CN202144328U - Transportation base for crystal boat - Google Patents

Transportation base for crystal boat Download PDF

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Publication number
CN202144328U
CN202144328U CN201120233158U CN201120233158U CN202144328U CN 202144328 U CN202144328 U CN 202144328U CN 201120233158 U CN201120233158 U CN 201120233158U CN 201120233158 U CN201120233158 U CN 201120233158U CN 202144328 U CN202144328 U CN 202144328U
Authority
CN
China
Prior art keywords
brilliant boat
transport base
support board
boat transport
elastic baffle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201120233158U
Other languages
Chinese (zh)
Inventor
许亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Beijing Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN201120233158U priority Critical patent/CN202144328U/en
Application granted granted Critical
Publication of CN202144328U publication Critical patent/CN202144328U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a transportation base for a crystal boat. The transportation base for a crystal boat is used for carrying a crystal boat, and comprises an object carrying plate, the object carrying plate is provided with several pairs of elastic baffle plate assemblies used for clamping the crystal boat. The transportation base for a crystal boat is advantageous in that, structure is simple, use is convenient, the crystal boat is clamped via several pairs of elastic baffle plate assemblies additionally disposed on the object carrying plate, and displacement between the crystal boat and the object carrying plate in the transportation process is prevented, thereby preventing generation of a large number of particles due to friction between the crystal boat and the object carrying plate, thereby preventing the particles from polluting a technical workshop, guaranteeing stability of technology.

