduces the right zone and increases, the visual field up to cannot see left side object lens of continuing to move right, the visual field of object lens on the right of the observer just can only see like this.
Among Fig. 1, left object lens can through the rotation roll adjustment hand button (3) thus driving screw rod realizes moving around about left object lens (1).The shifting principle of right object lens in like manner.
Among Fig. 1, the cola lighting system is adopted in illumination, and adopts the LED lamp as lighting source, and the light that light source sends passes through half-reflection and half-transmission catoptron (2) again through illuminator (4) earlier and reflexes to above the object, realizes the illumination to object.
In Fig. 2, imaging len (7) is installed on the focusing microscope base (20), and focusing microscope base (20) is fixed on above the focusing slide block (18) with focusing tooth bar (17), and focusing slide block (18) can move up and down along following focusing guide rail.Rotation focusing hand button (8) drives focusing gear (16), and the gear (16) of focusing meshes together with focusing tooth bar (17), then can drive imaging len (7) through rotation focusing hand button (8) like this and move around up and down, thereby reach the purpose that fine motion is focused.
In Fig. 3, triangular catoptron (14) is fixed on the prism slide block (22), and prism slide block (24) pulling handle (9) can make on the prism guide rail (23) of prism slide block (22) below it and freely move around, thereby changes the residing position of triangular catoptron (14).
In Fig. 4, the cusped edge of triangular catoptron is divided into two the visual field, and middle vertical line is the rib point of triangular catoptron.
Claims (2)
1. one kind is used for 2 the double-view field microscopes of aiming at observation in plane; This microscope mainly by left object lens (1), semi-transparent semi-reflecting catoptron (2), roll adjustment hand button (3), illuminator (4), catoptron 1 (5), catoptron 2 (6), imaging len (7), catoptron 3 (10), change road pull bar (11), catoptron 4 (12), catoptron 5 (13), triangular catoptron (14) and constitute, it is characterized in that it is 80 ° triangular catoptron that triangular catoptron adopts drift angle.
2. double-view field microscope according to claim 1 is characterized in that when triangular catoptron (14) when being positioned at center position, two semicircle field of view that size is impartial about the visual field is divided into by the drift angle seamed edge of triangular catoptron (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205766194U CN202153274U (en) | 2010-10-26 | 2010-10-26 | Double-field microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205766194U CN202153274U (en) | 2010-10-26 | 2010-10-26 | Double-field microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202153274U true CN202153274U (en) | 2012-02-29 |
Family
ID=45693769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205766194U Expired - Fee Related CN202153274U (en) | 2010-10-26 | 2010-10-26 | Double-field microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202153274U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459968A (en) * | 2014-12-09 | 2015-03-25 | 南京东利来光电实业有限责任公司 | Compact type microscope |
-
2010
- 2010-10-26 CN CN2010205766194U patent/CN202153274U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459968A (en) * | 2014-12-09 | 2015-03-25 | 南京东利来光电实业有限责任公司 | Compact type microscope |
| CN104459968B (en) * | 2014-12-09 | 2017-07-11 | 南京东利来光电实业有限责任公司 | Compact microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Chengdu Corder Optoelectronics Technology Co., Ltd. Document name: Notification to Go Through Formalities Rectification of Restoration of Right |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120229 Termination date: 20131026 |
|
| EXPY | Termination of patent right or utility model |