CN202144871U - Pneumatic draining valve and overflow device - Google Patents
Pneumatic draining valve and overflow device Download PDFInfo
- Publication number
- CN202144871U CN202144871U CN 201020693725 CN201020693725U CN202144871U CN 202144871 U CN202144871 U CN 202144871U CN 201020693725 CN201020693725 CN 201020693725 CN 201020693725 U CN201020693725 U CN 201020693725U CN 202144871 U CN202144871 U CN 202144871U
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- Prior art keywords
- hole
- valve
- air cavity
- valve seat
- drain valve
- Prior art date
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Abstract
The utility model relates to a pneumatic draining valve, comprising a valve core, a valve base and a draining baffle plate. The valve core comprises a heat part and a rod part which are mutually connected. The valve base is provided with a hollow air cavity and a through hole communicated with the air cavity. The head part tightly matches with the air cavity and can slide in the air cavity. The rod part tightly matches with the through hole and passes through the through hole. The head part abuts against the valve base. The valve base is also provided with a first air inlet hole and a second air inlet hole, which are communicated with the air cavity and are respectively connected to two air inlet channels controlled by an electromagnetic valve. The draining baffle plate is fixedly connected to the rod part. The valve core drives the draining baffle plate to enable the opening and closing of a water outlet. The utility model also relates to an overflow device. The pneumatic draining valve is advantageous in that the electromagnetic valve controls whether two air inlets should conduct ventilation, which controls the opening and closing of the draining valve; the operation is easy and the draining is thorough.
Description
[technical field]
The utility model relates to a kind of valve, relates in particular to a kind of pneumatic drain valve, and the utility model also relates to a kind of overflow device.
[background technique]
In semiconductor production, cleaning shop usually uses the spilling water groove that product is cleaned.In cleaning process or after cleaning completion, need the water in the spilling water groove be drained.
Conventional art can adopt artificial drainage (for example bailing out with water tumbler), but the artificial drainage inconvenient operation, and draining is incomplete, can cause the pollution of spilling water groove, influences the cleaning quality of silicon chip.
[model utility content]
Based on this, be necessary to provide a kind of pneumatic drain valve.
A kind of pneumatic drain valve, said pneumatic drain valve comprises spool, valve seat and draining baffle plate; Said spool comprises interconnective head and bar portion, offers the air cavity of hollow and the through hole that is communicated with said air cavity in the said valve seat; Said head and said air cavity closely cooperate and can in said air cavity, slide, and said bar portion and said through hole closely cooperate and pass from said through hole, the cross-section area of said head greater than the cross-section area of said bar portion to offset with said valve seat; Said valve seat also offers first inlet hole and second inlet hole that is communicated with said air cavity, and said first inlet hole is located at the end of valve seat near said through hole, and said second inlet hole is located at valve seat deviates from said through hole along the bearing of trend of said air cavity a end; Said first inlet hole and second inlet hole link to each other with two gas-entered passageways by electromagnetic valve respectively; Said draining baffle plate is fixedly connected with bar portion, and said spool drives the draining baffle plate and realizes the opening and closing of drain opening, and leaves the space that is communicated with said first inlet hole between said head and the valve seat when said drain opening is closed.
Preferably, said valve seat is a cylindrical body, and said air cavity and through hole form cylindrical shoulder hole, and the head of said spool and bar portion are cylindrical body, and the diameter of said head is greater than the diameter of said bar portion.
Preferably, offer attachment hole on the said spool that adopts polypropylene to process, the bearing of trend of said attachment hole is perpendicular to the bearing of trend of said bar portion, and said attachment hole is used for fixing the link that is connected with said draining baffle plate.
Preferably, said first inlet hole and second inlet hole are tapped holes.
Preferably, offer positioning hole on the said valve seat.
Preferably, said positioning hole is the tapped hole that bearing of trend is parallel to the bearing of trend of said air cavity.
Preferably, the quantity of said positioning hole is 8, is evenly distributed on the columned said valve seat.
Preferably, said draining baffle-panels is provided with diaphragm seal to the one side of drain opening.