Description

Brilliant boat transport base
Technical field
The utility model relates to a kind of brilliant boat transport base.
Background technology
At present, in the semiconductor production workshop, need a lot of hand barrows to be used for transporting brilliant boat, said hand barrow is provided with the brilliant boat transport base that is used to put brilliant boat.Said brilliant boat is a kind of device that is used to store and transport wafer, adopts brilliant boat that wafer is transported in the chamber of each process equipment usually.
As shown in Figure 1 is the existing hand barrow that is used to carry brilliant boat; Visible by this Fig. 1, when using hand barrow to transport brilliant boat 1, brilliant boat 1 directly is placed on the brilliant boat transport base of hand barrow; Said brilliant boat transport base comprises a support board 2; Be provided with fence board around this support board 2, the below of this support board 2 is provided with roller 5, rolls to make things convenient for hand barrow.
In use, because brilliant boat 1 is fixed at support board 2, consequently in transportation, be subjected to displacement easily, thereby make a large amount of particulate matters of friction generates between brilliant boat 1 and the support board 2.These particulate matters can float in the air in workshop, and when brilliant boat 1 was opened, these particulate matters adhered on the wafer easily, make the wafer yield descend.
Therefore, how providing a kind of can be fixed on the support board brilliant boat to prevent the brilliant boat transport base of friction generates particulate matter between the two, is the technical matters that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of the utility model is to provide a kind of brilliant boat transport base, some the elastic baffle assembly is come the brilliant boat of clamping through on support board, setting up, and avoids producing displacement between brilliant boat and the support board, thereby prevents between the two because of a large amount of particulate matters of friction generates.
In order to reach above-mentioned purpose, the utility model adopts following technical scheme:
A kind of brilliant boat transport base is used for the brilliant boat of carrying, and it comprises support board, and said support board is provided with some to being used for the elastic baffle assembly of the said brilliant boat of clamping.
Preferable, in above-mentioned brilliant boat transport base, said support board is provided with at least two pairs of said elastic baffle assemblies.
Preferable, in above-mentioned brilliant boat transport base, said at least two pairs of said elastic baffle assemblies are transversely arranged or longitudinally arrange or horizontal and vertical combined mode is arranged in said support board upper edge.
Preferable, in above-mentioned brilliant boat transport base, said each elastic baffle assembly comprises trapezoidal baffle plate and some springs, the two ends of said some springs are connected to two bases of said trapezoidal baffle plate.
Preferable, in above-mentioned brilliant boat transport base, two bases of said trapezoidal baffle plate are short base and long base, and the short base of every pair of elastic baffle assembly is oppositely arranged.
Preferable, in above-mentioned brilliant boat transport base, said trapezoidal baffle plate is to be processed by elastic material board.
Preferable, in above-mentioned brilliant boat transport base, be provided with fence board around the said support board.
Preferable, in above-mentioned brilliant boat transport base, said brilliant boat transport base is arranged on hand barrow or battery-driven car or automobile or the shelf.
Preferable; In above-mentioned brilliant boat transport base; Said brilliant boat transport base comprises some support boards, said support board be provided with up and down or about be provided with or up and down with about combination be provided with, be respectively equipped with some on the every support board to being used for the elastic baffle assembly of the said brilliant boat of clamping.
The beneficial effect of the utility model is following:
The brilliant boat transport base of the utility model; Some the elastic baffle assembly is come the brilliant boat of clamping through on support board, setting up, avoid producing displacement between the support board of brilliant boat and brilliant boat transport base, thereby prevent between the two because of a large amount of particulate matters of friction generates; Simple in structure, easy to use.
Description of drawings
The brilliant boat transport base of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of existing brilliant boat transport base;
Fig. 2 is the structural representation of brilliant boat transport base among the utility model embodiment;
Fig. 3 is the cooperation scheme drawing of support board and elastic baffle assembly among the utility model embodiment;
Fig. 4 is the cooperation scheme drawing of support board and elastic baffle assembly and brilliant boat among the utility model embodiment.
The specific embodiment
Below will do further to describe in detail to the brilliant boat transport base of the utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented the preferred embodiment of the utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the advantageous effects of the utility model.Therefore, following description is appreciated that extensively knowing to those skilled in the art, and not as the restriction to the utility model.
For clear, whole characteristics of practical embodiments are not described.In following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this developmental work possibly be complicated and time-consuming, but only be routine work to those skilled in the art.
For the purpose, the characteristic that make the utility model is more obviously understandable, be further described below in conjunction with the specific embodiment of accompanying drawing to the utility model.What need explanation is, accompanying drawing all adopts the form of simplifying very much and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 2-Fig. 4, wherein, Fig. 2 is the structural representation of the embodiment of the brilliant boat transport base of the utility model; Fig. 3 is the cooperation scheme drawing of support board and elastic baffle assembly among the embodiment of the utility model; Fig. 4 is the cooperation scheme drawing of support board and elastic baffle assembly and brilliant boat among the embodiment of the utility model.
This brilliant boat transport base is used for the brilliant boat 10 of carrying.Said brilliant boat transport base comprises support board 20, and said support board 20 is provided with some to being used for the elastic baffle assembly of the said brilliant boat 10 of clamping.
Can be provided with a pair of on the said support board 20 or at least two pairs of said elastic baffle assemblies.When at least two pairs of said elastic baffle assemblies were set on the said support board, said at least two pairs of said elastic baffle assemblies were can be in said support board upper edge transversely arranged or longitudinally arrange or horizontal and vertical combined mode is arranged.In the present embodiment, said support board 20 is provided with two pairs of said elastic baffle assemblies, and these two pairs of elastic baffle assemblies are longitudinally arranged on said support board 20.
Wherein, Please consult Fig. 3 and Fig. 4 by emphasis; Every pair of elastic baffle assembly comprises two elastic baffle assemblies; Each elastic baffle assembly comprises trapezoidal baffle plate 30 and some springs 40, and the two ends of said some springs 40 are connected to two bases of said trapezoidal baffle plate 30, and two bases of said trapezoidal baffle plate 30 are respectively short base 31 and long base 32.
Preferably, in the present embodiment, the short base 31 of every pair of elastic baffle assembly is oppositely arranged, and long base 32 is back to setting.That is to say when the brilliant boat 10 of transportation, is through the brilliant boat 10 of short base 31 clampings.Because short base 31 makes brilliant boat 10 snap in every pair of elastic baffle assembly with respect to long base 32 more easily, therefore, can improve the efficient of loading and unloading goods.
In addition, be provided with fence board 21 around the said support board 20, can stop brilliant boat 10 to fall to a certain extent from support board 20.
Preferably, said trapezoidal baffle plate 30 is to be processed by elastic material board.Thereby make the elastic baffle assembly of forming by trapezoidal baffle plate 30 and spring 40 be rich in contractibility more; Can said brilliant boat 10 be clamped; Thereby in transportation, further reduce the relative displacement between brilliant boat 10 and the support board 20; And then reduce brilliant boat 10 and produce the probability of particulate matter with support board 20 because of friction, thereby can avoid particulate matter to pollute the technology workshop, guarantee the stability of technology.
Said brilliant boat transport base can be arranged on hand barrow or battery-driven car or automobile or the shelf.In the present embodiment, said brilliant boat transport base is arranged on the hand barrow.In addition, the below of said support board 20 is provided with some rollers 50, moves to make things convenient for transport trolley.
It is understandable that though have only a support board 20 in the present embodiment in the brilliant boat transport base, brilliant boat transport base also can comprise some support boards in other specific embodiment.When brilliant boat transport base comprises some support boards; Said some support boards can be provided with up and down or about be provided with or up and down with about combination be provided with; And be respectively equipped with some on the every support board to being used for the elastic baffle assembly of the said brilliant boat of clamping, to improve the brilliant boat quantity of each transportation.Wherein, the structure of every pair of elastic baffle assembly is not being launched at this as stated.
In sum, the brilliant boat transport base that the utility model provides, simple in structure; Easy to use; Some the elastic baffle assembly is come the brilliant boat of clamping through setting up, avoid producing displacement between brilliant boat and the support board, thereby prevent between the two because of a large amount of particulate matters of friction generates; Thereby can avoid particulate matter to pollute the technology workshop, guarantee the stability of technology.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.