Also be necessary to provide a kind of overflow device.
A kind of overflow device comprises the spilling water groove, and the bottom surface of said spilling water groove offers drain opening, and the side of said spilling water groove offers overflow, and said overflow device also comprises pneumatic drain valve, and said pneumatic drain valve is above-mentioned pneumatic drain valve.
Above-mentioned pneumatic drain valve and overflow device, the first inlet hole air inlet, when second inlet hole is closed, to pressing down, the draining baffle plate descends gas with spool, and drain valve is opened, and the water in the spilling water groove is discharged from drain opening; First inlet hole is closed, during the second inlet hole air inlet, gas is with spool top upwards, the draining baffle plate rises drain opening is blocked, the water in the drain shut valve, spilling water groove can not discharged from drain opening.Inlet hole links to each other with two gas-entered passageways by electromagnetic valve respectively, and simple to operate through the opening and closing of electromagnetic valve drain valve, draining is more thorough.
[description of drawings]
Fig. 1 is the schematic representation of valve seat among the embodiment;
Fig. 2 be valve seat shown in Figure 1 along A-A to sectional drawing;
Fig. 3 be valve seat shown in Figure 1 along B-B to sectional drawing;
Fig. 4 is the sectional drawing of spool among the embodiment;
Fig. 5 is the fragmentary cross-sectional view of overflow device among the embodiment.
[embodiment]
For purpose, the feature and advantage that make the utility model can be more obviously understandable, the embodiment of the utility model is done detailed explanation below in conjunction with accompanying drawing.
Fig. 1 is the schematic representation of valve seat among the embodiment, Fig. 2 be valve seat shown in Figure 1 along A-A to sectional drawing, Fig. 3 be valve seat shown in Figure 1 along B-B to sectional drawing.As shown in Figure 5, pneumatic drain valve comprises valve seat 10, spool 20 and draining baffle plate 30.
In the present embodiment, valve seat 10 is a cylindrical body, and offers the cylindrical air cavity 12 and cylindrical hole 14 of hollow, and air cavity 12 is interconnected with through hole 14, forms cylindrical shoulder hole and the common valve seat 10 that connects.In the present embodiment, valve seat 10, air cavity 12 and through hole 14 are coaxial.In this specification, a bottom portion of the valve seat 10 that through hole 14 is run through is defined as upper base 104, and a bottom portion of the valve seat 10 that air cavity 12 is run through is defined as and goes to the bottom 102.In other embodiments, valve seat, air cavity and through hole also can be other shape, for example cuboid.
Valve seat 10 also offers first inlet hole 162 and second inlet hole 164 that is communicated with air cavity 12; First inlet hole 162 is located at valve seat 10 near an end of through hole 14 end of upper base 104 (promptly near), and second inlet hole 164 is located at valve seat 10 deviates from through hole 14 along the bearing of trend of air cavity 12 a end (promptly near going to the bottom an end of 102).In the present embodiment, the bearing of trend of first inlet hole 162 and second inlet hole 164 runs through the sidewall of valve seat 10 perpendicular to the bearing of trend (promptly axial) of valve seat 10, and air cavity 12 is communicated with the external world.In other embodiments, first inlet hole 162 and second inlet hole 164 also can be located at other position, and for example the bearing of trend of first inlet hole 162 can be parallel to the axial of valve seat 10, penetrates valve seat 10 from upper base 104.First inlet hole 162 and second inlet hole 164 link to each other with two gas-entered passageways by electromagnetic valve respectively.Operation through open and close drain valve behind the solenoid valve put in circuit is very simple.
In the present embodiment, first inlet hole 162 and second inlet hole 164 are ladder cylindrical holes, and their shape is identical.With first inlet hole 162 is that example describes, and first inlet hole 162 comprises that 1/4 inch tapped hole 1622 being interconnected and aperture are 1.5 millimeters aperture 1624, and aperture 1624 communicates with air cavity 12, and tapped hole 1622 communicates with the external world.It is the pressure that increases during for air inlet spool 20 for a short time that suction port is designed to outer imperial palace.In other embodiments, first inlet hole 162 and second inlet hole 164 also can directly adopt tapped hole.