Claims (9)

1. a brilliant boat transport base is used for the brilliant boat of carrying, and it comprises support board, it is characterized in that, said support board is provided with some to being used for the elastic baffle assembly of the said brilliant boat of clamping.
2. brilliant boat transport base according to claim 1 is characterized in that, said support board is provided with at least two pairs of said elastic baffle assemblies.
3. brilliant boat transport base according to claim 2 is characterized in that, at least two pairs of said elastic baffle assemblies are transversely arranged or longitudinally arrange or horizontal and vertical combined mode is arranged in said support board upper edge.
4. brilliant boat transport base according to claim 1 is characterized in that, said each elastic baffle assembly comprises trapezoidal baffle plate and some springs, and the two ends of said some springs are connected to two bases of said trapezoidal baffle plate.
5. brilliant boat transport base according to claim 4 is characterized in that, two bases of said trapezoidal baffle plate are short base and long base, and the short base of every pair of elastic baffle assembly is oppositely arranged.
6. brilliant boat transport base according to claim 4 is characterized in that said trapezoidal baffle plate is to be processed by elastic material board.
7. brilliant boat transport base according to claim 1 is characterized in that, is provided with fence board around the said support board.
8. brilliant boat transport base according to claim 1 is characterized in that, said brilliant boat transport base is arranged on hand barrow or battery-driven car or the automobile.
9. according to any described brilliant boat transport base among the claim 1-8; It is characterized in that; Said brilliant boat transport base comprises some support boards; Said support board be provided with up and down or about be provided with or up and down with about combination be provided with, be respectively equipped with some on the every support board to being used for the elastic baffle assembly of the said brilliant boat of clamping.
CN201120233158U 2011-07-04 2011-07-04 Transportation base for crystal boat Expired - Fee Related CN202144328U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201120233158U CN202144328U (en) 2011-07-04 2011-07-04 Transportation base for crystal boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201120233158U CN202144328U (en) 2011-07-04 2011-07-04 Transportation base for crystal boat

Publications (1)

Publication Number Publication Date
CN202144328U true CN202144328U (en) 2012-02-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201120233158U Expired - Fee Related CN202144328U (en) 2011-07-04 2011-07-04 Transportation base for crystal boat

Country Status (1)

Country Link
CN (1) CN202144328U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105584709A (en) * 2016-03-07 2016-05-18 江苏永浩通讯科技有限公司 Electronic connector collecting box

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105584709A (en) * 2016-03-07 2016-05-18 江苏永浩通讯科技有限公司 Electronic connector collecting box

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130507

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TR01 Transfer of patent right

Effective date of registration: 20130507

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120215

Termination date: 20180704