In conjunction with Fig. 1 and Fig. 3, in the present embodiment, offer positioning hole 16 on the valve seat 10, positioning hole 16 102 penetrates the valve seat 10 and bearing of trend is parallel to the bearing of trend of air cavity 12 from going to the bottom.Positioning hole 16 is 8 equally distributed tapped holes on a circumference in the present embodiment, and is obvious, and the quantity of positioning hole 16 can be different in other embodiments.
Fig. 4 is the sectional drawing of spool among the embodiment; Spool 20 can adopt PP (polypropylene) material manufacture with valve seat 10, comprises interconnective head 22 and bar portion 24.Head 22 shapes and air cavity 12 shapes are suitable, and head 22 closely cooperates and can in air cavity 12, slide with air cavity 12, and bar portion 24 closely cooperates with through hole 14 and passes from through hole 14.In the present embodiment, the head 22 and the bar portion 24 of spool 20 are cylindrical body, and the diameter of head 22 equates that with the aperture of air cavity 12 diameter of bar portion 24 equates with the aperture of through hole 14, and the diameter of head 22 is greater than bar portion 24, to offset with valve seat 10.In other embodiments, spool 20 can be other shape (for example cross section is a rectangular), at this moment the cross-section area of head 22 greater than the cross-section area of bar portion 24 to offset with valve seat 10.Polypropylene material ability strong alkali-acid resistance can use under the very high environment of pH value, is fit to use the semiconductor production of pickling.
In the present embodiment, the bar portion 24 of spool 20 offers attachment hole 25 away from an end of head 22, and the bearing of trend of attachment hole 25 is used for fixing the link that is connected with draining baffle plate 30 perpendicular to the bearing of trend of bar portion 24.In the present embodiment, this link is a pin 35, also can adopt other link in other embodiments.
Referring to Fig. 5, draining baffle plate 30 is fixedly connected with spool 20, and draining baffle plate 30 is provided with diaphragm seal with the one side that spilling water groove 40 contacts, and is sealed silicon film 34 in the present embodiment.Spool 20 drives draining baffle plate 30 and realizes opening and closing drain opening 42.When closing, drain opening 42 leaves the space that is communicated with first inlet hole 162 between head 22 and the valve seat 10.
Above-mentioned pneumatic drain valve, first inlet hole, 162 air inlets, when second inlet hole 164 is closed, to pressing down, draining baffle plate 30 descends gas with spool 20, and drain valve is opened, and the water in the spilling water groove 40 are discharged from drain opening 42; First inlet hole 162 is closed, during 164 air inlets of second inlet hole, gas is with spool 20 top upwards, draining baffle plate 30 rises drain opening 42 is blocked, drain shut valve, the water in the spilling water groove 40 can not discharged from drain opening 42.First inlet hole 162, second inlet hole 164 link to each other with two gas-entered passageways by electromagnetic valve respectively, and simple to operate through the opening and closing of electromagnetic valve drain valve, draining is more thorough.
In a preferred embodiment, pneumatic water valve also comprises seal ring.Fig. 3 and Fig. 4 show the seal groove that is used to install seal ring.For example head 22 is provided with seal ring with the surface of contact place of valve seat 10, referring to the seal groove among Fig. 4 232.
The utility model also provides a kind of overflow device.Fig. 5 is the fragmentary cross-sectional view of overflow device among the embodiment, comprises spilling water groove 40, and the bottom surface of spilling water groove 40 offers drain opening 42, and the side of spilling water groove 40 offers overflow 44.Overflow device also comprises pneumatic drain valve, and this pneumatic drain valve is exactly aforesaid pneumatic drain valve.
In the present embodiment, overflow device also comprises the drain valve support 50 of being located at spilling water groove 40 bottoms and being fixedly connected with spilling water groove 40.Drain valve support 50 can adopt the mode of welding to be fixed on the spilling water groove 40.Pneumatic drain valve is fixed on the drain valve support 50, specifically is to cooperate with positioning hole 16 through screw to form a fixed connection.
Above-mentioned pneumatic drain valve and overflow device structure are simpler, and material and processing cost are lower.
The above embodiment has only expressed several kinds of mode of executions of the utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to the protection domain of the utility model.Therefore, the protection domain of the utility model patent should be as the criterion with accompanying claims.
Claims (10)
1. a pneumatic drain valve is characterized in that, said pneumatic drain valve comprises spool, valve seat and draining baffle plate;
Said spool comprises interconnective head and bar portion, offers the air cavity of hollow and the through hole that is communicated with said air cavity in the said valve seat; Said head and said air cavity closely cooperate and can in said air cavity, slide, and said bar portion and said through hole closely cooperate and pass from said through hole, the cross-section area of said head greater than the cross-section area of said bar portion to offset with said valve seat; Said valve seat also offers first inlet hole and second inlet hole that is communicated with said air cavity, and said first inlet hole is located at the end of valve seat near said through hole, and said second inlet hole is located at valve seat deviates from said through hole along the bearing of trend of said air cavity a end; Said first inlet hole and second inlet hole link to each other with two gas-entered passageways by electromagnetic valve respectively;
Said draining baffle plate is fixedly connected with bar portion, and said spool drives the draining baffle plate and realizes the opening and closing of drain opening, and leaves the space that is communicated with said first inlet hole between said head and the valve seat when said drain opening is closed.
2. pneumatic drain valve according to claim 1 is characterized in that, said valve seat is a cylindrical body, and said air cavity and through hole form cylindrical shoulder hole, and the head of said spool and bar portion are cylindrical body, and the diameter of said head is greater than the diameter of said bar portion.
3. pneumatic drain valve according to claim 1; It is characterized in that; Offer attachment hole on the said spool that adopts polypropylene to process, the bearing of trend of said attachment hole is perpendicular to the bearing of trend of said bar portion, and said attachment hole is used for fixing the link that is connected with said draining baffle plate.
4. pneumatic drain valve according to claim 1 is characterized in that, said first inlet hole and second inlet hole are tapped holes.
5. pneumatic drain valve according to claim 1 is characterized in that, offers positioning hole on the said valve seat.
6. pneumatic drain valve according to claim 5 is characterized in that, said positioning hole is the tapped hole that bearing of trend is parallel to the bearing of trend of said air cavity.
7. pneumatic drain valve according to claim 5 is characterized in that the quantity of said positioning hole is 8, is evenly distributed on the columned said valve seat.
8. pneumatic drain valve according to claim 1 is characterized in that, said draining baffle-panels is provided with diaphragm seal to the one side of drain opening.
9. overflow device; Comprise the spilling water groove; The bottom surface of said spilling water groove offers drain opening, and the side of said spilling water groove offers overflow, it is characterized in that; Said overflow device also comprises pneumatic drain valve, and said pneumatic drain valve is like any described pneumatic drain valve among the claim 1-8.
10. overflow device according to claim 9 is characterized in that, also comprises being located at the drain valve support that said spilling water groove bottom is fixedly connected with said spilling water groove, and said pneumatic drain valve is fixed on the said drain valve support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020693725 CN202144871U (en) | 2010-12-31 | 2010-12-31 | Pneumatic draining valve and overflow device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020693725 CN202144871U (en) | 2010-12-31 | 2010-12-31 | Pneumatic draining valve and overflow device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202144871U true CN202144871U (en) | 2012-02-15 |
Family
ID=45580802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201020693725 Expired - Fee Related CN202144871U (en) | 2010-12-31 | 2010-12-31 | Pneumatic draining valve and overflow device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202144871U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108617578A (en) * | 2018-05-04 | 2018-10-09 | 范科晨 | A kind of fish culture pond drainage arrangement |
-
2010
- 2010-12-31 CN CN 201020693725 patent/CN202144871U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108617578A (en) * | 2018-05-04 | 2018-10-09 | 范科晨 | A kind of fish culture pond drainage arrangement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120215 Termination date: 20151231 |
|
| EXPY | Termination of patent right or utility model |